EP0653059A1 - Thin film gas sensor and method of fabrication thereof - Google Patents

Thin film gas sensor and method of fabrication thereof

Info

Publication number
EP0653059A1
EP0653059A1 EP94918253A EP94918253A EP0653059A1 EP 0653059 A1 EP0653059 A1 EP 0653059A1 EP 94918253 A EP94918253 A EP 94918253A EP 94918253 A EP94918253 A EP 94918253A EP 0653059 A1 EP0653059 A1 EP 0653059A1
Authority
EP
European Patent Office
Prior art keywords
thin film
gas sensor
ionic conductor
recited
heating element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP94918253A
Other languages
German (de)
English (en)
French (fr)
Inventor
John F. Currie
André LECOURS
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Les Capteurs Carpo R & D Inc
Original Assignee
Les Capteurs Carpo R & D Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Les Capteurs Carpo R & D Inc filed Critical Les Capteurs Carpo R & D Inc
Publication of EP0653059A1 publication Critical patent/EP0653059A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4073—Composition or fabrication of the solid electrolyte
    • G01N27/4074—Composition or fabrication of the solid electrolyte for detection of gases other than oxygen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
EP94918253A 1993-06-02 1994-06-01 Thin film gas sensor and method of fabrication thereof Withdrawn EP0653059A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US7026793A 1993-06-02 1993-06-02
US70267 1993-06-02
PCT/CA1994/000312 WO1994028403A1 (en) 1993-06-02 1994-06-01 Thin film gas sensor and method of fabrication thereof

Publications (1)

Publication Number Publication Date
EP0653059A1 true EP0653059A1 (en) 1995-05-17

Family

ID=22094235

Family Applications (1)

Application Number Title Priority Date Filing Date
EP94918253A Withdrawn EP0653059A1 (en) 1993-06-02 1994-06-01 Thin film gas sensor and method of fabrication thereof

Country Status (5)

Country Link
EP (1) EP0653059A1 (ja)
JP (1) JPH07509567A (ja)
AU (1) AU6966894A (ja)
CA (1) CA2141561A1 (ja)
WO (1) WO1994028403A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19525764A1 (de) * 1995-07-14 1997-01-16 Siemens Matsushita Components CO¶2¶-Sensor
DE19623487C2 (de) * 1996-06-12 1999-01-07 Max Planck Gesellschaft Gavanische Zelle und deren Verwendung als Gassensor
US6073478A (en) * 1998-02-02 2000-06-13 Her Majesty The Queen In Right Of Canada, As Represented By The Minister Of Natural Resources Hydrogen sensor using a solid hydrogen ion conducting electrolyte
US20040084308A1 (en) * 2002-11-01 2004-05-06 Cole Barrett E. Gas sensor
US8813539B2 (en) * 2007-07-10 2014-08-26 National Taiwan University Of Science And Technology Electrochemistry apparatus
US20170324119A1 (en) * 2016-05-06 2017-11-09 GM Global Technology Operations LLC Reference electrode implementation with reduced measurement artifacts
DE102017200156A1 (de) * 2017-01-09 2018-07-12 Robert Bosch Gmbh Herstellungsverfahren für eine mikromechanische Sensorvorrichtung und entsprechende mikromechanische Sensorvorrichtung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04230842A (ja) * 1990-05-11 1992-08-19 Toshio Maruyama 固体電解質を用いたガスセンサ
GB9116385D0 (en) * 1991-07-30 1991-09-11 British Gas Plc Oxygen sensor
DE4131503A1 (de) * 1991-09-21 1993-04-01 Bosch Gmbh Robert Abgassensor und verfahren zu dessen herstellung

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO9428403A1 *

Also Published As

Publication number Publication date
CA2141561A1 (en) 1994-12-08
JPH07509567A (ja) 1995-10-19
WO1994028403A1 (en) 1994-12-08
AU6966894A (en) 1994-12-20

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Legal Events

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