EP0985828A1 - Verfahren und Anlage zur Verhinderung von Ablagerungen in eineTurbomolekularpumpe mit Magnet-oder Gaslager - Google Patents

Verfahren und Anlage zur Verhinderung von Ablagerungen in eineTurbomolekularpumpe mit Magnet-oder Gaslager Download PDF

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Publication number
EP0985828A1
EP0985828A1 EP99402125A EP99402125A EP0985828A1 EP 0985828 A1 EP0985828 A1 EP 0985828A1 EP 99402125 A EP99402125 A EP 99402125A EP 99402125 A EP99402125 A EP 99402125A EP 0985828 A1 EP0985828 A1 EP 0985828A1
Authority
EP
European Patent Office
Prior art keywords
active gas
turbomolecular pump
rotor
turbomolecular
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP99402125A
Other languages
English (en)
French (fr)
Other versions
EP0985828B1 (de
Inventor
Michel Puech
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Alcatel Lucent SAS
Original Assignee
Alcatel CIT SA
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA
Publication of EP0985828A1 publication Critical patent/EP0985828A1/de
Application granted granted Critical
Publication of EP0985828B1 publication Critical patent/EP0985828B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Definitions

  • the present invention relates to pumps turbomolecular which, combined with primary pumps, allow to achieve and maintain a high vacuum in an enclosure.
  • Turbomolecular pumps generally have a rotor and a multistage stator, the rotor being carried by bearings. Going from the inside of the enclosure to the outside, the gas pressure gradually increases from one stage to another, and the floors near the interior of the enclosure are the low pressure stages, while the stages near the outlet are the high pressure stages.
  • these turbomolecular pumps When they have magnetic or gas bearings to support the rotor, these turbomolecular pumps have the characteristic of having the rotor physically isolated and therefore electrically from the stator and the pump body which is at the reference potential, i.e. the mass of the equipment.
  • Turbomolecular pumps are frequently used in plasma etching or deposition equipment in the semiconductor industry.
  • turbomolecular pumps in etching or plasma deposition processes, we already have found that it tends to form deposits of materials from reaction products.
  • residues from the etching of resin masks tend to settle on surfaces inside of the rotor and stator, and preferably in the high pressure stages of the turbomolecular pump.
  • the turbomolecular pump and in particular the rotor are in direct contact with the plasma. Therefore, the rotor, which is electrically isolated, carries a potential different from the mass.
  • the pressure conditions in the high pressure part of the turbomolecular pump combined with the short distance separating the rotor and the stator and with the potential difference between the rotor and the stator, cause electrical discharges between the rotor and the stator. These discharges, in the absence deposits, are evenly distributed between the rotor surfaces and stator and are not harmful.
  • a grid connected to ground.
  • the high density of plasmas used screens require very fine pitch, which can be less than 100 ⁇ m.
  • the presence of the grids considerably reduces the conductance of the pump, and alters significantly the pumping speed.
  • the step grid very thin is the seat of depots which can then generate particles harmful to the industrial process carried out in the enclosure.
  • the problem proposed by the present invention is to avoid the formation of disturbing deposits of electrical discharges at inside a turbomolecular pump with magnetic bearings or gas connected to an enclosure containing a plasma, without altering significantly the pumping speed or the industrial process to inside the enclosure.
  • the invention aims to devise other means which, without intervention of an intermediate grid nor increase sensitive to the temperature of the materials, prevents the formation of disturbing deposits in a turbomolecular step pump magnetic or gaseous connected to a plasma enclosure.
  • the invention provides a method for avoiding disturbing deposits of electric shocks between the rotor and the stator inside a multistage turbomolecular pump on bearings magnetic or gaseous; according to this process, at least one is injected suitable location inside the turbomolecular pump a active gas which reacts with the molecules which generate deposits and forms gaseous compounds evacuated by the turbomolecular pump.
  • the active gas is injected only into the floors where deposits are likely to occur. Generally, these are the high pressure stages of the pump turbomolecular. In practice, the active gas can be injected into the last turbomolecular stages, and / or in the Holweck stage when the pump is fitted.
  • the injected active gas can advantageously be oxygen, or contain oxygen. Indeed, dissociated under the action of electric discharges, the oxygen gas gives rise to highly reactive oxygen atoms which effectively combine with in particular organic residues generated by industrial processes to form molecules volatiles such as carbon monoxide, carbon dioxide or water which are discharged at the same time as the other gaseous compounds originating from the plasma chamber.
  • a turbomolecular pump is provided.
  • the pump turbomolecular comprises means for injecting, in at least one suitable location inside the turbomolecular pump, an active gas that reacts with the molecules that generate deposits and forms gaseous compounds discharged by the turbomolecular pump.
  • the turbomolecular pump according to the invention can advantageously comprise at least one inlet pipe of gas, positioned to bring the active gas between the rotor and the stator in the passage of gas flows in the top floors turbomolecular, and / or in the Holweck stage when the pump in is equipped.
  • the turbomolecular pump according to the invention can advantageously be associated with an external source of active gas and to control means for delivering the active gas in quantity sufficient to avoid deposits.
  • the turbomolecular pump according to the invention comprises a structure traditional hybrid, with a stator 1 and a rotor 2 with several floors.
  • the stator 1 is open upwards according to an entry suction 3, and has a shaped internal recess for receive the rotor 2, with a lower annular volume 4 of collection of pumped gases communicating with a lateral outlet lower delivery 5.
  • the stator 1 includes, from suction inlet 3, several stages fixed fins such as stages 6 and 7, followed by a stage of Holweck type stator 8 with an external tubular part 9 of Holweck stator and an internal tubular part 10 of Holweck stator coaxial and joined to each other by the bottom 11 to form between them an annular chimney communicating with the volume lower ring 4.
  • the rotor 2 is integral with a shaft 12 carried by magnetic or gas bearings 13 and 14 and stressed in rotation axial in known manner by coils constituting the windings stator and rotor of an electric motor 15.
  • the rotor 2 comprises several stages, including several rotor fin stages 16, 17 and 18, followed by a rotor Holweck 19 of tubular shape engaged in the annular chimney between the external tubular part 9 and the internal tubular part 10 of stator Holweck 8.
  • the different stages of the turbomolecular pump the invention may have structures such as those traditionally used in turbomolecular pumps.
  • turbomolecular pump structure such as illustrated in figure 1, we can consider that the first turbomolecular stages constituted by the stator fins 6 and 7 and the rotor fins 16 and 17 constitute low stages pressure, and that the turbomolecular stage with stator fins 7 and rotor 18 followed by the Holweck stage 8-10 and 19 constitute high pressure stages.
  • high pressure stages the distances between the facing surfaces of each other of the stator 1 and rotor 2 are low, and gas pressures are such that the conditions are met for landfills between the rotor 2, electrically isolated and at a floating potential, and stator 1 which is grounded.
  • deposits of solids tend to occur on the facing surfaces of stator 1 and rotor 2, in particularly on the surfaces of the high pressure finned stage 7 and 18, and on the Holweck floor 8-10 and 19.
  • deposits tend to occur at the interface between the tubular part external 9 of the Holweck stator 8 and the Holweck rotor stage 19 of tubular shape.
  • the turbomolecular pump comprises in in addition to means for injecting, in at least one location suitable inside the pump, an active gas capable of react with the molecules that generate deposits to form gaseous compounds discharged by the pump.
  • the active gas must be present in the interface zones between the stator 1 and the rotor 2 where deposits are likely to occur.
  • the pump comprises at least one gas inlet pipe 20, positioned for bring the active gas between the rotor 2 and the stator 1 in the stages high pressure of the turbomolecular pump.
  • a pipe gas inlet 20 brings the active gas to the floors high pressure turbomolecular so that the active gas also propagates in the Holweck stage which follows.
  • a gas inlet pipe 20 conducts the gas active at entrance 21 of the Holweck floor, in a higher volume annular, by a branch line 20a.
  • the turbomolecular pump illustrated in Figure 1 is associated with an external source of active gas 22 and with means for control 23 to deliver the active gas in just sufficient quantity to avoid deposits that could disrupt pension plans electrical discharges between stator 1 and rotor 2.
  • We can in particular control the flow of active gas by a calibrated valve or a micro-leakage valve, in permanent or intermittent operation.
  • the active gas can be supplied in one intermediate position along the Holweck floor by a pipe branch 20b, or in the lower volume annular 4 by a pipe branch 20c.
  • the invention thus avoids disturbing deposits of electric discharges between rotor 2 and stator 1 inside the multi-turbomolecular pump stages on magnetic or gas bearings 13 and 14 by injecting in at least one suitable location 21 inside the pump a active gas which reacts with the molecules which generate deposits and forms gaseous compounds discharged by the pump.
  • the introduction of a gas into the high pressure stages does not does not disturb the atmosphere inside the plasma chamber, and effectively prevents the appearance of deposits likely to disrupt electrical discharge regimes between stator 1 and rotor 2.
  • the pumping speed of the system is not disturbed, nor is the temperature of the pump.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Chemical Vapour Deposition (AREA)
EP99402125A 1998-09-10 1999-08-26 Verfahren und Anlage zur Verhinderung von Ablagerungen in eineTurbomolekularpumpe mit Magnet-oder Gaslager Expired - Lifetime EP0985828B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9811296 1998-09-10
FR9811296A FR2783883B1 (fr) 1998-09-10 1998-09-10 Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux

Publications (2)

Publication Number Publication Date
EP0985828A1 true EP0985828A1 (de) 2000-03-15
EP0985828B1 EP0985828B1 (de) 2005-09-07

Family

ID=9530295

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99402125A Expired - Lifetime EP0985828B1 (de) 1998-09-10 1999-08-26 Verfahren und Anlage zur Verhinderung von Ablagerungen in eineTurbomolekularpumpe mit Magnet-oder Gaslager

Country Status (5)

Country Link
US (1) US6224326B1 (de)
EP (1) EP0985828B1 (de)
AT (1) ATE304123T1 (de)
DE (1) DE69927101T2 (de)
FR (1) FR2783883B1 (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007066141A1 (en) * 2005-12-09 2007-06-14 Edwards Limited Method of inhibiting a deflagration in a vacuum pump
WO2008022916A1 (de) 2006-08-23 2008-02-28 Oerlikon Leybold Vacuum Gmbh Verfahren zur abreaktion selbstentzündlicher stäube in einer vakuumpumpvorrichtung
WO2009077777A1 (en) * 2007-12-19 2009-06-25 Edwards Limited Method of treating a gas stream
WO2020178042A1 (fr) * 2019-03-05 2020-09-10 Pfeiffer Vacuum Pompe à vide turbomoléculaire et procédé de purge
EP4119795A4 (de) * 2020-03-09 2024-04-10 Edwards Japan Limited Vakuumpumpe

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004036047A1 (en) 2002-10-14 2004-04-29 The Boc Group Plc Rotary piston vacuum pump with washing installation
GB0229356D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
US8047817B2 (en) * 2003-09-23 2011-11-01 Edwards Limited Cleaning method of a rotary piston vacuum pump
US7404698B2 (en) * 2005-08-16 2008-07-29 Edwards Vacuum, Inc. Turbomolecular pump with static charge control
JP5190214B2 (ja) * 2007-03-29 2013-04-24 東京エレクトロン株式会社 ターボ分子ポンプ、基板処理装置、及びターボ分子ポンプの堆積物付着抑制方法
DE102008034948A1 (de) * 2008-07-26 2010-01-28 Pfeiffer Vacuum Gmbh Vakuumpumpe
WO2010055665A1 (ja) * 2008-11-14 2010-05-20 アルバック・クライオ株式会社 真空排気装置、真空処理装置及び真空処理方法
DE102011119506A1 (de) * 2011-11-26 2013-05-29 Pfeiffer Vacuum Gmbh Schnell drehender Rotor für eine Vakuumpumpe
JP6391171B2 (ja) * 2015-09-07 2018-09-19 東芝メモリ株式会社 半導体製造システムおよびその運転方法
GB2569633A (en) * 2017-12-21 2019-06-26 Edwards Ltd A vacuum pumping arrangement and method of cleaning the vacuum pumping arrangement
JP7224168B2 (ja) 2017-12-27 2023-02-17 エドワーズ株式会社 真空ポンプおよびこれに用いられる固定部品、排気ポート、制御手段

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4512725A (en) * 1982-02-16 1985-04-23 Compagnie Industrielle Des Telecommunications Cit-Alcatel Rotary vacuum pump
EP0408792A1 (de) * 1989-07-20 1991-01-23 Leybold Aktiengesellschaft Gasreibungspumpe mit mindestens einer auslassseitigen Gewindestufe
EP0451708A2 (de) * 1990-04-06 1991-10-16 Hitachi, Ltd. Vakuumpumpe
EP0695873A1 (de) * 1994-08-01 1996-02-07 Balzers-Pfeiffer GmbH Fluteinrichtung für magnetisch gelagerte Vakuumpumpen

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump
US5443368A (en) * 1993-07-16 1995-08-22 Helix Technology Corporation Turbomolecular pump with valves and integrated electronic controls
DE59305085D1 (de) * 1992-06-19 1997-02-20 Leybold Ag Gasreibungsvakuumpumpe
IT1281025B1 (it) * 1995-11-10 1998-02-11 Varian Spa Pompa turbomolecolare.

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4512725A (en) * 1982-02-16 1985-04-23 Compagnie Industrielle Des Telecommunications Cit-Alcatel Rotary vacuum pump
EP0408792A1 (de) * 1989-07-20 1991-01-23 Leybold Aktiengesellschaft Gasreibungspumpe mit mindestens einer auslassseitigen Gewindestufe
EP0451708A2 (de) * 1990-04-06 1991-10-16 Hitachi, Ltd. Vakuumpumpe
EP0695873A1 (de) * 1994-08-01 1996-02-07 Balzers-Pfeiffer GmbH Fluteinrichtung für magnetisch gelagerte Vakuumpumpen

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007066141A1 (en) * 2005-12-09 2007-06-14 Edwards Limited Method of inhibiting a deflagration in a vacuum pump
WO2008022916A1 (de) 2006-08-23 2008-02-28 Oerlikon Leybold Vacuum Gmbh Verfahren zur abreaktion selbstentzündlicher stäube in einer vakuumpumpvorrichtung
WO2009077777A1 (en) * 2007-12-19 2009-06-25 Edwards Limited Method of treating a gas stream
WO2020178042A1 (fr) * 2019-03-05 2020-09-10 Pfeiffer Vacuum Pompe à vide turbomoléculaire et procédé de purge
FR3093544A1 (fr) * 2019-03-05 2020-09-11 Pfeiffer Vacuum Pompe à vide turbomoléculaire et procédé de purge
CN113518863A (zh) * 2019-03-05 2021-10-19 普发真空公司 涡轮分子真空泵和净化方法
EP4119795A4 (de) * 2020-03-09 2024-04-10 Edwards Japan Limited Vakuumpumpe

Also Published As

Publication number Publication date
FR2783883B1 (fr) 2000-11-10
US6224326B1 (en) 2001-05-01
ATE304123T1 (de) 2005-09-15
EP0985828B1 (de) 2005-09-07
FR2783883A1 (fr) 2000-03-31
DE69927101D1 (de) 2005-10-13
DE69927101T2 (de) 2006-06-29

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