EP1024904B1 - Dispositif permettant d'appliquer une couche mince a la surface de l'ampoule de verre d'un tube cathodique - Google Patents

Dispositif permettant d'appliquer une couche mince a la surface de l'ampoule de verre d'un tube cathodique Download PDF

Info

Publication number
EP1024904B1
EP1024904B1 EP98955473A EP98955473A EP1024904B1 EP 1024904 B1 EP1024904 B1 EP 1024904B1 EP 98955473 A EP98955473 A EP 98955473A EP 98955473 A EP98955473 A EP 98955473A EP 1024904 B1 EP1024904 B1 EP 1024904B1
Authority
EP
European Patent Office
Prior art keywords
article
coated
receptacle
process pot
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP98955473A
Other languages
German (de)
English (en)
Other versions
EP1024904A1 (fr
Inventor
Roland Mann
Wolfgang Schmutz
Josef Gentischer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ACR Automation in Cleanroom GmbH
Original Assignee
ACR Automation in Cleanroom GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ACR Automation in Cleanroom GmbH filed Critical ACR Automation in Cleanroom GmbH
Publication of EP1024904A1 publication Critical patent/EP1024904A1/fr
Application granted granted Critical
Publication of EP1024904B1 publication Critical patent/EP1024904B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting

Definitions

  • the present invention relates to a Device for applying a thin layer from a liquid coating medium on a preferably curved Surface of an object, preferably Screen glass bulb, according to the preamble of claim 1.
  • the Screen glass flask from the bottom into the process pot introduced and against a surface to be coated bounding mask pressed to prevent the Coating medium to undesired areas of the glass bulb arrives.
  • This way of feeding and discharging the Screen glass flask is mechanically complex and laborious.
  • the glass flask from the top into the Process pot introduced and an open split mask in their closed position around the boundary of the brought coating surface. This too is because of the moving mask is mechanically complex.
  • the object of the present invention is a device for applying a thin layer on a surface to create an object of the type mentioned at the beginning, the one to be coated when inserting and removing Object is easier to handle and the a significantly improved layer uniformity the critical corners and edges of the offers coating surface.
  • the measures according to the invention result in a Air flow due to its in different areas different air speeds on the one hand Uniformization of the layer to be applied also in the Edge and corner areas of the preferably curved Surface reached and on the other hand contamination other areas of the object to be coated avoids. Due to the laminar flow in the corners and edges of the preferably curved ones to be coated Surface and that exerted on it to the suction cone indicative pull and the resulting downward flow component becomes one Tear off the air flow at the corners and edges of the Surface and thus vortex formation prevented and other splashes onto the surface to be coated avoided.
  • the air turbulence from the to coating surface for example the screen surface be kept away so that an unimpeded coating is possible in the area of the corners.
  • each on the strap Retaining tabs provided on the corner.
  • a tool e.g. a robot to achieve, it is possible, according to the characteristics of the Claim 23 the individual fenders from this Movement path of the tool towards the holding tabs bring.
  • the preferred in the drawing Device 10 shown embodiment serves for Apply a thin layer of a liquid Coating medium onto a curved surface 12 one here in the form of a screen glass bulb 11 represented object.
  • the application of the Coating medium is carried out in the usual way via a Spray arm, not shown here, above the surface 12 and by centrifugal force distribution of the coating medium along the surface to be coated 12 or through The remaining coating medium is thrown off a rotational movement of the screen glass bulb 11 is to be coated during the spraying Surface 12 of the screen glass bulb 11 with relative driven at low speed while at Centrifugal force distribution or to throw off the Coating medium along the surface 12 or over this also the speed at which the screen glass bulb 11 is rotated, is significantly increased.
  • the screen glass bulb 11 to be coated is on her Head 13 provided with a strap 14, on which over the circumference distributed holding tabs 15 are provided, the both for holding in the device 10 and for later hold in a device housing.
  • the one with the head 13 to be coated surface 12 facing away, the screen glass bulb 11 has a neck 16th
  • the device 10 has a receptacle 30 for the Screen glass bulb 11 and a turntable 20, with the the receptacle 30 is rotatably connected.
  • Turntable 20 and Recording 30 are held by a non-rotatable rotationally symmetrical process pot 50 surrounded by the an axially lowerable head part 51 an upper Thrower 60 holds.
  • the turntable 20 is with a flange 21 of a hollow shaft 22 easily detachably connected.
  • the hollow shaft 22 is via roller bearings 24 at a concentric stationary Hollow axis 23 is held rotatably and has at that End facing away from flange 21 is a pulley 25, the via a drive belt 26 with the output shaft a drive motor 27, not shown, coupled is.
  • the hollow axis 23 is perpendicular to one Device base 28 from.
  • the turntable 20 is with the flange 21 Via quick release elements 29, not shown releasably connectable.
  • the process pot 50 has an upper cylindrical one Pot part 52, within which the head part 51 can be lowered is receivable, and a lower annular pot part 53, whose annular space is closed by an annular base 54.
  • the lower annular pot part 53 begins below the Turntable 20 and has an inner ring flange 55, the below the turntable 20, the flange 21 of the Surrounds the hollow shaft 22 at a radial distance.
  • the process pot 50 is distributed over its circumference over its ring base 54 arranged legs 56 held perpendicular to the Stand out base 28.
  • the ring base 54 is on at least one Place over an opening with a suction nozzle 57 connected, on which in a manner not shown a suction device, directly or indirectly connected.
  • the suction nozzle 57 is the Annular base 54 radially inclined and extends from a highest Place in both circumferential directions to the suction nozzle 57 downhill.
  • the head part 51 of the process pot 50 is For example, hydraulically into the upper cylindrical pot part 52 can be lowered and has an upper outer flange 58. In addition, the head part 51 is not shown in FIG Way from the upper cylindrical pot part 52nd removable or held by this.
  • the splash ring 60 has a rotationally symmetrical hood-shaped insert 61, the holder 62, of which For example, three arranged evenly distributed over the circumference are removable on the head part 51 of the process pot 50 is held.
  • the holder 62 are on a cone part 63, the down into a cylindrical part 64, longitudinally the extent of a central limited by the cone part 63 Opening 65 of the splash ring insert 61 attached.
  • the holder 62 hang with an arm 66 in a recess 59 of the Outer flange 58 of the head part 51.
  • a first narrow annular gap 67 educated between the am Head part 51 hanging cylindrical part 64 of the Thrust ring insert 61 and the inner circumference of the head part 51 of the process pot 50 is a first narrow annular gap 67 educated.
  • the receptacle 30 has a box-shaped receptacle part 31, its rectangular shape in plan view the outer dimensions the head 13 of the screen glass bulb 11 corresponds approximately.
  • the receiving part 31 sits on the top of the turntable 20 on and is rotatably connected to this.
  • the receiving part 31 whose outer dimensions are significantly smaller are as the inner diameter of the process pot 50 or whose head part 51 is in the area of its lower end a suction cone 32 rotatably provided.
  • the suction cone 32 has a peripheral flange attached to the receiving part 31 33, on which a hood-like cone part 34 is held, which ends in a cylinder part 35.
  • the Outside diameter of the ring bottom 54 of the Process pot 50 extending cylinder part 35 is such that between its outer circumference and the Inner circumference of the lower annular pot part 53 of the Process pot 50 there is a second annular gap 37.
  • the Cylinder part 35 of the receptacle 30 ends in a certain Distance from the ring base 54 of the process pot 50. Inside a relaxation space 36 is formed in the cylinder part 35, that of the wall of the cylinder part 35 radially inwards facing away from a sheet metal sleeve 38 is limited to the Underside of the turntable 20 is rotatably held and between the and the inner wall of the lower annular Pot part 53 a third narrow annular gap 39 is formed is.
  • a central opening in the bottom 72 of the receptacle 30 includes vertically downward protruding below closed tube 73 for receiving a thin end 18th of the glass bulb 11.
  • the receptacle 30 or its receiving part 31 has an upper one circumferential end face 41 on which a sealing sleeve 40 for the head 13 of the screen glass bulb 11 is attached.
  • the sealing sleeve 40 has an elastic according to Figure 5 spring-loaded lower part 42, a flat seal 43 and a holding part 44.
  • the resiliently biased Lower part 42 is in a radially inner area upwards either arched or buckled. That the flat gasket 43 supporting lower part 42, which due to its curvature partially lifts off the end face 41, protrudes somewhat the inner edge of the receiving part 31, while the Flat seal 43 is pulled even further radially inwards.
  • the holding part 44 is much narrower, i.e.
  • FIG. 5 shows the lower forehead 17 of the retaining tab 15 on the Inner edge of the flat seal 43, so that the space 48 below the head 13 of the screen glass bulb 11 or below the sealing sleeve 40 opposite Coating medium is sealed.
  • Figure 1 is the device 10 of one on the entire area of the process pot 50 extending laminar Flow applied according to the arrows A, the Laminar flow a speed of, for example, about 0.3 to 0.4 m / s.
  • the suction nozzle 57 of the process pot 50 one Suction flow generated according to arrow B.
  • the laminar flow A arrives during the spraying process and in particular through the central opening during the spinning process 65 on the surface to be coated 12 of the Screen glass bulb 11 and past this into one Passage 71 between the edges and corners of the Screen glass bulb 11 and the cone part 63 of the Spray ring 60.
  • the laminar flow A enters the first annular gap 67 between splash ring insert 61 and Process pot header 51.
  • the partial flow through the first Annular gap 61 is opened due to this narrow passage a flow rate between about 7 and 10, for example brought m / s, so that a suction at the exit of the annular gap 67 is exerted on the partial flow in the passage 71.
  • This has beneficial effects on the removal of the from the edge and corner areas of the glass bulb 11 centrifuged coating medium in such a way that the corners and edges of the glass bulb 11 no Flow stall and therefore no turbulence.
  • the area of the top Thrower ring 60 and the first annular gap 7 between Process pot 50 and top thrower ring 60 as well as the area between screen recording 30 and upper splash ring 60 are dimensioned so that on the circumference of the process pot 50 with a downward flow component Air velocities between 7 and 10 m / s are generated. This also causes splashes back onto the object 11 avoided.
  • the free volume between screen capture 30 and process pot 50 is selected such that at Spin speeds up to 250 rpm are not a significant back pressure in the area between the top edge of the screen 11 and the Suction cone 32 occurs.
  • the now enriched with coating medium or nebulized stream passes through the second annular gap 37 between process pot 50 and suction cone 32.
  • This second Annular gap 37 is selected such that a Flow speed of, for example, 3 to 5 m / s reached is, so that an effective suction of the nebulized coating medium from the upper critical Area results.
  • a Flow speed of, for example, 3 to 5 m / s reached is, so that an effective suction of the nebulized coating medium from the upper critical Area results.
  • the inflowing Coating medium mist is soothed by the Flow speed to about 0.6 to 0.9 m / s is reduced.
  • the head part 51 of the process pot 50 together with the splash ring 60 lowered so that with With the help of gripper arms (not shown) of the glass bulb 11 grabbed at the holding tabs 15 and removed or another in a corresponding manner Glass bulb 11 can be used.
  • the device 10 in such a way be adjusted so that the unit 70 shown in FIG from turntable 20 and receptacle 30 with sealing sleeve 40 is replaced.
  • the quick release elements are used for this 29, with which the turntable 20 on the flange 21 of the hollow shaft 22 is releasably attachable.
  • To remove one Unit 70 becomes splash ring 60 from head part 51 removed or, depending on the diameter ratios between head part 51 and suction cone 32 of receptacle 30, if necessary, the head part 51 with the splash ring 60 from the Process pot 50 removed.
  • the device 10 has a fender device 80, which are arranged around the head region 13 of the glass bulb 11 is.
  • the fender device 80 is upright and in Essentially parallel to the axis of rotation of the turntable and thus arranged the axis of the screen glass bulb 11 and extends from an area at the level of the lower edge of the Tension band 14 up to a height range of a few centimeters, for example 5 cm above the zenith of the curved surface 12 of the glass bulb 11 ( Figure 7).
  • the fender device 80 consists of several, here four individual fenders 81, each of which Mudguard 81 in the area of a corner 82 of the head 13 of the Glass bulb 11 is arranged.
  • the fender 81 is in one piece and has several sections 83, 84 and 85. While the side sections 83 and 35 are in short distance along the relevant sides of the head 13 or the strap 14 extend straight, is the central portion 84 shaped like a baffle, that it surrounds the retaining tab 15 so that a free space 86 arises within the central partial area 84, the free area Access to the holding tab 15 by means of a tool or Robot for inserting and removing the object 11 in or from the device 10 from above.
  • That section 83 of the fender 81 which in the direction of rotation C of the Turntable 20 is leading is much longer than that portion 85 that in the direction of rotation is lagging. For example. extends the leading one Section 83 over more than half the length of the relevant side of the head 13 while the trailing section 85 only over a small, for example a quarter of the length of the relevant side of the Head 13 extends.
  • the corners 82 of the Glass bulb 11 attached fenders 81 it is possible Air turbulence from the surface to be coated 12 of the Keep glass bulb 11 away and thus an unimpeded or even coating also in the area of the corners 82 to reach.
  • the individual fenders in every section, including the central section running linearly along the outer edge of the head 13 intended.
  • the individual fenders are like this movable or swiveling that access to the Retaining tabs 15 can be released. For example. can do this in the way that the leading portion of the Fender hinged at its free end is.

Landscapes

  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
  • Formation Of Insulating Films (AREA)
  • Electronic Switches (AREA)

Claims (25)

  1. Dispositif pour appliquer une couche mince en une matière de revêtement liquide sur une surface (12), de préférence courbe, d'un objet, de préférence le tube en verre d'un écran (11), comportant un plateau tournant (20) qui peut être entraíné en rotation et sur lequel un logement (30), destiné à l'objet à revêtir (11), est maintenu sans possibilité de rotation, un récipient de traitement (50), maintenu sans possibilité de rotation et qui entoure le logement (30) et le plateau tournant (20), une bague de projection (60) qui entoure la surface à revêtir (12) de l'objet (11), qui est maintenue sur l'extrémité ouverte du récipient de traitement (50) et comportant une ouverture centrale de projection, et des moyens destinés à produire un écoulement laminaire, caractérisé en ce que, entre la bague de projection (60), qui est munie d'une ouverture centrale d'amission (65), et la partie supérieure (51) du récipient de traitement (50), on prévoit une première fente annulaire (67) qui s'étend sur le logement (30) jusqu'en dessous d'un bord de montage de l'objet (11) et dont la section transversale est beaucoup plus faible que celle d'une traversée d'écoulement (71), en forme de bague et disposée entre la bague de projection (60) et l'objet (11) maintenu dans le logement (30), en ce que le logement (30) est muni d'un cône d'aspiration (32) dirigé vers un fond (54) du récipient de traitement (50), en ce qu'une deuxième fente annulaire (37) est créée entre le cône d'aspiration (32), et une paroi extérieure du récipient de traitement (50) en ce qu'une chambre de détente (26), délimitée par le fond (54) du récipient de traitement (50), est formée à l'intérieur du cône d'aspiration (32), en ce que l'écoulement laminaire (A) est dirigé vers la bague de projection (60) ou la face supérieure du récipient de traitement (50), et en ce que le fond (54) du récipient de traitement (50) est relié à un dispositif d'aspiration (B).
  2. Dispositif selon la revendication 1, caractérisé en ce que la chambre de détente (26) est délimitée dans la direction radiale du côté intérieur par une tôle annulaire (38) et en ce qu'une troisième fente annulaire (39) est créée entre la tôle annulaire (38) et une paroi interne du récipient de traitement (50).
  3. Dispositif selon la revendication 2, caractérisé en ce que la tôle annulaire (38) est fixée sur la face inférieure du plateau tournant (20).
  4. Dispositif selon au moins l'une quelconque des revendications 1 à 3, caractérisé en ce que le récipient de traitement (50) est conformé de manière cylindrique dans sa zone supérieure et sous la forme d'un anneau de cercle dans sa zone inférteure.
  5. Dispositif selon les revendications 1 et 4, caractérisé en ce que le fond (54) en forme de bague du récipient de traitement (50) est courbe dans sa direction périphérique et/ou incliné dans la direction radiale et est relié au dispositif d'aspiration (B) par l'intermédiaire d'une ouverture dans sa ou ses zones de plus grande profondeur.
  6. Dispositif selon au moins l'une quelconque des revendications précédentes, caractérisé en ce que la bague de projection (60) est maintenue sur le récipient de traitement (50) avec possibilité d'être abaissée.
  7. Dispositif selon la revendication 6, caractérisé en ce que le récipient de traitement (50) comporte une partie supérieure (51) qui peut être enlevée, sur laquelle la bague de projection (60) est maintenue de manière amovible, et qui peut être abaissée dans la partie de base (52) du récipient de traitement (50).
  8. Dispositif selon la revendication 6 ou 7, caractérisé en ce que la bague de projection (60) est équipée de supports (62) répartis de manière régulière sur la périphérie et qui reposent sur une bride de la partie supérieure (51) du récipient de traitement (50).
  9. Dispositif selon au moins l'une quelconque des revendications 6 à 8, caractérisé en ce que la bague de projection (60) peut être abaissée jusqu'en dessous de l'extrémité supérieure du logement (30) pour l'objet à revêtir (11).
  10. Dispositif selon au moins l'une quelconque des revendications précédentes, caractérisé en ce que le logement (30) pour l'objet à revêtir (11) est maintenu avec possibilité d'échange.
  11. Dispositif selon la revendication 10, caractérisé en ce que le logement (30) est fixé sur le plateau tournant (20) et en ce que le plateau tournant (20) est maintenu avec possibilité d'échange sur un arbre entraíné (22).
  12. Dispositif selon la revendication 11, caractérisé en ce que l'arbre entraíné (22) est creux et est monté à rotation sur un support fixe creux (23) qui reçoit une extrémité de l'objet à revêtir (11).
  13. Dispositif selon la revendication 11 ou 12, caractérisé en ce que, entre le plateau tournant (20) et une bride (21) de l'arbre creux (22), on prévoit des fermetures à serrage rapide (29) réparties de manière régulière sur la périphérie.
  14. Dispositif selon au moins l'une quelconque des revendications précédentes, caractérisé en ce que le logement (30) est muni, sur son support (41), d'un manchon d'étanchéité (40) faisant saillie radialement vers l'extérieur et reposant de manière étanche sur l'épaulement (17) de l'objet à revêtir (11) opposé à la surface à revêtir (12).
  15. Dispositif selon la revendication 14, caractérisé en ce que le manchon d'étanchéité (40) est soumis à une précontrainte par ressort dans sa zone radiale interne en direction de l'objet à recevoir (11).
  16. Dispositif selon la revendication 14 ou 15, caractérisé en ce que le manchon d'étanchéité (40) est en plusieurs couches, de préférence en trois couches, et comporte un élément d'étanchéité (43) qui y est interposé.
  17. Dispositif selon la revendication 16, caractérisé en ce que l'élément d'étanchéité (43) repose sur une pièce de fond (42) soumise à une précontrainte par ressort, et est recouvert par une pièce de maintien (44) dans la zone de la surface de montage.
  18. Dispositif selon la revendication 17, caractérisé en ce que l'élément d'étanchéité (43) fait saillie radialement vers l'intérieur au dessus de la pièce de fond (42) soumise à une précontrainte par ressort.
  19. Dispositif selon au moins l'une quelconque des revendications 14 à 18, caractérisé en ce que le manchon d'étanchéité (40) est monté sur le logement (30) au moyen d'éléments en forme de plaque (45) disposés en étant distribués sur la périphérie, en ce que les éléments en forme de plaque (45) sont munis, à chaque fois, d'un boulon (46) qui dépasse, et en ce que les boulons (46) servent à réaliser la liaison démontable sans possibilité de rotation avec des languettes (15) disposées sur une bande serrage (14) fixée sur l'objet à revêtir (11).
  20. Dispositif selon au moins l'une quelconque des revendications précédentes, caractérisé en ce que l'objet à revêtir (11) sur sa surface (12), qui est ovale en vue de dessus, est entouré, au moins partiellement, par un dispositif à tôles de protection (80) disposé en étant essentiellement debout et en s'étendant jusqu'au moins dans le plan de l'objet à revêtir (11).
  21. Dispositif selon la revendication 20, caractérisé en ce que le dispositif à tôles de protection (80) est constitué par des tôles individuelles (81) disposées dans la zone des coins (82) de l'objet à revêtir (11).
  22. Dispositif selon la revendication 21, caractérisé en ce que la tôle de protection (81) est disposée, dans la direction de rotation (C), avant, dans et après la zone du coin (82), la tôle de protection (83) qui se trouve avant la zone du coin (82) étant beaucoup plus longue que la tôle de protection (85) qui se trouve après la zone du coin (82).
  23. Dispositif selon la revendication 21 ou 22, caractérisé en ce que la tôle de protection (81) peut être déplacée ou pivotée hors de la zone du coin (82) de l'objet (11).
  24. Dispositif selon l'une quelconque des revendications 20 à 22, caractérisé en ce que le dispositif à tôle de protection (80) ou la tôle de projection (81) comporte, dans la zone des coins ou du coin (82), une zone de démoulage dirigée vers l'extérieur et entourant une languette de maintien (15) de l'objet (11).
  25. Dispositif selon au moins l'une quelconque des revendications 20 à 24, caractérisé en ce que le dispositif à tôle de protection (80) ou les tôles individuelles (81) dépasse(nt) de la surface à revêtir (12).
EP98955473A 1997-10-31 1998-10-17 Dispositif permettant d'appliquer une couche mince a la surface de l'ampoule de verre d'un tube cathodique Expired - Lifetime EP1024904B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19748063A DE19748063A1 (de) 1997-10-31 1997-10-31 Vorrichtung zum Aufbringen einer dünnen Schicht auf die Oberfläche eines Bildschirmglaskolbens
DE19748063 1997-10-31
PCT/EP1998/006586 WO1999022877A1 (fr) 1997-10-31 1998-10-17 Dispositif permettant d'appliquer une couche mince a la surface de l'ampoule de verre d'un tube cathodique

Publications (2)

Publication Number Publication Date
EP1024904A1 EP1024904A1 (fr) 2000-08-09
EP1024904B1 true EP1024904B1 (fr) 2002-12-04

Family

ID=7847171

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98955473A Expired - Lifetime EP1024904B1 (fr) 1997-10-31 1998-10-17 Dispositif permettant d'appliquer une couche mince a la surface de l'ampoule de verre d'un tube cathodique

Country Status (8)

Country Link
US (1) US6494952B1 (fr)
EP (1) EP1024904B1 (fr)
CN (1) CN1106231C (fr)
AT (1) ATE228892T1 (fr)
DE (2) DE19748063A1 (fr)
MY (1) MY126403A (fr)
TW (1) TW409076B (fr)
WO (1) WO1999022877A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001043159A1 (fr) * 1999-12-10 2001-06-14 Koninklijke Philips Electronics N.V. Procede et dispositif de formation d'une couche de matiere de revetement sur le cote interne d'une fenetre d'affichage pour tube d'affichage couleur
JP4117843B2 (ja) * 2003-12-25 2008-07-16 オリジン電気株式会社 スピンコート装置
CN102627408A (zh) * 2012-04-13 2012-08-08 安徽鑫昊等离子显示器件有限公司 一种等离子平板显示屏的浆料涂敷装置
DE102017212887A1 (de) 2017-07-26 2019-01-31 Gebr. Schmid Gmbh Verfahren, Vorrichtung und Anlage zur Leiterplattenherstellung
CN111864102A (zh) * 2020-07-07 2020-10-30 武汉华星光电半导体显示技术有限公司 显示面板及其制作方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2653429B2 (ja) * 1986-10-16 1997-09-17 株式会社東芝 陰極線管用バルブホルダー
KR920000328B1 (ko) * 1988-09-29 1992-01-11 미쯔비시덴끼 가부시끼가이샤 대전방지 처리형 음극선관의 제조방법
US5234499A (en) * 1990-06-26 1993-08-10 Dainippon Screen Mgf. Co., Ltd. Spin coating apparatus
KR100248565B1 (ko) * 1993-03-30 2000-05-01 다카시마 히로시 레지스트 처리방법 및 레지스트 처리장치
JPH0869752A (ja) 1994-08-30 1996-03-12 Nec Kansai Ltd スピンコーティング装置
JP3257340B2 (ja) * 1995-05-24 2002-02-18 松下電器産業株式会社 液体塗布方法、液体塗布装置およびスリットノズル
US5688328A (en) * 1995-09-13 1997-11-18 Chunghwa Picture Tubes, Ltd. Apparatus for improved coating of a CRT display screen
US5985031A (en) * 1996-06-21 1999-11-16 Micron Technology, Inc. Spin coating spindle and chuck assembly

Also Published As

Publication number Publication date
EP1024904A1 (fr) 2000-08-09
MY126403A (en) 2006-09-29
CN1278194A (zh) 2000-12-27
CN1106231C (zh) 2003-04-23
TW409076B (en) 2000-10-21
US6494952B1 (en) 2002-12-17
DE19748063A1 (de) 1999-05-06
WO1999022877A1 (fr) 1999-05-14
ATE228892T1 (de) 2002-12-15
DE59806563D1 (de) 2003-01-16

Similar Documents

Publication Publication Date Title
DE2621952C2 (de) Vorrichtung zum Entplattieren und Reinigen von Plättchen oder Substraten
EP0076472B1 (fr) Dispositif pour la distribution uniforme d'un courant d'une matière en vrac
DE2939828A1 (de) Verfahren und einrichtung zum flaechenverteilten streubeschichten von unterlagenoberflaechen mit partikeln
EP1232003A2 (fr) Dispositif de revetement de particules
EP0046569A2 (fr) Procédé et appareil pour mélanger des solides avec des liquides
EP0609693B1 (fr) Dispositif pour capter aerosol vagabond dans une machine d'impression rotative
DE2707809C3 (de) Vorrichtung zum Überziehen von Granulat
DE2409618A1 (de) Spruehkopf und spruehvorrichtung
EP0545044A2 (fr) Machine de dragéification de produits en morceaux, en particulier de pilules et comprimés
EP1024904B1 (fr) Dispositif permettant d'appliquer une couche mince a la surface de l'ampoule de verre d'un tube cathodique
EP0331112B1 (fr) Appareil du type lit fluidisé, spécialement pour l'agglomération de matière pulvérulentes
DE3934039A1 (de) Vorrichtung zum abtragen von faserballen, z. b. baumwoll- und chemiefaserballen o. dgl., mittels einer oeffnervorrichtung
DE4203913C2 (de) Verfahren und Vorrichtung zum Aufbringen und/oder zum partiellen Entfernen einer dünnen Schicht auf ein bzw. von einem Substrat
DE1110087B (de) Verfahren und Vorrichtung zum Vermeiden von Krustenbildung an Sprueheinrichtungen
EP0072467A1 (fr) Appareil d'enrobage de dragées
DE3151929A1 (de) Vorrichtung zum aufeinanderfolgenden auftragen verschiedener ueberzugsfluessigkeiten
DE3330414A1 (de) Verfahren und vorrichtung zum aufbereiten der einer friktionsspinnmaschine zugefuehrten spinnfasern
DE4445618C2 (de) Vorrichtung für die Filmlackierung und/oder Zuckerdragierung
DE4229250A1 (de) Reinigungs- und Trocknungseinrichtung für Behälter, Container und Fässer insbesondere für Farben, Lacke, Klebstoffe, Dichtstoffe und chemische sowie pharmazeutische Produkte
DE3016031C2 (de) Verfahren zum Beleimen von Spänen, Fasern o.dgl. lignozellulosehaltigen Teilchen und Beleimmaschine zur Durchführung des Verfahrens
DE3720200A1 (de) Spruehbeschichtungseinrichtung mit einem rotationsspruehorgan
DE1508698B1 (de) Einrichtung zur Aufbereitung von Giessereisand
DE635734C (de) Vorrichtung zum Aufbringen einer fluessigen, spaeter trocknenden Schicht auf Platten, insbesondere einer lichtempfindlichen Schicht auf Druckplatten
DE69416745T2 (de) Vorrichtung mit Reinigungsmittel zum Füllen von geschlossenen Behältern mit einer Nadel
EP0334085B1 (fr) Tuyère de remplissage pour machines, dispositifs et autres pour le remplissage de sacs à valve

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20000322

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT CH DE FR LI

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

17Q First examination report despatched

Effective date: 20020301

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT CH DE FR LI

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20021204

REF Corresponds to:

Ref document number: 228892

Country of ref document: AT

Date of ref document: 20021215

Kind code of ref document: T

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REF Corresponds to:

Ref document number: 59806563

Country of ref document: DE

Date of ref document: 20030116

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

EN Fr: translation not filed
PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20031017

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20031031

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20031031

26N No opposition filed

Effective date: 20030905

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20040501

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL