DE59806563D1 - Vorrichtung zum aufbringen einer dünnen schicht auf die oberfläche eines bildschirmglaskolbens - Google Patents

Vorrichtung zum aufbringen einer dünnen schicht auf die oberfläche eines bildschirmglaskolbens

Info

Publication number
DE59806563D1
DE59806563D1 DE59806563T DE59806563T DE59806563D1 DE 59806563 D1 DE59806563 D1 DE 59806563D1 DE 59806563 T DE59806563 T DE 59806563T DE 59806563 T DE59806563 T DE 59806563T DE 59806563 D1 DE59806563 D1 DE 59806563D1
Authority
DE
Germany
Prior art keywords
receptacle
applying
process pot
thin layer
turntable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59806563T
Other languages
English (en)
Inventor
Roland Mann
Wolfgang Schmutz
Josef Gentischer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ACR Automation in Cleanroom GmbH
Original Assignee
ACR Automation in Cleanroom GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ACR Automation in Cleanroom GmbH filed Critical ACR Automation in Cleanroom GmbH
Application granted granted Critical
Publication of DE59806563D1 publication Critical patent/DE59806563D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting

Landscapes

  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
  • Formation Of Insulating Films (AREA)
  • Electronic Switches (AREA)
DE59806563T 1997-10-31 1998-10-17 Vorrichtung zum aufbringen einer dünnen schicht auf die oberfläche eines bildschirmglaskolbens Expired - Fee Related DE59806563D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19748063A DE19748063A1 (de) 1997-10-31 1997-10-31 Vorrichtung zum Aufbringen einer dünnen Schicht auf die Oberfläche eines Bildschirmglaskolbens
PCT/EP1998/006586 WO1999022877A1 (de) 1997-10-31 1998-10-17 Vorrichtung zum aufbringen einer dünnen schicht auf die oberfläche eines bildschirmglaskolbens

Publications (1)

Publication Number Publication Date
DE59806563D1 true DE59806563D1 (de) 2003-01-16

Family

ID=7847171

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19748063A Withdrawn DE19748063A1 (de) 1997-10-31 1997-10-31 Vorrichtung zum Aufbringen einer dünnen Schicht auf die Oberfläche eines Bildschirmglaskolbens
DE59806563T Expired - Fee Related DE59806563D1 (de) 1997-10-31 1998-10-17 Vorrichtung zum aufbringen einer dünnen schicht auf die oberfläche eines bildschirmglaskolbens

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19748063A Withdrawn DE19748063A1 (de) 1997-10-31 1997-10-31 Vorrichtung zum Aufbringen einer dünnen Schicht auf die Oberfläche eines Bildschirmglaskolbens

Country Status (8)

Country Link
US (1) US6494952B1 (de)
EP (1) EP1024904B1 (de)
CN (1) CN1106231C (de)
AT (1) ATE228892T1 (de)
DE (2) DE19748063A1 (de)
MY (1) MY126403A (de)
TW (1) TW409076B (de)
WO (1) WO1999022877A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010101828A (ko) * 1999-12-10 2001-11-14 요트.게.아. 롤페즈 컬러 디스플레이 튜브를 위한 디스플레이 윈도우의 내측면상에 코팅 물질 층을 제공하기 위한 방법 및 디바이스
JP4117843B2 (ja) * 2003-12-25 2008-07-16 オリジン電気株式会社 スピンコート装置
CN102627408A (zh) * 2012-04-13 2012-08-08 安徽鑫昊等离子显示器件有限公司 一种等离子平板显示屏的浆料涂敷装置
DE102017212887A1 (de) 2017-07-26 2019-01-31 Gebr. Schmid Gmbh Verfahren, Vorrichtung und Anlage zur Leiterplattenherstellung
CN111864102A (zh) * 2020-07-07 2020-10-30 武汉华星光电半导体显示技术有限公司 显示面板及其制作方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2653429B2 (ja) * 1986-10-16 1997-09-17 株式会社東芝 陰極線管用バルブホルダー
KR920000328B1 (ko) * 1988-09-29 1992-01-11 미쯔비시덴끼 가부시끼가이샤 대전방지 처리형 음극선관의 제조방법
US5234499A (en) * 1990-06-26 1993-08-10 Dainippon Screen Mgf. Co., Ltd. Spin coating apparatus
US5626913A (en) * 1994-03-09 1997-05-06 Tokyo Electron Limited Resist processing method and apparatus
JPH0869752A (ja) * 1994-08-30 1996-03-12 Nec Kansai Ltd スピンコーティング装置
JP3257340B2 (ja) * 1995-05-24 2002-02-18 松下電器産業株式会社 液体塗布方法、液体塗布装置およびスリットノズル
US5688328A (en) * 1995-09-13 1997-11-18 Chunghwa Picture Tubes, Ltd. Apparatus for improved coating of a CRT display screen
US5985031A (en) * 1996-06-21 1999-11-16 Micron Technology, Inc. Spin coating spindle and chuck assembly

Also Published As

Publication number Publication date
US6494952B1 (en) 2002-12-17
DE19748063A1 (de) 1999-05-06
TW409076B (en) 2000-10-21
EP1024904A1 (de) 2000-08-09
ATE228892T1 (de) 2002-12-15
MY126403A (en) 2006-09-29
CN1278194A (zh) 2000-12-27
WO1999022877A1 (de) 1999-05-14
EP1024904B1 (de) 2002-12-04
CN1106231C (zh) 2003-04-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee