EP0690661B1 - Heizelement zum Beheizen von Schmelztiegeln - Google Patents

Heizelement zum Beheizen von Schmelztiegeln Download PDF

Info

Publication number
EP0690661B1
EP0690661B1 EP95109670A EP95109670A EP0690661B1 EP 0690661 B1 EP0690661 B1 EP 0690661B1 EP 95109670 A EP95109670 A EP 95109670A EP 95109670 A EP95109670 A EP 95109670A EP 0690661 B1 EP0690661 B1 EP 0690661B1
Authority
EP
European Patent Office
Prior art keywords
heating element
meanders
hollow body
rounded
perimeters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP95109670A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0690661A1 (de
Inventor
Peter Vilzmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siltronic AG
Original Assignee
Wacker Siltronic AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Siltronic AG filed Critical Wacker Siltronic AG
Publication of EP0690661A1 publication Critical patent/EP0690661A1/de
Application granted granted Critical
Publication of EP0690661B1 publication Critical patent/EP0690661B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D11/00—Arrangement of elements for electric heating in or on furnaces
    • F27D11/02—Ohmic resistance heating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/62—Heating elements specially adapted for furnaces

Definitions

  • the invention described below relates to a Heating element used to heat crucibles becomes.
  • Figure 1a shows a longitudinal section
  • Figure 1b shows the cross section by a known heating element of this type. It has that Form of a cylindrical hollow body (1).
  • the heating element is usually made of graphite and is for example for the production of crucible-drawn Single crystals of semiconductor material needed.
  • Of the cylindrical hollow body is spaced by slots (2) incised alternating from the top or bottom Go out edge of the hollow body and to each lead opposite edge, but without this to reach.
  • the slots divide the hollow body into individual, interconnected segments, which act as meanders (3) be designated. Every meander is through a slit partly into a left and a right half of a meander (3a) Cut.
  • In the area of the lower edge of the heating element are at least two power supply lines (4) attached to the an electrical power source can be connected.
  • the diameter of the heating element can be towards the bottom of the Hollow body be reduced so that the heating element like adapted to the shape of the crucible to be heated Vessel is formed. Embodiments are shown in the figures shown with constant diameter.
  • the upper edge of the heating element protrudes over the top of the crucible so that the Contents of the crucible as evenly as possible through that of the heating element emitted heat radiation is heated.
  • breeding of single crystals made of semiconductor material, in particular Silicon is often observed to be molten Semiconductor material from the crucible to the surface of the Heating element arrives.
  • the one that protrudes beyond the edge of the crucible Edge of the heating element is particularly affected because under certain doping conditions molten Can inject material from the crucible.
  • a meandering heating element is known from US Pat. No. 2,650,254, in which the upper, or lower sections of the meander are partially rounded so that the circumferential lines viewed in longitudinal section are curved in an arc.
  • the task was to develop an improved heating element that was less prone to wear and that is more suitable for growing single crystals.
  • a heating element for heating crucibles from a cylindrical hollow body which is meandered through slots Segments is divided, the circumferential lines of the longitudinal cut surfaces through the Meandering in the area of the upper and lower edges of the hollow body are rounded, and the circumferential lines of the cross-sectional areas through the meanders straight and curved portions, which is characterized in that the circumferential lines the cross-sectional areas do not form corners and also have rounded portions.
  • FIG. 2a A heating element according to the present invention is shown in Figures 2a (in longitudinal section) and 2b (in cross section). A section of FIG. 2b is enlarged in FIG. 2c reproduced.
  • the cylindrical hollow body (5) is through vertical slots (6) which alternate from go out the top and bottom and towards the opposite Lead edge, incised so that the typical shape of juxtaposed Meandering (7) arises (Fig.2a).
  • power supply lines (8) brought up to the meanders.
  • the power supplies are to an electrical power source during operation of the heating element connected.
  • each meander has the transitions between two side surfaces of each meander, so that the meanders are free of edges and corners (Fig. 2c).
  • the radius of curvature R of the rounding is preferably equal to or approximately equal to the cross-sectional length L of a meander half (7a).
  • the circumferential lines (10) of the cut surfaces point straight, curved and rounded parts on (Fig.2b).
  • a molded body is more suitable for producing the heating element according to the invention
  • Size for example a graphite block or a graphite cylinder of a mechanical shape, for example by piercing, cutting, grinding, milling or the like, subject.
  • a solid shaped body becomes a cylindrical hollow body produced.
  • the hollow body is then provided with the appropriate slots and in this way divided into meandering segments. Eventually they will rounded transitions between abutting side surfaces of the meanders are rounded and so much material in the area of the upper or lower edge of the hollow body removed that the longitudinal cut surfaces through the meanders the intended, rounded Get shape.
  • an edge is also considered to be rounded if the mechanical processing is carried out using a computer-controlled processing tool, that creates curved surfaces that, with sufficiently high resolution, as step-like level changes can be recognized.
  • the heating element according to the invention is provided with the necessary power supplies with particular advantage as an electrical resistance heater for heating Crucibles in the manufacture of single crystals from semiconductor material, preferably Silicon.
  • Draw heating elements with the features of the invention are characterized by the fact that they have a heating zone with special generate a uniform temperature profile. Through her Use when pulling single crystals out Semiconductor material is less likely to malfunction Crystal growth, directly or indirectly Malfunction of the heating element are. The yields increase based on their use the achievable length of dislocation-free single crystal, on. In addition, the mean operating times, after which a heating element is replaced on average according to initial attempts, more than twice as much longer than with conventional heating elements.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
EP95109670A 1994-07-01 1995-06-22 Heizelement zum Beheizen von Schmelztiegeln Expired - Lifetime EP0690661B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4423196A DE4423196A1 (de) 1994-07-01 1994-07-01 Heizelement zum Beheizen von Schmelztiegeln
DE4423196 1994-07-01

Publications (2)

Publication Number Publication Date
EP0690661A1 EP0690661A1 (de) 1996-01-03
EP0690661B1 true EP0690661B1 (de) 1998-04-08

Family

ID=6522076

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95109670A Expired - Lifetime EP0690661B1 (de) 1994-07-01 1995-06-22 Heizelement zum Beheizen von Schmelztiegeln

Country Status (6)

Country Link
US (1) US5660752A (ko)
EP (1) EP0690661B1 (ko)
JP (1) JP2909529B2 (ko)
KR (1) KR0171462B1 (ko)
CN (1) CN1115843A (ko)
DE (2) DE4423196A1 (ko)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5911825A (en) * 1997-09-30 1999-06-15 Seh America, Inc. Low oxygen heater
DE19959416C1 (de) * 1999-12-09 2001-03-15 Freiberger Compound Mat Gmbh Heizelement zum Beheizen von Schmelztiegeln und Anordnung von Heizelementen
FR2836592A1 (fr) * 2002-02-27 2003-08-29 Carbone Lorraine Composants Resistor en materiau carbone
ATE300163T1 (de) * 2002-02-27 2005-08-15 Carbone Lorraine Composants Widerstand aus kohlenstoffhaltigen material
JP2006123885A (ja) * 2004-09-28 2006-05-18 Denso Corp 車載用輻射熱暖房装置
JP5360958B2 (ja) * 2008-10-23 2013-12-04 ナビオ株式会社 溶解用ルツボ
JP5828232B2 (ja) 2011-06-29 2015-12-02 住友電気工業株式会社 ガラス母材用加熱炉
WO2024174602A1 (zh) * 2023-02-24 2024-08-29 广东美的厨房电器制造有限公司 加热元件、加热装置及烹饪设备

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2650254A (en) * 1953-08-25 Side heater
US2640861A (en) * 1950-11-27 1953-06-02 Harshaw Chem Corp Resistance furnace
FR2067967A5 (ko) * 1969-11-24 1971-08-20 Anvar
US4347431A (en) * 1980-07-25 1982-08-31 Bell Telephone Laboratories, Inc. Diffusion furnace
FR2497050A1 (fr) * 1980-12-23 1982-06-25 Saphymo Stel Dispositif de fusion par induction directe en cage froide avec confinement electromagnetique de la charge fondue
JPS5865795U (ja) * 1981-10-28 1983-05-04 株式会社神戸製鋼所 熱間静水圧処理装置における加熱装置
US4410796A (en) * 1981-11-19 1983-10-18 Ultra Carbon Corporation Segmented heater assembly
DE3242959C2 (de) * 1981-11-20 1986-02-20 Kabushiki Kaisha Kobe Seiko Sho, Kobe Isostatische Heißpreßvorrichtung
JPS60137894A (ja) * 1983-12-26 1985-07-22 Toshiba Ceramics Co Ltd 円筒ヒ−タ
US4755658A (en) * 1985-11-12 1988-07-05 Ultra Carbon Corporation Segmented heater system
JPH0468296A (ja) * 1990-07-09 1992-03-04 Fujitsu Ltd 半導体製造装置
JP2952390B2 (ja) * 1990-11-01 1999-09-27 イビデン株式会社 黒鉛ヒータの製造方法及びこれに使用する加工用治具
JPH0613091U (ja) * 1991-05-30 1994-02-18 東海高熱工業株式会社 炭化けい素発熱体

Also Published As

Publication number Publication date
KR0171462B1 (ko) 1999-02-18
US5660752A (en) 1997-08-26
JPH0842976A (ja) 1996-02-16
JP2909529B2 (ja) 1999-06-23
EP0690661A1 (de) 1996-01-03
DE59501823D1 (de) 1998-05-14
CN1115843A (zh) 1996-01-31
DE4423196A1 (de) 1996-01-04

Similar Documents

Publication Publication Date Title
EP0690661B1 (de) Heizelement zum Beheizen von Schmelztiegeln
DE4417526C1 (de) Zylinderförmiger feuerfester Hohlstein
EP2379783A1 (de) Verfahren und vorrichtung zur herstellung von siliziumdünnstäben
DE112006002595B4 (de) Herstellungsvorrichtung und Herstellungsverfahren für einen Einkristall-Halbleiter
DE69610021T2 (de) Verfahren und Vorrichtung zur Herstellung von Einkristallen durch die Czochralski-Technik
DE69014896T2 (de) Verbindungsbrücke für kerndrähte für apparate zur herstellung polykristallinen siliziums.
DE8306259U1 (de) Dielektrischer heizabschnitt in einer blasformmaschine
DE69706589T2 (de) Vorrichtung zur Herstellung Silizium-Einkristallen
DE3805118C2 (ko)
DE102004058547B4 (de) Verfahren und eine Vorrichtung zur Herstellung von Einkristallen mit großem Durchmesser
EP1107646B1 (de) Vorrichtung zum Beheizen von Schmelztiegeln
DE3530231C2 (ko)
DE1596386B2 (de) Mit strahlungsbrennern versehener speisekanal fuer schmelzfluessiges glas
EP0780059B1 (de) Vorrichtung zum Erwärmen der beleimten Überlappungsnaht eines Stranges der tabakverarbeitenden Industrie
EP0105175A1 (de) Vakuumgeformte elektrische Heizvorrichtung und Verfahren zu deren Herstellung
DE2755006B2 (de) Vorrichtung zum Kristallziehen aus der Schmelze
DE2453644C3 (de) Rollenkühlofen für ein nach dem Floatverfahren hergestelltes Glasband
AT524602B1 (de) Vorrichtung zur Herstellung eines Einkristalls
DE1471874C (de) Vorrichtung zum Ziehen von Glastafeln aus einer geschmolzenen Glasmasse
DE3152924C2 (en) Moulding box for the production of a ceramic mould
DE3539881A1 (de) Elektrischer strahlheizkoerper zur beheizung von heizflaechen sowie verfahren und vorrichtung zu seiner herstellung
DE102019102376B4 (de) Formvorrichtung zum Züchten von Einkristallen
DE2224685A1 (de) Vorrichtung zum tiegelfreien zonenschmelzen eines stabfoermigen koerpers aus kristallinem material, insbesondere aus halbleitermaterial
DE102004003035B4 (de) Elektrisches Heizelement aus einem flächigen Heizband
DE3313165C2 (de) Ofen zur Herstellung von Tonwaren

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 19950622

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE GB IT

17Q First examination report despatched

Effective date: 19951128

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: WACKER SILTRONIC GESELLSCHAFT FUER HALBLEITERMATER

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): DE GB IT

REF Corresponds to:

Ref document number: 59501823

Country of ref document: DE

Date of ref document: 19980514

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 19980507

ITF It: translation for a ep patent filed
PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20010604

Year of fee payment: 7

Ref country code: DE

Payment date: 20010604

Year of fee payment: 7

REG Reference to a national code

Ref country code: GB

Ref legal event code: IF02

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20020622

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20030101

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20020622

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES;WARNING: LAPSES OF ITALIAN PATENTS WITH EFFECTIVE DATE BEFORE 2007 MAY HAVE OCCURRED AT ANY TIME BEFORE 2007. THE CORRECT EFFECTIVE DATE MAY BE DIFFERENT FROM THE ONE RECORDED.

Effective date: 20050622