EP0844395A2 - Micropompe réversible - Google Patents

Micropompe réversible Download PDF

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Publication number
EP0844395A2
EP0844395A2 EP97119955A EP97119955A EP0844395A2 EP 0844395 A2 EP0844395 A2 EP 0844395A2 EP 97119955 A EP97119955 A EP 97119955A EP 97119955 A EP97119955 A EP 97119955A EP 0844395 A2 EP0844395 A2 EP 0844395A2
Authority
EP
European Patent Office
Prior art keywords
flow
channels
bidirectional dynamic
micropump according
channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP97119955A
Other languages
German (de)
English (en)
Other versions
EP0844395B1 (fr
EP0844395A3 (fr
Inventor
Peter Heun
Holger Klingner
Original Assignee
Vermes Mikrotechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vermes Mikrotechnik GmbH filed Critical Vermes Mikrotechnik GmbH
Publication of EP0844395A2 publication Critical patent/EP0844395A2/fr
Publication of EP0844395A3 publication Critical patent/EP0844395A3/fr
Application granted granted Critical
Publication of EP0844395B1 publication Critical patent/EP0844395B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1077—Flow resistance valves, e.g. without moving parts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/04—Motor parameters of linear electric motors
    • F04B2203/0409—Linear speed

Definitions

  • the invention relates to a bidirectional dynamic micropump for small amounts of liquid, in which the fluid flow can be varied in quantity and direction with simple means that is etched into a silicon wafer.
  • Bidirectional pumps with rotary drives are well known With the help of gear or propeller arrangements a directional acceleration of the Effect fluids. The direction is reversed by reversing the direction of rotation. These arrangements consist of a number of mechanically moved ones Elements that are subject to wear and their miniaturization are major problems is prepared or limited. In addition, there are sealing problems at the bearing points.
  • bidirectional pumps in which an undirected volume flow is generated, which is given a variable direction by suitable measures can be.
  • the volume flow is caused by volume change a chamber, usually using pump membranes; reached and the direction is determined by actively controlled mechanical Inlet and outlet valves.
  • the disadvantage here is that in addition to the pump drive Drives for the valves are required and there is a high control effort.
  • micropumps with directional passive valves which have a preferred pump direction and in which a reversal of direction is possible through the use of resonance phenomena. These consist of a number of very precisely aligned elements . The volume control in the reverse direction is very limited and the possible delivery rate differs from the preferred direction.
  • the patent specifications DE 42 23 019 and DE 44 22 743 contain dynamic micropumps without mechanical valves, which work on the basis of directed flow resistances and have a fixed flow direction.
  • the invention is therefore based on the object with a small number of Functional elements an easily reproducible miniaturized pumping device create that with a simple tax effort in both directions Limits of variable fluid flow are generated and characterized by very small dimensions distinguished.
  • the solution to this problem consists in a miniaturized arrangement of one Diaphragm pump and two connected flow channels in such a way that as a result the excitation with special impulses in the flow channels to different Develop different resistance relationships at times.
  • a structure is introduced into a (100) oriented Si wafer 1 by anisotropic etching, which together with a glass cover layer 2 applied by anodic bonding results in an arrangement of pump chamber 4 and channels 7, 8 (FIG. 1).
  • the pump chamber uses a piezo bimorph system as the drive membrane, which is formed by applying a piezo plate or layer 3 to the glass cover layer or chamber base.
  • the pump chamber 4 is rectangular with a trapezoidal cross section.
  • channels 7, 8 Immediately in front of and behind the pump chamber are channels 7, 8 with a triangular or or trapezoidal cross section with different cross-sectional areas, which represent a non-linear flow resistance with regard to the flow velocity.
  • the mode of operation of the bidirectional dynamic micropump is based on the fact that laminar flows with defined flow resistances predominate in the channels of the pump structure up to a certain flow speed and that the change from laminar to turbulent flow takes place when this flow speed is exceeded (FIG. 3). This results in an increase in flow resistance from R l to R t in the affected channel.
  • this effect is used by selecting different geometries for channels 7 and 8 (ie channel 7 has a significantly smaller cross-section in relation to channel 8 and thus a higher flow velocity, but a comparable laminar flow resistance R 1 ) and the piezo actuator 3
  • Pump chamber 4 is acted upon by a pulse shape characteristic of the pumping direction. Simplified, it is assumed that the change in volume of the pump chamber 4 is linear to the voltage applied to the piezo actuator 3.
  • this high-speed fluid flow leads to the transition to turbulent flow and consequently to an increased flow resistance R t (FIG. 3).
  • the pumping process in the direction of channel 7 is the reverse of the pumping process towards channel 8.
  • the delivery rate results from the difference between the lifting and lowering currents and can be controlled very flexibly in both pump directions by varying the control amplitude and the pulse repetition frequency.
  • the efficiency of the arrangement described (db the ratio of delivery volume to volume displacement) increases with the achieved ratio of R t to R l , ie with the amount of the value x.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Medicines Containing Antibodies Or Antigens For Use As Internal Diagnostic Agents (AREA)
  • Micromachines (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP97119955A 1996-11-25 1997-11-14 Micropompe réversible Expired - Lifetime EP0844395B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19648694A DE19648694C1 (de) 1996-11-25 1996-11-25 Bidirektionale dynamische Mikropumpe
DE19648694 1996-11-25

Publications (3)

Publication Number Publication Date
EP0844395A2 true EP0844395A2 (fr) 1998-05-27
EP0844395A3 EP0844395A3 (fr) 2001-01-10
EP0844395B1 EP0844395B1 (fr) 2005-10-19

Family

ID=7812664

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97119955A Expired - Lifetime EP0844395B1 (fr) 1996-11-25 1997-11-14 Micropompe réversible

Country Status (3)

Country Link
EP (1) EP0844395B1 (fr)
AT (1) ATE307292T1 (fr)
DE (2) DE19648694C1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1369587A2 (fr) * 2002-06-03 2003-12-10 Seiko Epson Corporation Clapet de pompe
DE102013015453A1 (de) 2012-12-21 2014-07-10 Thomas Magnete Gmbh Hubkolbenpumpe mit zwei Förderrichtungen

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19860227C1 (de) * 1998-12-24 2000-05-25 Daimler Chrysler Ag Mikropumpe
JP3629405B2 (ja) * 2000-05-16 2005-03-16 コニカミノルタホールディングス株式会社 マイクロポンプ
DE10102152C1 (de) * 2001-01-18 2002-06-20 Roland Zengerle Vorrichtung und Verfahren zum Dosieren kleiner Flüssigkeitsmengen
DE10212278B4 (de) * 2002-03-20 2007-10-25 Dietrich Dr.-Ing. Roscher Tintenschreibgerät
DE102008016121B4 (de) 2007-11-29 2010-03-11 Ihp Gmbh - Innovations For High Performance Microelectronics / Leibniz-Institut Für Innovative Mikroelektronik Vorrichtung und Verfahren zur Messung der Viskosität
DE102011115622A1 (de) 2010-12-20 2012-06-21 Technische Universität Ilmenau Mikropumpe sowie Vorrichtung und Verfahren zur Erzeugung einer Fluidströmung

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4223019C1 (de) 1992-07-13 1993-11-18 Fraunhofer Ges Forschung Ventillose Mikropumpe
DE4422743A1 (de) 1994-06-29 1996-01-04 Torsten Gerlach Mikropumpe

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5094594A (en) * 1990-04-23 1992-03-10 Genomyx, Incorporated Piezoelectric pumping device
SE508435C2 (sv) * 1993-02-23 1998-10-05 Erik Stemme Förträngningspump av membranpumptyp
DE4433894A1 (de) * 1994-09-22 1996-03-28 Fraunhofer Ges Forschung Verfahren und Vorrichtung zur Ansteuerung einer Mikropumpe
DE19546570C1 (de) * 1995-12-13 1997-03-27 Inst Mikro Und Informationstec Fluidpumpe

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4223019C1 (de) 1992-07-13 1993-11-18 Fraunhofer Ges Forschung Ventillose Mikropumpe
DE4422743A1 (de) 1994-06-29 1996-01-04 Torsten Gerlach Mikropumpe

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1369587A2 (fr) * 2002-06-03 2003-12-10 Seiko Epson Corporation Clapet de pompe
EP1369587A3 (fr) * 2002-06-03 2005-04-27 Seiko Epson Corporation Clapet de pompe
US7059836B2 (en) 2002-06-03 2006-06-13 Seiko Epson Corporation Pump
DE102013015453A1 (de) 2012-12-21 2014-07-10 Thomas Magnete Gmbh Hubkolbenpumpe mit zwei Förderrichtungen

Also Published As

Publication number Publication date
DE59712449D1 (de) 2006-03-02
EP0844395B1 (fr) 2005-10-19
ATE307292T1 (de) 2005-11-15
EP0844395A3 (fr) 2001-01-10
DE19648694C1 (de) 1998-04-30

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