EP0844665A2 - Halbleiterscheibengrosse Verpackung - Google Patents

Halbleiterscheibengrosse Verpackung Download PDF

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Publication number
EP0844665A2
EP0844665A2 EP97120173A EP97120173A EP0844665A2 EP 0844665 A2 EP0844665 A2 EP 0844665A2 EP 97120173 A EP97120173 A EP 97120173A EP 97120173 A EP97120173 A EP 97120173A EP 0844665 A2 EP0844665 A2 EP 0844665A2
Authority
EP
European Patent Office
Prior art keywords
integrated circuit
lead
lead frame
opposing
connector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP97120173A
Other languages
English (en)
French (fr)
Other versions
EP0844665A3 (de
Inventor
Walter H. Schroen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of EP0844665A2 publication Critical patent/EP0844665A2/de
Publication of EP0844665A3 publication Critical patent/EP0844665A3/de
Withdrawn legal-status Critical Current

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Definitions

  • This invention relates generally to the field of integrated circuit packaging, and more particularly to wafer level packaging of integrated circuits.
  • circuit chips The processes involved in the fabrication and packaging of circuit chips are well known. Typically, an array of identical circuits is patterned onto a circular semiconductor wafer using well known micro-lithographic techniques. The wafer is then sawed into many rectangular pieces to separate the individual circuits from one another, so that each circuit occupies its own circuit chip.
  • the chips are individually mounted onto lead frames, where they are held in place by means of an epoxy.
  • a wire bonder is then used to establish electrical connections between the die pads on the chip and the respective leads of the lead frame.
  • the chip and lead frame are placed into mold equipment, where plastic is transfer molded to surround the assembly.
  • This plastic packaging serves to protect the chip from exposure to light, moisture and contamination, which could damage the circuit components, as well as making the entire assembly mechanically rigid and durable.
  • the molded plastic is then cured by means of heating in an oven for several hours.
  • the leads of the lead frame are then trimmed and formed into the desired shape.
  • the leads may be formed into a "gull wing" shape for surface-mounted chips.
  • various electrical and mechanical tests are performed to determine whether the chip will function for its intended purpose.
  • circuit chip industry is very cost-competitive. It is therefore desirable to shorten, streamline or eliminate packaging steps to shorten production time and reduce production costs for the chips.
  • the present invention provides a method of packaging integrated circuits at the wafer level. Additionally, the present invention provides a chip size package.
  • an integrated circuit package may include an integrated circuit chip.
  • a lead frame may be opposite the circuit side of the integrated circuit chip.
  • the lead frame may include at least one lead electrically coupled to the integrated circuit by a connector.
  • the lead may be within a periphery of the integrated circuit chip.
  • An encapsulate may cover the integrated circuit, the connector and a portion of the lead frame. A remaining portion of the lead frame may be exposed from the encapsulant.
  • an integrated circuit may be packaged at the wafer level.
  • a sheet of lead frames may be opposite a plurality of integrated circuit chips.
  • the encapsulate may cover the integrated circuits and a portion of each lead frame.
  • Each encapsulated integrated circuit and opposing lead frame may form a discrete integrated circuit package.
  • Important technical advantages of the present invention include providing chip size packages for integrated circuits.
  • a lead frame, connectors and encapsulant do not extend beyond a periphery of an opposing integrated circuit chip. Accordingly, package volume is minimized and the chip may be used in devices requiring extremely small chips.
  • Another technical advantage of the present invention includes providing a method of packaging integrated circuit chips at the wafer level.
  • integrated circuit chips may be packaged concurrently while still part of a wafer.
  • the packaging process may be carried out as a continuation of the wafer fabrication process. This serves to streamline and shorten the assembly and packaging process.
  • FIGURES 1A-E illustrate a method of packaging integrated circuits at the wafer level. Wafer level packaging may be carried out as a continuation of the wafer fabrication process to streamline and shorten the packaging process.
  • FIGURE 1A shows a patterned wafer 10.
  • the patterned wafer 10 may comprise a substrate 12 and a plurality of integrated circuits 14 formed in a surface 16 of the substrate 12.
  • the substrate 12 may include one or more layers of semiconductor material.
  • the substrate 12 may include an epitaxial layer grown on a wafer.
  • the integrated circuits 14 may each include a plurality of bond pads 18 electrically coupled to the integrated circuit 14. As described in more detail below, the bond pads 18 provide electrical contacts through which the integrated circuit 14 may be connected to external components. In one embodiment, the bond pads 18 may be disposed along a center line 20 of the integrated circuit 14. In this embodiment, the number and configuration of the bond pads 18 may vary depending on the application. For example, the integrated circuit 14 may include one or more staggered or parallel rows of bond pads 18. It will be understood that the bond pads 18 may be disposed elsewhere on the integrated circuit 14 within the scope of the present invention.
  • Each integrated circuit 14 and surrounding section of the substrate 12 may define a discrete integrated circuit chip 22.
  • the integrated circuit chips 22 may each be packaged to provide connections to external components and to provide protection from environmental factors. Typically, patterned wafers are sawed into individual integrated circuit chips for packaging. The integrated circuit chips are each separately mounted and coupled to a lead frame, and then encapsulated with that lead frame. A problem with this method is that the separate packaging of integrated circuit chips is both time consuming and costly. Additionally, it prevents packaging from being carried out as a continuation of the wafer fabrication process.
  • the present invention solves this problem by providing a method of packaging integrated circuit chips at the wafer level.
  • the integrated circuit chips 22 are packaged concurrently while still part of the patterned wafer 10. Accordingly, the packaging process may be carried out as a continuation of the wafer fabrication process. This serves to streamline and shorten the packaging process.
  • the method of the present invention produces a chip size package. As a result, the packaged integrated circuit chips 22 may be used in applications which require miniaturized devices consuming an area not larger than individual chips.
  • a polymide coating 24 may be applied to the surface 16 of the substrate 12.
  • the polymide coating 24 may provide better adhesion for encapsulating material that will cover and protect the integrated circuits 14.
  • Conventional pattern etching techniques may be used to prevent the polymide coating 24 from covering the bonding pads 18. It will be understood that other or no coatings may be used within the scope of the present invention.
  • a sheet of lead frames 26 may be disposed opposite the surface 16 of the substrate 12.
  • the sheet of lead frames 26 may include a plurality of individual lead frames 28 that each provide electrical connections for one of the integrated circuit chips 22.
  • the sheet of lead frames 26 may be a unitary sheet of material.
  • the material of the lead frames 28 may be Alloy 42 locally plated with silver. It will be understood that a variety of other materials may be used for the lead frames 28 within the scope of the present invention.
  • the lead frames 28 may each include a plurality of leads 30 within a periphery 32 of an opposing integrated circuit chip 22. Accordingly, the leads 30 do not overlap other integrated circuit chips 22. As described in more detail below, the leads 30 may be electrically coupled to the bonding pads 18 and extend from the encapsulant for connection to external components.
  • the leads 30 may be in a dual level configuration. In this configuration, as shown by FIGURE 1B, an upper set of leads 30 may be disposed on a lower set of leads 30. Accordingly, the dual level configuration provides a greater number of leads 30 for the integrated circuit chips 22.
  • the lead frames 28 may also include an elongated strip (not shown) connecting one or more leads 30. The strip may be employed as a ground or supply voltage conductor. It will be understood that other lead frame 28 configurations may be used within the scope of the present invention.
  • the leads 30 may each have a distal end 34 for connection to an external device.
  • the distal ends 34 are in substantially one plane and may extend the periphery 32 of the integrated circuit chip 22.
  • the lead frames 28 may be cut from the lead frame sheet 26 by the post packaging sawing process used to cut the patterned wafer 10 into individual integrated circuit chips 22.
  • each distal end 34 may be substantially parallel to the integrated circuit chip 22.
  • the distal end 34 may include palladium.
  • the palladium pre-plating allows the distal end 34 to be more easily soldered to a printed circuit board and the like. It will be understood that the distal end 34 may include other or no pre-plating within the scope of the present invention.
  • the distal end 34 may be solder pre-plated.
  • the lead frames 28 may each be mounted to an opposing integrated circuit chip 22.
  • an adhesive tape 40 may be used to mount the lead frames 28 to the opposing integrated circuit chip 22.
  • the adhesive tape 40 is non-conducting to prevent electrical shorting.
  • the adhesive tape 40 may be tacky on both sides to adhere to the polymide layer 24 and to the leads 30 of the lead frame 28.
  • the adhesive tape 40 may be attached to the lead frame 28 in a variety of ways and a variety of thicknesses. Such methods are well known and will not be further described.
  • the upper set of leads 30 may be mounted to the lower set of leads 30 by the adhesive tape 40.
  • adhesive tape 40 has been discussed for mounting the leads 30, it will be understood that the lead frames 28 may be otherwise mounted to the opposing integrated circuit chip 22.
  • the upper leads may be otherwise mounted to the lower leads.
  • the leads 30 and/or lead frame 28 may be mechanically coupled by an epoxy or the like.
  • a connector 42 may electrically couple the leads 30 to the bonding pads 18 of the opposing integrated circuit chip 22.
  • the connectors 42 may each comprise a wire bonded to a lead 30 and to a bonding pad 18.
  • the wire may be any thin, durable conductive metal.
  • the wire may be gold wire having a diameter of about 1.0 to 1.2 mils.
  • the wire may be wedge, ball or similarly bonded to the leads 30 and the bonding pads 18.
  • the wire bonding process may use trapezoidal looping which results in a low looping profile.
  • the connector 42 may be other than a wire within the scope of the present invention.
  • the connector 42 may be a solder or a gold ball, or alternately wire and ball.
  • the integrated circuit chips 22, connectors 42 and at least a portion of the lead frames 28 may be encapsulated.
  • the encapsulant 44 serves to protect the integrated circuit chips 22 from exposure to environmental factors that could damage the circuit components.
  • the encapsulant 44 also serves to make the entire assembly mechanically rigid and durable.
  • Each encapsulated integrated circuit, connectors and opposing lead frame may form a discrete integrated circuit package 50.
  • the encapsulant 44 may be applied to only the side of the wafer 10 including the integrated circuits 14, connectors 42 and lead frames 28.
  • the encapsulant 44 may be applied as a liquid by a syringe. In this embodiment, the liquid may be at first low viscosity and quickly solidify. It will be understood that the encapsulant 44 may be otherwise applied within the scope of the present invention.
  • the encapsulant 44 may be applied using conventional transfer molding or 3P molding technology, a mold cavity as large as the wafer 10 or the like. It will be further understood that both sides of the wafer 10 may be encapsulated within the scope of the present invention.
  • each lead 30 may remain exposed after encapsulation.
  • the exposed portion of the leads 30 provide connections for the integrated circuit chip 22 to external components, such as a printed circuit board and the like.
  • the exposed portion of the leads 30 may be the distal ends 34.
  • the distal ends 34 may be pre-plating with palladium to be more easily soldered to a printed circuit board or the like.
  • the distal ends 34 may be left exposed by regulating the volume of encapsulant 44 applied to the wafer 10.
  • the volume of the encapsulant 44 may be the amount necessary to fill up to an underside 46 of the distal ends 34.
  • the distal ends 34 may be substantially parallel to the integrated circuit chip 22 to allow the encapsulant 44 to fill up to the underside 46 of the distal ends 34 without covering an outer side 46 of the distal ends 34.
  • the substantially parallel distal ends 34 will also allow the packaged chip to sit flat against a printed circuit board or the like.
  • the encapsulated wafer may be sawed to detach the individual integrated circuit packages 50 from one another.
  • the integrated circuit packages 50 may be complete and ready for testing, stenciling and shipment to customers. If desired, however, ends 52 of the integrated circuit packages 50 and/or the back side 54 of the substrate 12 may be first sealed.
  • the present invention provides a method of packaging integrated circuits at the wafer level.
  • the wafer level packaging may be carried out as a continuation of the wafer fabrication process to streamline and shorten the packaging process.
  • each integrated circuit package 50 may be a chip sized package. Accordingly, neither the lead frame 28, connectors 42 or encapsulant 44 extend beyond the periphery 32 of the integrated circuit chip 22. As a result, package volume is minimized and the chip may be used in devices requiring extremely small chips.
EP97120173A 1996-11-21 1997-11-18 Halbleiterscheibengrosse Verpackung Withdrawn EP0844665A3 (de)

Applications Claiming Priority (2)

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US3146496P 1996-11-21 1996-11-21
US31464P 1996-11-21

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EP0844665A3 EP0844665A3 (de) 1999-10-27

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JP (1) JPH10163405A (de)
KR (1) KR19980042617A (de)
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TW (1) TW386272B (de)

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TW386272B (en) 2000-04-01
JPH10163405A (ja) 1998-06-19
EP0844665A3 (de) 1999-10-27
KR19980042617A (ko) 1998-08-17
SG74604A1 (en) 2000-08-22

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