EP0703364B1 - Procédé et dispositif pour commander une micropompe - Google Patents

Procédé et dispositif pour commander une micropompe Download PDF

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Publication number
EP0703364B1
EP0703364B1 EP95112161A EP95112161A EP0703364B1 EP 0703364 B1 EP0703364 B1 EP 0703364B1 EP 95112161 A EP95112161 A EP 95112161A EP 95112161 A EP95112161 A EP 95112161A EP 0703364 B1 EP0703364 B1 EP 0703364B1
Authority
EP
European Patent Office
Prior art keywords
micropump
valve structure
resonance
driving signal
pumped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP95112161A
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German (de)
English (en)
Other versions
EP0703364A1 (fr
Inventor
Roland Zengerle
Axel Richter
Stefan Kluge
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of EP0703364A1 publication Critical patent/EP0703364A1/fr
Application granted granted Critical
Publication of EP0703364B1 publication Critical patent/EP0703364B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/04—Motor parameters of linear electric motors
    • F04B2203/0404—Frequency of the electric current

Definitions

  • the present invention relates to a method and a device for controlling a micropump by means of a driver signal such that a conveying direction defined by a valve structure is reversed.
  • Micro diaphragm pumps are known for example from WO-93/05295. One of the pumps described there is shown in Fig. 1.
  • This micro-diaphragm pump 100 comprises a two-part displacement unit 102 and also a two-part valve unit 104.
  • the two parts of the displacement unit 102 comprise a flexible pump diaphragm 106 and a rigid counter electrode 108.
  • a so-called drive chamber 110 is formed between the pump diaphragm 106 and a counter chamber 108.
  • the pump membrane 106 is attracted by the counter electrode 108.
  • the volume of the pump chamber 112 increases and a fluid to be pumped is sucked in via an inlet.
  • the pump membrane 106 relaxes in its output region and displaces the fluid to be pumped into the outlet 116.
  • Two passive check valves 118, 120 which define a preferred direction for the fluid flow, result in a directional pumping action when the displacement unit 102 is periodically activated from inlet 114 to outlet 116 of the pump.
  • the behavior of the valves 118, 120 is quasi static, ie the position of the movable valve part results at all times from the hydrostatic pressure difference applied across the valve.
  • Known methods for controlling such a micro diaphragm pump enable a fluid to be pumped in the preferred direction defined by the valves 118, 120.
  • micromembrane pump In technical applications of the micromembrane pump, the situation often arises in which fluids, for example, both have to be transported to a sensor element and have to be removed again. This occurs, for example, in chemical analysis, in which liquids both have to be transported to a sensor element and have to be removed again. So far, a micro-diaphragm pump has to be used both for the forward transport and for the removal, these micro-diaphragm pumps being arranged in opposite directions. The need for the two micro diaphragm pumps increases the complexity of such analytical systems and their manufacturing costs and makes it difficult to fill them with a fluid when operating these systems.
  • the present invention is based on the object of creating a method and a device for controlling a micropump which make it possible to reverse the conveying direction defined by a valve structure.
  • the present invention provides a method for controlling a micropump by means of a driver signal, the micropump having a conveying direction defined by a valve structure, with the method step of applying the driver signal to the exciter frequency Micropump, the excitation frequency being in the range above a resonance of a system formed from the moving parts of the micropump and the fluid to be pumped, whereby the delivery direction defined by a valve structure is reversed.
  • the present invention provides a device for controlling a micropump by means of a driver signal, the micropump having a conveying direction defined by a valve structure, with a device for generating the driver signal with an excitation frequency which is in the range above a resonance of one of the moving parts of the micropump and the system to be pumped fluid lies, whereby the delivery direction defined by a valve structure is reversed.
  • the micropump can be designed as a micro-diaphragm pump.
  • An advantage of the present invention is that for practical applications in which both a transport and a transport of fluids to an element is required, only a micro-diaphragm pump has to be used, whereby the required space is reduced.
  • Another advantage is that the filling of such systems with a fluid is made easier.
  • Yet another advantage is that the manufacturing cost of such systems can be significantly reduced.
  • the method according to the invention and the device according to the invention make it possible to reverse the pumping direction in micro-diaphragm pumps (see FIG. 1) with so-called passive check valves 118, 120.
  • the displacement unit 102 is acted upon by a driver signal which has an operating frequency in the region of a resonance, which is essentially defined by the movable valve parts, which lies above this resonance.
  • this resonance is a resonance of a system which is formed from the moving parts of the micro diaphragm pump (106, 118, 120) and from the fluid to be pumped.
  • This behavior corresponds to that of an oscillatory, mechanical system, which is stimulated to a forced oscillation by an external force.
  • the amplitude of the vibration has the known resonance behavior.
  • the curves 200 and 202 shown in FIG. 2 represent the course of the deflection and the phase shift with different damping or quality factors.
  • the course of the curve 200 is assigned a quality factor of 3 and the course of the curve 202 is assigned a quality factor of 1 .
  • the deflection and phase shift of a movable valve part shown in FIG. 2 applies to a resonance of this part of 3000 Hz.
  • the curves in the first line indicate the so-called exciting pressure
  • the signal curves in the middle line indicate the opening state of the movable valve
  • the signal curves in the lower row show the time-dependent flow
  • the respective y-scales in any Units are shown.
  • the second effect is that the valve can only be opened in the positive direction (see second line of Fig. 3), i.e. the valve is completely closed for half a period.
  • the micro diaphragm pump In the frequency range from 1 Hz to 1 kHz, the micro diaphragm pump is in its so-called standard operating range, which is shown by arrow 400. In this standard operating range 400, the micro diaphragm pump has a positive pumping rate ( ⁇ > 0), which corresponds to a forward pumping effect.
  • the micro diaphragm pump In the frequency range from 2 kHz to 6 kHz, which is represented by the arrow 410, the micro diaphragm pump has a negative pumping rate ( ⁇ ⁇ 0), which corresponds to a backward pumping effect.
  • the resonance frequency of the movable valve parts used in a micro diaphragm pump can be varied by a suitable change in the shape of the valves used. This makes it possible to influence the frequency range 410 in which the negative pumping rate occurs.
  • the frequency range 410 where a negative pumping rate occurs is the frequency range where there is a phase difference of about 90 degrees to about 180 degrees between the drive signal and the deflection of the valves.
  • the frequency range in which a positive pumping rate occurs is that frequency range in which a phase difference of approximately 0 degrees to 90 degrees occurs between the driver signal and the deflection of the valve structure.
  • FIG. 5 shows a block diagram of the arrangement of a device for generating a driver signal and a micro diaphragm pump.
  • the device according to the invention for controlling a micro-diaphragm pump 510 by means of a driver signal comprises a device 500 for generating the driver signal with an excitation frequency which lies in the range above a resonance of the system formed from the moving parts of the micro-diaphragm pump 510 and the fluid to be pumped.
  • the driver signal is over one or more Signal lines 520 applied to the micro diaphragm pump 510.
  • the driver signal generating device generates a second driver signal with a second excitation frequency, which is in a range in which a phase difference of approximately 0 degrees to 90 degrees occurs between the driver signal and the deflection of the valve structure, in order to fluid to be pumped into that defined by the valve structure Pump direction of pumping.
  • the method according to the invention and the device according to the invention are not limited to micro-diaphragm pumps that use check valves.
  • the application of the invention to micro diaphragm pumps which use passive valves of a different design is readily possible.
  • the application of the present invention is not limited to a micro diaphragm pump that uses two valves.
  • the use of micro diaphragm pumps that use one valve or more than two valves is easily possible.
  • piezoelectric and pneumatic or thermopneumatic drive mechanisms for the micro diaphragm pump are also possible.
  • a two-phase thermal drive is also contemplated, in which a liquid is heated in a drive chamber, whereby a vapor bubble is formed, through which a pump membrane is actuated by displacement.
  • the thermal two-phase drive enables higher pressures to be generated than a purely thermopneumatic drive.
  • a piston displacer can also be considered in addition to a membrane displacer.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Claims (9)

  1. Procédé pour commander une micropompe (100) à l'aide d'un signal d'excitation, la micropompe (100) ayant une direction de transport définie par une structure de soupape (118, 120), caractérisé par l'étape de procédé suivante, consistant à:
    appliquer sur la micropompe (100) le signal d'excitation avec une fréquence d'excitation, la fréquence d'excitation se situant dans la plage au-dessus d'une résonance d'un système formé par les éléments mobiles (106, 118, 120) de la micropompe (100) et par le fluide à pomper, d'où la direction de transport définie par la structure de soupape (118, 120) est inversée.
  2. Procédé suivant la revendication 1, caractérisé par le fait que la micropompe se présente sous forme de micropompe à membrane (100).
  3. Procédé suivant la revendication 1 ou 2, caractérisé par le fait que la plage dans laquelle se situe la fréquence d'excitation est la plage de fréquences dans laquelle il se produit une différence de phase d'environ 90 degrés à environ 180 degrés entre le signal d'excitation et la déflexion de la structure de soupape (118, 120).
  4. Procédé suivant l'une des revendications 1 à 3, caractérisé par le fait que la résonance est déterminée sensiblement par la structure de soupape (118, 120).
  5. Procédé suivant l'une des revendications 1 à 4, caractérisé par le fait que la résonance est une résonance de premier ordre ou une résonance d'ordre supérieur.
  6. Procédé suivant l'une des revendications 1 à 5, caractérisé, par ailleurs, par l'étape de procédé suivante, consistant à:
    appliquer sur la micropompe (100) un second signal d'excitation avec une seconde fréquence d'excitation, la seconde fréquence d'excitation se situant dans une plage dans laquelle il se produit une différence de phase d'environ 0 degré à 90 degrés entre le signal d'excitation et la déflexion de la structure de soupape (118, 120), pour pomper le fluide à pomper dans la direction de transport définie par la structure de soupape (118, 120).
  7. Dispositif pour commander une micropompe (510) à l'aide d'un signal d'excitation, la micropompe (100) ayant une direction de transport définie par une structure de soupape (118, 120), caractérisé par un dispositif (500) de production du signal d'excitation avec une fréquence d'excitation située dans la plage au-dessus d'une résonance d'un système formé par les éléments mobiles de la micropompe et par le fluide à pomper, d'où la direction de transport définie par la structure de soupape (118, 120) est inversée.
  8. Dispositif suivant la revendication 7, caractérisé par le fait que la micropompe se présente sous forme de micropompe à membrane (100).
  9. Dispositif suivant la revendication 7 ou 8, caractérisé par le fait que le dispositif de production du signal d'excitation (500) génère un second signal d'excitation avec une seconde fréquence d'excitation qui se situe dans une plage dans laquelle il se produit une différence de phase d'environ 0 degré à 90 degrés entre le signal d'excitation et la déflexion de la structure de soupape, pour pomper le fluide à pomper dans la direction de transport définie par la structure de soupape.
EP95112161A 1994-09-22 1995-08-02 Procédé et dispositif pour commander une micropompe Expired - Lifetime EP0703364B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4433894A DE4433894A1 (de) 1994-09-22 1994-09-22 Verfahren und Vorrichtung zur Ansteuerung einer Mikropumpe
DE4433894 1994-09-22

Publications (2)

Publication Number Publication Date
EP0703364A1 EP0703364A1 (fr) 1996-03-27
EP0703364B1 true EP0703364B1 (fr) 1997-04-23

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EP (1) EP0703364B1 (fr)
DE (2) DE4433894A1 (fr)

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US6818395B1 (en) 1999-06-28 2004-11-16 California Institute Of Technology Methods and apparatus for analyzing polynucleotide sequences
US7897345B2 (en) 2003-11-12 2011-03-01 Helicos Biosciences Corporation Short cycle methods for sequencing polynucleotides
US8016260B2 (en) 2007-07-19 2011-09-13 Formulatrix, Inc. Metering assembly and method of dispensing fluid
US8100293B2 (en) 2009-01-23 2012-01-24 Formulatrix, Inc. Microfluidic dispensing assembly
US8658418B2 (en) 2002-04-01 2014-02-25 Fluidigm Corporation Microfluidic particle-analysis systems
US9540689B2 (en) 1998-05-01 2017-01-10 Life Technologies Corporation Method of determining the nucleotide sequence of oligonucleotides and DNA molecules
WO2021014444A1 (fr) * 2019-07-23 2021-01-28 Innotech Ltd Pompes et micro-clapets de non-retour accordés
WO2022162651A1 (fr) * 2021-01-27 2022-08-04 Q T Flow Ltd Agencement de pompage de fluide

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19648694C1 (de) * 1996-11-25 1998-04-30 Vermes Mikrotechnik Gmbh Bidirektionale dynamische Mikropumpe
DE19719862A1 (de) * 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Mikromembranpumpe
DE19719861A1 (de) * 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Verfahren zum Herstellen eines Mikromembranpumpenkörpers
JP3582316B2 (ja) 1997-08-20 2004-10-27 株式会社日立製作所 化学分析装置
DE19802368C1 (de) * 1998-01-22 1999-08-05 Hahn Schickard Ges Mikrodosiervorrichtung
JP3543604B2 (ja) * 1998-03-04 2004-07-14 株式会社日立製作所 送液装置および自動分析装置
US6780591B2 (en) 1998-05-01 2004-08-24 Arizona Board Of Regents Method of determining the nucleotide sequence of oligonucleotides and DNA molecules
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US7217321B2 (en) 2001-04-06 2007-05-15 California Institute Of Technology Microfluidic protein crystallography techniques
EP1195523B1 (fr) * 1999-06-28 2005-03-02 California Institute of Technology Système de micropompes ou soupapes flexibles
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DK1065378T3 (da) 1999-06-28 2002-07-29 California Inst Of Techn Elastomere mikropumpe- og mikroventilsystemer
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Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4344743A (en) * 1979-12-04 1982-08-17 Bessman Samuel P Piezoelectric driven diaphragm micro-pump
JPH03217672A (ja) * 1990-01-23 1991-09-25 Seiko Epson Corp マイクロポンプの吐出量制御方法
DE4135655A1 (de) * 1991-09-11 1993-03-18 Fraunhofer Ges Forschung Mikrominiaturisierte, elektrostatisch betriebene membranpumpe
DE4200838C2 (de) * 1992-01-15 1994-12-22 Knf Neuberger Gmbh Pumpe mit vom Fördermedium gesteuerten Ventilen

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US6818395B1 (en) 1999-06-28 2004-11-16 California Institute Of Technology Methods and apparatus for analyzing polynucleotide sequences
US8658418B2 (en) 2002-04-01 2014-02-25 Fluidigm Corporation Microfluidic particle-analysis systems
US7897345B2 (en) 2003-11-12 2011-03-01 Helicos Biosciences Corporation Short cycle methods for sequencing polynucleotides
US9012144B2 (en) 2003-11-12 2015-04-21 Fluidigm Corporation Short cycle methods for sequencing polynucleotides
US8016260B2 (en) 2007-07-19 2011-09-13 Formulatrix, Inc. Metering assembly and method of dispensing fluid
US8100293B2 (en) 2009-01-23 2012-01-24 Formulatrix, Inc. Microfluidic dispensing assembly
US8550298B2 (en) 2009-01-23 2013-10-08 Formulatrix, Inc. Microfluidic dispensing assembly
WO2021014444A1 (fr) * 2019-07-23 2021-01-28 Innotech Ltd Pompes et micro-clapets de non-retour accordés
WO2022162651A1 (fr) * 2021-01-27 2022-08-04 Q T Flow Ltd Agencement de pompage de fluide

Also Published As

Publication number Publication date
EP0703364A1 (fr) 1996-03-27
DE4433894A1 (de) 1996-03-28
DE59500196D1 (de) 1997-05-28

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