EP0962720A3 - Ventilation structure of planarization chamber - Google Patents
Ventilation structure of planarization chamber Download PDFInfo
- Publication number
- EP0962720A3 EP0962720A3 EP99107384A EP99107384A EP0962720A3 EP 0962720 A3 EP0962720 A3 EP 0962720A3 EP 99107384 A EP99107384 A EP 99107384A EP 99107384 A EP99107384 A EP 99107384A EP 0962720 A3 EP0962720 A3 EP 0962720A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- chamber
- planarization
- air
- particles
- planarization chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/02—Ducting arrangements
- F24F13/06—Outlets for directing or distributing air into rooms or spaces, e.g. ceiling air diffuser
- F24F13/068—Outlets for directing or distributing air into rooms or spaces, e.g. ceiling air diffuser formed as perforated walls, ceilings or floors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/06—Dust extraction equipment on grinding or polishing machines
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/08—Air-flow control members, e.g. louvres, grilles, flaps or guide plates
- F24F13/082—Grilles, registers or guards
- F24F2013/088—Air-flow straightener
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- General Engineering & Computer Science (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Treatment Of Fiber Materials (AREA)
- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10174106A JPH11347937A (ja) | 1998-06-05 | 1998-06-05 | 研磨加工室の換気構造 |
JP17410698 | 1998-06-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0962720A2 EP0962720A2 (en) | 1999-12-08 |
EP0962720A3 true EP0962720A3 (en) | 2000-07-12 |
Family
ID=15972762
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99107384A Withdrawn EP0962720A3 (en) | 1998-06-05 | 1999-04-23 | Ventilation structure of planarization chamber |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0962720A3 (ja) |
JP (1) | JPH11347937A (ja) |
KR (1) | KR20000005667A (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4448297B2 (ja) * | 2002-12-27 | 2010-04-07 | 株式会社荏原製作所 | 基板研磨装置及び基板研磨方法 |
CH695326A5 (de) * | 2004-11-26 | 2006-03-31 | Lk Luftqualitaet Ag | Flaechenelement zur Temperierung von Raumluft. |
JP4708966B2 (ja) * | 2005-11-11 | 2011-06-22 | 株式会社ディスコ | 切削装置 |
NL2004886C2 (nl) * | 2010-06-14 | 2011-12-15 | Jong Air B V | Luchtverversingsysteem en werkwijze. |
CN102155771B (zh) * | 2011-03-30 | 2013-02-27 | 四川电力设计咨询有限责任公司 | 汽机房降温通风系统及方法 |
JP5850788B2 (ja) * | 2012-04-10 | 2016-02-03 | 株式会社ディスコ | 切削装置 |
JP6927814B2 (ja) * | 2017-09-08 | 2021-09-01 | 株式会社ディスコ | ドライ研磨装置 |
CN107457705A (zh) * | 2017-09-22 | 2017-12-12 | 彭欣莉 | 一种自动化多角度打磨装置 |
CN108581846A (zh) * | 2018-04-25 | 2018-09-28 | 安徽天顺环保设备股份有限公司 | 一种车间用打磨除尘工作台 |
KR102659557B1 (ko) * | 2020-09-29 | 2024-04-23 | 시바우라 메카트로닉스 가부시끼가이샤 | 송풍기 및 전자 부품의 실장 장치 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1318364A (en) * | 1969-09-15 | 1973-05-31 | Nesher Ag | Apparatus for controlling delivery of clean gas to a clean environment |
FR2485698A1 (fr) * | 1980-06-24 | 1981-12-31 | Aurore Sa | Poste de travail a ecoulements laminaires |
GB2106240A (en) * | 1981-09-22 | 1983-04-07 | Howorth Air Eng Ltd | Air-conditioned workstation |
EP0710803A1 (en) * | 1994-10-22 | 1996-05-08 | Howorth Airtech Limited | Clean air system |
US5679059A (en) * | 1994-11-29 | 1997-10-21 | Ebara Corporation | Polishing aparatus and method |
-
1998
- 1998-06-05 JP JP10174106A patent/JPH11347937A/ja active Pending
-
1999
- 1999-04-23 EP EP99107384A patent/EP0962720A3/en not_active Withdrawn
- 1999-05-17 KR KR1019990017545A patent/KR20000005667A/ko not_active Application Discontinuation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1318364A (en) * | 1969-09-15 | 1973-05-31 | Nesher Ag | Apparatus for controlling delivery of clean gas to a clean environment |
FR2485698A1 (fr) * | 1980-06-24 | 1981-12-31 | Aurore Sa | Poste de travail a ecoulements laminaires |
GB2106240A (en) * | 1981-09-22 | 1983-04-07 | Howorth Air Eng Ltd | Air-conditioned workstation |
EP0710803A1 (en) * | 1994-10-22 | 1996-05-08 | Howorth Airtech Limited | Clean air system |
US5679059A (en) * | 1994-11-29 | 1997-10-21 | Ebara Corporation | Polishing aparatus and method |
Also Published As
Publication number | Publication date |
---|---|
JPH11347937A (ja) | 1999-12-21 |
KR20000005667A (ko) | 2000-01-25 |
EP0962720A2 (en) | 1999-12-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
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AK | Designated contracting states |
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AX | Request for extension of the european patent |
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|
PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
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RIC1 | Information provided on ipc code assigned before grant |
Free format text: 7F 24F 13/068 A, 7F 24F 3/16 B |
|
AKX | Designation fees paid | ||
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20010115 |