DE69927101D1 - Verfahren und Anlage zur Verhinderung von Ablagerungen in eineTurbomolekularpumpe mit Magnet-oder Gaslager - Google Patents
Verfahren und Anlage zur Verhinderung von Ablagerungen in eineTurbomolekularpumpe mit Magnet-oder GaslagerInfo
- Publication number
- DE69927101D1 DE69927101D1 DE69927101T DE69927101T DE69927101D1 DE 69927101 D1 DE69927101 D1 DE 69927101D1 DE 69927101 T DE69927101 T DE 69927101T DE 69927101 T DE69927101 T DE 69927101T DE 69927101 D1 DE69927101 D1 DE 69927101D1
- Authority
- DE
- Germany
- Prior art keywords
- magnetic
- plant
- gas bearing
- turbomolecular pump
- preventing sedimentation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title abstract 2
- 238000004062 sedimentation Methods 0.000 title 1
- 230000008021 deposition Effects 0.000 abstract 2
- 238000003756 stirring Methods 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
- F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2260/00—Function
- F05D2260/60—Fluid transfer
- F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9811296A FR2783883B1 (fr) | 1998-09-10 | 1998-09-10 | Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux |
FR9811296 | 1998-09-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69927101D1 true DE69927101D1 (de) | 2005-10-13 |
DE69927101T2 DE69927101T2 (de) | 2006-06-29 |
Family
ID=9530295
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69927101T Expired - Fee Related DE69927101T2 (de) | 1998-09-10 | 1999-08-26 | Verfahren und Anlage zur Verhinderung von Ablagerungen in eine Turbomolekularpumpe mit Magnet-oder Gaslager |
Country Status (5)
Country | Link |
---|---|
US (1) | US6224326B1 (de) |
EP (1) | EP0985828B1 (de) |
AT (1) | ATE304123T1 (de) |
DE (1) | DE69927101T2 (de) |
FR (1) | FR2783883B1 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1552152B1 (de) * | 2002-10-14 | 2013-03-20 | Edwards Limited | Drehkolbenvakuumpumpe mit einer reinigungsvorrichtung |
GB0229356D0 (en) * | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping arrangement |
US8047817B2 (en) * | 2003-09-23 | 2011-11-01 | Edwards Limited | Cleaning method of a rotary piston vacuum pump |
US7404698B2 (en) * | 2005-08-16 | 2008-07-29 | Edwards Vacuum, Inc. | Turbomolecular pump with static charge control |
GB0525136D0 (en) * | 2005-12-09 | 2006-01-18 | Boc Group Plc | Method of inhibiting a deflagration in a vacuum pump |
DE102006039529A1 (de) | 2006-08-23 | 2008-03-06 | Oerlikon Leybold Vacuum Gmbh | Verfahren zur Abreaktion selbstentzündlicher Stäube in einer Vakuumpumpvorrichtung |
JP5190214B2 (ja) * | 2007-03-29 | 2013-04-24 | 東京エレクトロン株式会社 | ターボ分子ポンプ、基板処理装置、及びターボ分子ポンプの堆積物付着抑制方法 |
GB0724717D0 (en) * | 2007-12-19 | 2008-01-30 | Edwards Ltd | Method of treating a gas stream |
DE102008034948A1 (de) * | 2008-07-26 | 2010-01-28 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
JP5207417B2 (ja) * | 2008-11-14 | 2013-06-12 | アルバック・クライオ株式会社 | 真空排気装置、真空処理装置及び真空処理方法 |
DE102011119506A1 (de) * | 2011-11-26 | 2013-05-29 | Pfeiffer Vacuum Gmbh | Schnell drehender Rotor für eine Vakuumpumpe |
JP6391171B2 (ja) * | 2015-09-07 | 2018-09-19 | 東芝メモリ株式会社 | 半導体製造システムおよびその運転方法 |
GB2569633A (en) * | 2017-12-21 | 2019-06-26 | Edwards Ltd | A vacuum pumping arrangement and method of cleaning the vacuum pumping arrangement |
JP7224168B2 (ja) | 2017-12-27 | 2023-02-17 | エドワーズ株式会社 | 真空ポンプおよびこれに用いられる固定部品、排気ポート、制御手段 |
FR3093544B1 (fr) * | 2019-03-05 | 2021-03-12 | Pfeiffer Vacuum | Pompe à vide turbomoléculaire et procédé de purge |
JP7361640B2 (ja) * | 2020-03-09 | 2023-10-16 | エドワーズ株式会社 | 真空ポンプ |
CN116018464A (zh) * | 2020-09-10 | 2023-04-25 | 埃地沃兹日本有限公司 | 真空泵 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2521650A1 (fr) * | 1982-02-16 | 1983-08-19 | Cit Alcatel | Pompe rotative a vide eleve |
JPS6419198A (en) * | 1987-07-15 | 1989-01-23 | Hitachi Ltd | Vacuum pump |
US5443368A (en) * | 1993-07-16 | 1995-08-22 | Helix Technology Corporation | Turbomolecular pump with valves and integrated electronic controls |
DE58905785D1 (de) * | 1989-07-20 | 1993-11-04 | Leybold Ag | Gasreibungspumpe mit mindestens einer auslassseitigen gewindestufe. |
KR950007378B1 (ko) * | 1990-04-06 | 1995-07-10 | 가부시끼 가이샤 히다찌 세이사꾸쇼 | 진공펌프 |
WO1994000694A1 (de) * | 1992-06-19 | 1994-01-06 | Leybold Aktiengesellschaft | Gasreibungsvakuumpumpe |
DE4427153A1 (de) * | 1994-08-01 | 1996-02-08 | Balzers Pfeiffer Gmbh | Fluteinrichtung für magnetisch gelagerte Vakuumpumpen |
IT1281025B1 (it) * | 1995-11-10 | 1998-02-11 | Varian Spa | Pompa turbomolecolare. |
-
1998
- 1998-09-10 FR FR9811296A patent/FR2783883B1/fr not_active Expired - Fee Related
-
1999
- 1999-08-26 DE DE69927101T patent/DE69927101T2/de not_active Expired - Fee Related
- 1999-08-26 EP EP99402125A patent/EP0985828B1/de not_active Expired - Lifetime
- 1999-08-26 AT AT99402125T patent/ATE304123T1/de not_active IP Right Cessation
- 1999-09-09 US US09/392,586 patent/US6224326B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2783883B1 (fr) | 2000-11-10 |
DE69927101T2 (de) | 2006-06-29 |
EP0985828A1 (de) | 2000-03-15 |
FR2783883A1 (fr) | 2000-03-31 |
EP0985828B1 (de) | 2005-09-07 |
ATE304123T1 (de) | 2005-09-15 |
US6224326B1 (en) | 2001-05-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: ALCATEL LUCENT, PARIS, FR |
|
8339 | Ceased/non-payment of the annual fee |