EP0445503A1 - Pompe cryogénique à deux À©tages - Google Patents

Pompe cryogénique à deux À©tages Download PDF

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Publication number
EP0445503A1
EP0445503A1 EP91100181A EP91100181A EP0445503A1 EP 0445503 A1 EP0445503 A1 EP 0445503A1 EP 91100181 A EP91100181 A EP 91100181A EP 91100181 A EP91100181 A EP 91100181A EP 0445503 A1 EP0445503 A1 EP 0445503A1
Authority
EP
European Patent Office
Prior art keywords
stage
adsorption
sheet metal
cryopump
metal sections
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP91100181A
Other languages
German (de)
English (en)
Other versions
EP0445503B1 (fr
Inventor
Hans-Ulrich Dr. Häfner
Hans-Hermann Prof. Dr. Klein
Uwe Prof. Dr. Timm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Publication of EP0445503A1 publication Critical patent/EP0445503A1/fr
Application granted granted Critical
Publication of EP0445503B1 publication Critical patent/EP0445503B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D19/00—Arrangement or mounting of refrigeration units with respect to devices or objects to be refrigerated, e.g. infrared detectors
    • F25D19/006—Thermal coupling structure or interface
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Definitions

  • the invention relates to a two-stage cryopump with condensation and adsorption surfaces arranged on the second (colder) stage.
  • a two-stage cryopump of this type is known for example from DE-OS 35 12 614.
  • Two-stage cryopumps are usually operated with a two-stage refrigerator as the cooling source.
  • the first stage of the refrigerator takes on a temperature of 60 to 100 K during operation.
  • the pump surfaces (baffle, radiation shield for the second stage) which have a good heat-conducting connection with this first stage of the refrigerator are preferably used for the accumulation of gases such as water vapor, carbon dioxide or the like by condensation.
  • the immediately accessible area is preferably used to remove gases such as nitrogen, argon or the like by condensation.
  • the indirectly accessible area is designed to remove light gases, such as hydrogen or helium, by adsorption.
  • This pump surface area is usually covered with an adsorption material, preferably activated carbon.
  • cryopumps In the previously known cryopumps, the capacity of the adsorbing pump surfaces of the second stage is relatively small compared to the capacity of the condensing pump surfaces of the second stage.
  • a heater arranged on the second stage is switched on and the stage itself and the pump surfaces are thereby heated.
  • a temperature increase to at least 70 K, preferably 90 K, is necessary in order to achieve complete regeneration of the adsorption surfaces. Since the condensation surfaces of the second stage also assume this temperature, it cannot be avoided that condensable gases, e.g. B.
  • condensable gases e.g. Ar
  • the present invention has for its object to provide a two-stage cryopump of the type mentioned, which allows a partial regeneration of the pumping surfaces for light gases such as hydrogen, helium or the like.
  • this object is achieved in that the adsorption surfaces are on a separate, heatable component and that this component is so thermally switchable between two positions that in the first position (pump operation) it has thermal contact with the second stage of the refrigerator and that it is thermally insulated in the second position (regeneration mode) from the second stage of the regenerator.
  • the pumping surfaces of the second stage configured in this way, the regeneration of the adsorption surfaces can be carried out when the adsorption surfaces have no thermal contact with the second stage of the refrigerator.
  • a disturbing increase in temperature does not occur during the regeneration of the adsorption surfaces. Evaporation of already condensed gases and thus the undesired rearrangements are avoided.
  • mechanical adjustment devices or thermal switches for the adsorption surfaces are required, which must be operable from outside the pump.
  • the adsorption surfaces are on a separate, heatable component and that a heat flow resistance is arranged between the second stage and the adsorption surfaces. Even with a configuration of the pumping surfaces of the second stage designed in this way, it is possible to heat the adsorption surfaces to a temperature which enables the regeneration of these surfaces, without this temperature increase having a significant influence on the temperature of the condensation surfaces.
  • the heat flow resistance prevents the condensation surfaces from heating up to temperatures during the relatively short regeneration of the adsorption surfaces, which cause condensed gases to evaporate Have consequence. Since the adsorption surfaces are not subject to high thermal loads during normal operation of the cryopump, the influence of the thermal resistance on the adsorption properties is negligible.
  • the cryopump shown in FIG. 1 has a housing 1 with an inlet opening 2 for the gases to be pumped out.
  • the recipient 30 to be evacuated is connected to the flange 3, specifically via a shut-off device 31.
  • a two-stage refrigerator 4 projects into the housing 1 from below.
  • a pot-shaped shield 6 is fastened in a heat-conducting manner, the opening 7 of which is approximately parallel to the inlet opening 2 of the housing 1 and is equipped with a baffle which consists of a metal strip 8.
  • the shield 5 and also the baffle strips 8 serve as pump surfaces for gases such as water vapor, carbon dioxide or the like.
  • the second stage 9 of the refrigerator 4 projects into the shield 6 inside. This stage 9 bears the pumping surfaces of the second stage, denoted overall by 10.
  • These comprise a total of four sheet metal sections arranged essentially parallel to one another and extending perpendicular to the inlet opening 2, of which the outer sections are designated 11 and the inner sections 12.
  • the outer sheet metal sections are fastened directly to the second stage 9 of the refrigerator 4, ie with the best possible thermal contact, and form the condensation pumping surfaces of the second stage.
  • the inner sheet metal sections 12 are provided on their inner sides with activated carbon layers 13, which form the adsorption pumping surfaces of the second stage. These pumping surfaces are connected to the second stage 9 of the refrigerator 4 via schematically illustrated heat flow resistors 14. In addition, the adsorption surfaces can be heated. You are z. B. equipped with foil heating elements 15. In addition, the two stages 5 and 9 of the refrigerator 4 are provided with heaters 16, 17. These heaters can be used to regenerate the entire pump.
  • the housing 1 of the cryopump shown is equipped with two connecting pieces 18 and 19.
  • a forevacuum pump 21 is connected to the connection 18.
  • the connecting piece 19 is used to carry out power supply lines to the heaters 15, 16 and 17.
  • the connecting piece 19 is also used to hold a control 22 via which the heaters 15, 16, 17 are put into operation.
  • FIG. 2 shows the principle of the present invention. It is essential that there is good thermal contact (strong coupling) between the condensation pumping surfaces 11 and the second stage 9 of the refrigerator, while the adsorption pumping surfaces are in contact with the second cold stage 9 via heat flow resistors 14 (weak coupling).
  • the size of the heat flow resistors is such that the relatively short-term regeneration of the adsorption surfaces 12 with their Adsorption material 13 can be made by heating with the help of the heater 15, without the temperature increase of the adsorption surfaces having a significant influence on the second stage 9 and thus on the condensation surfaces 11.
  • the regeneration process of the adsorption surfaces must be completed before condensable gases evaporate on the condensation surfaces 11.
  • the upper limit value it is decisive that adequate and reliable cooling of the adsorption surfaces 12 must be ensured during normal operation of the cryopump. Since the adsorption surfaces 12 are not subjected to high thermal loads during normal operation, the existence of heat flux resistances 14 that are not too high does not interfere. The presence of the heat flow resistors 14 only has the consequence that the adsorption surfaces 12 reach their operating temperature after the start-up or after a total regeneration process. However, this delay is generally desirable, since it avoids an early occupancy of the adsorption surfaces 12 with undesired gases.
  • the angled sections 24 of the condensation surfaces 11 are contacted with the second stage 9 of the refrigerator 4 via a block 26 made of a material which is a good heat conductor (for example copper, which can also be used as a material for the pump surfaces 11, 12).
  • the pump surfaces 11 and the copper block 26 are fastened to the second stage 9 in the central region thereof by means of a screw 27 which is also made of a good heat-conducting material.
  • the adsorption surfaces are attached laterally next to the copper sheet 26 on the second stage 9, with the help of poorly heat-conducting components (screws 28, rings 29, for example made of stainless steel). This provides a sufficiently large heat flow resistance.
  • FIG. 4 shows an embodiment in which the heater 16 of the second stage 9 is designed as a heating plate.
  • the copper block 26 lies directly on this heating plate.
  • Thermal resistance 14 two further alternatives are shown.
  • the thickness of the sheet metal section forming this pump surface between the adsorbing region and the second cold stage 9 is reduced.
  • the cross-section relevant for heat conduction is thereby considerably smaller, so that there is a sufficiently large heat flow resistance.
  • the cross-sectional reduction between the angled section 25 and the actual pump surface is achieved in that only two webs 31 are present (cf. also FIG. 5).
  • the heaters 15 assigned to the adsorption surfaces 12 are designed as foil heating elements and that the remaining areas facing the condensation surfaces 11 are also covered with layers 13 of adsorption material. This increases the capacity of the adsorption surfaces.
  • the condensation surfaces 11 are again strongly coupled to the cold stage 9 with the aid of the copper block 26.
  • this also applies to the adsorption surfaces 12 with their angled sections 25.
  • bolts 33 with spiral springs 34 are screwed into the cold stage 9 and press the adsorption surfaces 12 against the cold stage 9.
  • a linkage 35 is fastened to the adsorption surfaces 12 and is guided through the shield 6 and - with the aid of a bellows 36 - through the pump housing 1 in a vacuum-tight manner to the outside.
  • drive 37 instead of the drive 37 shown, other drives - motor-driven eccentric, electromagnetic drive, bimetal switch, pneumatic device, which may be self-controlling by the vapor pressure of a suitable liquid (e.g. LH2), can be used. With a suitable choice of material, the drive 37 can also be installed in the pump. A prerequisite for a bimetallic drive, for example, is that the desired changes in shape causing the coupling and uncoupling occur at the temperatures which occur in the area of the adsorption surfaces 12.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP91100181A 1990-03-03 1991-01-08 Pompe cryogénique à deux étages Expired - Lifetime EP0445503B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4006755A DE4006755A1 (de) 1990-03-03 1990-03-03 Zweistufige kryopumpe
DE4006755 1990-03-03

Publications (2)

Publication Number Publication Date
EP0445503A1 true EP0445503A1 (fr) 1991-09-11
EP0445503B1 EP0445503B1 (fr) 1993-12-29

Family

ID=6401381

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91100181A Expired - Lifetime EP0445503B1 (fr) 1990-03-03 1991-01-08 Pompe cryogénique à deux étages

Country Status (4)

Country Link
US (1) US5111667A (fr)
EP (1) EP0445503B1 (fr)
JP (1) JP2871873B2 (fr)
DE (2) DE4006755A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993025815A1 (fr) * 1992-06-12 1993-12-23 Helix Technology Corporation Pompe cryogenique et panneau cryogenique possedant un dispositif de concentration de givre
WO1994019608A1 (fr) * 1993-02-26 1994-09-01 Helix Technology Corporation Pompe a vide cryogenique a regeneration electroniquement commandee
DE4336035A1 (de) * 1993-10-22 1995-04-27 Leybold Ag Verfahren zum Betrieb einer Kryopumpe sowie Vakuumpumpensystem mit Kryopumpe und Vorpumpe
WO2014173809A1 (fr) * 2013-04-24 2014-10-30 Siemens Plc Ensemble comprenant un réfrigérateur cryogénique à deux étages et un système de fixation associé

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5231840A (en) * 1991-03-28 1993-08-03 Daikin Industries, Ltd. Cryopump
US5305612A (en) * 1992-07-06 1994-04-26 Ebara Technologies Incorporated Cryopump method and apparatus
US5590538A (en) * 1995-11-16 1997-01-07 Lockheed Missiles And Space Company, Inc. Stacked multistage Joule-Thomson cryostat
DE19547030A1 (de) * 1995-12-15 1997-06-19 Leybold Ag Tieftemperatur-Refrigerator mit einem Kaltkopf sowie Verfahren zur Optimierung des Kaltkopfes für einen gewünschten Temperaturbereich
DE19632123A1 (de) * 1996-08-09 1998-02-12 Leybold Vakuum Gmbh Kryopumpe
US6116032A (en) * 1999-01-12 2000-09-12 Applied Materials, Inc. Method for reducing particulate generation from regeneration of cryogenic vacuum pumps
US6122921A (en) * 1999-01-19 2000-09-26 Applied Materials, Inc. Shield to prevent cryopump charcoal array from shedding during cryo-regeneration
US20100011783A1 (en) * 2007-05-17 2010-01-21 Canon Anelva Technix Corporation Cryotrap and vacuum processing device with cryotrap
JP5028142B2 (ja) * 2007-05-17 2012-09-19 キヤノンアネルバ株式会社 クライオトラップ
US20090038319A1 (en) * 2007-08-08 2009-02-12 Sumitomo Heavy Industries, Ltd. Cryopanel and Cryopump Using the Cryopanel
JP5666438B2 (ja) * 2008-07-01 2015-02-12 ブルックス オートメーション インコーポレイテッド 極低温ユニットおよびその構成品
US20100011784A1 (en) * 2008-07-17 2010-01-21 Sumitomo Heavy Industries, Ltd. Cryopump louver extension
US9266039B2 (en) * 2010-11-24 2016-02-23 Brooks Automation, Inc. Cryopump with controlled hydrogen gas release
KR101986159B1 (ko) 2011-02-09 2019-06-05 브룩스 오토메이션, 인크. 극저온 펌프
US10352617B2 (en) * 2014-09-25 2019-07-16 University Of Zaragoza Apparatus and method for purifying gases and method of regenerating the same
JP6745880B2 (ja) 2015-12-04 2020-08-26 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 極低温冷却システム
JP6857046B2 (ja) * 2016-03-29 2021-04-14 住友重機械工業株式会社 クライオポンプ
JP6913049B2 (ja) * 2018-03-02 2021-08-04 住友重機械工業株式会社 クライオポンプ

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1508542A (fr) * 1966-01-17 1968-01-05 Little Inc A Pompes cryogéniques pour vides très poussés
EP0119604A1 (fr) * 1983-03-21 1984-09-26 Air Products And Chemicals, Inc. Pompe cryogénique pouvant être chauffée
CH652804A5 (en) * 1981-03-10 1985-11-29 Balzers Hochvakuum Method for regenerating the low-temperature condensation surfaces of a cryopump and cryopump appliance for implementing the method
DE3512614A1 (de) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe
FR2599789A1 (fr) * 1986-06-04 1987-12-11 Air Liquide Procede de regeneration d'un etage de cryopompe ou de cryocondenseur et cryopompe pour sa mise en oeuvre
US4763483A (en) * 1986-07-17 1988-08-16 Helix Technology Corporation Cryopump and method of starting the cryopump

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DE1253404B (de) * 1962-03-26 1967-11-02 Varian Associates Hochvakuum-Pumpvorrichtung
DE2536005A1 (de) * 1975-08-13 1977-02-24 Eckhard Kellner Hochvakuum-pumpensystem
DE2455712A1 (de) * 1974-11-25 1976-08-12 Eckhard Kellner Cryo-sorptionspumpe
DE2620880C2 (de) * 1976-05-11 1984-07-12 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe
DE2949092A1 (de) * 1979-12-06 1981-06-11 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe
US4454722A (en) * 1981-05-22 1984-06-19 Helix Technology Corporation Cryopump
US4438632A (en) * 1982-07-06 1984-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
US4910965A (en) * 1984-06-29 1990-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
DE3680335D1 (de) * 1986-06-23 1991-08-22 Leybold Ag Kryopumpe und verfahren zum betrieb dieser kryopumpe.
JPS63124880A (ja) * 1986-11-12 1988-05-28 Hitachi Ltd クライオポンプ再生方法
EP0336992A1 (fr) * 1988-04-13 1989-10-18 Leybold Aktiengesellschaft Procédé et dispositif pour vérifier le fonctionnement d'une pompe de cryogénie
US4918930A (en) * 1988-09-13 1990-04-24 Helix Technology Corporation Electronically controlled cryopump

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1508542A (fr) * 1966-01-17 1968-01-05 Little Inc A Pompes cryogéniques pour vides très poussés
CH652804A5 (en) * 1981-03-10 1985-11-29 Balzers Hochvakuum Method for regenerating the low-temperature condensation surfaces of a cryopump and cryopump appliance for implementing the method
EP0119604A1 (fr) * 1983-03-21 1984-09-26 Air Products And Chemicals, Inc. Pompe cryogénique pouvant être chauffée
DE3512614A1 (de) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe
FR2599789A1 (fr) * 1986-06-04 1987-12-11 Air Liquide Procede de regeneration d'un etage de cryopompe ou de cryocondenseur et cryopompe pour sa mise en oeuvre
US4763483A (en) * 1986-07-17 1988-08-16 Helix Technology Corporation Cryopump and method of starting the cryopump

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2283063A (en) * 1992-06-12 1995-04-26 Helix Tech Corp Cryopump and cyropanel having a frost concentrating device
US5301511A (en) * 1992-06-12 1994-04-12 Helix Technology Corporation Cryopump and cryopanel having frost concentrating device
DE4392772B4 (de) * 1992-06-12 2006-05-04 Helix Technology Corp., Mansfield Cryopumpe und Cryoplatte, die eine reifkonzentrierende Einrichtung hat
WO1993025815A1 (fr) * 1992-06-12 1993-12-23 Helix Technology Corporation Pompe cryogenique et panneau cryogenique possedant un dispositif de concentration de givre
GB2283063B (en) * 1992-06-12 1996-04-17 Helix Tech Corp Cryopump and cyropanel having a frost concentrating device
US5375424A (en) * 1993-02-26 1994-12-27 Helix Technology Corporation Cryopump with electronically controlled regeneration
GB2289922A (en) * 1993-02-26 1995-12-06 Helix Tech Corp Cryogenic vacuum pump with electronically controlled regeneration
FR2709333A1 (fr) * 1993-02-26 1995-03-03 Helix Tech Corp Procédé de régénération, pompe cryogénique et module de commande d'une telle pompe.
GB2289922B (en) * 1993-02-26 1997-09-24 Helix Tech Corp Cryogenic vacuum pump with electronically controlled regeneration
WO1994019608A1 (fr) * 1993-02-26 1994-09-01 Helix Technology Corporation Pompe a vide cryogenique a regeneration electroniquement commandee
DE4336035A1 (de) * 1993-10-22 1995-04-27 Leybold Ag Verfahren zum Betrieb einer Kryopumpe sowie Vakuumpumpensystem mit Kryopumpe und Vorpumpe
WO1995011381A1 (fr) * 1993-10-22 1995-04-27 Leybold Aktiengesellschaft Procede d'exploitation d'une pompe cryogenique et systeme de pompes a vide comprenant une pompe cryogenique et une pompe a vide preliminaire
WO2014173809A1 (fr) * 2013-04-24 2014-10-30 Siemens Plc Ensemble comprenant un réfrigérateur cryogénique à deux étages et un système de fixation associé

Also Published As

Publication number Publication date
EP0445503B1 (fr) 1993-12-29
DE4006755A1 (de) 1991-09-05
US5111667A (en) 1992-05-12
JP2871873B2 (ja) 1999-03-17
JPH04219478A (ja) 1992-08-10
DE59100757D1 (de) 1994-02-10

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