EP0469895B1 - Röntgenstrahlenübertragendes Fenster und Verfahren zu seiner Einrichtung - Google Patents

Röntgenstrahlenübertragendes Fenster und Verfahren zu seiner Einrichtung Download PDF

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Publication number
EP0469895B1
EP0469895B1 EP91307038A EP91307038A EP0469895B1 EP 0469895 B1 EP0469895 B1 EP 0469895B1 EP 91307038 A EP91307038 A EP 91307038A EP 91307038 A EP91307038 A EP 91307038A EP 0469895 B1 EP0469895 B1 EP 0469895B1
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EP
European Patent Office
Prior art keywords
film
ray transmitting
ray
gasket members
ray transmission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP91307038A
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English (en)
French (fr)
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EP0469895A2 (de
EP0469895A3 (en
Inventor
Yutaka Watanabe
Shunichi Uzawa
Yasuaki Fukuda
Nobutoshi Mizusawa
Ryuichi Ebinuma
Mitsuaki Amemiya
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Canon Inc
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Canon Inc
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Publication date
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Publication of EP0469895A2 publication Critical patent/EP0469895A2/de
Publication of EP0469895A3 publication Critical patent/EP0469895A3/en
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Publication of EP0469895B1 publication Critical patent/EP0469895B1/de
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    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K5/00—Irradiation devices
    • G21K5/04—Irradiation devices with beam-forming means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/18—Windows, e.g. for X-ray transmission

Definitions

  • This invention relates generally to X-ray lithography or other X-ray technology and, more particularly, to a method of mounting an X-ray transmitting window with an X-ray transmitting film, which serves as a vacuum partition wall, allowing transmission therethrough of X-rays from a vacuum ambience to a non-vacuum ambience.
  • Figure 8 shows a known example of X-ray transmitting window, wherein an X-ray transmitting film 81 made from a beryllium sheet, for example, is gas-tightly fixed to a connecting member 82 which in turn is gas-tightly fixed to an inside cylindrical surface of a ring frame member 83.
  • a connecting member 82 which in turn is gas-tightly fixed to an inside cylindrical surface of a ring frame member 83.
  • silver brazing, electron beam welding, diffusion welding or the like is usable.
  • This X-ray transmitting film 81 can serve as a vacuum partition wall, when fixed by bolts at bores 84 formed in the ring frame member 83.
  • a film is mounted between gasket rings located each side of the film and is supported by a ring support member held between flanges with other gasket rings each side of the support member.
  • a particular feature of this method is that the gasket members each side of the X-ray transmission film are gas tightly fixed to the X-ray transmission film before being sandwiched and fastened between the pair of flanges. This assures a vacuum tight arrangement.
  • an X-ray transmitting window structure which is light in weight and small in size may thus be used, while nonetheless gas-tightness is positively assured.
  • An X-ray transmitting window structure usable in the method of the present invention may be thinner and may have a higher X-ray transmissivity than used hitherto.
  • the X-ray transmitting window serves as a vacuum partition wall between a vacuum ambience and a different, non-vacuum ambience, there exists a pressure difference across the X-ray transmitting film. This applies a tensile stress to the X-ray transmitting film. If the tensile stress becomes larger than the breaking stress of the film, the film is broken. In this respect, the X-ray film should have a thickness sufficient for avoiding breakage by the pressure difference.
  • the tensile stress of the film at the centre of a film where it has an elliptical shape or a oblong shape is slightly smaller than that of a circular or square film.
  • an X-ray transmitting film of an X-ray transmitting window for use in the present method should desirably have a size (area) small enough but sufficiently large for attaining the function as an X-ray transmitting window.
  • the film thickness should desirably be thinnest but of a thickness sufficient large to prevent overcoming of the tensile stress beyond the breaking stress.
  • the present invention is suitably applicable to an X-ray transmitting window structure in an X-ray lithographic exposure apparatus.
  • Such an X-ray exposure apparatus is suited for manufacture of integrated circuit devices of 64 megabit DRAMs having an expected chip size of 10 x 20 (mm2). Since an X-ray transmitting window is disposed closer to a light source side than a mask is and, generally, X-rays from the light source are divergent, there is a necessity that at the X-ray transmitting window position an X-ray transmission area slightly smaller than the area of 10 x 20 (mm2) is defined. Further, in future X-ray lithography for a 4 gigabit DRAM having an expected chip size of 30 x 60 (mm2), a required X-ray transmission area at the X-ray transmitting window position will be slightly smaller than the chip size.
  • an X-ray transmitting window having an X-ray transmission area with a length at either side sufficiently covering only one of the longitudinal side and the transverse side of the chip size, may be prepared and such X-ray transmitting window may be scanningly moved along the longitudinal side or the transverse side by a distance corresponding to the length thereof.
  • the longitudinal length of the X-ray transmitting area should be not less than 10 mm.
  • the strength of the X-ray transmitting window decreases and, in this case, the thickness of the X-ray transmitting film may be made larger to assure a sufficient strength resistive to breakage.
  • making the film thickness so large is not desirable. It is therefore preferable that the longitudinal length of the X-ray transmitting area is made not greater than 60 mm.
  • an X-ray transmitting window is not scanningly moved, clearly it is necessary to define at the window position an X-ray transmitting area of a size allowing transmission of X-rays for exposure of the chip size.
  • the longitudinal length should be in a range of 20 - 60 mm.
  • an X-ray transmitting window should preferably have an X-ray transmitting area of a size ranging from 10 mm to 60 mm.
  • a pair of gasket members adjoining an X-ray transmitting film is sandwiched and fastened between a pair of flanges each having a Brinell hardness larger than that of the gasket members.
  • Each flange may be provided with a seal edge (sealing projection) which bites into an opposed gasket member when the latter is sandwiched and fastened between the flanges. This effectively improves the sealing property. Further, where the material of the gasket members has a Brinell hardness smaller than that of the X-ray transmitting film, the fastening of the gasket members between the flanges with resultant deformation of the gasket members or with resultant biting of the seal edges of the flanges into the gasket members, does not cause deformation of the X-ray transmitting film itself which otherwise would result in damage to the strength thereof.
  • the structure shown in figure 1 includes a window member 1 which comprises an X-ray transmitting film 2 and two ring-like outer frame members (gasket members) 3 gas-tightly adjoining to outer peripheral portions of the opposite surfaces of the film 2.
  • the window member 1 is fastened between and fixedly supported by flanges 4 and 5 of tubular members which define an X-ray beam line for an X-ray exposure apparatus, for example.
  • Each of the flanges 4 and 5 is made of a material having a Brinell hardness larger than that of the outer frame members 3.
  • circumferential recesses 4A and 5A for receiving and abutting against portions of the outer frame members 3, respectively.
  • Each recess 4A or 5A has a flat bottom surface extending from a central part of the flange to its inner peripheral edge.
  • a ring-like seal edge 4B (5B) projecting perpendicularly from the flat bottom surface and having a slant surface obliquely extending from the ridge of the projection toward the outer peripheral edge of the flange.
  • each recess 4A (5A) extends along the outer peripheral edge of the window member 1.
  • the gaskets or outer frame members 3 of a suitable width and a suitable thickness are provided on the both side surfaces of the X-ray transmitting film 2, with the outer peripheral edge of each outer frame member being aligned with the outer peripheral edge of the film 2.
  • the window member 1 is sandwiched between the flanges 4 and 5 and fastened therebetween by means of bolts 6 and 8 and nuts 7 and 9, while at the recesses 4A and 5A the seal edges 4B and 5B are press contacted to the outer frame members 3.
  • the flanges 4 and 5 each is made of a material having a Brinell hardness larger than that of the outer frame members 3 adjoining to the X-ray transmitting film 2, each seal edge 4B or 5B formed on the flange 4 or 5 bites into corresponding one of the outer frame members 3 while causing plastic deformation thereof. This assures good gas-tightness at the X-ray transmitting window.
  • Figure 3 shows another X-ray transmitting window member that can be used in the present invention.
  • the window member 31 has an integral outer frame member (a unified pair of gasket members) 33 of a predetermined width, which is provided on an X-ray transmitting film 32 so as to wrap the outer peripheral edge portion of the film 32.
  • the outer frame member has an outer diameter which is larger than that of the film 32, and the thickness of the circumferential outer frame 33 portion is constant.
  • the outer frame member 33 is provided so as to wrap the peripheral edge portion of the X-ray transmitting film 32. Therefore, the film 32 can be protected against contact to the atmosphere and it is possible to avoid oxidization and resultant damage of the film 32.
  • the outer frame member should preferably be made of a material having a sufficiently small Brinell hardness as compared with that of the material used for the flange.
  • the X-ray transmitting film 2 was made from a beryllium film of a circular shape, having a thickness 60 »m and a diameter 82.4 mm.
  • the flanges 4 and 5 each was made of stainless steel (SUS 316L).
  • Each flange is of a known type which is available as Model ICF114 from ANELVA Corp., having a recess (4A or 4B) with a seal edge (4B or 5B) formed at an inside peripheral edge portion of a surface to be opposed to the other flange.
  • each outer peripheral edge portion of the opposite side surfaces of the X-ray transmitting film 2 electroplating by nickel to a thickness of 20 »m was made to a circumferential area of an inner diameter 63.7 mm and an outer diameter 82.4 mm, along the seal edge 4B or 5B of the flange 4 or 5. Additionally, electroplating by copper was made to the outside surfaces of that portion, to a thickness of 950 »m whereby the outer frame members 3 were formed.
  • the outer frame members 3 and the X-ray transmitting film 2 of the thus formed window member 1 had their outer peripheral edges aligned with each other.
  • the total thickness t of the outer frame member 3 portion, including the thickness of the X-ray transmitting film 2 was 2 mm.
  • the thus formed window member 1 was sandwiched between the flanges 4 and 5, with the seal edges 4B and 5B engaging with the the outer frame members 3 at the opposite sides of the window member, and it was fastened by the bolts 6 and 7 and the nuts 7 and 9 with a screw torque of 120 Kg ⁇ cm, whereby a vacuum partition wall was provided.
  • each outer frame member 3 provided on the X-ray transmitting film 2 had a surface layer of copper having a Brinell hardness (740 MPa (75 H B )) smaller than that stainless steel (1760 MPa (180 HB)), the seal edges 4B and 5B of the flanges 4 and 5 bit into the outer frame members 3 of the window member 1, with a result of plastic deformation of the outer frame members 3, whereby gas-tightness was assured.
  • a circular X-ray transmitting film 32 was formed by a beryllium film of a thickness 20 microns and, to that film, the outer frame member (gasket) 33 was provided so as to wrap the outer peripheral edge portion of the film, whereby the window member 31 was formed.
  • the outer frame member 33 was formed on the X-ray transmitting film 32 by aluminium deposition with uniform thickness, in a concentric ring area of an outer diameter 82.4 mm and an inner (opening) diameter 35 mm. The thickness was 2 mm.
  • the X-ray transmitting film 32 may have any diameter provided that it is within the range of the outer frame member 33 and, if so, the outer peripheral edge portion of the X-ray transmitting film 32 can be wrapped by the outer frame member 33.
  • the window member 31 having the X-ray transmitting film 32 and the outer frame member 33 provided thereon was sandwiched between the flanges 4 and 5, with their seal edges 4B and 5B engaging with the outer frame member 33, and it was fastened by means of the bolts 6 and 8 and the nuts 7 and 9 with a screw torque 120 Kg ⁇ cm, whereby a vacuum partition wall was provided.
  • the outer frame member was made of aluminium whose Brinell hardness 170 MPa (17H B ) was smaller than that of stainless steel (1760 MPa (180 H B )).
  • the seal edges 4B and 5B of the flanges 4 and 5 bit into the opposite sides of the outer frame member 33 with plastic deformation thereof.
  • a window member 41 has outer frame members 43 which are provided, with desired width and thickness, on both sides of an X-ray transmitting film 42, with the outer peripheral edges of them being aligned with the outer peripheral edge of the film 42.
  • an opening for transmission of X-rays therethrough which is defined by the provision of the outer frame members 43, is defined so as to have a size slightly larger than the area through which the X-rays should actually be passed.
  • the length of each side of the opening is made larger by about 1 mm than the length of each side of the area through which the X-rays should actually be passed. This is determined in consideration of the fact that, at the position of the X-ray transmitting film 42, the X-rays are oscillated perpendicularly to the direction of X-ray projection in a range of several hundred »m.
  • a beryllium film was used as the X-ray transmitting film 42 and copper was used for the outer frame members 43.
  • the opening had a size of 25 mm square which is slightly larger than the size of the area through which the X-rays should actually passed. Since the opening had a size of 25 mm square, it was possible that the beryllium film (X-ray transmitting film) 42 had a thickness of 15 »m.
  • Example 1 the thus formed window member 41 was sandwiched between flanges 4 and 5 with their seal edges 4B and 5B engaging with the both sides of the outer frame members 43, and it was fastened to an X-ray exposure apparatus by means of bolts 6 and 8 and nuts 7 and 9, whereby a vacuum partition wall was provided.
  • An X-ray exposure apparatus which utilizes synchrotron radiation as a light source, mainly uses a wavelength range of 0.7 - 1.0 nm.
  • the result is that the beryllium film of 60 »m thickness showed a transmissivity of 17 %, but the beryllium film of 15 um thickness showed a higher transmissivity of 64 %.
  • the X-ray transmissivity i.e., the intensity of transmitted X-rays
  • the improvement in the transmissivity as described above essentially results in a significant increase in the throughput.
  • Example 3 While in Example 3 the opening as defined by the outer frame members has a square shape, any other shape may be used. Examples are illustrated in Figures 5A - 5F. Of these drawings, Figure 5A shows a square shape similar to Example 3. Figure 5B shows an oblong shape. Figures 5C and 5D show those shapes as formed by rounding the corners of a square shape and an oblong shape, respectively. Figures 5E and 5F show a circular shape and an elliptical shape, respectively. Other than those, a pentagonal shape or any other polygonal shape or a shape as can be defined by rounding such a polygonal shape, may be used.
  • Example 3 the outer frame members 43 adjoining the opposite sides of the X-ray transmitting film 42 have the same shape. However, this is not a necessary requirement. That is, as shown in Figure 6, a window member 61 may have an outer frame member 63 formed to adjoin the surface of an X-ray transmitting film 62 which is on the X-ray input side of the film, wherein this outer frame member defines an opening of a size slightly larger than the of the area through which the X-rays should actually be passed.
  • an integral outer frame member 73 adjoins to an X-ray transmitting film 72 so as to wrap the outer peripheral edge portion of the film 72.
  • the opening to be defined for X-ray transmission has a size slightly larger than that of the area through which the X-rays should actually pass.
  • a beryllium film is used as the X-ray transmitting film 72, but its outer diameter is made smaller than the seal edge (ring) 4B or 5B formed on the flange 4 or 5.
  • the seal edges 4B and 5B bites into those portions of the outer frame member 73 whereat no X-ray transmitting film is embedded, as seen in Figure 7.
  • the outer frame member 73 can be provided integrally to the X-ray transmitting film 72 by means of electroless plating, for example. Therefore, a sufficient strength as of an X-ray transmitting film resistive to breakage, is ensured and thus substantially the same advantageous effects as attainable with Examples 1 - 3 are assured.
  • the X-ray transmitting film is provided by a beryllium film.
  • a metal material such as silver, nickel, aluminium or the like, an insulative material or a semiconductive material such as silicon, carbon (diamond thin film), silicon nitride, silicon carbide and the like, may of course be used.
  • a beryllium X-ray transmitting film copper or aluminium is used as the material for forming the outer frame member (gasket).
  • a material having a Brinell hardness not greater than 1180 MPa (120H B ), such as gold, for example, may be used as the outer frame member.
  • a material having a Brinell hardness not greater than 226 MPa (23 H B ) (e.g. aluminium) may preferably be used for the material of the outer frame member.
  • a material having a Brinell hardness not greater than 1080 MPa (110 H B ) (e.g. aluminium, copper, gold) may preferably used for the material of the outer frame member.
  • a material having a Brinell hardness not greater than 170 MPa (17 HB) e.g. aluminium
  • HB Brinell hardness not greater than 170 MPa
  • a material having a Brinell hardness not greater than 120 H B e.g. aluminium, copper, gold
  • a material having a Brinell hardness not greater than 120 H B e.g. aluminium, copper, gold
  • the vacuum leakage measurements were made under the condition that one side of the X-ray transmitting window was filled with a helium gas of 20 KPa (150 Torr), if the thickness of the X-ray transmitting film is so selected as to sufficiently resist breakage of the film due to the pressure difference, an atmospheric pressure or a pressure higher than this may be set. Further, other than the helium gas ambience, an ambience of nitrogen gas, argon gas or atmospheric gas may be used provided that it does not damage the used X-ray transmitting film.
  • the outer frame member is made by plating or deposition
  • the outer frame member may be made separately by using a material of copper, for example, and the formed outer frame member may be adhered to the X-ray transmitting film by silver brazing.
  • it may be formed by fusing a material having a melting point lower than that of the used X-ray transmitting film material.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Measurement Of Radiation (AREA)

Claims (7)

  1. Verfahren zum Montieren eines röntgenstrahldurchlässigen Films, der als eine Vakuum-Trennwand dient, um dadurch eine Übertragung zu ermöglichen, von einer Vakuum-Umgebung zu einer unterschiedlichen Umgebung, wobei das Verfahren das Vorsehen des röntgenstrahldurchlässigen Films (2; 32; 42; 62; 72), das Vorsehen eines Paares von Dichtungen (3; 33; 43; 63; 73) an den äußeren Umfangskanten-Abschnitten von gegenüberliegenden Seiten des röntgenstrahldurchlässigen Films (2; 32; 42; 62; 72), und das Übereinanderschichten und Refestigen der Dichtungen (3; 33; 43; 63; 73) durch einen Paar von Flanschen (4, 5) umfaßt, wobei die Dichtungen (3; 33; 43; 63; 73) eine Brinellhärte aufweisen, die geringer ist als die der Flansche (4, 5), dadurch gekennzeichnet, daß:
       vor dem Übereinanderschichten und dem Befestigen der Dichtungen (3; 33; 43; 63; 73) die Dichtungen (3; 33; 43; 63; 73) und der röntgenstrahldurchlässige Film (2; 32; 42; 62; 72) gasdicht miteinander in einer integrierten Struktur fixiert werden, und daß das Übereinanderschichten und das Befestigen der Dichtungen (3; 33; 43; 63; 73) von gegenüberliegenden Seiten der gepaarten Dichtungen (3; 33; 43; 63; 73) ausgeführt wird, die an den gegenüberliegenden Seiten des röntgenstrahldurchlässigen Films (2; 32; 42; 62; 72) fixiert wurden.
  2. Verfahren nach Anspruch 1, wobei das Paar von Flanschen (4, 5 gegenüberliegende Oberflächen aufweist, von denen jede eine innenliegende umlaufende Vertiefung (4A, 5A) zur Aufnahme des röntgenstrahldurchlässigen Films (2; 32; 42; 62; 72) aufweist, wobei jede Vertiefung (4A, 5A) eine flache Bodenoberfläche hat, die sich von einem mittigen Teil zu einer innenliegenden umlaufenden Kante der zugehörigen Oberfläche der gegenüberliegenden Oberflächen erstreckt, und wobei jede Vertiefung (4A, 5A) an einem mittigen Teil davon mit einer Dichtkante (4B, 5B) ausgebildet ist, wobei diese Dichtkante (4B, 5B) durch einen umlaufenden Vorsprung festgelegt ist, der senkrecht von der flachen Bodenoberfläche vorspringt und der eine geneigte Oberfläche aufweist, die von einer Spitze des Vorsprungs in Richtung auf eine außenliegende Kante der Vertiefung (4A, 5A) geneigt ist.
  3. Verfahren nach Anspruch 1 oder 2, wobei die Brinellhärte der Dichtungen (3; 33; 43; 63; 73) geringer ist als die des röntgenstrahldurchlässigen Films (2; 32; 42; 62; 72).
  4. Verfahren nach einem der Ansprüche 1 bis 3, wobei eine gesamte Dicke eines außenliegenden umlaufenden Kantenabschnittes des röntgenstrahldurchlässigen Films (2; 32; 42; 62; 72) und des Paares von Dichtungen (3; 33; 43; 63; 73), die daran angrenzen im Bereich von 0,2 bis 10 mm liegt, bevor sie übereinander geschichtet werden.
  5. Verfahren nach einem der Ansprüche 1 bis 4, wobei ein Abschnitt der Oberfläche des röntgenstrahldurchlässigen Films (2; 32; 42; 62; 72), der durch die Dichtungen (3; 33; 43; 63; 73) nicht abgedeckt wird, entweder eine rechteckige Form, eine fünfeckige Form, eine vieleckige Form, eine Form ohne Ecken, eine kreisförmige Form oder eine elliptische Form aufweist, und wobei der Abschnitt, der durch die Dichtungen(3; 33; 43; 63; 73) nicht abgedeckt ist, eine Längserstreckung im Bereich von 10 bis 60 mm aufweist.
  6. Verfahren nach einem der Ansprüche 1 bis 5, wobei der röntgenstrahldurchlässige Film (2; 32; 42; 62; 72) bei der Versorgung mit Röntgenstrahlen für die Röntgenstrahlen-Lithographie einsetzbar ist.
  7. Verfahren nach einem der Ansprüche 1 bis 6, wobei sich das Paar von Dichtungen (33; 73) über den Umfang des röntgenstrahldurchlässigen Films (32; 72) erstreckt und einen einzelnen Körper (33; 73) bildet.
EP91307038A 1990-08-01 1991-07-31 Röntgenstrahlenübertragendes Fenster und Verfahren zu seiner Einrichtung Expired - Lifetime EP0469895B1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP202530/90 1990-08-01
JP20253090 1990-08-01
JP3167059A JPH04363700A (ja) 1990-08-01 1991-07-08 Ｘ線透過窓およびその取付け方法
JP167059/91 1991-07-08

Publications (3)

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EP0469895A2 EP0469895A2 (de) 1992-02-05
EP0469895A3 EP0469895A3 (en) 1992-08-12
EP0469895B1 true EP0469895B1 (de) 1995-12-06

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US (1) US5159621A (de)
EP (1) EP0469895B1 (de)
JP (1) JPH04363700A (de)
DE (1) DE69115156T2 (de)

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CN107578971A (zh) * 2017-09-13 2018-01-12 北京京城环保股份有限公司 一种x射线源装置的发射窗口
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Also Published As

Publication number Publication date
EP0469895A2 (de) 1992-02-05
DE69115156T2 (de) 1996-05-15
JPH04363700A (ja) 1992-12-16
EP0469895A3 (en) 1992-08-12
DE69115156D1 (de) 1996-01-18
US5159621A (en) 1992-10-27

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