EP0690661B1 - Heating element for crucible - Google Patents
Heating element for crucible Download PDFInfo
- Publication number
- EP0690661B1 EP0690661B1 EP95109670A EP95109670A EP0690661B1 EP 0690661 B1 EP0690661 B1 EP 0690661B1 EP 95109670 A EP95109670 A EP 95109670A EP 95109670 A EP95109670 A EP 95109670A EP 0690661 B1 EP0690661 B1 EP 0690661B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- heating element
- meanders
- hollow body
- rounded
- perimeters
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 title claims description 39
- 239000013078 crystal Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 229910002804 graphite Inorganic materials 0.000 claims description 5
- 239000010439 graphite Substances 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 230000008018 melting Effects 0.000 claims 2
- 238000002844 melting Methods 0.000 claims 2
- 230000007257 malfunction Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 206010041662 Splinter Diseases 0.000 description 1
- 238000009395 breeding Methods 0.000 description 1
- 230000001488 breeding effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006735 deficit Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D11/00—Arrangement of elements for electric heating in or on furnaces
- F27D11/02—Ohmic resistance heating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/62—Heating elements specially adapted for furnaces
Definitions
- the invention described below relates to a Heating element used to heat crucibles becomes.
- Figure 1a shows a longitudinal section
- Figure 1b shows the cross section by a known heating element of this type. It has that Form of a cylindrical hollow body (1).
- the heating element is usually made of graphite and is for example for the production of crucible-drawn Single crystals of semiconductor material needed.
- Of the cylindrical hollow body is spaced by slots (2) incised alternating from the top or bottom Go out edge of the hollow body and to each lead opposite edge, but without this to reach.
- the slots divide the hollow body into individual, interconnected segments, which act as meanders (3) be designated. Every meander is through a slit partly into a left and a right half of a meander (3a) Cut.
- In the area of the lower edge of the heating element are at least two power supply lines (4) attached to the an electrical power source can be connected.
- the diameter of the heating element can be towards the bottom of the Hollow body be reduced so that the heating element like adapted to the shape of the crucible to be heated Vessel is formed. Embodiments are shown in the figures shown with constant diameter.
- the upper edge of the heating element protrudes over the top of the crucible so that the Contents of the crucible as evenly as possible through that of the heating element emitted heat radiation is heated.
- breeding of single crystals made of semiconductor material, in particular Silicon is often observed to be molten Semiconductor material from the crucible to the surface of the Heating element arrives.
- the one that protrudes beyond the edge of the crucible Edge of the heating element is particularly affected because under certain doping conditions molten Can inject material from the crucible.
- a meandering heating element is known from US Pat. No. 2,650,254, in which the upper, or lower sections of the meander are partially rounded so that the circumferential lines viewed in longitudinal section are curved in an arc.
- the task was to develop an improved heating element that was less prone to wear and that is more suitable for growing single crystals.
- a heating element for heating crucibles from a cylindrical hollow body which is meandered through slots Segments is divided, the circumferential lines of the longitudinal cut surfaces through the Meandering in the area of the upper and lower edges of the hollow body are rounded, and the circumferential lines of the cross-sectional areas through the meanders straight and curved portions, which is characterized in that the circumferential lines the cross-sectional areas do not form corners and also have rounded portions.
- FIG. 2a A heating element according to the present invention is shown in Figures 2a (in longitudinal section) and 2b (in cross section). A section of FIG. 2b is enlarged in FIG. 2c reproduced.
- the cylindrical hollow body (5) is through vertical slots (6) which alternate from go out the top and bottom and towards the opposite Lead edge, incised so that the typical shape of juxtaposed Meandering (7) arises (Fig.2a).
- power supply lines (8) brought up to the meanders.
- the power supplies are to an electrical power source during operation of the heating element connected.
- each meander has the transitions between two side surfaces of each meander, so that the meanders are free of edges and corners (Fig. 2c).
- the radius of curvature R of the rounding is preferably equal to or approximately equal to the cross-sectional length L of a meander half (7a).
- the circumferential lines (10) of the cut surfaces point straight, curved and rounded parts on (Fig.2b).
- a molded body is more suitable for producing the heating element according to the invention
- Size for example a graphite block or a graphite cylinder of a mechanical shape, for example by piercing, cutting, grinding, milling or the like, subject.
- a solid shaped body becomes a cylindrical hollow body produced.
- the hollow body is then provided with the appropriate slots and in this way divided into meandering segments. Eventually they will rounded transitions between abutting side surfaces of the meanders are rounded and so much material in the area of the upper or lower edge of the hollow body removed that the longitudinal cut surfaces through the meanders the intended, rounded Get shape.
- an edge is also considered to be rounded if the mechanical processing is carried out using a computer-controlled processing tool, that creates curved surfaces that, with sufficiently high resolution, as step-like level changes can be recognized.
- the heating element according to the invention is provided with the necessary power supplies with particular advantage as an electrical resistance heater for heating Crucibles in the manufacture of single crystals from semiconductor material, preferably Silicon.
- Draw heating elements with the features of the invention are characterized by the fact that they have a heating zone with special generate a uniform temperature profile. Through her Use when pulling single crystals out Semiconductor material is less likely to malfunction Crystal growth, directly or indirectly Malfunction of the heating element are. The yields increase based on their use the achievable length of dislocation-free single crystal, on. In addition, the mean operating times, after which a heating element is replaced on average according to initial attempts, more than twice as much longer than with conventional heating elements.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Description
Die nachstehend beschriebene Erfindung betrifft ein Heizelement, das zum Beheizen von Schmelztiegeln verwendet wird.The invention described below relates to a Heating element used to heat crucibles becomes.
Figur 1a zeigt einen Längsschnitt, Figur 1b den Querschnitt durch ein bekanntes Heizelement dieser Gattung. Es hat die Form eines zylinderförmigen Hohlkörpers (1). Das Heizelement ist in der Regel aus Graphit gefertigt und wird beispielsweise zur Herstellung von tiegelgezogenen Einkristallen aus Halbleitermaterial benötigt. Der zylinderförmige Hohlkörper ist in Abständen durch Schlitze (2) eingeschnitten, die alternierend vom oberen oder unteren Rand des Hohlkörpers ausgehen und zum jeweils gegenüberliegenden Rand führen, ohne diesen jedoch zu erreichen. Die Schlitze teilen den Hohlkörper in einzelne, miteinander verbundene Segmente auf, die als Mäander (3) bezeichnet werden. Jeder Mäander ist durch einen Schlitz teilweise in eine linke und eine rechte Mäanderhälfte (3a) getrennt. Im Bereich des unteren Randes des Heizelementes sind mindestens zwei Stromzuführungen (4) angebracht, an die eine elektrische Stromquelle angeschlossen werden kann.Figure 1a shows a longitudinal section, Figure 1b shows the cross section by a known heating element of this type. It has that Form of a cylindrical hollow body (1). The heating element is usually made of graphite and is for example for the production of crucible-drawn Single crystals of semiconductor material needed. Of the cylindrical hollow body is spaced by slots (2) incised alternating from the top or bottom Go out edge of the hollow body and to each lead opposite edge, but without this to reach. The slots divide the hollow body into individual, interconnected segments, which act as meanders (3) be designated. Every meander is through a slit partly into a left and a right half of a meander (3a) Cut. In the area of the lower edge of the heating element are at least two power supply lines (4) attached to the an electrical power source can be connected.
Der Durchmesser des Heizelementes kann zum unteren Rand des Hohlkörpers hin verringert sein, so daß das Heizelement wie ein an die Form des zu beheizenden Schmelztiegels angepaßtes Gefäß ausgebildet ist. In den Figuren sind Ausführungsformen mit gleichbleibendem Durchmesser gezeigt.The diameter of the heating element can be towards the bottom of the Hollow body be reduced so that the heating element like adapted to the shape of the crucible to be heated Vessel is formed. Embodiments are shown in the figures shown with constant diameter.
Üblicherweise ragt der obere Rand des Heizelementes über den oberen Rand des Schmelztiegels hinaus, damit der Tiegelinhalt möglichst gleichmäßig durch die vom Heizelement abgegebene Wärmestrahlung aufgeheizt wird. Bei der Züchtung von Einkristallen aus Halbleitermaterial, insbesondere aus Silicium, ist häufig zu beobachten, daß geschmolzenes Halbleitermaterial aus dem Tiegel an die Oberläche des Heizelementes gelangt. Der über den Tiegelrand hinausragende Rand des Heizelementes ist davon besonders betroffen, da unter bestimmten Dotierungs-Bedingungen schmelzflüssiges Material aus dem Tiegel spritzen kann. Darüber hinaus kondensiert Halbleitermaterial, das den Tiegel in gasförmigem Zustand verläßt, bevorzugt auf den Rändern des Heizelementes wieder aus. Diese Ablagerungen können, wie im Fall von Silicium, mit dem Graphit des Heizelementes zu carbidischen Phasen reagieren, die wegen unterschiedlicher Wärmeausdehnungs-Koeffizienten Spannungen im Heizelement erzeugen. Diese Spannungen lösen sich häufig dadurch, daß Teile vom Heizelement absplittern und während der Kristallzucht in den Schmelztiegel fallen. Dort stören sie das versetzungsfreie Wachstum des Einkristalls erheblich. In besonders ungünstigen Fällen muß sogar die Kristallzüchtung wegen eines solchen Vorfalles abgebrochen werden. Durch das wiederholte Absplittern von Teilen des Heizelementes wird auch dessen Betriebsdauer stark herabgesetzt, so daß es früher gegen ein Neues ausgetauscht werden muß. Eine weitere Beeinträchtigung der störungsfreien Kristallzucht und der Betriebsdauer des Heizelementes resultiert durch elektrische Überschläge, die sich häufen, weil Halbleitermaterial auch besonders im Bereich des unteren Randes des Heizelementes auskondensiert und dabei die Schlitzbreite zwischen den Mäandern und/oder den Abstand des Heizelementes zu benachbarten Anlagenteilen verringert.Usually the upper edge of the heating element protrudes over the top of the crucible so that the Contents of the crucible as evenly as possible through that of the heating element emitted heat radiation is heated. When breeding of single crystals made of semiconductor material, in particular Silicon, is often observed to be molten Semiconductor material from the crucible to the surface of the Heating element arrives. The one that protrudes beyond the edge of the crucible Edge of the heating element is particularly affected because under certain doping conditions molten Can inject material from the crucible. Furthermore condenses semiconductor material that the crucible in leaves gaseous state, preferably on the edges of the Heating element again. These deposits can, as in Case of silicon, with the graphite of the heating element too carbidic phases react because of different Thermal expansion coefficient stresses in the heating element produce. These tensions are often solved by the fact that Splinter parts from the heating element and during the Crystal growing fall into the crucible. There they interfere the dislocation-free growth of the single crystal considerably. In In particularly unfavorable cases, even crystal growing be canceled due to such an incident. By the repeated chipping of parts of the heating element also its operating time greatly reduced, so that it must be exchanged for a new one earlier. Another Impairment of trouble-free crystal growing and Operating time of the heating element results from electrical Rollovers that pile up because of semiconductor material also especially in the area of the lower edge of the Heating element condensed out and the slot width between the meanders and / or the distance of the heating element to neighboring system parts decreased.
Aus der US-2,650,254 ist ein mäanderförmiges Heizelement bekannt, bei dem die oberen, beziehungsweise unteren Abschnitte der mäander teilweise so gerundet sind, daß die Umfangslinien im Längsschnitt betrachtet bogenförmig gekrümmt sind.A meandering heating element is known from US Pat. No. 2,650,254, in which the upper, or lower sections of the meander are partially rounded so that the circumferential lines viewed in longitudinal section are curved in an arc.
Es bestand die Aufgabe, ein verbessertes Heizelement zu entwickeln, das weniger verschleißanfällig ist und das zur Zucht von Einkristallen geeigneter ist.The task was to develop an improved heating element that was less prone to wear and that is more suitable for growing single crystals.
Gelöst wird die Aufgabe durch ein Heizelement zum Beheizen von Schmelztiegeln, bestehend aus einem zylinderförmigen Hohlkörper, der durch Schlitze in mäanderförmige Segmente geteilt ist, wobei die Umfangslinien der Längsschnittflächen durch die Mäander im Bereich des oberen und unteren Randes des Hohlkörpers bogenförmig gerundet sind, und die Umfangslinien der Querschnittflächen durch die Mäander gerade und gekrümmte Anteile aufweisen, das dadurch gekennzeichnet ist, daß die Umfangslinien der Querschnittsflächen keine Ecken bilden und auch abgerundete Anteile aufweisen.The task is solved by a heating element for heating crucibles from a cylindrical hollow body which is meandered through slots Segments is divided, the circumferential lines of the longitudinal cut surfaces through the Meandering in the area of the upper and lower edges of the hollow body are rounded, and the circumferential lines of the cross-sectional areas through the meanders straight and curved portions, which is characterized in that the circumferential lines the cross-sectional areas do not form corners and also have rounded portions.
Ein Heizelement gemäß der vorliegenden Erfindung ist in den Figuren 2a (im Längsschnitt) und 2b (im Querschnitt) dargestellt. In Figur 2c ist ein Ausschnitt aus Figur 2b vergrößert wiedergegeben.A heating element according to the present invention is shown in Figures 2a (in longitudinal section) and 2b (in cross section). A section of FIG. 2b is enlarged in FIG. 2c reproduced.
Der zylinderförmige Hohlkörper (5) ist durch senkrechte Schlitze (6), die alternierend vom oberen und unteren Rand ausgehen und in Richtung zum jeweils gegenüberliegenden Rand führen, eingeschnitten, so daß die typische Form von nebeneinander angeordneten Mäandern (7) entsteht (Fig.2a). Im unteren Randbereich des Hohlkörpers sind an mindestens zwei Stellen Stromzuführungen (8) an die Mäander herangeführt. Die Stromzuführungen sind während des Betriebes des Heizelementes an eine elektrische Stromquelle angeschlossen. The cylindrical hollow body (5) is through vertical slots (6) which alternate from go out the top and bottom and towards the opposite Lead edge, incised so that the typical shape of juxtaposed Meandering (7) arises (Fig.2a). At least in the lower edge area of the hollow body two places power supply lines (8) brought up to the meanders. The power supplies are to an electrical power source during operation of the heating element connected.
Die Übergänge zwischen zwei Seitenflächen jedes Mäanders sind mit dem Radius r gerundet, so daß die Mäander frei von Kanten und Ecken sind (Fig. 2c). Im Längsschnitt durch die Mäander (7) sind die Umfangslinien (9) der Schnittflächen im Bereich des oberen, beziehungsweise unteren Randes des Hohlkörpers (5) bogenförmig gerundet (Fig.2a). Dies verleiht den Randkonturen ein rosettenförmiges Aussehen. Der Krümmungsradius R der Rundung ist vorzugsweise gleich oder annähernd gleich der Querschnittslänge L einer Mäanderhälfle (7a). Im Querschnitt durch die Mäander weisen die Umfangslinien (10) der Schnittflächen gerade, gekrümmte und abgerundete Anteile auf (Fig.2b).The transitions between two side surfaces of each meander are rounded with the radius r, so that the meanders are free of edges and corners (Fig. 2c). In longitudinal section through the meanders (7) are the circumferential lines (9) of the cut surfaces in the area of the upper, respectively lower edge of the hollow body (5) rounded in an arc (Fig.2a). This gives the Edge contours a rosette-like appearance. The radius of curvature R of the rounding is preferably equal to or approximately equal to the cross-sectional length L of a meander half (7a). In cross-section through the meanders, the circumferential lines (10) of the cut surfaces point straight, curved and rounded parts on (Fig.2b).
Zur Herstellung des erfindungsgemäßen Heizelementes wird ein Formkörper geeigneter Größe, beispielsweise ein Graphitblock oder ein Graphitzylinder einer mechanischen Formgebung, beispielsweise durch Stechen, Schneiden, Schleifen, Fräsen oder dergleichen, unterworfen. Zunächst wird aus einem massiven Formkörper ein zylinderförmiger Hohlkörper hergestellt. Der Hohlkörper wird anschließend mit den entsprechenden Schlitzen versehen und auf diese Weise in mäanderförmige Segmente unterteilt. Schließlich werden die kantigen Übergänge zwischen aneinanderstoßenden Seitenflächen der Mäander gerundet und im Bereich des oberen, beziehungsweise unteren Randes des Hohlkörpers soviel Material entfernt, daß die Längsschnittflächen durch die Mäander die vorgesehene, gerundete Form erhalten. Eine Kante gilt im Sinne der Erfindung auch dann als gerundet, wenn die mechanische Bearbeitung durch ein rechnergesteuertes Bearbeitungswerkzeug erfolgt, das gekrümmte Flächen erzeugt, die, bei genügend hoher Auflösung, als stufenförmige Niveauänderungen erkannt werden können.A molded body is more suitable for producing the heating element according to the invention Size, for example a graphite block or a graphite cylinder of a mechanical shape, for example by piercing, cutting, grinding, milling or the like, subject. First of all, a solid shaped body becomes a cylindrical hollow body produced. The hollow body is then provided with the appropriate slots and in this way divided into meandering segments. Eventually they will rounded transitions between abutting side surfaces of the meanders are rounded and so much material in the area of the upper or lower edge of the hollow body removed that the longitudinal cut surfaces through the meanders the intended, rounded Get shape. For the purposes of the invention, an edge is also considered to be rounded if the mechanical processing is carried out using a computer-controlled processing tool, that creates curved surfaces that, with sufficiently high resolution, as step-like level changes can be recognized.
Mit den notwendigen Stromzuführungen versehen wird das erfindungsgemäße Heizelement mit besonderem Vorteil als elektrische Widerstandsheizung zum Beheizen von Schmelztiegeln bei der Herstellung von Einkristallen aus Halbleitermaterial, vorzugsweise Silicium, verwendet. The heating element according to the invention is provided with the necessary power supplies with particular advantage as an electrical resistance heater for heating Crucibles in the manufacture of single crystals from semiconductor material, preferably Silicon.
Heizelemente mit den erfindungsgemäßen Merkmalen zeichnen sich dadurch aus, daß sie eine Heizzone mit besonders gleichmäßigem Temperaturprofil erzeugen. Durch ihre Verwendung beim Ziehen von Einkristallen aus Halbleitermaterial kommt es seltener zu Störungen des Kristallwachstums, die direkt oder indirekt auf Fehlfunktionen des Heizelementes zurückzuführen sind. Durch ihre Verwendung steigen die Ausbeuten, bezogen auf die erzielbare Länge an versetzungsfreiem Einkristall, an. Darüber hinaus sind auch die mittleren Betriebszeiten, nach denen ein Heizelement im Durchschnitt ausgewechselt werden muß, ersten Versuchen zufolge mehr als doppelt so lange, als bei herkömmlichen Heizelementen.Draw heating elements with the features of the invention are characterized by the fact that they have a heating zone with special generate a uniform temperature profile. Through her Use when pulling single crystals out Semiconductor material is less likely to malfunction Crystal growth, directly or indirectly Malfunction of the heating element are. The yields increase based on their use the achievable length of dislocation-free single crystal, on. In addition, the mean operating times, after which a heating element is replaced on average according to initial attempts, more than twice as much longer than with conventional heating elements.
Claims (4)
- Heating element for heating melting crucibles, comprising a cylindrical hollow body (5) which is divided by slits (6) into meandrous segments (7), the perimeters (9) of the areas defined by longitudinal section through the meanders (7) being rounded arcuately in the vicinity of the upper and lower rim of the hollow body (5), and the perimeters (10) of the areas defined by cross-section through the meanders (7) having straight and curved portions, characterized in that the perimeters (10) of the cross-sectional areas do not form any vertices, and also have rounded portions.
- Heating element according to Claim 1, characterized in that the perimeters (9) of the areas defined by longitudinal section through the meanders (7) in the vicinity of the upper and lower rim, respectively, of the hollow body (5) are rounded with a radius of curvature R which is equal to or approximately equal to the cross-sectional length L of a meander half (7a).
- Heating element according to Claim 1 or Claim 2, characterized in that the meanders (7) are made of graphite.
- Use of the heating element according to any one of Claims 1 to 3 for heating a melting crucible in growing single crystals of semiconductor material, especially silicon.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4423196A DE4423196A1 (en) | 1994-07-01 | 1994-07-01 | Heating element for heating crucibles |
| DE4423196 | 1994-07-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP0690661A1 EP0690661A1 (en) | 1996-01-03 |
| EP0690661B1 true EP0690661B1 (en) | 1998-04-08 |
Family
ID=6522076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP95109670A Expired - Lifetime EP0690661B1 (en) | 1994-07-01 | 1995-06-22 | Heating element for crucible |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5660752A (en) |
| EP (1) | EP0690661B1 (en) |
| JP (1) | JP2909529B2 (en) |
| KR (1) | KR0171462B1 (en) |
| CN (1) | CN1115843A (en) |
| DE (2) | DE4423196A1 (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5911825A (en) * | 1997-09-30 | 1999-06-15 | Seh America, Inc. | Low oxygen heater |
| DE19959416C1 (en) | 1999-12-09 | 2001-03-15 | Freiberger Compound Mat Gmbh | Heating element for heating a melt crucible in the production of gallium arsenide single crystals has a hollow body comprising first hollow cylindrical section and a second section |
| WO2003073794A1 (en) * | 2002-02-27 | 2003-09-04 | Carbone Lorraine Composants | Resistor made from carbonaceous material |
| FR2836592A1 (en) * | 2002-02-27 | 2003-08-29 | Carbone Lorraine Composants | Crenellated resistor for furnaces, has hollow cylinder wall whose radial thickness decreases in transition section from peripheral edge to internal edge |
| JP2006123885A (en) * | 2004-09-28 | 2006-05-18 | Denso Corp | In-vehicle radiation heater |
| JP5360958B2 (en) * | 2008-10-23 | 2013-12-04 | ナビオ株式会社 | Melting crucible |
| JP5828232B2 (en) | 2011-06-29 | 2015-12-02 | 住友電気工業株式会社 | Glass furnace heating furnace |
| WO2024174602A1 (en) * | 2023-02-24 | 2024-08-29 | 广东美的厨房电器制造有限公司 | Heating element, heating apparatus, and cooking device |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2650254A (en) * | 1953-08-25 | Side heater | ||
| US2640861A (en) * | 1950-11-27 | 1953-06-02 | Harshaw Chem Corp | Resistance furnace |
| FR2067967A5 (en) * | 1969-11-24 | 1971-08-20 | Anvar | |
| US4347431A (en) * | 1980-07-25 | 1982-08-31 | Bell Telephone Laboratories, Inc. | Diffusion furnace |
| FR2497050A1 (en) * | 1980-12-23 | 1982-06-25 | Saphymo Stel | COLD CAGE DIRECT INDUCTION FUSION DEVICE WITH ELECTROMAGNETIC CONTAINMENT OF MOLTEN LOAD |
| JPS5865795U (en) * | 1981-10-28 | 1983-05-04 | 株式会社神戸製鋼所 | Heating device in hot isostatic pressure treatment equipment |
| US4410796A (en) * | 1981-11-19 | 1983-10-18 | Ultra Carbon Corporation | Segmented heater assembly |
| DE3242959C2 (en) * | 1981-11-20 | 1986-02-20 | Kabushiki Kaisha Kobe Seiko Sho, Kobe | Isostatic hot press device |
| JPS60137894A (en) * | 1983-12-26 | 1985-07-22 | Toshiba Ceramics Co Ltd | Cylindrical heater |
| US4755658A (en) * | 1985-11-12 | 1988-07-05 | Ultra Carbon Corporation | Segmented heater system |
| JPH0468296A (en) * | 1990-07-09 | 1992-03-04 | Fujitsu Ltd | Semiconductor manufacturing device |
| JP2952390B2 (en) * | 1990-11-01 | 1999-09-27 | イビデン株式会社 | Manufacturing method of graphite heater and processing jig used therefor |
| JPH0613091U (en) * | 1991-05-30 | 1994-02-18 | 東海高熱工業株式会社 | Silicon carbide heating element |
-
1994
- 1994-07-01 DE DE4423196A patent/DE4423196A1/en not_active Withdrawn
-
1995
- 1995-05-26 US US08/450,481 patent/US5660752A/en not_active Expired - Fee Related
- 1995-06-20 CN CN95107691A patent/CN1115843A/en active Pending
- 1995-06-22 EP EP95109670A patent/EP0690661B1/en not_active Expired - Lifetime
- 1995-06-22 DE DE59501823T patent/DE59501823D1/en not_active Expired - Fee Related
- 1995-06-30 JP JP7166328A patent/JP2909529B2/en not_active Expired - Lifetime
- 1995-07-01 KR KR1019950019191A patent/KR0171462B1/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DE4423196A1 (en) | 1996-01-04 |
| JPH0842976A (en) | 1996-02-16 |
| DE59501823D1 (en) | 1998-05-14 |
| EP0690661A1 (en) | 1996-01-03 |
| JP2909529B2 (en) | 1999-06-23 |
| CN1115843A (en) | 1996-01-31 |
| KR0171462B1 (en) | 1999-02-18 |
| US5660752A (en) | 1997-08-26 |
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