EP0798472B1 - Fluidbetätigter Drehantrieb - Google Patents

Fluidbetätigter Drehantrieb Download PDF

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Publication number
EP0798472B1
EP0798472B1 EP97103201A EP97103201A EP0798472B1 EP 0798472 B1 EP0798472 B1 EP 0798472B1 EP 97103201 A EP97103201 A EP 97103201A EP 97103201 A EP97103201 A EP 97103201A EP 0798472 B1 EP0798472 B1 EP 0798472B1
Authority
EP
European Patent Office
Prior art keywords
housing
rotary drive
adjusting ring
adjusting
drive according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP97103201A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0798472A1 (de
Inventor
Kurt Dr. Stoll
Gerhard Thorwart
Albrecht Wagner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Festo SE and Co KG
Original Assignee
Festo SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Festo SE and Co KG filed Critical Festo SE and Co KG
Publication of EP0798472A1 publication Critical patent/EP0798472A1/de
Application granted granted Critical
Publication of EP0798472B1 publication Critical patent/EP0798472B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20—Other details, e.g. assembly with regulating devices
    • F15B15/28—Means for indicating the position, e.g. end of stroke
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20—Other details, e.g. assembly with regulating devices
    • F15B15/28—Means for indicating the position, e.g. end of stroke
    • F15B15/2892—Means for indicating the position, e.g. end of stroke characterised by the attachment means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/08—Characterised by the construction of the motor unit
    • F15B15/12—Characterised by the construction of the motor unit of the oscillating-vane or curved-cylinder type

Definitions

  • the invention relates to a fluid-operated rotary drive, with a drive device, the one to a reciprocating Revolving driven output shaft and has a housing, on one axial side of a position detection device is arranged, the at least one rotatably connected to the output shaft during the rotary movement the output shaft on an arc-shaped trajectory actuator moved about a pivot axis and two radially outside next to the movement path of the actuator arranged along at least a portion of this trajectory can be positioned in the desired detection positions Has holder for sensors responsive to the actuator.
  • a fluid-operated rotary drive of this type works, for example from the tested Japanese utility model JP 5-26327.
  • the rotary drive is designed as a swivel wing drive and has a drive device through which the output shaft are driven to an oscillating rotary motion can.
  • To detect certain angular positions of the output shaft, especially the two end positions is one Position detection device provided, the one with the output shaft rotatably connected actuator in the form a permanent magnet.
  • the actuator leads a pivotal movement along an arcuate trajectory through, in their neighborhood through mediation Bracket sensors are attached when approaching respond to the actuator and generate a signal. For variable detection of different angles of rotation can hold the sensors in the desired detection positions positioned along the path of movement of the actuator become.
  • the holders of the sensors slidably arranged on a guide ring fixed to the housing.
  • the attachment is relatively unstable and it can move canting can occur which impair handling.
  • the object of the present invention is a fluid-operated To create rotary actuator of the type mentioned, in which the holders for the sensors are stably arranged and still can be easily adjusted.
  • each holder is fixed is arranged on its own setting ring assigned to it, the two setting rings being axially consecutive and superimposed coaxially to the pivot axis of the actuator are arranged that the holder starting from assigned adjusting ring in the housing of the drive device project axially opposite direction, the top adjustment ring one along a section has its circumferential recess through which the holder arranged on the lower adjusting ring underneath reaches through, and that the two adjustment rings for adjustment the detection positions relative to each other and relative to the housing of the drive device with respect to the pivot axis of the actuator rotatable and in the settings made are releasably fixed to the housing.
  • the two adjusting rings are in direct axial contact with one another, so that a particularly safe mutual support and leadership is guaranteed.
  • the upper adjusting ring is preferred with an axially projecting annular bearing collar directly on the cylindrical bearing section fixed to the housing pivoted, the ring-shaped bearing collar in turn as Pivot bearing section for the lower setting ring is used by the ring opening of the lower adjusting ring is radially positive intervenes.
  • the two setting rings are expediently via a locking element can be fixed together on the drive housing.
  • a locking element can be fixed together on the drive housing.
  • both have an arcuate adjustment slot, with a corresponding relative rotational position one more or less large coverage of the two adjustment slots in Slot longitudinal direction results and the locking element both Adjustment slots axially penetrated in the coverage area.
  • both adjusting rings clamped non-rotatably with the housing and the respective Entry position is saved.
  • With the locking element released can both adjustment rings relative to each other and relative to Housing of the drive device is rotated and positioned, with a suitable angular assignment and length Adequate adjustment of the adjustment slots Adjustment margin is guaranteed.
  • the lower adjustment ring has an additional one Adjustment slot, which is quite of a section of the corresponding longer trained first adjustment slot of the lower adjustment ring can be formed, there is the possibility the lower adjusting ring and the rigid on this fixed holder independent of the upper adjusting ring to fix. It is advisable to take it in a dissolved state both locking elements first a rotary setting of the lower adjusting ring. The setting made is then by means of the further assigned to the further adjustment slot Locking element fixed. Because of the still solved first Locking element can now still be influenced of the lower adjusting ring position the upper adjusting ring and then also by actuating the first locking element lock.
  • the holders for the sensors are expediently used as slide-in holders trained the corresponding plug-in assembly enable trained sensors, especially in the axial direction.
  • the fluid-operated rotary drive is also intended in particular to be miniaturized Construction can be carried out.
  • the angle of rotation of the output shaft invariable by appropriate Fixed stops from the factory to be specified in the work chamber are arranged.
  • a rotation angle setting direction for variable specification of the angle of rotation of the output shaft be provided.
  • a universal use of the position detection device to enable it may be appropriate be, which is preferably formed by a permanent magnet piece Actuator on a radially inside of the two holders arranged carrier to fix the particular one of an end portion of the output shaft formed shaft portion can be set in different relative angles of rotation is.
  • the carrier can mediate a polygonal connector gradually displaceable on the shaft section be definable.
  • the example is the fluid-operated rotary drive is a pneumatically operated rotary drive, which as Swivel wing drive is executed. It has a mounting plate 1 for external attachment, to the over its housing 2 a drive device 3 is attached.
  • the basic one The structure of this drive device 3 can be one correspond as it is known from DE 39 41 255 C2. in the essentially has the drive device 3 inside the Housing 2 via a working chamber 4 into which a chamber divider 5 is firmly used, in cooperation with an example designed as a swivel wing 7 drive member 6, the working chamber 4 divided fluid-tight into two pressurizing spaces 8, 8 '.
  • the swivel wing 7 is rotatably connected via a holding part 12 an output shaft 13 connected to the working chamber 4 coaxially interspersed and at the front of the drive device 3 protrudes with an output section 11.
  • the swivel wing 7 is over the holding section 12 releasably attached to the output shaft 13 and there is a positively achieved by a toothing or the like Connection before.
  • a one-piece design would also be conceivable, especially with small sizes.
  • An admission channel opens into each admission space 8, 8 ' 16, 16 ', which is led to the outer surface of the housing 2, where there are pressure medium lines for the supply and discharge of the actuating fluid get connected.
  • the drive member 6 can reciprocate outgoing pivoting movement according to double arrow 17 are caused, resulting in a reciprocating rotary motion of the output shaft 13 results about its longitudinal axis 18.
  • the chamber divider 5 preferably acts simultaneously as a stop device 22, the maximum angle of rotation of the output shaft 13 specifies by limiting the swivel path of the drive member 6.
  • the stop device 22 has the two Side surfaces of the swivel wing 7 facing stop surfaces 23, 23 ', which are positioned so that a maximum Rotation angle of 180 ° is possible.
  • the stop device 22 is expediently releasable into the Working chamber 4 used, so that if necessary by a other anchor device can be replaced, the one deviating angle of rotation.
  • dash-dotted lines indicate an extended anchor device, when using only a rotation or swivel angle of 90 ° is possible. Allow the indicated fixing means 24 each a positive anchorage of the anchor device 22, 22 'in the working chamber 4.
  • the manufacturer can thus build on a basic design Rotary drives with different maximum rotation angles for Make available, with only equipment with different stop devices 22, 22 'required is.
  • Stop device 22, 22 can an external angle of rotation adjustment device arranged outside the working chamber 81 for the variable specification of the maximum possible rotation angle of the output shaft 13 may be provided which will be discussed later.
  • the drive device 3 On the rear side axially opposite the output section 11 the drive device 3 is a position detection device 25 arranged. It comprises a carrier 27 which is non-rotatable one from the rear of the housing 2 of the drive device 3 protruding shaft section 26 is fixed non-rotatably, which is connected to the output shaft 13. Is preferred the shaft section 26 from the axially opposite of the output section 11 End portion of the output shaft 13 itself formed.
  • the carrier 27 makes the rotational movement of the output shaft 13. With a radial distance to its longitudinal axis, which at the same time the Forms axis of rotation 28, he carries in the embodiment of an actuator 32 formed by a permanent magnet piece extends only over a small part of the scope of the Axis of rotation 28 and is, for example, block-like. With a rotational movement of the output shaft 13, it is along a circular arc-shaped trajectory 33 so that it pivots with respect to the longitudinal axis 28 which here forms a pivot axis 34.
  • the pivot angle of the actuator 32 corresponds to that Angle of rotation of the output shaft 13 and thus amounts to shown embodiment to 180 °.
  • the position detection device 25 also has two radially outside next to the movement path 33 of the actuator 32 arranged holder 35, 36, each with a sensor 37 is releasably set.
  • the sensors 37 respond to this Actuator 32 when this is a substantially radial occupies an adjacent position.
  • the actuation is contactless.
  • the sensors 37 are So-called reed switches, in which the magnetic field of the actuator 32 contacts will be closed making the levy cause a sensor signal.
  • the two holders 35, 36 are arranged so that they are the carrier Flank radially outside. It is, for example elongated components aligned parallel to the pivot axis 34 are. Each holder 35, 36 is firmly attached to it own adjusting ring 38, 39 arranged, with which it expediently forms a one-piece unit.
  • the two adjusting rings 38, 39 are designed like disks, thus extend in one with respect to its longitudinal axis rectangular expansion plane. Your outside diameter is correct preferably match. They are axially consecutive and lying one above the other in a coaxial arrangement with reference to the pivot axis 34 on the rear end face 42 of the housing 2 arranged. Immediately on the surface of this face 42 is flat the one lower adjusting ring 38 on which in turn, preferably with direct contact, the other upper adjusting ring 39 rests.
  • a respective holder 35, 36 is on the drive device 3 pioneering axial side of each assigned Adjustment ring 38, 39 arranged such that it starts from this associated setting ring 38, 39 axially from the housing 2 sticking out.
  • the carrier 27 sits between these two holders 35, 36, the length of the holder preferably at least approximately corresponds to the height of the carrier 27.
  • the upper has Adjustment ring 39 over a portion of his Circumferential recess 43.
  • the arc length of this recess 43 is indicated in FIG. 3 by double arrow 44.
  • the Recess 43 is open to the radial outside, being has a relatively large radial depth, so that the relevant setting ring 39 only in its area narrow ring section 45 in the radially inner region.
  • the holder 35 of the lower adjusting ring 38 can now through the recess brought into angular correspondence 43 of the upper adjusting ring 39 upwards into the neighboring area the movement path 33 of the actuator 32 protrude.
  • Both adjusting rings 38, 39 are rotatably supported with respect to the housing 2.
  • the rotary adjustment of the lower adjusting ring 38 takes place via the upper adjusting ring 39. It sits concentrically with its ring opening 52 on the bearing collar 51 of the upper adjusting ring 39, the one with its bearing collar 51 practically in the radial space between the housing-fixed bearing section 46 and the inner surface of the lower adjusting ring 38 engages.
  • the dimensions are such that the lower adjusting ring 38 centered radially by the upper adjusting ring 39, simultaneously however, is rotatable with respect to this.
  • Each holder 35, 36 can thus in one desired detection position along the movement path 33 of the actuator 32 to be positioned by the associated sensor to detect when the actuator 32nd reached the position in question.
  • the settings can be fixed in a detachable manner fix the two setting rings 38, 39 detachably to the housing.
  • each setting ring 38, 39 has an axial continuous arcuate adjustment slot 53, 54, the center of curvature in the ring center and thus on the swivel axis 34 lies. They have an identical curvature and are radial arranged at the same distance from the pivot axis 34. For example, they also have the same length in Slot longitudinal direction.
  • the adjustment slots 53, 54 are arranged so that they are cover at least partially in the longitudinal direction of the slot.
  • the degree of coverage can be influenced.
  • the degree of coverage 100% here are the two adjustment slots 53, 54 directly axially one above the other.
  • the degree of coverage is relatively small and the coverage area 55 in which the two adjustment slots 53, 54 with associated, in overlap end portions pointing in opposite circumferential directions, relatively short.
  • Both adjustment slots 53, 54 are in their coverage area 55 penetrated by a locking element 56, the housing side is fixed. It is, for example, from a screw formed with its threaded shaft 57 in one on the end face 42 of the housing 2 screwed threaded hole which is not shown in the drawing. With its shaft 57 passes through both adjustment slots 53, 54 and is supported with her head 58, preferably with the interposition a washer 62 on the one facing away from the housing 2 Axial side 63 of the upper adjusting ring 39. Here the head 58 or the washer 62 works against the both laterally delimit the upper adjustment slot 54 round edges.
  • both adjusting rings 38, 39 can be relative to each other and relative to the housing 2 completely independently of each other be twisted.
  • This further adjustment slot 64 is otherwise arranged in such a way that it is at least partially below the recess 43 of the upper adjusting ring 39. According to the respective relative rotational position of the two adjusting rings 38, 39 comes thus the further adjustment slot 64 with a more or less large length section 65 of its slot length in the area the recess 43 to lie.
  • the further adjustment slot 64 is fully accessible because its entire length is in the region of the recess 43, which is according to the example extends over an arc length of about 200 °. in the In the case of the setting according to FIG. 5, the accessible length section is 65, on the other hand, greatly shortened.
  • Another locking element 66 fixed on the housing side provided that in the area of the always accessible length section 65 through the further adjustment slot 64 of the lower one Adjustment ring 38 passes through. Its structure corresponds to that of the above-mentioned first locking element 56, so that no further explanations are necessary.
  • dot-dash lines at 32 ' indicate that the Relative position between the actuator always maintained during operation 32 and the output shaft 13 also vary if necessary leaves. The requirement for this can come from the design of the stop devices 22, 22 'used or from the location of the angular placement of this anchor device 22, 22 'inside the working chamber 4.
  • the actuator 27 carrying the actuator 32 in different relative rotational angle positions on the shaft section 26 definable.
  • the carrier 27 is preferably over a polygonal connector 67 gradually angular releasably fixed to the shaft section 26.
  • the shaft section 26 can be polygonal on the outside be profiled, for example in the manner of a square, wherein the carrier 27 has a complementarily contoured receptacle 68, with which he on the profiled shaft section 26 in different rotational angle positions, for example at 90 ° intervals, is attachable.
  • the attachment of the carrier 27 the shaft section 26 can take place, for example, that a holding screw engaging with its head on the support 27 69 is provided which coaxially penetrates the carrier 27 and screwed into a threaded bore of the shaft section 26 is.
  • the carrier 27 can be a component which is essentially cylindrical on the outside be that over a closed cylindrical side wall 72 and then on the side facing away from the housing 2 Axial side, has a radially extending end wall 73, which is penetrated by the retaining screw 69.
  • the actuator 32 is fixed in a recess 71 of the carrier 27, the rest, as well as the adjusting rings 38, 39 and their Holders 35, 36, preferably made of magnetically non-conductive material consists, for example, of plastic material or how here made of aluminum material.
  • the holder 35, 36 are designed, for example, so that they as Universal holders can be used on which there are commercially available Have sensors 37 attached. For example, they have an axially aligned receptacle 74, which on the housing 2 opposite side has an insertion opening 75 through which the correspondingly designed sensor 37 axially according to arrow 76 can be inserted. When the position of use has been reached, use a provided on the sensor 37 clamping screw 77 a The insertion position is secured. It is accessible Clamping screw 77 through a longitudinal slot 78 in the radial outward facing long side of a respective holder 35, 36, which preferably extends over the entire holding length and merges into the insertion opening 75 at the end.
  • the receptacle 74 on the upper adjusting ring 39 arranged holder 36 to the lower adjusting ring 38 open towards.
  • the assigned sensor can therefore be so far in Insert the holder 36 until it is on the lower adjusting ring 38 comes to the plant.
  • the relevant opening 79 can in this case from a suitable recess in the upper adjusting ring 39 be educated.
  • the rotary drive corresponds to the drive device 3 and the position detection devices 25 under construction of the rotary drive of Figures 1 to 5. Corresponding to each other Components are therefore provided with identical reference symbols. However, this rotary drive is compared to the previous one described embodiment additionally with a rotation angle adjusting devices 81 equipped with a variable specification of the angle of rotation tapped on the output shaft 13 enables and the axially between the drive device 3 and the position detection device 25 is interposed.
  • the structure of the rotation angle adjusting device 81 can preferably be basically correspond to the one in DE 39 43 716 C2 is described.
  • the rotation angle adjuster 81 of the embodiment has a swivel stop 82, which instead of the carrier 27 on the protruding from the housing 2 of the drive device 3 Shaft section 26 is rotatably mounted.
  • FIG. 7 shows the swivel stop according to the example 82 via a holding section 83, with which he rotatably on the Shaft section 26 is placed.
  • the holding section 83 is slotted and thus has two clamping arms 84, 84 ', the under Mediation of a clamping screw 85 can be clamped against each other are releasably clamped around the pivot stop 82 on the shaft section 26 to be determined.
  • the pivot stop 82 also has a reference the pivot axis 34 projecting radially from the holding part 83 wing-like swivel arm 86, the free end of a stop 87, which forms during the rotational movement of the output shaft 13 pivoted along an arcuate path 88 becomes.
  • this trajectory 88 there are at least one and preferably two counter stops 89, 89 'arranged along their position the trajectory 88 is variably adjustable.
  • the support disk 90 has a central recess 91 which reaches over the bearing section 46.
  • the one to the rear Front 42 of the housing 2 attached support plate 90 is detachably fixed to the housing 2 by means of two fastening screws 92, only one of these fastening screws in FIG. 6 92 is shown.
  • the support disk 90 is diametrically opposed to two provided with circular arc-shaped guide slots 93 which the counter stops 89, 89 'arranged longitudinally adjustable are.
  • a fixing screw 94 can be used respective counter-stop 89, 89 'at any point along the assigned assigned guide slot 93 releasably.
  • a counter stop 89, 89 ' is arranged to be adjustable, can be the swivel arm 86 according to their setting specify the allowed swivel angle. Runs in the end positions the swivel arm 86 with its stop portion 87 alternately the two counter stops 89, 89 '. According to the setting the counter stops 89, 89 'can be done in this way the angle of rotation which can be tapped at the output shaft 13 is very convenient adjust because the swivel stop 82 is fixed to the output shaft 13 is connected.
  • the pivot stop 82 and the counter stops 89 are of one cup-like cover 95 covered with the open Side is attached to the support plate 90. Your attachment is carried out using suitable fastening screws, which are in Figure 6 are only indicated by dash-dotted lines at 103. She are from the axial side opposite the housing 2 passed through the cover 95 and can be actuate this axial side.
  • the cover 95 has one hollow cylindrical peripheral wall 96 and one thereon on the housing 2 opposite side molded bottom wall 97, the delimits a receiving space 98 together with the peripheral wall 96, in which the swivel stop 82 and the counter stops 89 are accommodated.
  • the Bottom wall 97 On its opposite axial side of the housing 2 is the Bottom wall 97 centrally with one of the bearing section 46 corresponding another bearing section 99 provided.
  • the Bottom wall 97 on its axially opposite the drive device 3 Page a design that essentially resembles that the rear end face 42 of the housing 2 of the drive device 3 corresponds.
  • the position detection device 25 it is possible to get to the Outside of the bottom wall 97 the position detection device 25 to be installed in a manner as in the case of the embodiment 1 to 5 to the rear end face 42 of the Housing 2 is attached.
  • locking elements 56, 66 used in this Traps are preferably anchored in the cover 95.
  • the carrier 27 with its receptacle 68 is elongated rod-like coupling piece 100 attached, which the Bottom wall 97 through a central opening 101 is penetrated and fixed in the holding recess 102, which the Holding portion 83 penetrates and with the holding portion 83 the shaft section 26 is attached.
  • the coupling piece 100 can in this way simultaneously with the shaft section 26 clamped to the holding part 83 of the swivel stop 82 his.
  • the coupling piece 100 thus practically forms an axial Extension of the shaft section 26.
  • the position detection device 25 optionally without intermediate connection the rotation angle adjusting device 81 according to the figures 1 and 2 or with the interposition of the rotation angle adjustment device 81 according to Figures 6 and 7 on the drive device 3 to be determined.
  • the rotary drive 3 only is operated solely with its drive device 3 or in a combination of the drive device 3 with the Angle of rotation setting device 81 and / or with the position detection device 25.
  • the rotary actuator only settles from the drive device 3 and the rotation angle setting device 81 together, the opening 101 by means of a Be closed the lid to the axial outside of the Bottom wall 97 can be attached (not shown).

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Actuator (AREA)
EP97103201A 1996-03-28 1997-02-27 Fluidbetätigter Drehantrieb Expired - Lifetime EP0798472B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE29605723U DE29605723U1 (de) 1996-03-28 1996-03-28 Fluidbetätigter Drehantrieb
DE29605723U 1996-03-28

Publications (2)

Publication Number Publication Date
EP0798472A1 EP0798472A1 (de) 1997-10-01
EP0798472B1 true EP0798472B1 (de) 2001-08-29

Family

ID=8021804

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97103201A Expired - Lifetime EP0798472B1 (de) 1996-03-28 1997-02-27 Fluidbetätigter Drehantrieb

Country Status (4)

Country Link
US (1) US5732613A (ko)
EP (1) EP0798472B1 (ko)
KR (1) KR100225675B1 (ko)
DE (2) DE29605723U1 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013012774A1 (de) 2013-07-31 2015-02-05 Festo Ag & Co. Kg Schwenkantrieb und Verfahren zur automatisierten Festlegung eines Schaltpunkts
US20230119452A1 (en) * 2021-10-20 2023-04-20 Energy Recovery, Inc. Pressure exchanger inserts

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE20014353U1 (de) 2000-08-19 2000-12-07 Festo Ag & Co Linearantrieb
DE20110965U1 (de) * 2001-07-03 2001-09-06 Festo Ag & Co Arbeitszylinder
DE202006005174U1 (de) * 2006-03-31 2006-06-22 Festo Ag & Co Fluidbetätigter Drehantrieb
JP2013510296A (ja) * 2009-11-04 2013-03-21 グラコ ミネソタ インコーポレーテッド ポンプライン線形位置検出アセンブリ
JP5382591B2 (ja) * 2010-12-21 2014-01-08 Ｓｍｃ株式会社 流体圧シリンダの位置検出装置
WO2013044934A1 (de) * 2011-09-28 2013-04-04 Festo Ag & Co. Kg Fluidbetätigte drehantriebsvorrichtung
JP6085844B2 (ja) * 2015-07-02 2017-03-01 Smc株式会社 位置検出装置付き揺動形アクチュエータ

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US2778338A (en) * 1953-01-27 1957-01-22 Shafer Valve Co Internal fluid shut off for hydraulic motor
US3171332A (en) * 1963-06-04 1965-03-02 Shafer Valve Co Adjustable stop for rotary vane motors
US4492150A (en) * 1983-07-01 1985-01-08 Yates Harlan W Actuator for mechanical apparatus
JP2796372B2 (ja) * 1989-09-20 1998-09-10 株式会社日立製作所 スロツトルセンサ
DE3943716C2 (de) * 1989-12-14 1995-01-05 Festo Kg Fluidbetätigter Schwenkkolbenmotor
DE4031185C2 (de) * 1990-10-01 1995-11-16 Mannesmann Ag Pneumatischer Drehantrieb für die genaue Positionierung eines Kraftabnehmers
DE4041090C2 (de) * 1990-12-21 2001-01-04 Festo Ag & Co Befestigungsvorrichtung für Sensoren
JPH0526327A (ja) * 1991-07-16 1993-02-02 Aichi Mach Ind Co Ltd 無段変速機のトルクカム機構
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US5579800A (en) * 1994-07-05 1996-12-03 Keystone International Holdings Corp. Rotary valve position indicator and method
SE9501187L (sv) * 1995-03-31 1996-06-03 Mecman Ab Rexroth Vridlägesavkännare till ett vriddon
DE29518346U1 (de) * 1995-11-18 1996-01-18 Festo Kg, 73734 Esslingen Fluidbetätigter Drehantrieb

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013012774A1 (de) 2013-07-31 2015-02-05 Festo Ag & Co. Kg Schwenkantrieb und Verfahren zur automatisierten Festlegung eines Schaltpunkts
DE102013012774B4 (de) 2013-07-31 2022-02-17 Festo Se & Co. Kg Schwenkantrieb und Verfahren zur automatisierten Festlegung eines Schaltpunkts
US20230119452A1 (en) * 2021-10-20 2023-04-20 Energy Recovery, Inc. Pressure exchanger inserts
US11959498B2 (en) * 2021-10-20 2024-04-16 Energy Recovery, Inc. Pressure exchanger inserts

Also Published As

Publication number Publication date
EP0798472A1 (de) 1997-10-01
DE59704411D1 (de) 2001-10-04
KR100225675B1 (ko) 1999-12-01
US5732613A (en) 1998-03-31
KR970066115A (ko) 1997-10-13
DE29605723U1 (de) 1996-05-30

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