EP0735322A2 - Procédé et dispositif pour la purification des effluents gazeux nocifs par conversion chimique dans une flamme et sur des surfaces chaudes - Google Patents

Procédé et dispositif pour la purification des effluents gazeux nocifs par conversion chimique dans une flamme et sur des surfaces chaudes Download PDF

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Publication number
EP0735322A2
EP0735322A2 EP96102123A EP96102123A EP0735322A2 EP 0735322 A2 EP0735322 A2 EP 0735322A2 EP 96102123 A EP96102123 A EP 96102123A EP 96102123 A EP96102123 A EP 96102123A EP 0735322 A2 EP0735322 A2 EP 0735322A2
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EP
European Patent Office
Prior art keywords
combustion chamber
flame
permeable
burner
fuel gas
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Application number
EP96102123A
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German (de)
English (en)
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EP0735322A3 (fr
EP0735322B1 (fr
Inventor
Horst Dr. Reichardt
Lothar Dipl.-Ing. Ritter
Günter Dipl.-Ing. Firkert
Lutz Dipl.-Phys. Labs
Konrad Dipl.-Phys. Gehmlich
Gerold Hofmann
Michael Dipl.-Ing. Hentrich
Wido Wiesenberg
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Das-Duennschicht Anlagen Systeme Dresden GmbH
Das Duennschicht Anlagen Systeme GmbH
Original Assignee
Das-Duennschicht Anlagen Systeme Dresden GmbH
Das Duennschicht Anlagen Systeme GmbH
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Publication of EP0735322A2 publication Critical patent/EP0735322A2/fr
Publication of EP0735322A3 publication Critical patent/EP0735322A3/fr
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Publication of EP0735322B1 publication Critical patent/EP0735322B1/fr
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M9/00—Baffles or deflectors for air or combustion products; Flame shields
    • F23M9/06—Baffles or deflectors for air or combustion products; Flame shields in fire-boxes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
    • F23J15/04—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material using washing fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F23G2209/142—Halogen gases, e.g. silane
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2215/00—Preventing emissions
    • F23J2215/30—Halogen; Compounds thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2219/00—Treatment devices
    • F23J2219/40—Sorption with wet devices, e.g. scrubbers

Definitions

  • the invention relates to a method and a device for cleaning exhaust gases with different, preferably fluorine-containing pollutants, in particular from plants for the separation and removal by plasma processes and by chemical vapor phase separation. Such processes play a role in the manufacture of semiconductor circuits.
  • the exhaust gases contain pollutants of different chemical compositions. Important groups of these pollutants are hydrides, e.g. Silanes. Fluorocarbons and other fluorine compounds are frequently produced.
  • the pollutants or their reaction products have a toxic effect or, due to their harmful effects in the atmosphere, require ozone depletion and the greenhouse effect.
  • the cleaning is very often carried out by sorption of the harmful gases from the exhaust gas, for example by passing it through oxidizing, aqueous solutions (DE 3342 816 A1).
  • the resulting water-soluble compounds can be processed in a second process step, e.g. be precipitated by basic solutions.
  • Volatile pollutants or secondary products are processed in a third process stage, e.g. by means of activated carbon filters, removed from the exhaust gas.
  • Non-organic halides and hydrides as well as organometallic compounds can be decomposed on heated metal catalysts (European Pat. 0384803 A1).
  • the reactive materials are arranged in layers in an indirectly heated column (WO89 / 11905, WO91 / 08041).
  • halogens and hydrides were chemically converted and converted into solid compounds.
  • the cleaning process requires periodic renewal of the reactive materials.
  • volatile fluorine compounds for example, are removed from the exhaust gas.
  • C 2 F 6 , SiF, 4 COF 2 and other substances are first converted into volatile silicon fluorides on hot silicon oxide surfaces and then precipitated as solid fluorine compounds, for example as CaF 2 , in the aqueous solutions.
  • Poisoning of the reactive surfaces in the solid-state reactor eg by coal or carbides
  • the limited reaction areas of the reactive materials and the limited throughput of pollutant-containing exhaust gases are problematic.
  • a large number of exhaust gas purification processes are based on the thermal decomposition or oxidation of the pollutants in a combustion chamber. If the pollutants themselves are not flammable or if they are only components of exhaust gases with a high proportion of inert gas, they are used for chemical conversion into a fuel gas flame, e.g. from a natural gas / oxygen or hydrogen-oxygen mixture, introduced (US 5 183 646). Harmful secondary substances of the conversion are subsequently, e.g. by sorption or washing processes, removed from the exhaust gas (US-A 288 9002).
  • Exhaust gas cleaning is usually a multi-stage process in which one or more of the following sub-processes, such as thermal decomposition or oxidation, cooling, sorption, hydrolysis and neutralization, take place (034 689 3 B1). by a device with a combustion chamber and at least one further device, e.g. one that works according to the washing principle.
  • sub-processes such as thermal decomposition or oxidation, cooling, sorption, hydrolysis and neutralization
  • the implementation of the pollutants in a fuel gas flame has a different efficiency in the cleaning effect for different pollutants.
  • the efficiency of the cleaning effect is not sufficient for fluorinated hydrocarbons and other fluorine compounds, to meet required standards.
  • the cleaned exhaust gases still contain critically high proportions of pollutants.
  • An improvement in the efficiency of cleaning in the direction of a low pollutant content in the cleaned exhaust gas can be achieved to a certain extent by increasing the amount of fuel gas relative to the amount of the supplied exhaust gas, but leads to a critical deterioration in the economy of exhaust gas cleaning because of the increase in fuel gas consumption.
  • the cleaning of fluorine-containing exhaust gases in a combustion chamber with a fuel gas flame requires a specific procedure and equipment design if it is to be carried out both with high efficiency of the pollutant conversion and with economical economy. The results are not equally satisfactory for all pollutants when using a facility.
  • the efficiency of the implementation is e.g. unfavorable for tetrafluoromethane in a fuel gas flame.
  • the invention has for its object to increase the efficiency of cleaning in the removal of pollutants, in particular fluorine compounds, from non-combustible exhaust gases in a combustion chamber with a fuel gas flame.
  • pollutants in particular fluorine compounds
  • the degree of decomposition of compounds which can be thermally decomposed is to be improved and the degree of chemical conversion of other pollutants is to be increased for pollutants which react with components of the fuel gas flame.
  • it is to be ensured that a high cleaning effect is achieved if the exhaust gas has different, toxic components contains.
  • the economy of the cleaning process can be improved by reducing the fuel gas consumption and by longer uninterrupted operating times.
  • the object is achieved by a method according to claims 1 to 8 and a device according to claims 9 to 14 .
  • the method assumes that a fuel gas mixture, preferably a hydrogen / oxygen mixture or a methane / oxygen mixture, is burned in a combustion chamber with the aid of a burner and that the pollutant-containing exhaust gas is fed into the flame.
  • the exhaust gases are not combustible themselves, even if they contain combustible components, e.g. B. hydrides, since they usually consist of over 90% of non-flammable inert gases, such as N 2 or Ar. If the pollutants in the flame are only to be activated for thermal decomposition, the components of the fuel gas mixture are supplied stoichiometrically.
  • the hydrogen-containing component or the hydrogen is supplied in excess if this is done by reduction or air or oxygen is supplied in excess if oxidation is to be achieved.
  • the efficiency of the pollutant conversion in the flame is set by precise dosing and / or by separate or additional supply of components. An increase in the efficiency of the pollutant conversion in the flame is achieved with special burner designs or devices for swirling the gas streams and for separately feeding the components of the fuel gas mixture.
  • the hot gas stream at the end of the effective area of the flame then consists of the combusted fuel gas mixture (mostly CO 2 and H 2 O), heated inert gases (mostly N 2 and Ar) and either the products of thermal decomposition in an O 2 atmosphere (e.g. SiO 2 and water vapor) or from products of chemical conversion (e.g. hydrogen fluoride, silicon fluoride, carbon dioxide and water vapor when burning silane and tetrafluoromethane in a detonating gas flame). Solid reaction products are deposited on components of the combustion chamber, eg SiO 2 ).
  • the hot gases at the exit of the combustion chamber are fed to a device for further treatment.
  • One or more sub-processes such as cooling, hydrolizing, neutralizing and washing out are usually carried out. Such sub-processes are carried out, for example, in spray washers or columns.
  • the gas stream treated in this way ie largely freed from toxic pollutants, is now fed to the exhaust air duct with the aid of an extraction system.
  • a body that is permeable to the hot gas flow or material with a large inner surface in the hot gas flow is arranged inside the combustion chamber, thermally insulated from the casing thereof, and in this way to temperatures above 500 ° C., preferably in the range from 700 ° C. to 1400 ° C, heated.
  • the thermal energy content of the flame is initially used to heat the exhaust gas and in this way in the volume of the flame to bring about the effects which are typical for treatment in a fuel gas flame. These are the thermal decomposition of pollutants and the chemical conversion in thermally stimulated reactions between components of the fuel gas mixture and the pollutants.
  • the energy content of the hot gas stream is now also used to bring said body or material to high temperatures. If heat radiation protection plates, possibly additional heat-insulating materials, are introduced in or around the combustion chamber in the area between the flame and the end of the combustion chamber, the energy content of the hot gas stream is efficiently used to heat the body.
  • Said body consists of a material or material mixture which forms volatile compounds with one of the primary pollutants and / or secondary substances of the combustion at the specified temperature and / or causes an additional activation and / or is catalytically active.
  • the body due to the intimate contact between the inner surfaces and the gas flow, the body (or the materials) with the given thermal insulation will almost assume the temperature that is given in the flame when the hot gases enter the body. There is a slight difference in the radial and in the direction of expansion of the gas flow due to unavoidable but low heat losses. Overall, however, by regulating the temperature by controlling the supply of the components of the fuel gas mixture, the body can be set to a temperature required for the thermal cleaning process. This temperature is also about that of the respective gas flowing through the body.
  • this additionally acts as a surface-active, thermal reactor within the combustion chamber.
  • the choice of material is adapted to the type of pollutants to be disposed of. It may be expedient that the same pollutants as in the flame and secondary pollutants generated in the flame are converted into volatile products by additional solid-state reactions.
  • silicon dioxide is used as the material. Is e.g. Disposing of hexafluoromethane as a harmful gas, this is known to be largely converted into carbon dioxide and hydrogen fluoride in the flame containing hydrogen and oxygen.
  • the degree of implementation is not entirely sufficient for the current strict environmental requirements.
  • the further conversion of the pollutants in the example that of hexafluoromethane, takes place by volume reaction in the gas-permeable body (or material) heated by the flame, which further significantly reduces the pollutant content. Extremely low levels of pollutants are achieved, however, since surface reactions with silicon dioxide are also effective in the hot body. In this way, residual hexafluoromethane is converted into volatile silicon fluoride.
  • An essential, further effect of the use of the surface reactor which is additionally effective in the combustion chamber for the fuel gas flame is that not only the primary pollutant (in the example hexafluoromethane) is converted chemically, but that in the flame and in the interior of the permeable body (or material ) resulting from thermal decomposition and chemical conversion, often also toxic secondary products, are also converted chemically by surface reactions.
  • the reaction of hexafluoromethane in the flame and in the volume of the body in addition to volatile hydrofluoric acid and carbon dioxide produces various fluorhexamethane degradation products, such as CHF 3 , which also form volatile silicon compounds with silicon dioxide, which also forms harmless inert gases.
  • the surface reactions of the primary and, in this sense, secondary pollutants take place in the presence of hydrogen and oxygen in the hot gas stream.
  • the chemical conversion of these pollutants can be influenced further favorably if excess oxygen or air is fed into the burner to generate the fuel gas flame.
  • the reactions take place on the surfaces of the permeable body (or material) in the presence of an excess of oxygen.
  • This improves the conversion of pollutants on the surfaces by forming further volatile intermediates, such as SiOF 2 .
  • the presence of oxygen in the reaction of primary or secondary pollutants with the introduced material also has the advantage that the deposition of solid substances, for example silicon carbide or coal, is avoided. In this way, a "poisoning" of the surfaces for the intended conversion into gaseous substances is avoided.
  • the additional feeding of oxygen or air can also take place in the area of the entry of the hot gases into the permeable body (or material). In this way, the surface reactions can be optimally adjusted with regard to the required amount of oxygen, regardless of the volume reactions in the flame.
  • a further, decisive effect of the procedure according to the invention is that pollutants which are only slightly or not thermally decomposed or chemically converted in the fuel gas flame are still chemically converted by the surface reaction in the combustion chamber.
  • pollutants which are only slightly or not thermally decomposed or chemically converted in the fuel gas flame are still chemically converted by the surface reaction in the combustion chamber.
  • a high degree of implementation can also be achieved for such pollutants as SF 6 , CHF 3 and CF 4 . Since two different mechanisms are effective in the combustion chamber with the volume reaction, predominantly in the fuel gas flame, and the surface reaction in the permeable body (or material), the process is well suited for cleaning exhaust gases that contain different pollutants. If the exhaust gas contains NF 3 and CF 4 , for example, NF 3 is mainly converted in the fuel gas flame, while the predominant portion of CF 4 is converted on the surfaces of the hot, permeable body (or material).
  • the selection of the material for said body (or material) is thus determined on the one hand by chemical requirements with regard to the pollutants to be disposed of, on the other hand by aspects of ensuring permeability for the hot gas flow and the formation of large internal surfaces with low flow resistance for the hot gas.
  • silicon dioxide in addition to said silicon dioxide, it is according to the invention to use silicon dioxide as a mixture with silicon and / or with other silicon-containing compounds as the material. Pollutants, such as For example, chlorobenzene easily react with the silicon in such a mixture at temperatures above 600 ° C.
  • the permeable bodies can be designed as sintered bodies or as sintered ceramic bodies which contain Al 2 O 3 or / and other sinterable materials in addition to silicon oxide or the other substances mentioned.
  • said hot body catalytically effective it may be expedient to partially coat the surfaces of said permeable body with metals or metal oxides (e.g. with Cu, CuO etc.) or to incorporate them into the sintered body.
  • metals or metal oxides e.g. with Cu, CuO etc.
  • Another procedure according to the invention is that the material for the permeable body (or material) is replenished in accordance with the consumption by the chemical reactions in the hot area of the flame of the burner. In this way it is ensured that the cleaning process in the combustion chamber can be carried out continuously over long periods.
  • an additional, inventive feature is that the infrared radiation of the heated material is registered in the combustion chamber with the aid of a sensor, and that the measurement signal from this sensor is used to control the process.
  • the temperature of the chemically reacting surfaces of the body (or material) can be regulated by controlling the flows of the fuel gas mixture. In this way, optimal reaction conditions in volume and on the surfaces of the material introduced can be set.
  • the sensor signal can be used to control the refill devices in the form of a point control.
  • the hot gas stream emerging from the permeable body (or material) is fed to a device for further, one-stage or multi-stage treatment at the outlet of the combustion chamber and is then discharged into the exhaust air in a purified manner.
  • a permeable body or material is arranged in the interior of the combustion chamber at a distance from the ring burner, which does not hinder the formation of the fuel gas flame.
  • this body or material
  • one or more, preferably cylindrical radiation protection plates are arranged between it and the burner wall.
  • heat-insulating, temperature-resistant insulation materials are arranged between the burner wall and the casing of the combustion chamber.
  • These shapes on the one hand ensure a large surface in the body (or material) for contact or for reaction with the hot gas.
  • a high permeability for the flowing hot gas is achieved.
  • their inner and outer jacket surfaces act as reaction surfaces.
  • the sintered body can be inserted directly into the combustion chamber with appropriate holders.
  • the granules or packing are used in a net-like, basket-shaped storage vessel. If sintered or melted tubes are used as permeable bodies, they are combined by brackets to form a bundle in the combustion chamber in such a way that their longitudinal direction coincides with the direction of flow of the hot gases through the combustion chamber.
  • the permeable body (or the permeable material) is exchanged when it is consumed by reactions with a corresponding flow rate of pollutants.
  • the permeable body is exchanged when it is consumed by reactions with a corresponding flow rate of pollutants.
  • the materials e.g. Granules or packing e.g. with a vibratory conveyor, be refilled.
  • a bundle of tubes is used as a permeable, reactive body, the burn-off thereof can be compensated for as a result of the reactions by longitudinal movement of the holders against the direction of flow of the hot gases.
  • a sufficient length of the tube bundle serves as a supply for an uninterrupted operating time to be achieved.
  • controlled end-feeding of the reactive materials can also be achieved by intervening in the vibrating conveyor device or in the feed of the holder for the tubes, by means of an end point control.
  • Another useful device are openings or inlet pipes on the combustion chamber in the region of the entry of the hot gases into the permeable body. It can cause said additional feeding of oxygen or air. On the one hand, this optimizes the conditions in the flame with regard to the implementation of one of the pollutants, e.g. by setting an excess of hydrogen in the fuel gas mixture, on the other hand, optimizing the conditions in the body (or material) for the implementation of another pollutant by an excess of oxygen on the hot reaction surfaces.
  • Another useful device for the device for carrying out the method is a baffle in the immediate vicinity of the permeable body (or material).
  • the permeable body or material
  • the solid, secondary products are separated, which are produced by the volume reaction in the flame. This prevents them from depositing on the surfaces of the hot body in question and poisoning their surfaces for reaction with other pollutant components.
  • FIG. 1 shows a schematic longitudinal section.
  • the device according to the invention essentially consists of a cylindrical combustion chamber (1) made of corrosion-resistant material. It is 18 cm in diameter and 80 cm high. This combustion chamber is thermally insulated in an outer casing (2). In the area of an end face (3) of the combustion chamber (1) there is an annular burner (4) to which the fuel gas mixture of hydrogen and oxygen is fed via a feed (5).
  • the ring burner (4) has a diameter of 25 mm.
  • the fuel gas flame (7) forms above the ring channel (6).
  • the exhaust gas with pollutants of different compositions is fed to the burner (4) via the central feed (8). It enters the fuel gas flame (7) centrally through the bore (9).
  • a basket-like container made of corrosion-resistant wire mesh with a mesh size of 2 mm and one Permeability of approx. 55% arranged.
  • a basket-like container made of corrosion-resistant wire mesh with a mesh size of 2 mm and one Permeability of approx. 55% arranged.
  • Plate-shaped radiation protection plates (11) are arranged on the end face of the container.
  • thermal insulation (12) made of rock wool is inserted between the combustion chamber wall and the casing (2).
  • the basket-like container is filled with packing elements (13) made of quartz rings (diameter 4 mm, wall thickness 1 mm, length 4 mm).
  • An IR sensor (15) is directed with its receiver surface onto the hot filler body through a bore (14) in the wall of the combustion chamber and in the casing. Offset to this are three bores on the periphery of the combustion chamber for interconnected inlet pipes (16), through which air or oxygen is admitted into the area where the hot gases enter the quartz fillers.
  • the hot gases first flow through the baffle in the direction of the arrow (18), then through the packing (13) and then through the opening (20) in the direction of the arrow (19) and then through the spray washing device (21).
  • the spray washer has the same diameter as the combustion chamber. It is 30 cm long. It is integrated into the casing together with the combustion chamber. Wash rings (23) are arranged between holding sieves (22) in the central region of the spray washing device. A one-percent aqueous potassium hydroxide solution is let in via the feed (24) and sprayed into the washing device by means of the spray device (25) (arrow direction 26). The hot gas stream and the aqueous solution flow through the washing rings in the direction of the arrow (27). The cleaned and cooled gas stream collects in the room (28) and is sucked off via a tubular connection (29) and fed to the exhaust air. The aqueous solution collects in the lower part of the room (28) and is fed to the reprocessing via the connection (30).
  • a plasma CVD coating system 60 l / min of exhaust gas is produced when silicon dioxide is deposited on semiconductor wafers.
  • the exhaust gas consists of 30 l / min nitrogen and 3 l / min silane as the predominant pollutant.
  • the coating chamber of a plasma CVD coating system cleaned by a plasma etching process. This process is carried out with a mixture of tetrafluoromethane and oxygen as the process gas.
  • the resulting exhaust gas consists of 30 l / min N 2 , 1 l / min N 2 O and 2 l / min tetrafluoromethane from a few tenths l / min of silicon tetrafluoride as the main pollutants, in addition to small amounts of fluorine and other substances that decompose tetafluoromethane , eg CHF 3 , in the presence of SiO 2 in the plasma.
  • the fuel gas flame (7) is maintained on the burner (4) of the combustion chamber (1) by letting 20 l / min of hydrogen and 10 l / min of oxygen into the feed (5). This means that a total of approx. 85 l / min is introduced into the ring burner (4) via the feed (8) and thus into the fuel gas flame.
  • the pollutant conversion largely takes place according to two different reaction principles, which are determined by the main pollutants mentioned, namely silane and tetrafluoromethane.
  • the volume of the hydrogen / oxygen flame mainly converts the silane to silicon dioxide and water vapor. Silicon dioxide settles on the walls of the combustion chamber and on the flame-side surfaces of the baffle (18). From these surfaces, it can be easily removed using devices known per se, possibly also under operating conditions.
  • the volume of tetrafluoromethane is also converted chemically, mainly to hydrogen fluoride and carbon dioxide.
  • a number of intermediate products are created in the flame, such as CHF 3 .
  • the body is heated to around 1300 ° C by the hot gases flowing through it.
  • the pollutants come into intimate contact with the surfaces of the hot quartz fillers.
  • the predominant surface reaction is that of tetrafluoromethane to volatile silicon tetrafluoride.
  • Pollutants still contained in the hot gas stream. such as hydrogen fluoride and fluorine are partially converted to volatile silicon tetrafluoride on the hot surfaces.
  • Traces of silanes that have not yet been converted in the volume of the flame are decomposed in the volume of the permeable, hot body or are chemically converted to silicon dioxide with the oxygen which is still present at the same time.
  • the hot gases with the secondary and tertiary reaction products enter through the gap (20) into the spray washing device (21), in which the aqueous absorbent is effective.
  • the hot gases are cooled to around 50 ° C.
  • the hydrogen fluoride and the silicon fluoride are absorbed by the basic active components of the solution, for example by KOH or K 2 CO 3 .
  • the process has a high cleaning effect for chemically very differently behaving pollutants.
  • the pollutant content of fluorine-containing, very toxic compounds in the exhaust air of the exhaust gas cleaning device is reduced to a few ppm.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Treating Waste Gases (AREA)
  • Incineration Of Waste (AREA)
EP96102123A 1995-03-30 1996-02-14 Procédé et dispositif pour la purification des effluents gazeux nocifs par conversion chimique dans une flamme et sur des surfaces chaudes Expired - Lifetime EP0735322B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19511645A DE19511645A1 (de) 1995-03-30 1995-03-30 Verfahren und Einrichtung zur Reinigung von schadstoffhaltigen Abgasen durch chemische Umsetzung in einer Flamme und an heißen Oberflächen
DE19511645 1995-03-30

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EP0735322A2 true EP0735322A2 (fr) 1996-10-02
EP0735322A3 EP0735322A3 (fr) 1997-04-23
EP0735322B1 EP0735322B1 (fr) 2000-10-18

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Cited By (5)

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Publication number Priority date Publication date Assignee Title
EP1920819A1 (fr) * 2006-11-08 2008-05-14 SCHOTT Solar GmbH Procédé et dispositif de nettoyage des gaz d'échappement d'une installation de production de couches fines de silicium
US7462333B2 (en) * 2002-04-11 2008-12-09 Das-Dunnschicht Anlagen Systeme Gmbh Dresden Device for the purification of exhaust gases consisting of fluorine-containing compounds in a combustion reactor
CN102644928A (zh) * 2011-02-18 2012-08-22 Das环境专家有限公司 用于热处理包括有害物质的废气的装置
WO2014188154A1 (fr) * 2013-05-20 2014-11-27 Edwards Limited Surveillance de combustion
CN104848206A (zh) * 2015-05-28 2015-08-19 苏州斯洛莱自动化设备有限公司 一种抑制氮氧化物排放的燃煤锅炉

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29712026U1 (de) * 1997-07-09 1998-11-12 EBARA Germany GmbH, 63452 Hanau Brenner für die Verbrennung von Abgasen mit mindestens einer kondensationsfähigen Komponente
TW506852B (en) * 2000-08-28 2002-10-21 Promos Technologies Inc Device and method for processing exhaust from process chamber

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2090402A5 (fr) * 1970-01-12 1972-01-14 Muller Maurice
DE2745100A1 (de) * 1976-10-13 1978-04-20 Air Resources Verfahren zur katalytischen verbrennung von gasen, die verbrennbare substanzen enthalten
WO1991008041A1 (fr) * 1989-12-02 1991-06-13 Boc Limited Traitement des gaz d'echappement

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3529309A1 (de) * 1985-08-16 1987-03-19 Hoechst Ag Vorrichtung zum verbrennen von fluorkohlenwasserstoffen

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2090402A5 (fr) * 1970-01-12 1972-01-14 Muller Maurice
DE2745100A1 (de) * 1976-10-13 1978-04-20 Air Resources Verfahren zur katalytischen verbrennung von gasen, die verbrennbare substanzen enthalten
WO1991008041A1 (fr) * 1989-12-02 1991-06-13 Boc Limited Traitement des gaz d'echappement

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7462333B2 (en) * 2002-04-11 2008-12-09 Das-Dunnschicht Anlagen Systeme Gmbh Dresden Device for the purification of exhaust gases consisting of fluorine-containing compounds in a combustion reactor
EP1920819A1 (fr) * 2006-11-08 2008-05-14 SCHOTT Solar GmbH Procédé et dispositif de nettoyage des gaz d'échappement d'une installation de production de couches fines de silicium
CN102644928A (zh) * 2011-02-18 2012-08-22 Das环境专家有限公司 用于热处理包括有害物质的废气的装置
CN102644928B (zh) * 2011-02-18 2015-07-29 Das环境专家有限公司 用于热处理包括有害物质的废气的装置
WO2014188154A1 (fr) * 2013-05-20 2014-11-27 Edwards Limited Surveillance de combustion
US20160076769A1 (en) * 2013-05-20 2016-03-17 Edwards Limited Combustion monitoring
JP2016526143A (ja) * 2013-05-20 2016-09-01 エドワーズ リミテッド 燃焼モニタリング
US10030871B2 (en) 2013-05-20 2018-07-24 Edwards Limited Combustion monitoring
TWI632324B (zh) * 2013-05-20 2018-08-11 英商愛德華有限公司 燃燒監測
CN104848206A (zh) * 2015-05-28 2015-08-19 苏州斯洛莱自动化设备有限公司 一种抑制氮氧化物排放的燃煤锅炉

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EP0735322A3 (fr) 1997-04-23
DE59605997D1 (de) 2000-11-23
DE19511645A1 (de) 1996-10-02
EP0735322B1 (fr) 2000-10-18

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