EP0850897B1 - Alumina-based sintered material - Google Patents

Alumina-based sintered material Download PDF

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Publication number
EP0850897B1
EP0850897B1 EP97310527A EP97310527A EP0850897B1 EP 0850897 B1 EP0850897 B1 EP 0850897B1 EP 97310527 A EP97310527 A EP 97310527A EP 97310527 A EP97310527 A EP 97310527A EP 0850897 B1 EP0850897 B1 EP 0850897B1
Authority
EP
European Patent Office
Prior art keywords
alumina
weight
based sintered
sintered material
load current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP97310527A
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German (de)
English (en)
French (fr)
Other versions
EP0850897A1 (en
Inventor
Ken-ichi c/o NGK Spark Co. Ltd. Mizuno
Yoshihiro c/o NGK Spark Co. Ltd. Yamamoto
Toru c/o NGK Spark Co. Ltd. Shimamori
Kazuhisa c/o NGK Spark Co. Ltd. Itakura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Publication of EP0850897A1 publication Critical patent/EP0850897A1/en
Application granted granted Critical
Publication of EP0850897B1 publication Critical patent/EP0850897B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
    • C04B35/111—Fine ceramics

Definitions

  • the present invention relates to a uniformly dense and homogeneous alumina-based sintered material having excellent grindability and strength such as flexural strength, and which is free from color unevenness and fluctuations in density.
  • the alumina-based sintered material of the present invention can be used to make ceramic parts for semiconductor fabrication equipment such as a wafer chuck, a conveyor jig, a polishing plate, various chamber parts and a wafer board, or to make ceramic parts for ordinary industrial machines.
  • the alumina-based sintered material of the present invention can also be used as a ceramic part requiring particularly precise working and corrosion resistance, such as a precision working jig for producing a magnetic head.
  • the first aspect of the present invention concerns an alumina-based sintered material comprising MgO in an amount of not more than 1% by weight (excluding 0% by weight), preferably from 0.005 to 1% by weight, CaO in an amount of from 0.02 to 1% by weight, SiO 2 in an amount of from 0.02 to 1% by weight and Al 2 O 3 in an amount of at least 98% by weight, having an SiO 2 content ratio of less than 80 parts by weight based on 100 parts by weight of the sum of the weight of MgO, CaO and SiO 2 , a 50 percent cumulative grain size distribution in diameter of from 4 to 15 ⁇ m, a 90 percent diameter of not more than three times the 50 percent diameter, a maximum load current during grinding of not more than 1.0 A/mm, and a porosity of not more than 5%.
  • the second aspect of the present invention concerns an alumina-based sintered material comprising MgO in an amount of not more than 0.4% by weight (excluding 0% by weight), preferably 0.005 to 0.4% by weight, CaO in an amount of from 0.02 to 0.7% by weight, SiO 2 in an amount of from 0.02 to 0.8% by weight and Al 2 O 3 , in an amount of at least 98% by weight, having an SiO 2 content ratio of less than 80 parts by weight based on 100 parts by weight of the sum of the weight of MgO, CaO and SiO 2 , a 50 percent cumulative grain size distribution in diameter of from 6 to 12 ⁇ m, a 90 percent diameter of not more than three times the 50 percent diameter, a maximum load current during grinding of not more than 0.5 A/mm as determined by the method defined above, a porosity of not more than 3%, and a four-point flexural strength of not less than 300 MPa as determined according to JIS R1601 (1995).
  • the Al 2 O 3 content can be adjusted as defined in the following third aspect of the present invention to invariably obtain an alumina-based sintered material having superior grindability. That is, the third aspect of the present invention concerns an alumina-based sintered material according to the first and second aspects of the present invention, comprising Al 2 O 3 in an amount of not less than 99.3% by weight.
  • the resulting alumina-based sintered material has a fine structure that increases strength but deteriorates grindability.
  • the resulting alumina-based sintered material has a coarse structure that enhances grindability but deteriorates strength.
  • the 50 percent grain diameter falls within a range of from 4 to 15 ⁇ m
  • the 90 percent grain diameter as defined above is three or more times the 50 percent grain diameter
  • the resulting alumina-based sintered material exhibits reduced strength as well as deteriorated grindability. Namely, although the bulk of the sintered material has a structure which is sufficiently coarse so as to maintain high strength, abnormally grown oversized grains occur. This in turn gives rise to a fracture origin that causes a reduction in strength.
  • the 50 percent grain diameter as defined above is preferably from 6 to 12 ⁇ m, particularly from 6 to 10 ⁇ m.
  • the 90 percent grain diameter is preferably not more than three times, particularly from two to three times, and more particularly from 2 to 2.7 times the 50 percent grain diameter.
  • an alumina-based sintered material having, in combination, a grindability as good as that obtained with a maximum load current during grinding of not more than 0.5 A/mm and a flexural strength of not less than 300 MPa can be obtained.
  • the maximum load current during grinding can be reduced to not more than 0.3 A/mm, particularly to not more than 0.28 A/mm, and more particularly to not more than 0.25 A/mm while maintaining a flexural strength of not less than 320 MPa.
  • the fourth aspect of the present invention concerns an alumina-based sintered material according to any one of the first to third aspects of the present invention, which exhibits a maximum load current during grinding of not more than 0.3 A/mm as determined above and a four-point flexural strength of not less than 320 MPa as determined according to JIS R1601 (1995).
  • an alumina-based sintered material having such excellent grindability and great strength can be obtained.
  • the value of the load current as defined above indicates whether or not the grindability is good. In other words, the smaller the value of the load current, the better the grindability.
  • the foregoing composition can be sintered at a temperature of from 1,550°C to 1,650°C, and particularly from 1,600°C to 1,650°C to obtain an alumina-based sintered material having a density such that the porosity is not more than 5%, particularly not more than 3%, and more particularly not more than 2%.
  • the alumina-based sintered material obtained according to the present invention has both high density and great strength.
  • the alumina-based sintered material of the present invention also exhibits very excellent grindability.
  • the alumina-based sintered material having in combination such excellent grindability and strength can be obtained by adjusting the 50 percent grain diameter of the cumulative grain sine distribution and by adjusting the ratio of the 50 percent grain diameter to the 90 percent grain diameter in accordance with the present invention.
  • CaCO 3 was blended in an amount to provide a CaO content as set forth in Tables 1 and 2.
  • the Al 2 O 3 content as set forth in Tables 1 and 2 included the CaO and SiO 2 contents incorporated as impurities.
  • the foregoing oxide powders were charged into a ball mill. An appropriate amount of an organic binder and water were then charged into the ball mill. The mixture was then stirred with 20 mm ⁇ alumina balls (purity: not less than 99.5%) for 16 hours. Thereafter, the material was dried using a spray dryer, and then granulated. Subsequently, the material thus granulated was hydrostatically pressed to prepare a molded product having a size of 50 ⁇ 50 ⁇ 20 mm (thickness). Thereafter, the molded product was stored and sintered at a temperature as set forth in Tables 1 and 2 under atmospheric pressure for 2 hours.
  • the sintered product thus obtained was then mirror-polished.
  • a photograph of the surface structure of the sintered product thus mirror-polished was then taken using a scanning electron microscope. Using the photograph, the maximum distance across each of 200 to 300 grains was measured.
  • the grain diameter on the abscissa corresponding to 50% of the total number of grains measured on the ordinate is the 50 percent grain diameter
  • the grain diameter on the abscissa corresponding to 90% of the total number of grains measured on the ordinate is the 90 percent grain diameter.
  • the 50 percent grain diameter and 90 percent grain diameter measured as described above are set forth in Tables 1 and 2.
  • the figure in parentheses in the 90 percent grain diameter column indicates the ratio of the 90 percent grain diameter to the 50 percent grain diameter.
  • the alumina-based sintered material of Comparative Example 3 which had a 50 percent grain diameter falling within the desired range but had a 90 percent grain diameter of more than three times the 50 percent grain diameter, exhibited a relatively reduced strength due to the occurrence of abnormally grown grains.
  • the composition, the 50 percent grain diameter of the cumulative grain size distribution, the ratio of the 90 percent grain diameter to the 50 percent grain diameter, etc. are specified in accordance with the first aspect of the present invention, an alumina-based sintered material having excellent grindability, high density, high strength, and which is free of color unevenness and fluctuations in density can be obtained.
  • an alumina-based sintered material having even better grindability and high strength can be obtained.
  • the present invention can provide a sintered product having, in combination very excellent grindability and high strength as defined in the fourth aspect of the present invention.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Compositions Of Oxide Ceramics (AREA)
EP97310527A 1996-12-26 1997-12-23 Alumina-based sintered material Expired - Lifetime EP0850897B1 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP35872296 1996-12-26
JP35872296 1996-12-26
JP358722/96 1996-12-26
JP35010597 1997-12-03
JP9350105A JP3035582B2 (ja) 1996-12-26 1997-12-03 アルミナ質焼結体
JP350105/97 1997-12-03

Publications (2)

Publication Number Publication Date
EP0850897A1 EP0850897A1 (en) 1998-07-01
EP0850897B1 true EP0850897B1 (en) 2000-09-27

Family

ID=26579121

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97310527A Expired - Lifetime EP0850897B1 (en) 1996-12-26 1997-12-23 Alumina-based sintered material

Country Status (4)

Country Link
US (1) US6159885A (ja)
EP (1) EP0850897B1 (ja)
JP (1) JP3035582B2 (ja)
DE (1) DE69703197T2 (ja)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3783521B2 (ja) * 2000-04-20 2006-06-07 株式会社村田製作所 熱処理用物品及びその製造方法
EP1547055B1 (en) * 2002-09-30 2007-03-21 Polymeric Converting LLC Color changing tape, label, card and game intermediates
US7858547B2 (en) * 2003-11-12 2010-12-28 Federal-Mogul World Wide, Inc. Ceramic with improved high temperature electrical properties for use as a spark plug insulator
JP4889223B2 (ja) * 2004-02-23 2012-03-07 京セラ株式会社 酸化アルミニウム質焼結体とこれを用いた半導体製造装置用部材並びに液晶製造装置用部材
JP4959113B2 (ja) * 2004-02-25 2012-06-20 京セラ株式会社 アルミナ質焼結体
US7135426B2 (en) * 2004-05-25 2006-11-14 Applied Materials, Inc. Erosion resistant process chamber components
US8614542B2 (en) * 2006-12-18 2013-12-24 Federal-Mogul Ignition Company Alumina ceramic for spark plug insulator
EP2482397B1 (en) * 2009-09-25 2018-11-07 Ngk Spark Plug Co., Ltd. Spark plug and method for manufacturing spark plug
TWI537231B (zh) * 2010-07-12 2016-06-11 康寧公司 高靜態疲勞的氧化鋁隔離管
US10421681B2 (en) 2010-07-12 2019-09-24 Corning Incorporated Alumina isopipes for use with tin-containing glasses
MY166938A (en) 2011-03-11 2018-07-25 Saint Gobain Ceramics Refractory object, glass overflow forming block, and process for glass object manufacture
CN108689591A (zh) 2011-03-30 2018-10-23 圣戈本陶瓷及塑料股份有限公司 耐火物体、玻璃溢流形成块、以及形成和使用该耐火物体的方法
US9216928B2 (en) 2011-04-13 2015-12-22 Saint-Gobain Ceramics & Plastics, Inc. Refractory object including beta alumina and processes of making and using the same
TWI492915B (zh) 2012-01-11 2015-07-21 Saint Gobain Ceramics 耐火物件及使用耐火物件形成玻璃板之方法
WO2016138111A1 (en) 2015-02-24 2016-09-01 Saint-Gobain Ceramics & Plastics, Inc. Refractory article and method of making
JP6636307B2 (ja) * 2015-11-27 2020-01-29 株式会社ニッカトー 高温特性及び耐食性に優れたアルミナ焼結体
WO2018079666A1 (ja) * 2016-10-27 2018-05-03 京セラ株式会社 放熱部材およびこれを用いた電子装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53120176A (en) * 1977-03-29 1978-10-20 Ngk Spark Plug Co Method of producing ic board
JPS6022671B2 (ja) * 1978-06-19 1985-06-03 日本特殊陶業株式会社 高強度高アルミナ磁器の製造法
JPS61183163A (ja) * 1985-02-08 1986-08-15 日本特殊陶業株式会社 アルミナ磁器組成物
JPH04293290A (ja) * 1991-03-20 1992-10-16 Kyocera Corp 平滑セラミック基板およびその製造方法
EP0564982A3 (en) * 1992-04-04 1995-09-13 Hoechst Ceram Tec Ag Ceramic alumina body with high metallization adherence
US6083451A (en) * 1995-04-18 2000-07-04 Applied Materials, Inc. Method of producing a polycrystalline alumina ceramic which is resistant to a fluorine-comprising plasma
JPH0952758A (ja) * 1995-08-10 1997-02-25 Nippon Steel Corp アルミナセラミックス及びその製造方法
JPH1072249A (ja) * 1996-05-23 1998-03-17 Ngk Spark Plug Co Ltd アルミナ系セラミック焼結体及びアルミナ系セラミック部品

Also Published As

Publication number Publication date
DE69703197T2 (de) 2001-02-01
EP0850897A1 (en) 1998-07-01
US6159885A (en) 2000-12-12
JP3035582B2 (ja) 2000-04-24
JPH10236866A (ja) 1998-09-08
DE69703197D1 (de) 2000-11-02

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