EP0488450B1 - Anode pour tube à rayons X à couche d'oxyde - Google Patents

Anode pour tube à rayons X à couche d'oxyde Download PDF

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Publication number
EP0488450B1
EP0488450B1 EP91203023A EP91203023A EP0488450B1 EP 0488450 B1 EP0488450 B1 EP 0488450B1 EP 91203023 A EP91203023 A EP 91203023A EP 91203023 A EP91203023 A EP 91203023A EP 0488450 B1 EP0488450 B1 EP 0488450B1
Authority
EP
European Patent Office
Prior art keywords
layer
anode
ray
intermediate layer
oxidic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP91203023A
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German (de)
English (en)
Other versions
EP0488450A1 (fr
Inventor
Wolfgang Hohenauer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plansee SE
Original Assignee
Plansee SE
Metallwerk Plansee GmbH
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Filing date
Publication date
Application filed by Plansee SE, Metallwerk Plansee GmbH filed Critical Plansee SE
Publication of EP0488450A1 publication Critical patent/EP0488450A1/fr
Application granted granted Critical
Publication of EP0488450B1 publication Critical patent/EP0488450B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • H01J35/105—Cooling of rotating anodes, e.g. heat emitting layers or structures

Definitions

  • the invention relates to an X-ray anode, in particular a rotating anode, with high heat emissivity, with a carbon-containing base body made of a high-melting material and a focal spot or focal path region made of a high-melting metal or its alloys, which has an oxidic covering layer with a coating on at least parts of the surface outside the focal path homogeneous melted phase.
  • EP-A-0 172 491 describes an X-ray anode made of a molybdenum alloy, such as TZM, with an oxide coating from a mixture of 40-70% titanium oxide, the rest being stabilized oxides from the group ZrO2, HfO, MgO, CeO2, La2O3 and SrO.
  • TZM molybdenum alloy
  • HfO, MgO, CeO2, La2O3 and SrO oxide coating from the group ZrO2, HfO, MgO, CeO2, La2O3 and SrO.
  • melting the oxide coating improves the thermal emission coefficient and improves the adhesion of the oxide layer to the base body.
  • the disadvantage of such an X-ray anode is that the carbon contained in the base body of the rotating anode causes the oxidic cover layer to age rapidly, which leads to a premature deterioration in the thermal heat emission coefficient.
  • AT-A-376 064 describes an X-ray tube rotating anode with a base body made of a carbon-containing molybdenum alloy, e.g. B. TZM, which is provided outside the focal path with a coating of one or more oxides or a mixture of one or more metals with one or more oxides to improve the heat emissivity.
  • a 10 - 200 »m thick intermediate layer made of molybdenum and / or tungsten between the base body and the oxidic coating in order to prevent the rapid aging of the rotating anode and thus the premature reduction of the thermal emission coefficient.
  • a disadvantage of such a rotating anode is that melted oxide cover layers are practically impossible to produce. It has been found that, depending on the type of application of the molybdenum and / or tungsten intermediate layer, the oxidic top layer cannot be melted at all or runs off from the surface to be coated during melting.
  • the object of the present invention is therefore to provide an X-ray tube anode consisting of a carbon-containing base body and a melted oxide cover layer to increase the to create thermal emission coefficients which have a noticeably improved aging resistance with respect to the thermal emission coefficient compared to the prior art and in which the melting of the oxide cover layer into a homogeneous phase is possible without problems.
  • a two-layer intermediate layer is arranged with a layer of molybdenum and / or tungsten and a layer of Al2O3 with 1 - 30 wt.
  • the X-ray anodes according to the invention have an oxidic cover layer that adheres well to the base body and has good melting properties.
  • the thermal emission coefficient is over 80% for suitable oxidic cover layers and deteriorates only insignificantly in the long-term operation of the X-ray anode.
  • oxide cover layers can now be melted without problems and do not run off the surface during melting, cannot be explained ad hoc from the theoretical background .
  • thermal coating processes such as. B. plasma spraying, for use.
  • PVD and CVD processes in particular plasma CVD processes and sputtering processes, have also proven themselves.
  • the oxide layer of the intermediate layer consists of Al2O3 with 5-20% by weight of TiO2 and the total layer thickness of the intermediate layer is between 10 and 100 »m.
  • the molybdenum alloy TZM with typical 0.5% Ti, 0.7% Zr and 0 - 0.05% C has proven itself as the material for the base body.
  • An X-ray rotating anode consisting of the molybdenum alloy TZM, has an approx. 2 mm thick W-Re layer in the focal path area.
  • the anode surface is first provided with an intermediate layer according to the invention and then with an oxidic cover layer.
  • a completely sintered and mechanically shaped X-ray anode on the back of the anode to be coated is cleaned and roughened by means of sandblasting and, if possible, immediately provided with a 20 »m thick molybdenum layer using plasma spraying under the usual process conditions.
  • annealing takes place under a hydrogen atmosphere at about 1350 ° C. for about 2 hours.
  • the oxide powder has the following composition: 68% by weight of ZrO2, 7.5% by weight of CaO, 19% by weight of TiO2 and 5.5% by weight of SiO2
  • the rotating anode coated in this way must be subjected to an annealing treatment in order to make it useful for use in X-ray tubes.
  • the rotating anode both the base material and the layer material, is largely freed of gas inclusions and of contaminants which are volatile at higher temperatures, in order to prevent electrical flashovers as a result of the release of gas inclusions when the rotating anode is later used in the high-vacuum X-ray tube.
  • the degassing annealing takes place within a narrow temperature and time range, matched to the anode base material, in order to avoid undesired structural changes in the base material.
  • the applied layer must also be treated within a very specific temperature and time range in order to achieve melting in the desired homogeneous phase and with a slightly nubbed surface structure (orange peel layer).
  • the annealing is carried out at 1620 ° C. for 65 minutes.
  • the melted layer has the desired degree of blackening and the desired surface structure (orange peel).
  • There is no uncontrolled flow of the melting oxide layer especially not in the transition area between coated and uncoated parts of the rotating anode surface.
  • gaseous oxides evaporate from the layer surface during the annealing process, these are struck not as a disruptive layer in the originally uncoated focal path area of the rotating anode.
  • the rotating anode was then tested in an X-ray tube arrangement under practical conditions. It ran there for several days without any problems within the required limit load.
  • An X-ray rotating anode consisting of a TZM base body and a 2 mm thick W-Re layer in the focal path area is produced like the rotating anode according to Example 1, with the exception that the oxidic cover layer has the following changed composition: 68% by weight ZrO2, 7.5% by weight CaO, 19% by weight TiO2 and 5.5% by weight Al2O3
  • rotating anodes according to Examples 1 and 2 with rotating anodes which have the same oxidic cover layer but no intermediate layer according to the invention, are used with regard to their thermal emission factor as a function of temperature and time compared with each other.
  • curve 1 shows the course of the thermal emission factor ⁇ of a rotating anode produced according to Example 1 as a function of the temperature.
  • Curve 2 shows the corresponding course of a rotary anode produced in accordance with Example 1, but without an intermediate layer according to the invention. It can be seen that the course of these two curves is approximately the same.
  • Curve 3 shows the course of the thermal emission factor ⁇ of a rotating anode produced according to Example 1 after thermal aging of the rotating anode. The aging takes place by annealing the rotating anode for ten hours at a temperature which is higher than the maximum temperature that later occurs during operation.
  • Curve 4 shows the corresponding course of a thermally aged rotating anode produced in accordance with Example 1, but without an intermediate layer according to the invention. It can be clearly seen that the thermal emission coefficient shows only a slight deterioration even under long-term exposure due to the intermediate layer according to the invention, while the thermal emission coefficient of the rotating anode without the intermediate layer according to the invention drops significantly.
  • FIG. 2 shows, analogously to FIG. 1, the corresponding curves of a rotating anode produced according to Example 2 with and without an intermediate layer before and after ten hours of aging, curve 1 of the rotating anode with an intermediate layer before aging, curve 2 of the rotating anode without Intermediate layer before aging, curve 3 of the rotating anode with intermediate layer after aging and curve 4 of the rotating anode without intermediate layer after aging. It can also be seen here that the intermediate layer according to the invention achieves a significantly improved aging resistance of the thermal emission factor.

Landscapes

  • Other Surface Treatments For Metallic Materials (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)

Claims (6)

  1. Anode pour tube à rayons X, en particulier anode tournante, à émittance thermique élevée, comprenant un corps de base, contenant du carbone et formé d'une matière à haut point de fusion, ainsi qu'une zone de trace focale en un métal à haut point de fusion ou. en alliages de tels métaux, qui présente au moins sur des parties de la surface situées en dehors de la trace focale une couche de revêtement d'oxydes à phase homogène appliquée par fusion,
       caractérisée en ce que
       une couche intermédiaire à deux strates, qui comprend en partant du corps de base une strate de molybdène et/ou de tungstène et une strate de Al₂O₃ contenant des proportions de 1 à 30% en poids de TiO₂, est disposée entre le corps de base et la couche de revêtement d'oxydes.
  2. Anode pour tube à rayons X, en particulier anode tournante, selon la revendication 1, caractérisée en ce que la strate d'oxydes de la couche intermédiaire se compose de Al₂O₃ contenant des proportions de TiO₂ de 5 à 20% en poids.
  3. Anode pour tube à rayons X, en particulier anode tournante, selon l'une des revendications 1 ou 2, caractérisée en ce que l'épaisseur totale de couche de la couche intermédiaire est comprise entre 10 et 100 »m.
  4. Anode pour tube à rayons X, en particulier anode tournante, selon l'une des revendications 1 à 3, caractérisée en ce que la couche de revêtement d'oxydes se compose d'un mélange de ZrO₂, TiO₂ et Al₂O₃, et éventuellement d'oxydes stabilisants, tels que CaO et/ou Y₂O₃.
  5. Anode pour tube à rayons X, en particulier anode tournante, selon l'une des revendications 1 à 3, caractérisée en ce que la couche de revêtement d'oxydes se compose d'un mélange de TiO₂, ZrO₂ et SiO₂, et éventuellement d'oxydes stabilisants, tels que CaO et/ou Y₂O₃.
  6. Anode pour tube à rayons X, en particulier anode tournante, selon l'une des revendications 1 à 5, caractérisée en ce que le corps de base se compose d'un alliage titane-zirconium-molybdène, ou TZM.
EP91203023A 1990-11-30 1991-11-20 Anode pour tube à rayons X à couche d'oxyde Expired - Lifetime EP0488450B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT2421/90 1990-11-30
AT0242190A AT394642B (de) 1990-11-30 1990-11-30 Roentgenroehrenanode mit oxidbeschichtung

Publications (2)

Publication Number Publication Date
EP0488450A1 EP0488450A1 (fr) 1992-06-03
EP0488450B1 true EP0488450B1 (fr) 1995-03-08

Family

ID=3534049

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91203023A Expired - Lifetime EP0488450B1 (fr) 1990-11-30 1991-11-20 Anode pour tube à rayons X à couche d'oxyde

Country Status (5)

Country Link
US (1) US5157706A (fr)
EP (1) EP0488450B1 (fr)
JP (1) JPH04269436A (fr)
AT (1) AT394642B (fr)
DE (1) DE59104875D1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5264801A (en) * 1992-05-05 1993-11-23 Picker International, Inc. Active carbon barrier for x-ray tube targets
US20040194146A1 (en) * 2000-02-15 2004-09-30 Bates Cary Lee Set top box and methods for using the same
US6693990B1 (en) 2001-05-14 2004-02-17 Varian Medical Systems Technologies, Inc. Low thermal resistance bearing assembly for x-ray device
US7004635B1 (en) 2002-05-17 2006-02-28 Varian Medical Systems, Inc. Lubricated ball bearings
US6751292B2 (en) * 2002-08-19 2004-06-15 Varian Medical Systems, Inc. X-ray tube rotor assembly having augmented heat transfer capability
DE102005039187B4 (de) * 2005-08-18 2012-06-21 Siemens Ag Röntgenröhre
DE102005039188B4 (de) * 2005-08-18 2007-06-21 Siemens Ag Röntgenröhre
US20080081122A1 (en) * 2006-10-03 2008-04-03 H.C. Starck Inc. Process for producing a rotary anode and the anode produced by such process
CN111415852B (zh) * 2020-05-06 2024-02-09 上海联影医疗科技股份有限公司 X射线管的阳极组件、x射线管及医疗成像设备

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7312945A (nl) * 1973-09-20 1975-03-24 Philips Nv Draaianode voor een roentgenbuis en werkwijze voor de vervaardiging van een dergelijke anode.
AT336143B (de) * 1975-03-19 1977-04-25 Plansee Metallwerk Rontgenanode
AT337314B (de) * 1975-06-23 1977-06-27 Plansee Metallwerk Rontgenanode
AT376064B (de) * 1982-02-18 1984-10-10 Plansee Metallwerk Roentgenroehren-drehanode
DE3226858A1 (de) * 1982-07-17 1984-01-19 Philips Patentverwaltung Gmbh, 2000 Hamburg Drehanoden-roentgenroehre
US4600659A (en) * 1984-08-24 1986-07-15 General Electric Company Emissive coating on alloy x-ray tube target
US4840850A (en) * 1986-05-09 1989-06-20 General Electric Company Emissive coating for X-ray target
US4870672A (en) * 1987-08-26 1989-09-26 General Electric Company Thermal emittance coating for x-ray tube target
US4953190A (en) * 1989-06-29 1990-08-28 General Electric Company Thermal emissive coating for x-ray targets

Also Published As

Publication number Publication date
AT394642B (de) 1992-05-25
EP0488450A1 (fr) 1992-06-03
JPH04269436A (ja) 1992-09-25
DE59104875D1 (de) 1995-04-13
ATA242190A (de) 1991-10-15
US5157706A (en) 1992-10-20

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