AU6966894A - Thin film gas sensor and method of fabrication thereof - Google Patents

Thin film gas sensor and method of fabrication thereof

Info

Publication number
AU6966894A
AU6966894A AU69668/94A AU6966894A AU6966894A AU 6966894 A AU6966894 A AU 6966894A AU 69668/94 A AU69668/94 A AU 69668/94A AU 6966894 A AU6966894 A AU 6966894A AU 6966894 A AU6966894 A AU 6966894A
Authority
AU
Australia
Prior art keywords
fabrication
thin film
gas sensor
film gas
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU69668/94A
Inventor
John F Currie
Andre Lecours
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Les Capteurs Capco R & D Inc
Original Assignee
Capteurs Capco R & D Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Capteurs Capco R & D Inc filed Critical Capteurs Capco R & D Inc
Publication of AU6966894A publication Critical patent/AU6966894A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4073—Composition or fabrication of the solid electrolyte
    • G01N27/4074—Composition or fabrication of the solid electrolyte for detection of gases other than oxygen
AU69668/94A 1993-06-02 1994-06-01 Thin film gas sensor and method of fabrication thereof Abandoned AU6966894A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US7026793A 1993-06-02 1993-06-02
US070267 1993-06-02
PCT/CA1994/000312 WO1994028403A1 (en) 1993-06-02 1994-06-01 Thin film gas sensor and method of fabrication thereof

Publications (1)

Publication Number Publication Date
AU6966894A true AU6966894A (en) 1994-12-20

Family

ID=22094235

Family Applications (1)

Application Number Title Priority Date Filing Date
AU69668/94A Abandoned AU6966894A (en) 1993-06-02 1994-06-01 Thin film gas sensor and method of fabrication thereof

Country Status (5)

Country Link
EP (1) EP0653059A1 (en)
JP (1) JPH07509567A (en)
AU (1) AU6966894A (en)
CA (1) CA2141561A1 (en)
WO (1) WO1994028403A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19525764A1 (en) * 1995-07-14 1997-01-16 Siemens Matsushita Components CO¶2¶ sensor
DE19623487C2 (en) * 1996-06-12 1999-01-07 Max Planck Gesellschaft Javanese cell and its use as a gas sensor
US6073478A (en) * 1998-02-02 2000-06-13 Her Majesty The Queen In Right Of Canada, As Represented By The Minister Of Natural Resources Hydrogen sensor using a solid hydrogen ion conducting electrolyte
US20040084308A1 (en) * 2002-11-01 2004-05-06 Cole Barrett E. Gas sensor
US8813539B2 (en) * 2007-07-10 2014-08-26 National Taiwan University Of Science And Technology Electrochemistry apparatus
US20170324119A1 (en) * 2016-05-06 2017-11-09 GM Global Technology Operations LLC Reference electrode implementation with reduced measurement artifacts
DE102017200156A1 (en) * 2017-01-09 2018-07-12 Robert Bosch Gmbh Manufacturing method for a micromechanical sensor device and corresponding micromechanical sensor device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04230842A (en) * 1990-05-11 1992-08-19 Toshio Maruyama Gas sensor using solid electrolyte
GB9116385D0 (en) * 1991-07-30 1991-09-11 British Gas Plc Oxygen sensor
DE4131503A1 (en) * 1991-09-21 1993-04-01 Bosch Gmbh Robert EXHAUST GAS SENSOR AND METHOD FOR THE PRODUCTION THEREOF

Also Published As

Publication number Publication date
WO1994028403A1 (en) 1994-12-08
EP0653059A1 (en) 1995-05-17
JPH07509567A (en) 1995-10-19
CA2141561A1 (en) 1994-12-08

Similar Documents

Publication Publication Date Title
AU6121294A (en) Desiccant-coated substrate and method of manufacture
AU7042894A (en) Apparatus and method of film thickness measurement
AU7590594A (en) Gas barrier film and production process thereof
AU3966697A (en) Hermetically sealable film and method of making
SG49605A1 (en) Magnetoresistive film method of its fabrication and magnetoresistive sensor
AU7420194A (en) Gas barrier film and production process thereof
AU1208699A (en) Silicon nitrogen-based films and method of making the same
AU4834393A (en) Method of forming air film on submerged surface of submerged part-carrying structure, and film structure on submerged surface
AU7475594A (en) Air filter and method of construction
AU4487393A (en) Thin film thickness monitoring and control
EP0652308A3 (en) Method of and apparatus for forming single-crystalline thin film
EP0858582A4 (en) Thin film bridge initiators and method of manufacture
AU6814794A (en) Synthesis of metal oxide thin films
AU6830394A (en) Integrated membrane permeators and method of fabrication
AU8011694A (en) Casket and method of making same
AU7968694A (en) Bags and method of making bags
AU6976594A (en) Semiconducting oxide gas sensors and materials therefor
HU9601094D0 (en) Thin film actuated mirror array and method for its manufacture
AU1335095A (en) Coated hdpe film and its method of manufacture
EP0762079A3 (en) Method and apparatus for measuring the thickness of a film
AU4926796A (en) Environmental enclosure and method of sealing same
EP0617439A3 (en) Thin film capacitor and method of manufacturing the same.
AU7467596A (en) Ceramic wafers and thin film magnetic heads
AU6966894A (en) Thin film gas sensor and method of fabrication thereof
AU5513994A (en) Thin film transducer and separated transformer