EP0491163A1 - Verfahren und Vorrichtung zur elektrolytischen Erzeugung von Kupferfolien - Google Patents

Verfahren und Vorrichtung zur elektrolytischen Erzeugung von Kupferfolien Download PDF

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Publication number
EP0491163A1
EP0491163A1 EP91119338A EP91119338A EP0491163A1 EP 0491163 A1 EP0491163 A1 EP 0491163A1 EP 91119338 A EP91119338 A EP 91119338A EP 91119338 A EP91119338 A EP 91119338A EP 0491163 A1 EP0491163 A1 EP 0491163A1
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EP
European Patent Office
Prior art keywords
anodes
thickness
sub
anode
copper foil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP91119338A
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English (en)
French (fr)
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EP0491163B1 (de
Inventor
Toyoshige C/O Nikko Gould Foil Co. Ltd. Kubo
Katsuhiko C/O Nikko Gould Foil Co.Ltd. Fujishima
Narito C/O Nikko Gould Foil Co.Ltd. Yamamoto
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Nippon Mining Holdings Inc
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Nikko Materials Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Priority claimed from JP41176690A external-priority patent/JP2506575B2/ja
Priority claimed from JP2411764A external-priority patent/JP2506573B2/ja
Priority claimed from JP2411765A external-priority patent/JP2506574B2/ja
Application filed by Nikko Materials Co Ltd filed Critical Nikko Materials Co Ltd
Publication of EP0491163A1 publication Critical patent/EP0491163A1/de
Application granted granted Critical
Publication of EP0491163B1 publication Critical patent/EP0491163B1/de
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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/04—Wires; Strips; Foils

Definitions

  • This invention relates to a method and apparatus of producing an electrolytic copper foil. More particularly, this invention relates to a method and apparatus of producing an electrolytic copper foil characterized by the provision of a plurality of foil thickness-controlling sub-anodes for uniformizing or otherwise locally changing or modifying as desired the thickness of the electrolytic copper foil being made and by the individual control of either the quantities of electricity being supplied to the individual foil thickness-controlling sub-anodes or the set positions of the sub-anodes. Under this invention, a high-quality electrolytic copper foil with a uniform thickness or an adjusted thickness in the direction of the width or the length or in the directions of both of them is obtained.
  • Electrolytic copper foil is produced by passing a stream of electrolyte between an anode of insoluble metal and a metallic cathode drum mirror-polished on the surface and supplying a potential between the anode and the cathode drum, thereby causing electrodeposition of copper on the cathode drum surface, and, when the electrodeposit has attained a predetermined thickness, peeling the same from the cathode drum.
  • the copper foil thus obtained, called as untreated foil is thereafter variously surface-treated to be final products.
  • FIG. 1 illustrates the relative position of a cathode drum and an anode as divided here into two anode sheets conventionally used for the manufacture of copper foil.
  • the cathode drum 1 is installed to be rotatable (clockwise in this case) as partly submerged in the electrolyte.
  • the anode e.g., two anode sheets 3, is disposed to cover generally the submerged lower half of the cathode drum 1 in spaced relation with a given clearance from the drum surface.
  • the electrolyte is supplied at 6 o'clock position (of the hour hand, the same applying hereinafter) between the two anode sheets 3. It flows upward along the space between the cathode drum and the anode and overflows the upper edges of the anode for circulation.
  • a rectifier 5 maintains a given current between the cathode drum and the anode.
  • the electrodeposit of copper from the electrolyte becomes thicker, and becomes a desired thickness around 9 o'clock position and an untreated foil that has attained a desired thickness is peeled off by suitable peeler means and wound up.
  • the untreated copper foil so produced varied in its thickness widthwise, lengthwise or in both of them as shown in FIG. 1.
  • electrolytic copper foil With electrolytic copper foil, one of the important qualitative requirements is that it is uniform in thickness.
  • the production line must be stopped for correcting the surface of an anode for the purpose of uniformizing the thickness of a copper foil produced and even when the above steps are taken, they could not adequately prevent the variations in thickness of the copper foil produced.
  • Copper foil is mostly used in printed-circuit boards.
  • the modern tendency with those boards is toward higher density, with finer circuit patterns and thinner layers for higher degrees of multilayer integration. This has not only induced the development of thinner copper foils but has brought increasingly exacting requirements for the uniformity of foil thickness.
  • the two methods of the prior art described above for uniformizing the thickness in the direction of the width are disadvantageous in that neither permits the correction during the course of operation. They cannot cope with the variations in thickness of the foil in the direction of the width due to uncertain factors originating from causes other than anode, e.g., the thickness variations attributable to the cathode drum or to changes or lack of uniformity of the flow of the electrolyte.
  • uncertain factors originating from causes other than anode e.g., the thickness variations attributable to the cathode drum or to changes or lack of uniformity of the flow of the electrolyte.
  • the partial cutting of the anode is time-consuming and cumbersome and renders it not always easy to achieve the end.
  • the object of the present invention is to develop a novel method and apparatus of producing electrolytic copper foil which permits the control in thickness of a copper foil including the uniformity and local change of thickness in the directions of width, length or both of the foil during operation and also the correction of thickness variation owing to indefinite and uncertain factors.
  • the present inventors have conceived of composing an anode at least part of which is divided into a plurality of sub-anodes for controlling foil thickness wherein the sub-anodes are individually controlled so as to produce an electrolytic copper foil having a uniform thickness or an adjusted thickness. To this end it has been found desirable to control either the quantities of electricity being supplied to the individual sub-anodes or the set positions of the sub-anodes individually.
  • this invention provides method of producing an electrolytic copper foil which comprises passing a stream of electrolyte between a rotating cathode drum and at least one anode facing the drum, effecting electrodeposition of copper on the surface of the cathode drum to form a copper foil, and thereafter peeling the foil from the drum, characterized in that the anode is at least partly divided into a plurality of sub-anodes for controlling foil thickness and that the foil thickness is controlled by controlling the individual sub-anodes.
  • This invention also provides an apparatus therefor.
  • the sub-anodes corresponding to the zone which needs such change or modification are controlled in the electricity supplied thereto or the set position in the manner as explained above.
  • At least a part of one, preferably at least one on the copper foil-recovering side, of the anode sheets already described with reference to FIG. 1 is divided widthwise into a plurality of sub-anodes for controlling foil thickness widthwise. It is, of course, possible to provide such sub-anodes as auxiliary anodes in addition to an existing anode.
  • FIGs. 2 and 3 there is illustrated an embodiment of the invention with a construction such that one of anode sheets, on the copper foil-recovering side, is partly divided into sub-anodes for controlling foil thickness.
  • FIG. 4 shows another embodiment constructed so that not only the anode sheet on the copper foil-recovering side but also the sheet on the electrodeposition-starting side is partly provided with sub-anodes for controlling foil thickness. Control is exercised both at the points where electrodeposition is started and concluded.
  • FIG. 5 depicts an embodiment in which one of two anode sheets, on the copper foil-recovering side, is split throughout the entire length into segmental sub-anodes for controlling foil thickness.
  • one anode is divided into from 10 to 40 sub-anodes.
  • Some apparatus for producing electrolytic copper foil show the tendency of producing a foil especially thin in the central zone or conversely along at least one edge portion.
  • FIG. 6 illustrates yet another embodiment in which only the middle portion of one anode sheet, on the copper foil-recovering side, is divided into sub-anodes for controlling foil thickness
  • FIG. 7 is an embodiment in which the both edge portions of one anode sheet are divided into sub-anodes for controlling foil thickness.
  • the sub-anodes may form a part of the anode and, specifically in FIG. 7, either edge portion alone may be so divided. The choice depends on the conditions of the particular copper foil production equipment used.
  • a cathode drum 1 which is a rotatable cylinder, e.g., of stainless steel or titanium, is held in place by support means, as partly submerged in the electrolyte and made rotatable clockwise in the embodiment shown.
  • support means as partly submerged in the electrolyte and made rotatable clockwise in the embodiment shown.
  • the anode 3 preferably consists of two anode sheets disposed along at least lower quarter, each, of the cathode drum 1 as shown. According to the necessity, it may be replaced by a single anode sheet or by three, four, or more sheets.
  • a part of the anode sheet on the copper foil-recovering side is comprised of sub-anodes 4 for controlling foil thickness widthwise, as described above.
  • a suitable number of sub-anodes, 4', 4'', 4''', and so forth, are thus provided.
  • the space between the cathode drum and the anodes is kept constant, usually in the range from 2 to 100 mm. The narrower the space the less the electricity consumption but the more difficult will be the control of the film thickness and quality.
  • This space between the cathode drum and the anode sheets constitutes a flow passage for the electrolyte.
  • the electrolyte is supplied at 6 o'clock position between two anode sheets 3 by way of a proper pump in the cell (not shown). It passes as divided streams in both directions along the space and overflows the both upper edges of the anode sheets for circulation.
  • a rectifier 5 maintains a given current between the cathode drum and the anode.
  • the cathode drum 1 As the cathode drum 1 rotates, electrodeposition of copper from the electrolyte starts, approximately at 3 o'clock position, and the deposit thickness increases until it attains a desired thickness at about 9 o'clock position where the electrodeposition comes to an end.
  • the foil of the desired thickness is peeled off by suitable peeler means at about 12 o'clock position and wound up.
  • the anode, especially of the lead type, is locally worn with use. This results in variation in space between the cathode drum and the anode.
  • the cathode drum can be responsible for some variation in foil thickness, and the electrolyte stream can undergo a certain deflection or irregularity in flow. Altogether, they tend to cause localized variation in thickness in the direction of the width of the foil.
  • the thickness in the direction of the width of the untreated foil is determined after the peeling and, when a thickness variation beyond a permissible limit has been detected, electrical currents supplied to the specific sub-anodes 4 corresponding to the specific sections in the direction of the width are controlled independently of one another.
  • sub-rectifiers 7 are connected between the individual sub-anodes 4 and the cathode drum 1.
  • the thickness values at different points in the direction of the width of the copper foil can be simply determined by suitable sampling, in terms of the weight per unit area.
  • a thickness measuring instrument such as of the static capacity detection type, may be installed in the winding route to monitor the thickness, cooperatively with the sub-rectifiers via feedback means.
  • insulating seal Between adjacent sub-anodes is preferably interposed an insulating seal.
  • Useful insulating materials for this purpose include sheets of PVC and cold curable rubber (for example, one marketed under the trade designation "RTV"). Insulation is provided instead by bonding adjacent sub-anodes with an insulating adhesive or integrally joining the sub-anodes with an insulating film therebetween.
  • the individual sub-anodes for controlling foil thickness widthwise can also be controlled through the control of their set positions.
  • means are provided to support the individual sub-anodes 4 and move them toward or away from the cathode drum, independently of supports for the anode sheets 3 submerged in the electrolyte.
  • FIG. 8a shows support rods 8', 8'', 8''' and so forth secured, respectively, to the sub-anodes 4', 4'', 4''' and so forth of FIG. 3.
  • These support rods in an array 8 are individually moved back and forth by suitable position adjusting means such as screw or piston-cylinder units.
  • FIG. 8b A typical example is illustrated in FIG. 8b.
  • a screw block 10 is attached to each sub-anode 4, and a threaded rod 12 is in thread engagement with the block 10.
  • the threaded rod 12 is linked through two universal joints 14 and 16 to a connecting rod 18, which in turn is rotated by a suitable motor.
  • the two universal joints permit the block 10 to be held at a suitable point. With the rotation of the threaded rod 12 by the motor, the block 10 can be moved back or forth as desired.
  • the block 10 may be linked instead with a cylinder-piston assembly for reciprocating motion.
  • the support rods 8 of the sub-anodes 4 facing the particular varied-thickness portion or portions in the direction of the width of the foil are displaced by the position control means.
  • an electrolytic copper foil being manufactured can be controlled in thickness including uniformity and local change as desired in thickness by the use of sub-anodes for controlling foil thickness widthwise, through the control of either the electric supplies to or the set positions of the individual sub-anodes.
  • sub-anodes for controlling foil thickness lengthwise
  • the sub-anodes may be replaced by a single sub-anode not divided in the width direction. It is possible to provide such sub-anode(s) as auxiliary anode(s) in addition to an existing anode.
  • FIG. 11 shows another embodiment in which sub-anodes 9 are provided in a plurality of rows throughout the anode sheet 5 on the copper foil-recovering side. Each row of sub-anodes may be replaced by a single sub-anode not divided widthwise.
  • FIG. 12 shows another embodiment constructed so that not only the anode sheet on the copper foil-recovering side but also the anode sheet on the electrodeposition-starting side is partly provided with sub-anodes for controlling foil thickness lengthwise.
  • the thickness pattern per revolution of the cathode drum of a sample of the actually formed copper foil is measured at some points in the directions of the length and width.
  • a plurality of sub-rectifiers 7 adjust the current supplied between the individual sub-anodes 9 and the cathode drum 1.
  • the individual sub-anodes can also be controlled herein through the control of their set positions as already explained.
  • means are provided to support the individual sub-anodes 4 and move them toward or away from the cathode drum, independently of supports for the anode sheets submerged in the electrolyte.
  • These sub-anodes are individually moved back and forth by suitable position adjusting means such as screw or piston-cylinder units. Support rods of the sub-anodes facing the particular varied thickness portion or portions in the direction of the length of the foil are displaced by the position control means.
  • an electrolytic copper foil being manufactured can be controlled in thickness lengthwise by the use of sub-anodes for controlling foil thickness lengthwise, through the individual control of either the quantities of electricity being supplied to the sub-anodes or the set positions of the individual sub-anodes.
  • the copper foil may be uniformized in thickness or locally changed in thickness as desired.
  • sub-anodes in the direction of the width 4 and sub-anode for controlling foil thickness lengthwise (hereinafter called “sub-anodes in the direction of the length") 9.
  • sub-anodes in the direction of the length 9', 9'' ; Suitable number of sub-anodes in the direction of the width 4', 4'', whereas sub-anodes in the direction of the length 9', 9'' ; are formed.
  • These sub-anodes in the directions of the width and length may be arranged in whatever order desired.
  • the sub-anodes in the direction of the length may be replaced by a single sub-anode not divided in the direction of the width.
  • FIG. 15 shows another embodiment in which sub-anodes 9 in the direction of the length are provided in a plurality of rows throughout the remainder except for sub-anodes 4 in the direction of the width of the anode sheet 3 on the copper foil-recovering side.
  • Each row of sub-anodes in the direction of the length may be replaced by a single sub-anode not divided widthwise.
  • FIG. 16 shows another embodiment constructed so that not only the anode sheet on the copper foil-recovering side but also the sheet on the electrodeposition-starting side is partly provided with sub-anodes in the direction of the length.
  • some apparatus for producing electrolytic copper foil show the tendency of producing a foil unusually thin in the central zone or conversely along at least one edge portion.
  • FIG. 17 illustrates yet another embodiment in which only the middle portion of one anode sheet, on the copper foil-recovering side, is divided widthwise into sub-anodes 4
  • FIG. 18 is an embodiment in which the both edge portions of one anode sheet are divided widthwise into sub-anodes 4.
  • the both embodiments have sub-anodes 9 in the direction of the length provided at the upper ends.
  • the sub-anodes in the direction of the width may form a part of the anode and, specifically in FIG. 18, either edge portion alone may be so divided. The choice depends on the conditions of the particular copper foil production equipment used.
  • electrodeposition of copper from the electrolyte starts, approximately at 3 o'clock position, and the deposit thickness increases until it attains a desired thickness at about 9 o'clock position where the electrodeposition comes to an end.
  • the foil of the desired thickness is peeled off by suitable peeler means at about 12 o'clock position and wound up.
  • the thickness in the direction of the width of the untreated foil is determined after the peeling and, when the thickness variation has exceeded a permissible limit in any sections, electric currents supplied to the specific sub-anodes 4 in the direction of the width corresponding to the specific sections are controlled independently of one another so as to correct the variation widthwise.
  • the thickness patterns per revolution of the cathode drum of a sample of the actually formed copper foil is measured at some points lengthwise and widthwise. According to the measured results, a plurality of sub-rectifiers 7 adjust the current supplied between the individual sub-anodes and the cathode drum.
  • the variation in thickness of the copper foil is decreased as the number of the division in the directions of the length and the width is increased.
  • a number in the range from 10 to 40 is usually satisfactory.
  • sub-rectifiers 7 are connected between the individual sub-anodes 4 and the cathode drum 1.
  • other sub-rectifiers are connected between the individual sub-anodes 9 and the cathode drum 1.
  • the individual sub-anodes for controlling foil thickness widthwise and lengthwise can also be controlled through the control of their set positions in the similar manner as previously explained.
  • an electrolytic copper foil being manufactured can be made controlled in thickness widthwise and lengthwise including uniformity in thickness and any local change as desired in thickness by the use of sub-anodes for controlling the foil thickness widthwise and sub-anodes for controlling the foil thickness lengthwise, through the individual control of either the quantities of electricity supplied to the sub-anodes or the set positions of the individual sub-anodes.
  • the thickness in the directions of the length and width of the untreated foil is determined after the peeling and, when variation in the target thickness has exceeded a permissible limit, the quantities of electricity supplied to sub-anodes for controlling foil thickness is individually controlled so as to eliminate it on the basis of a combined pattern combining a thickness pattern in the direction of the length and a thickness pattern in the direction of the width.
  • sub-anodes 20 there is illustrated an embodiment of the invention with a construction such that one of anode sheets, on the copper foil-recovering side, is partly divided into sub-anodes for controlling foil thickness (hereinafter called "sub-anodes") 20. Suitable number of sub-anodes 20', 20'' bibare formed.
  • FIG. 21 shows another embodiment in which sub-anodes 20 are provided in a plurality of rows throughout the anode sheet 3 on the copper foil-recovering side.
  • FIG. 22 shows another embodiment built so that not only the anode sheet 3 on the copper foil-recovering side but also the anode sheet 3 on the electrodeposition-starting side is partly provided with sub-anodes 20.
  • the thickness in the directions of the length and the width of the untreated foil is determined after the peeling and, when the thickness variation from the target thickness has exceeded a permissible limit, electric currents supplied to the sub-anode are controlled, on the basis of a combined pattern combining a thickness pattern in the direction of the length and a thickness pattern in the direction of the width, so as to correct the variation.
  • the thickness pattern per revolution of the cathode drum of a sample of the actually formed copper foil be determined beforehand and, on the basis of the pattern so determined, the quantity of electricity supplied to the sub-anodes be controlled.
  • any variation from the target thickness (for example, fluctuations in thickness) at the 720 points, as noted above, represent those caused by irregularities, such as lack of uniformity of the cathode-anode spacing, the flow rate of electrolyte fed, and the quantity of electricity supplied. They indirectly represent the relations between a given portion of the cathode drum and the anode during one complete turn of the particular portion round the drum along a given track thereon (the relations given in terms of changes in the spacing, electrolyte flow rate, quantity of electricity supplied, etc.) and therefore represent the variation in thickness.
  • a single row of sub-anodes usually will do, but where the variation is beyond control with a single row or where more precise control is needed, a plurality or a number of rows may be provided instead.
  • sub-rectifiers 7 are connected between the individual sub-anodes 20 and the cathode drum 1.
  • the individual sub-anodes can also be controlled through the control of their set positions as explained before.
  • an electrolytic copper foil being manufactured can be made controlled in thickness including uniformity in thickness or any change as desired in thickness by the use of sub-anodes based on the combination of a thickness pattern in the direction of the length and a thickness pattern in the direction of the width through the individual control of either the quantities of electricity supplied to the sub-anodes or the set positions of the individual sub-anodes.
  • this invention not only permits to effectively uniformize the thickness of a copper foil, but also permits to change or modify as desired the thickness of the copper foil in a given portion or portions in the directions of the length and the width. This invention intend to comprehend all these embodiments.
  • a 35 ⁇ m-thick copper foil was made using a copper sulfate solution and a combination of a cathode drum 2.0 m in diameter and 1.3 m in width and two 1.3 m-wide sheets of anode arranged arcuately along substantially the lower half of the cathode drum as shown.
  • the anode structure according to the invention was as depicted in FIGs. 2 and 3 and comprised 20 sub-anodes.
  • the electric currents supplied to the individual sub-anodes were adjusted within the range of 0.1 to 10 A/dm2.
  • the method of the invention made it possible to reduce the variation in thickness widthwise, from the usual level of about 3% down to 0.5% or less.
  • the anode structure embodying the invention comprised, 20 sub-anodes arranged on the existing anode sheet as shown in FIG. 1 on the copper foil-recovering side. Otherwise in the same way as in Example A-1, a 35 ⁇ m-thick copper foil was made. The variation in thickness widthwise of the copper foil thus obtained was 0.5% or less.
  • a 35 ⁇ m-thick copper foil was made using a copper sulfate solution and a combination of a cathode drum 2.0 m in diameter and 1.3 m in width and two 1.3 m-wide sheets of anode arranged arcuately along substantially the lower half of the cathode drum as shown.
  • the anode structure according to the invention was as depicted in FIGs. 9 and 10 and a longitudinally divided anode comprised 20 sub-anodes.
  • the electric currents supplied to the individual sub-anodes were calculated with a personal computer and adjusted within the range of 0.1 to 10 A/dm2.
  • the method of the invention made it possible to reduce the variation in thickness lengthwise, from the usual level of about 3% down to 0.5% or less.
  • the anode structure embodying the invention comprised, a longitudinally divided anode sheet consisting of 20 sub-anodes arranged on the existing anode sheet as shown in FIG. 1 on the copper foil-recovering side. Otherwise in the same way as in Example B-1, a 35 ⁇ m-thick copper foil was made. The variation in thickness lengthwise of the copper foil thus obtained was 0.5% or less.
  • a 35 ⁇ m-thick copper foil was made using a copper sulfate solution and a combination of a cathode drum 2.0 m in diameter and 1.3 m in width and two 1.3 m-wide sheets of anode arranged arcuately along substantially the lower half of the cathode drum as shown.
  • the anode structure according to the invention as depicted in FIGs. 13 and 14, comprised of sub-anodes 20 widthwise and 20 lengthwise.
  • the electric currents supplied to the individual sub-anodes were calculated with a personal computer and adjusted within the range of 0.1 to 10 A/dm2.
  • the method of the invention made it possible to reduce the variation in thickness in the directions of the length and the width, from the usual level of about 3% down to 0.5% or less.
  • the anode structure embodying the invention comprised, a longitudinally divided anode sheet consisting of sub-anodes in the directions of the width and the length, 20 each, arranged on the existing anode sheet as shown in FIG. 1 on the copper foil-recovering side. Otherwise in the same way as in Example C-1, a 35 ⁇ m thick copper foil was made. The variation in thickness in the direction of the length and in the direction of the width of the copper foil thus obtained was 0.5% or less.
  • a 35 ⁇ m-thick copper foil was made using a copper sulfate solution and a combination of a cathode drum 2.0 m in diameter and 1.3 m in width and two 1.3 m-wide sheets of anode arranged arcuately along substantially the lower half of the cathode drum as shown.
  • the anode structure according to the invention, as depicted in FIGs. 19 and 20 comprised 20 sub-anodes.
  • the electric currents supplied to the individual sub-anodes were calculated with a personal computer and adjusted within the range of 0.1 to 10 A/dm2.
  • the method of the invention made it possible to reduce the variation in thickness lengthwise and widthwise, from the usual level of about 3% down to 0.5% or less.
  • the anode structure embodying the invention comprised, 20 sub-anodes arranged on the existing anode sheet as shown in FIG. 1 on the copper foil-recovering side. Otherwise in the same way as in Example D-1, a 35 ⁇ m-thick copper foil was made. The variation in thickness in the direction of the length and in the direction of the width of the copper foil thus obtained was 0.5% or less.
  • the present invention permits to uniformize or change or modify as desired the thickness of an electrolytic copper foil using foil thickness-controlling sub-anodes in the direction of the width or the length or both thereof by individually controlling either of the quantities of electricity supplied to the sub-anodes or the set positions of the sub-anodes.
  • the present invention can accommodate the requirements for electrolytic copper foils for electronic devices and others in future.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Electroplating Methods And Accessories (AREA)
EP91119338A 1990-12-19 1991-11-13 Verfahren und Vorrichtung zur elektrolytischen Erzeugung von Kupferfolien Expired - Lifetime EP0491163B1 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP411764/90 1990-12-19
JP41176690A JP2506575B2 (ja) 1990-12-19 1990-12-19 電解銅箔の製造方法及び装置
JP411765/90 1990-12-19
JP2411764A JP2506573B2 (ja) 1990-12-19 1990-12-19 電解銅箔の製造方法及び装置
JP2411765A JP2506574B2 (ja) 1990-12-19 1990-12-19 電解銅箔の製造方法及び装置
JP411766/90 1990-12-19

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EP0491163A1 true EP0491163A1 (de) 1992-06-24
EP0491163B1 EP0491163B1 (de) 1996-02-14

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KR (1) KR940007609B1 (de)
DE (1) DE69117155T2 (de)
MY (1) MY138622A (de)

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EP0875605A2 (de) * 1997-04-25 1998-11-04 Sms Schloemann-Siemag Aktiengesellschaft Anordnung zur elektrogalvanischen Metallbeschichtung von Bändern
WO2001077416A2 (en) * 2000-04-11 2001-10-18 Yates Foil Usa, Inc. Thin copper foil, and process and apparatus for the manufacture thereof
CN104114751A (zh) * 2012-07-06 2014-10-22 Jx日矿日石金属株式会社 极薄铜箔及其制备方法以及极薄铜层
CN106034404A (zh) * 2014-02-19 2016-10-19 德诺拉工业有限公司 用于金属电解提取池的阳极结构
CN110616443A (zh) * 2019-04-19 2019-12-27 长春石油化学股份有限公司 电解铜箔
CN111194362A (zh) * 2017-07-24 2020-05-22 古河电气工业株式会社 表面处理铜箔、以及使用其的覆铜板及印刷配线板

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KR100762048B1 (ko) * 2006-03-16 2007-09-28 엘에스전선 주식회사 광폭 방향의 중량편차 저감을 위한 금속박막 제박기
KR102646185B1 (ko) 2017-02-27 2024-03-08 에스케이넥실리스 주식회사 우수한 접착력을 갖는 동박, 그것을 포함하는 전극, 그것을 포함하는 이차전지, 및 그것의 제조방법

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FR2271306A1 (en) * 1974-05-13 1975-12-12 Moshima Kosan Co Ltd Mfg. thin metal films by electrodeposition - such as a nickel-iron-molybdenum alloy with anisotropic magnetic properties

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EP0875605A2 (de) * 1997-04-25 1998-11-04 Sms Schloemann-Siemag Aktiengesellschaft Anordnung zur elektrogalvanischen Metallbeschichtung von Bändern
EP0875605A3 (de) * 1997-04-25 1998-12-09 Sms Schloemann-Siemag Aktiengesellschaft Anordnung zur elektrogalvanischen Metallbeschichtung von Bändern
US6071384A (en) * 1997-04-25 2000-06-06 Sms Schloemann-Siemag Aktiengesellschaft Arrangement for the electrogalvanic metal coating of strips
KR100568022B1 (ko) * 1997-04-25 2006-05-25 에스엠에스 데마그 악티엔게젤샤프트 스트립의 전기 아연도금식 금속코팅 장치
WO2001077416A2 (en) * 2000-04-11 2001-10-18 Yates Foil Usa, Inc. Thin copper foil, and process and apparatus for the manufacture thereof
WO2001077416A3 (en) * 2000-04-11 2002-04-04 Yates Foil Usa Inc Thin copper foil, and process and apparatus for the manufacture thereof
CN104114751A (zh) * 2012-07-06 2014-10-22 Jx日矿日石金属株式会社 极薄铜箔及其制备方法以及极薄铜层
CN106034404A (zh) * 2014-02-19 2016-10-19 德诺拉工业有限公司 用于金属电解提取池的阳极结构
US10309023B2 (en) 2014-02-19 2019-06-04 Industrie De Nora S.P.A. Anode structure for metal electrowinning cells
CN111194362A (zh) * 2017-07-24 2020-05-22 古河电气工业株式会社 表面处理铜箔、以及使用其的覆铜板及印刷配线板
CN111194362B (zh) * 2017-07-24 2022-03-11 古河电气工业株式会社 表面处理铜箔、以及使用其的覆铜板及印刷配线板
CN110616443A (zh) * 2019-04-19 2019-12-27 长春石油化学股份有限公司 电解铜箔

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KR940007609B1 (ko) 1994-08-22
EP0491163B1 (de) 1996-02-14
DE69117155T2 (de) 1996-09-05
MY138622A (en) 2009-07-31
DE69117155D1 (de) 1996-03-28
KR920012488A (ko) 1992-07-27

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