EP0712146A1 - Feldeffekt-Elektronenquelle und Herstellungsverfahren dazu, Anwendung in Anzeigevorrichtungen mit Kathodolumineszenz - Google Patents

Feldeffekt-Elektronenquelle und Herstellungsverfahren dazu, Anwendung in Anzeigevorrichtungen mit Kathodolumineszenz Download PDF

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Publication number
EP0712146A1
EP0712146A1 EP95402450A EP95402450A EP0712146A1 EP 0712146 A1 EP0712146 A1 EP 0712146A1 EP 95402450 A EP95402450 A EP 95402450A EP 95402450 A EP95402450 A EP 95402450A EP 0712146 A1 EP0712146 A1 EP 0712146A1
Authority
EP
European Patent Office
Prior art keywords
diamond
source
micro
electrically insulating
clusters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP95402450A
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English (en)
French (fr)
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EP0712146B1 (de
Inventor
Joel Danroc
Danh Van Tran
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
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Publication of EP0712146A1 publication Critical patent/EP0712146A1/de
Application granted granted Critical
Publication of EP0712146B1 publication Critical patent/EP0712146B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30403—Field emission cathodes characterised by the emitter shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30457—Diamond
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
EP95402450A 1994-11-08 1995-11-03 Feldeffekt-Elektronenquelle und Herstellungsverfahren dazu, Anwendung in Anzeigevorrichtungen mit Kathodolumineszenz Expired - Lifetime EP0712146B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9413371A FR2726688B1 (fr) 1994-11-08 1994-11-08 Source d'electrons a effet de champ et procede de fabrication de cette source, application aux dispositifs de visualisation par cathodoluminescence
FR9413371 1994-11-08

Publications (2)

Publication Number Publication Date
EP0712146A1 true EP0712146A1 (de) 1996-05-15
EP0712146B1 EP0712146B1 (de) 1999-06-30

Family

ID=9468611

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95402450A Expired - Lifetime EP0712146B1 (de) 1994-11-08 1995-11-03 Feldeffekt-Elektronenquelle und Herstellungsverfahren dazu, Anwendung in Anzeigevorrichtungen mit Kathodolumineszenz

Country Status (5)

Country Link
US (1) US5828162A (de)
EP (1) EP0712146B1 (de)
JP (1) JPH08241664A (de)
DE (1) DE69510521T2 (de)
FR (1) FR2726688B1 (de)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997018576A1 (en) * 1995-11-15 1997-05-22 E.I. Du Pont De Nemours And Company Diamond powder field emitters and field emitter cathodes made therefrom
WO1997018577A1 (en) * 1995-11-15 1997-05-22 E.I. Du Pont De Nemours And Company Process for making a field emitter cathode using a particulate field emitter material
EP0957503A2 (de) * 1998-05-15 1999-11-17 Sony Corporation Verfahren zur Herstellung einer Feldemissionskathode
EP1073085A2 (de) * 1999-07-29 2001-01-31 Sony Corporation Verfahren zur Herstellung eines Kaltkathodenfeldemitters und einer Anzeigevorrichtung
EP1073090A2 (de) * 1999-07-27 2001-01-31 Iljin Nanotech Co., Ltd. Feldemissionsanzeigevorrichtung mit Kohlenstoffnanoröhren und Verfahren
GB2322472B (en) * 1997-02-24 2001-11-28 Ibm Self stabilising non-thermionic cathode

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6635979B1 (en) * 1998-02-09 2003-10-21 Matsushita Electric Industrial Co., Ltd. Electron emitting device, method of producing the same, and method of driving the same; and image display comprising the electron emitting device and method of producing the same
JP2000182508A (ja) * 1998-12-16 2000-06-30 Sony Corp 電界放出型カソード、電子放出装置、および電子放出装置の製造方法
JP3595718B2 (ja) * 1999-03-15 2004-12-02 株式会社東芝 表示素子およびその製造方法
JP2000306492A (ja) * 1999-04-21 2000-11-02 Hitachi Powdered Metals Co Ltd 電界放出型カソード、電子放出装置、および電子放出装置の製造方法
US6342755B1 (en) * 1999-08-11 2002-01-29 Sony Corporation Field emission cathodes having an emitting layer comprised of electron emitting particles and insulating particles
GB9919737D0 (en) * 1999-08-21 1999-10-20 Printable Field Emitters Limit Field emitters and devices
US6384520B1 (en) 1999-11-24 2002-05-07 Sony Corporation Cathode structure for planar emitter field emission displays
JP2001185019A (ja) 1999-12-27 2001-07-06 Hitachi Powdered Metals Co Ltd 電界放出型カソード、電子放出装置、及び電子放出装置の製造方法
JP3953276B2 (ja) * 2000-02-04 2007-08-08 株式会社アルバック グラファイトナノファイバー、電子放出源及びその作製方法、該電子放出源を有する表示素子、並びにリチウムイオン二次電池
JP3730476B2 (ja) 2000-03-31 2006-01-05 株式会社東芝 電界放出型冷陰極及びその製造方法
KR100366705B1 (ko) * 2000-05-26 2003-01-09 삼성에스디아이 주식회사 전기 화학 중합을 이용한 탄소나노튜브 에미터 제조 방법
US6911767B2 (en) * 2001-06-14 2005-06-28 Hyperion Catalysis International, Inc. Field emission devices using ion bombarded carbon nanotubes
US7210978B2 (en) * 2004-04-14 2007-05-01 Teco Nanotech Co., Ltd. Electron-emission type field-emission display and method of fabricating the same
CN100405523C (zh) * 2004-04-23 2008-07-23 清华大学 场发射显示器
US7736209B2 (en) * 2004-09-10 2010-06-15 Applied Nanotech Holdings, Inc. Enhanced electron field emission from carbon nanotubes without activation
CN100370571C (zh) * 2004-11-12 2008-02-20 清华大学 场发射阴极和场发射装置
TWI309843B (en) * 2006-06-19 2009-05-11 Tatung Co Electron emission source and field emission display device

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2293593A (en) 1941-07-25 1942-08-18 Albert Shelby Hair treating apparatus
FR2593953A1 (fr) 1986-01-24 1987-08-07 Commissariat Energie Atomique Procede de fabrication d'un dispositif de visualisation par cathodoluminescence excitee par emission de champ
FR2623013A1 (fr) 1987-11-06 1989-05-12 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ,utilisant cette source
FR2663462A1 (fr) 1990-06-13 1991-12-20 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes.
US5199918A (en) * 1991-11-07 1993-04-06 Microelectronics And Computer Technology Corporation Method of forming field emitter device with diamond emission tips
GB2260641A (en) * 1991-09-30 1993-04-21 Kobe Steel Ltd Cold cathode emitter element
EP0555074A1 (de) * 1992-02-05 1993-08-11 Motorola, Inc. Elektronenquelle für Verarmungsbetrieb einer Elektronen-emittierenden Vorrichtung
FR2687839A1 (fr) 1992-02-26 1993-08-27 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ utilisant cette source.
US5289086A (en) * 1992-05-04 1994-02-22 Motorola, Inc. Electron device employing a diamond film electron source

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4084942A (en) * 1975-08-27 1978-04-18 Villalobos Humberto Fernandez Ultrasharp diamond edges and points and method of making
US5225820A (en) * 1988-06-29 1993-07-06 Commissariat A L'energie Atomique Microtip trichromatic fluorescent screen
US5473218A (en) * 1994-05-31 1995-12-05 Motorola, Inc. Diamond cold cathode using patterned metal for electron emission control

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2293593A (en) 1941-07-25 1942-08-18 Albert Shelby Hair treating apparatus
FR2593953A1 (fr) 1986-01-24 1987-08-07 Commissariat Energie Atomique Procede de fabrication d'un dispositif de visualisation par cathodoluminescence excitee par emission de champ
EP0234989A1 (de) * 1986-01-24 1987-09-02 Commissariat A L'energie Atomique Herstellungsverfahren einer feldeffektangeregten Kathodenlumineszenz-Wiedergabevorrichtung
FR2623013A1 (fr) 1987-11-06 1989-05-12 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ,utilisant cette source
FR2663462A1 (fr) 1990-06-13 1991-12-20 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes.
GB2260641A (en) * 1991-09-30 1993-04-21 Kobe Steel Ltd Cold cathode emitter element
US5199918A (en) * 1991-11-07 1993-04-06 Microelectronics And Computer Technology Corporation Method of forming field emitter device with diamond emission tips
EP0555074A1 (de) * 1992-02-05 1993-08-11 Motorola, Inc. Elektronenquelle für Verarmungsbetrieb einer Elektronen-emittierenden Vorrichtung
FR2687839A1 (fr) 1992-02-26 1993-08-27 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ utilisant cette source.
EP0558393A1 (de) * 1992-02-26 1993-09-01 Commissariat A L'energie Atomique Elektronenquelle mit Mikropunktkathoden und Anzeigevorrichtung mit Kathodolumineszenz erregt durch Feldemission unter Anwendung dieser Quelle
US5289086A (en) * 1992-05-04 1994-02-22 Motorola, Inc. Electron device employing a diamond film electron source

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
N.KUMAR ET AL.: "development of nano-crystalline diamond-based field-emission displays", SID INTERNATIONAL SYMPOSIUM DIGEST OF TECHNICAL PAPERS, vol. 25, 14 June 1994 (1994-06-14), pages 43 - 46, XP000439084 *

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997018576A1 (en) * 1995-11-15 1997-05-22 E.I. Du Pont De Nemours And Company Diamond powder field emitters and field emitter cathodes made therefrom
WO1997018577A1 (en) * 1995-11-15 1997-05-22 E.I. Du Pont De Nemours And Company Process for making a field emitter cathode using a particulate field emitter material
US5948465A (en) * 1995-11-15 1999-09-07 E. I. Du Pont De Nemours And Company Process for making a field emitter cathode using a particulate field emitter material
GB2322472B (en) * 1997-02-24 2001-11-28 Ibm Self stabilising non-thermionic cathode
EP0957503A2 (de) * 1998-05-15 1999-11-17 Sony Corporation Verfahren zur Herstellung einer Feldemissionskathode
EP0957503A3 (de) * 1998-05-15 2002-10-23 Sony Corporation Verfahren zur Herstellung einer Feldemissionskathode
EP1073090A2 (de) * 1999-07-27 2001-01-31 Iljin Nanotech Co., Ltd. Feldemissionsanzeigevorrichtung mit Kohlenstoffnanoröhren und Verfahren
EP1073090A3 (de) * 1999-07-27 2003-04-16 Iljin Nanotech Co., Ltd. Feldemissionsanzeigevorrichtung mit Kohlenstoffnanoröhren und Verfahren
EP1073085A2 (de) * 1999-07-29 2001-01-31 Sony Corporation Verfahren zur Herstellung eines Kaltkathodenfeldemitters und einer Anzeigevorrichtung
EP1073085A3 (de) * 1999-07-29 2003-04-09 Sony Corporation Verfahren zur Herstellung eines Kaltkathodenfeldemitters und einer Anzeigevorrichtung

Also Published As

Publication number Publication date
FR2726688A1 (fr) 1996-05-10
FR2726688B1 (fr) 1996-12-06
DE69510521T2 (de) 2000-03-16
EP0712146B1 (de) 1999-06-30
US5828162A (en) 1998-10-27
DE69510521D1 (de) 1999-08-05
JPH08241664A (ja) 1996-09-17

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