EP0491163B1 - Verfahren und Vorrichtung zur elektrolytischen Erzeugung von Kupferfolien - Google Patents

Verfahren und Vorrichtung zur elektrolytischen Erzeugung von Kupferfolien Download PDF

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Publication number
EP0491163B1
EP0491163B1 EP91119338A EP91119338A EP0491163B1 EP 0491163 B1 EP0491163 B1 EP 0491163B1 EP 91119338 A EP91119338 A EP 91119338A EP 91119338 A EP91119338 A EP 91119338A EP 0491163 B1 EP0491163 B1 EP 0491163B1
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European Patent Office
Prior art keywords
anodes
thickness
copper foil
sub
foil
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Expired - Lifetime
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EP91119338A
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English (en)
French (fr)
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EP0491163A1 (de
Inventor
Toyoshige C/O Nikko Gould Foil Co. Ltd. Kubo
Katsuhiko C/O Nikko Gould Foil Co.Ltd. Fujishima
Narito C/O Nikko Gould Foil Co.Ltd. Yamamoto
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Nippon Mining Holdings Inc
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Nikko Materials Co Ltd
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Priority claimed from JP2411764A external-priority patent/JP2506573B2/ja
Priority claimed from JP41176690A external-priority patent/JP2506575B2/ja
Priority claimed from JP2411765A external-priority patent/JP2506574B2/ja
Application filed by Nikko Materials Co Ltd filed Critical Nikko Materials Co Ltd
Publication of EP0491163A1 publication Critical patent/EP0491163A1/de
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Publication of EP0491163B1 publication Critical patent/EP0491163B1/de
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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/04—Wires; Strips; Foils

Definitions

  • This invention relates to a method and apparatus of producing an electrolytic copper foil. More particularly, this invention relates to a method and apparatus of producing an electrolytic copper foil characterized by the provision of a plurality of foil thickness-controlling sub-anodes for uniformizing the thickness of the electrolytic copper foil being made and by the individual control of the quantities of electricity being supplied to the individual foil thickness-controlling sub-anodes. Under this invention, a high-quality electrolytic copper foil with a uniform thickness in the direction of the width or the length or in the directions of both of them is obtained.
  • Electrolytic copper foil is produced by passing a stream of electrolyte between an anode of insoluble metal and a metallic cathode drum mirror-polished on the surface and supplying a potential between the anode and the cathode drum, thereby causing electrodeposition of copper on the cathode drum surface, and, when the electrodeposit has attained a predetermined thickness, peeling the same from the cathode drum.
  • the copper foil thus obtained, called as untreated foil is thereafter variously surface-treated to be final products.
  • FIG. 1 illustrates the relative position of a cathode drum and an anode as divided here into two anode sheets conventionally used for the manufacture of copper foil.
  • the cathode drum 1 is installed to be rotatable (clockwise in this case) as partly submerged in the electrolyte.
  • the anode e.g., two anode sheets 3, is disposed to cover generally the submerged lower half of the cathode drum 1 in spaced relation with a given clearance from the drum surface.
  • the electrolyte is supplied at 6 o'clock position (of the hour hand, the same applying hereinafter) between the two anode sheets 3. It flows upward along the space between the cathode drum and the anode and overflows the upper edges of the anode for circulation.
  • a rectifier 5 maintains a given current between the cathode drum and the anode.
  • the electrodeposit of copper from the electrolyte becomes thicker, and becomes a desired thickness around 9 o'clock position and an untreated foil that has attained a desired thickness is peeled off by suitable peeler means and wound up.
  • Such an apparatus is known from US-A-3 799 847, wherein a cathode drum is positioned in an electrolythic bath.
  • a first, second, third and fourth anode plate are positioned about the periphery of the cathode drum and radially spaced therefrom.
  • the first anode plate which is the first one in the direction of the progress of electrolytic deposition is secured on a first one of two semi-cylinders making up a housing, while the other anode plates are secured in succession on the other one ofthe two semi-cylinders.
  • the first and the second anode plate are connected to a common source of power supply, and the other anode plates are connected, respectively, to their individual different sources of power supply.
  • each successive anode plate has a surface area which is smaller than that of the preceding anode plate.
  • the first and the scond anode plate are intended for the formation of a metal band.
  • the third anode plate is intended to ensure sufficient roughness of the surface of this metal band, while the fourth anode plate is intended to ensure formation of an adhesive layer with a highly developed surface on the rough side of the band.
  • the current density is successively varied.
  • the untreated copper foil so produced varied in its thickness widthwise, lengthwise or in both of them as shown in FIG. 1.
  • electrolytic copper foil With electrolytic copper foil, one of the important qualitative requirements is that it is uniform in thickness.
  • the production line must be stopped for correcting the surface of an anode for the purpose of uniformizing the thickness of a copper foil produced and even when the above steps are taken, they could not adequately prevent the variations in thickness of the copper foil produced.
  • Copper foil is mostly used in printed-circuit boards.
  • the modern tendency with those boards is toward higher density, with finer circuit patterns and thinner layers for higher degrees of multilayer integration. This has not only induced the development of thinner copper foils but has brought increasingly exacting requirements for the uniformity of foil thickness.
  • the two methods of the prior art described above for uniformizing the thickness in the direction of the width are disadvantageous in that neither permits the correction during the course of operation. They cannot cope with the variations in thickness of the foil in the direction of the width due to uncertain factors originating from causes other than anode, e.g., the thickness variations attributable to the cathode drum or to changes or lack of uniformity of the flow of the electrolyte.
  • uncertain factors originating from causes other than anode e.g., the thickness variations attributable to the cathode drum or to changes or lack of uniformity of the flow of the electrolyte.
  • the partial cutting of the anode is time-consuming and cumbersome and renders it not always easy to achieve the end.
  • FR-A-2 271 306 discloses an apparatus for producing electrolytic metal foils comprising a plurality of anode sections disposed one behind another in the circumferential direction of a rotable cathode drum.
  • the current density of these anode sections connected to a common current source is individually controllable by variable resistances in order to provide a better uniformity of the foil features over the whole thickness the foil.
  • the object of the present invention is to develop a novel method and apparatus of producing electrolytic copper foil which permits the control in thickness of a copper foil including the uniformity of thickness in the directions of width, length or both of the foil during operation and also the correction of thickness variation owing to indefinite and uncertain factors.
  • An aspect of the subject invention is an apparatus for producing an electrolytic copper foil comprising:
  • a further aspect of the subject invention is a method of producing an electrolytic copper foil comprising the steps of:
  • Still further aspects of the subject invention are a method of producing an electrolytic copper foil comprising the steps of:
  • At least a part of one, preferably at least one on the copper foil-recovering side, of the anode sheets already described with reference to FIG. 1 is divided widthwise into a plurality of sub-anodes for controlling foil thickness widthwise. It is, of course, possible to provide such sub-anodes as auxiliary anodes in addition to an existing anode.
  • FIGs. 2 and 3 there is illustrated an embodiment of the invention with a construction such that one of anode sheets, on the copper foil-recovering side, is partly divided into sub-anodes for controlling foil thickness.
  • one anode is divided into from 10 to 40 sub-anodes.
  • Some apparatus for producing electrolytic copper foil show the tendency of producing a foil especially thin in the central zone or conversely along at least one edge portion.
  • a cathode drum 1 which is a rotatable cylinder, e.g., of stainless steel or titanium, is held in place by support means, as partly submerged in the electrolyte and made rotatable clockwise in the embodiment shown.
  • support means as partly submerged in the electrolyte and made rotatable clockwise in the embodiment shown.
  • the anode 3 preferably consists of two anode sheets disposed along at least lower quarter, each, of the cathode drum 1 as shown. According to the necessity, it may be replaced by a single anode sheet or by three, four, or more sheets.
  • a part of the anode sheet on the copper foil-recovering side is comprised of sub-anodes 4 for controlling foil thickness widthwise, as described above.
  • a suitable number of sub-anodes, 4', 4", 4'", and so forth, are thus provided.
  • the space between the cathode drum and the anodes is kept constant, usually in the range from 2 to 100 mm. The narrower the space the less the electricity consumption but the more difficult will be the control of the film thickness and quality.
  • This space between the cathode drum and the anode sheets constitutes a flow passage for the electrolyte.
  • the electrolyte is supplied at 6 o'clock position between two anode sheets 3 by way of a proper pump in the cell (not shown). It passes as divided streams in both directions along the space and overflows the both upper edges of the anode sheets for circulation.
  • a rectifier 5 maintains a given current between the cathode drum and the anode.
  • the cathode drum 1 As the cathode drum 1 rotates, electrodeposition of copper from the electrolyte starts, approximately at 3 o'clock position, and the deposit thickness increases until it attains a desired thickness at about 9 o'clock position where the electrodeposition comes to an end.
  • the foil of the desired thickness is peeled off by suitable peeler means at about 12 o'clock position and wound up.
  • the anode, especially of the lead type, is locally worn with use. This results in variation in space between the cathode drum and the anode.
  • the cathode drum can be responsible for some variation in foil thickness, and the electrolyte stream can undergo a certain deflection or irregularity in flow. Altogether, they tend to cause localized variation in thickness in the direction of the width of the foil.
  • the thickness in the direction of the width of the untreated foil is determined after the peeling and, when a thickness variation beyond a permissible limit has been detected, electrical currents supplied to the specific sub-anodes 4 corresponding to the specific sections in the direction of the width are controlled independently of one another.
  • sub-rectifiers 7 are connected between the individual sub-anodes 4 and the cathode drum 1.
  • the thickness values at different points in the direction of the width of the copper foil can be simply determined by suitable sampling, in terms of the weight per unit area.
  • a thickness measuring instrument such as of the static capacity detection type, may be installed in the winding route to monitor the thickness, cooperatively with the sub-rectifiers via feedback means.
  • insulating seal Between adjacent sub-anodes is preferably interposed an insulating seal.
  • Useful insulating materials for this purpose include sheets of PVC and cold curable rubber (for example, one marketed under the trade designation "RTV"). Insulation is provided instead by bonding adjacent sub-anodes with an insulating adhesive or integrally joining the sub-anodes with an insulating film therebetween.
  • an electrolytic copper foil being manufactured can be controlled in thickness including uniformity and local change as desired in thickness by the use of sub-anodes for controlling foil thickness widthwise, through the control of the electric supplies to the individual sub-anodes.
  • sub-anodes for controlling foil thickness lengthwise
  • the sub-anodes may be replaced by a single sub-anode not divided in the width direction. It is possible to provide such sub-anode(s) as auxiliary anode(s) in addition to an existing anode.
  • the thickness pattern per revolution of the cathode drum of a sample of the actually formed copper foil is measured at some points in the directions of the length and width.
  • a plurality of sub-rectifiers 7 adjust the current supplied between the individual sub-anodes 4 and the cathode drum 1.
  • an electrolytic copper foil being manufactured can be controlled in thickness lengthwise by the use of sub-anodes for controlling foil thickness lengthwise, through the individual control of the quantities of electricity being supplied to the sub-anodes.
  • the copper foil may be uniformized in thickness.
  • electrodeposition of copper from the electrolyte starts, approximately at 3 o'clock position, and the deposit thickness increases until it attains a desired thickness at about 9 o'clock position where the electrodeposition comes to an end.
  • the foil of the desired thickness is peeled off by suitable peeler means at about 12 o'clock position and wound up.
  • the thickness in the direction of the width of the untreated foil is determined after the peeling and, when the thickness variation has exceeded a permissible limit in any sections, electric currents supplied to the specific sub-anodes 4 in the direction of the width corresponding to the specific sections are controlled independently of one another so as to correct the variation widthwise.
  • the thickness patterns per revolution of the cathode drum of a sample of the actually formed copper foil is measured at some points lengthwise and widthwise. According to the measured results, a plurality of sub-rectifiers 7 adjust the current supplied between the individual sub-anodes and the cathode drum.
  • the variation in thickness of the copper foil is decreased as the number of the division in the directions of the length and the width is increased.
  • a number in the range from 10 to 40 is usually satisfactory.
  • sub-rectifiers 7 are connected between the individual sub-anodes 4 and the cathode drum 1.
  • an electrolytic copper foil being manufactured can be made controlled in thickness widthwise and lengthwise including uniformity in thickness and any local change as desired in thickness by the use of sub-anodes for controlling the foil thickness widthwise and sub-anodes for controlling the foil thickness lengthwise, through the individual control of the quantities of electricity supplied to the sub-anodes.
  • this invention permits to effectively uniformize the thickness of a copper foil.
  • a 35 ⁇ m-thick copper foil was made using a copper sulfate solution and a combination of a cathode drum 2.0 m in diameter and 1.3 m in width and two 1.3 m-wide sheets of anode arranged arcuately along substantially the lower half of the cathode drum as shown.
  • the anode structure according to the invention was as depicted in FIGs. 2 and 3 and comprised 20 sub-anodes.
  • the electric currents supplied to the individual sub-anodes were adjusted within the range of 0.1 to 10 A/dm.
  • the method of the invention made it possible to reduce the variation in thickness widthwise, from the usual level of about 3% down to 0.5% or less.
  • the anode structure embodying the invention comprised, 20 sub-anodes arranged on the existing anode sheet as shown in FIG. 1 on the copper foil-recovering side. Otherwise in the same way as in Example A-1, a 35 ⁇ m-thick copper foil was made. The variation in thickness widthwise of the copper foil thus obtained was 0.5% or less.
  • a 35 ⁇ m-thick copper foil was made using a copper sulfate solution and a combination of a cathode drum 2.0 m in diameter and 1.3 m in width and two 1.3 m-wide sheets of anode arranged arcuately along substantially the lower half of the cathode drum as shown.
  • the anode structure according to the invention was as depicted in FIGs. 2 and 3 and a longitudinally divided anode comprised 20 sub-anodes.
  • the electric currents supplied to the individual sub-anodes were calculated with a personal computer and adjusted within the range of 0.1 to 10 A/dm.
  • the method of the invention made it possible to reduce the variation in thickness lengthwise, from the usual level of about 3% down to 0.5% or less.
  • the anode structure embodying the invention comprised, a longitudinally divided anode sheet consisting of 20 sub-anodes arranged on the existing anode sheet as shown in FIG. 1 on the copper foil-recovering side. Otherwise in the same way as in Example B-1, a 35 ⁇ m-thick copper foil was made. The variation in thickness lengthwise of the copper foil thus obtained was 0.5% or less.
  • the anode structure embodying the invention comprised, a longitudinally divided anode sheet consisting of sub-anodes in the directions of the width and the length, 20 each, arranged on the existing anode sheet as shown in FIG. 1 on the copper foil-recovering side. Otherwise in the same way as in Example C-1, a 35 ⁇ m thick copper foil was made. The variation in thickness in the direction of the length and in the direction of the width of the copper foil thus obtained was 0.5% or less.
  • a 35 ⁇ m-thick copper foil was made using a copper sulfate solution and a combination of a cathode drum 2.0 m in diameter and 1.3 m in width and two 1.3 m-wide sheets of anode arranged arcuately along substantially the lower half of the cathode drum as shown.
  • the anode structure according to the invention, as depicted in FIGs. 2 and 3 comprised 20 sub-anodes.
  • the electric currents supplied to the individual sub-anodes were calculated with a personal computer and adjusted within the range of 0.1 to 10 A/dm.
  • the method of the invention made it possible to reduce the variation in thickness lengthwise and widthwise, from the usual level of about 3% down to 0.5% or less.
  • the anode structure embodying the invention comprised, 20 sub-anodes arranged on the existing anode sheet as shown in FIG. 1 on the copper foil-recovering side. Otherwise in the same way as in Example D-1, a 35 ⁇ m-thick copper foil was made. The variation in thickness in the direction of the length and in the direction of the width of the copper foil thus obtained was 0.5% or less.
  • the present invention permits to uniformize or change or modify as desired the thickness of an electrolytic copper foil using foil thickness-controlling sub-anodes in the direction of the width by individually controlling the quantities of electricity supplied to the sub-anodes.
  • the present invention can accommodate the requirements for electrolytic copper foils for electronic devices and others in future.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
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Claims (8)

  1. Verfahren zur elektrolytischen Erzeugung einer Kupferfolie, bei dem:
    (a)   ein Elektrolytstrom zwischen einer rotierenden Kathodentrommel (1) und einer flächigen Anodenanordnung (3, 4), welche der Trommel zugewendet und mit einem vorgegebenen Abstand von der Trommeloberfläche angeordnet ist, hindurchgeleitet wird, wobei die Anodenanordnung einen in Breitenrichtung ungeteilten Hauptanodenteil (3) und eine Mehrzahl n von die Dicke steuernden Hilfsanoden (4) aufweist, die gegeneinander elektrisch isoliert und dadurch gebildet sind, daß ein Endteil der Anodenanordnung (3, 4) an deren Folien-Abzugsseite in Breitenrichtung unterteilt ist;
    (b)   auf der Trommeloberfläche Kupfer elektrolytisch abgeschieden wird, indem der Hauptanode (3) und den Hilfsanoden (4) unabhängig voneinander Strom zugeführt wird;
    (c)   die erhaltene Kupferabscheidung von der Kathodentrommel (1) als eine Kupferfolie abgezogen wird;
    (d)   Änderungen der Dicke in Richtung der Breite der erhaltenen Kupferfolie als n Dicken entsprechend den n Hilfsanoden (4) gemessen werden; und
    (e)   die den n Hilfsanoden (4) zugeführten Strommengen in Abhängigkeit von den gemessenen Dicken individuell vergrößert oder verkleinert werden, um die Foliendicke über die Breite der Folie hinweg gleichmäßig zu machen.
  2. Verfahren zur elektrolytischen Erzeugung einer Kupferfolie, bei dem:
    (a)   ein Elektrolytstrom zwischen einer rotierenden Kathodentrommel (1) und einer flächigen Anodenanordnung (3, 4), welche der Trommel zugewendet und mit einem vorgegebenen Abstand von der Trommeloberfläche angeordnet ist, hindurchgeleitet wird, wobei die Anodenanordnung einen in Breitenrichtung ungeteilten Hauptanodenteil (3) und eine Mehrzahl n von die Dicke steuernden Hilfsanoden (4) aufweist, die gegeneinander elektrisch isoliert und dadurch gebildet sind, daß ein Endteil der Anodenanordnung (3, 4) an deren Folien-Abzugsseite in Breitenrichtung unterteilt ist;
    (b)   auf der Trommeloberfläche Kupfer elektrolytisch abgeschieden wird, indem der Hauptanode (3) und den Hilfsanoden (4) unabhängig voneinander Strom zugeführt wird;
    (c)   die erhaltene Kupferabscheidung von der Kathodentrommel (1) als eine Kupferfolie abgezogen wird;
    (d)   die je Umdrehung der Kathodentrommel erzeugte Kupferfolienfläche in Breitenrichtung in n Abschnitte und in Längsrichtung in m Abschnitte unterteilt wird, wodurch n x m Abschnitte gebildet werden;
    (e)   Änderungen der Dicke der erhaltenen Kupferfolie in den n x m Abschnitten gemessen werden; und
    (f)   die den n Hilfsanoden (4) zugeführten Strommengen in Abhängigkeit von den gemessenen Dicken in den n x m Abschnitten individuell vergrößert oder verkleinert werden, um die Foliendicke über die Breite und die Länge der Folie hinweg gleichmäßig zu machen.
  3. Verfahren nach Anspruch 1 oder 2, bei dem die Anzahl n der die Dicke steuernden Hilfsanoden (4) zwischen 10 und 40 liegt.
  4. Verfahren nach Anspruch 2, bei dem die Anzahl m der Abschnitte in Längsrichtung, in welche die je Umdrehung der Kathodentrommel erzeugte Kupferfolie unterteilt ist, zwischen 10 und 40 liegt.
  5. Vorrichtung zur elektrolytischen Erzeugung einer Kupferfolie mit:
    (a)   einer drehbaren Kathodentrommel (1);
    (b)   einer flächigen Anodenanordnung (3, 4), welche der Trommel zugewendet und mit einem vorgegebenen Abstand von der Trommeloberfläche angeordnet ist, wobei die Anodenanordnung einen in Breitenrichtung ungeteilten Hauptanodenteil (3) und eine Mehrzahl n von die Dicke steuernden Hilfsanoden (4) aufweist, die gegeneinander elektrisch isoliert und dadurch gebildet sind, daß ein Endteil der Anodenanordnung (3, 4) an deren Folien-Abzugsseite in Breitenrichtung unterteilt ist;
    (c)   einer Anordnung zum Hindurchleiten eines Elektrolyten zwischen der Kathodentrommel (1) und der Anodenanordnung (3, 4);
    (d)   einer Anordnung (5, 7) zum Zuführen von Strommengen zu dem Hauptanodenteil (3) und den Hilfsanoden (4), wodurch auf der Trommeloberfläche Kupfer elektrolytisch abgeschieden wird;
    (e)   einer Anordnung zum Abziehen der erhaltenen Kupferabscheidung von der Kathodentrommel (1) als eine Kupferfolie;
    (f)   einer Anordnung zum Messen von Änderungen der Dicke in Richtung der Breite der erhaltenen Kupferfolie als n Dicken entsprechend den n Hilfsanoden (4); und
    (g)   einer Anordnung zum individuellen Vergrößern oder Verkleinern der den n Hilfsanoden (4) zugeführten Strommengen in Abhängigkeit von den gemessenen Dikken, um die Foliendicke über die Breite der Folie hinweg gleichmäßig zu machen.
  6. Vorrichtung zur elektrolytischen Erzeugung einer Kupferfolie mit:
    (a)   einer drehbaren Kathodentrommel (1);
    (b)   einer flächigen Anodenanordnung (3, 4), welche der Trommel zugewendet und mit einem vorgegebenen Abstand von der Trommeloberfläche angeordnet ist, wobei die Anodenanordnung einen in Breitenrichtung ungeteilten Hauptanodenteil (3) und eine Mehrzahl n von die Dicke steuemden Hilfsanoden (4) aufweist, die gegeneinander elektrisch isoliert und dadurch gebildet sind, daß ein Endteil der Anodenanordnung (3, 4) an deren Folien-Abzugsseite in Breitenrichtung unterteilt ist;
    (c)   einer Anordnung zum Hindurchleiten eines Elektrolyten zwischen der Kathodentrommel (1) und der Anodenanordnung (3, 4);
    (d)   einer Anordnung (5, 7) zum Zuführen von Strommengen zu dem Hauptanodenteil (3) und den Hilfsanoden (4), wodurch auf der Trommeloberfläche Kupfer elektrolytisch abgeschieden wird;
    (e)   einer Anordnung zum Abziehen der erhaltenen Kupferabscheidung von der Kathodentrommel (1) als eine Kupferfolie;
    (f)   einer Anordnung zum Unterteilen der je Umdrehung der Kathodentrommel erzeugten Kupferfolienfläche in Breitenrichtung in n Abschnitte und in Längsrichtung in m Abschnitte, wodurch n x m Abschnitte gebildet werden;
    (g)   einer Anordnung zum Messen von Änderungen der Dicke der erhaltenen Kupferfolie in den n x m Abschnitten; und
    (h)   einer Anordnung zum individuellen Vergrößern oder Verkleinern der den n Hilfsanoden (4) zugeführten Strommengen in Abhängigkeit von den gemessenen Dicken in den n x m Abschnitten, um die Foliendicke über die Breite und die Länge der Folie hinweg gleichmäßig zu machen.
  7. Vorrichtung nach Anspruch 5 oder 6, bei der die Anzahl n der die Dicke steuernden Hilfsanoden (4) zwischen 10 und 40 liegt.
  8. Vorrichtung nach Anspruch 6, bei der die Anzahl m der Abschnitte in Längsrichtung, in welche die je Umdrehung der Kathodentrommel erzeugte Kupferfolie unterteilt wird, zwischen 10 und 40 liegt.
EP91119338A 1990-12-19 1991-11-13 Verfahren und Vorrichtung zur elektrolytischen Erzeugung von Kupferfolien Expired - Lifetime EP0491163B1 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2411764A JP2506573B2 (ja) 1990-12-19 1990-12-19 電解銅箔の製造方法及び装置
JP411764/90 1990-12-19
JP411765/90 1990-12-19
JP411766/90 1990-12-19
JP41176690A JP2506575B2 (ja) 1990-12-19 1990-12-19 電解銅箔の製造方法及び装置
JP2411765A JP2506574B2 (ja) 1990-12-19 1990-12-19 電解銅箔の製造方法及び装置

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EP0491163A1 EP0491163A1 (de) 1992-06-24
EP0491163B1 true EP0491163B1 (de) 1996-02-14

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KR (1) KR940007609B1 (de)
DE (1) DE69117155T2 (de)
MY (1) MY138622A (de)

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DE19717489B4 (de) * 1997-04-25 2008-04-10 Sms Demag Ag Anordnung zur elektrogalvanischen Metallbeschichtung eines Bandes
US6291080B1 (en) * 2000-04-11 2001-09-18 Yates Foll Usa, Inc. Thin copper foil, and process and apparatus for the manufacture thereof
KR100762048B1 (ko) * 2006-03-16 2007-09-28 엘에스전선 주식회사 광폭 방향의 중량편차 저감을 위한 금속박막 제박기
JP5175992B1 (ja) * 2012-07-06 2013-04-03 Ｊｘ日鉱日石金属株式会社 極薄銅箔及びその製造方法、並びに極薄銅層
TWI655324B (zh) 2014-02-19 2019-04-01 義大利商第諾拉工業公司 電解槽之陽極結構以及金屬電解場中金屬澱積方法和系統
KR102646185B1 (ko) * 2017-02-27 2024-03-08 에스케이넥실리스 주식회사 우수한 접착력을 갖는 동박, 그것을 포함하는 전극, 그것을 포함하는 이차전지, 및 그것의 제조방법
CN111194362B (zh) * 2017-07-24 2022-03-11 古河电气工业株式会社 表面处理铜箔、以及使用其的覆铜板及印刷配线板
TWI675128B (zh) * 2019-04-19 2019-10-21 長春石油化學股份有限公司 電解銅箔

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3799847A (en) * 1972-05-09 1974-03-26 A Buzhinskaya Method for electrolytically producing a metal band
FR2271306A1 (en) * 1974-05-13 1975-12-12 Moshima Kosan Co Ltd Mfg. thin metal films by electrodeposition - such as a nickel-iron-molybdenum alloy with anisotropic magnetic properties

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DE69117155T2 (de) 1996-09-05
MY138622A (en) 2009-07-31
KR940007609B1 (ko) 1994-08-22
EP0491163A1 (de) 1992-06-24
KR920012488A (ko) 1992-07-27
DE69117155D1 (de) 1996-03-28

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