EP0396610A1 - Electrochemical processes - Google Patents

Electrochemical processes

Info

Publication number
EP0396610A1
EP0396610A1 EP89901720A EP89901720A EP0396610A1 EP 0396610 A1 EP0396610 A1 EP 0396610A1 EP 89901720 A EP89901720 A EP 89901720A EP 89901720 A EP89901720 A EP 89901720A EP 0396610 A1 EP0396610 A1 EP 0396610A1
Authority
EP
European Patent Office
Prior art keywords
voltages
switching means
independently
equipment
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP89901720A
Other languages
German (de)
English (en)
French (fr)
Inventor
Richard Margrave Ellis
John Francis Houlston
Trevor Pearson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JCT CONTROLS Ltd
Original Assignee
JCT CONTROLS Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JCT CONTROLS Ltd filed Critical JCT CONTROLS Ltd
Publication of EP0396610A1 publication Critical patent/EP0396610A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/615Microstructure of the layers, e.g. mixed structure
    • C25D5/617Crystalline layers
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/38Electroplating: Baths therefor from solutions of copper
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/18Electroplating using modulated, pulsed or reversing current
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/623Porosity of the layers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing the conductive pattern
    • H05K3/241Reinforcing the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42Plated through-holes or plated via connections
    • H05K3/423Plated through-holes or plated via connections characterised by electroplating method

Definitions

  • This invention relates to improved means for carrying out electrochemical processes, particularly electro- deposition.
  • FIG. 1(a) of the accompanying drawings The basic arrangement for a typical elect rode position process is shown diagrammatically in Figure 1(a) of the accompanying drawings, in which a source of electrical power is shown at 1. This is most commonly a transformer-rectifier but may alternatively be a battery or a rotary generator. Means for varying the output voltage are provided.
  • the current source 1 is connected to a workpiece 2 and another electrode 3 which are suspended in a cell or bath 4 of electrolyte solution forming an electrolytic cell.
  • a reversing switch unit 5 is interposed between the power source 1 and the cell 4.
  • the unit 5 may be a number of switches operated mechanically, appropriate electromechanical relays or solid state devices.
  • the unit 5 operates at intervals, producing the effect shown in Figure 1(b), which is a graph of the voltage applied to the cell against time.
  • the normal voltage V is replaced at intervals by the same voltage in the opposite sense.
  • FIG. 2(a) Another known technique is "Pulse Plating".
  • the basic arrangement is shown diagrammatically in the accompanying Figure 2(a). It is the same as that of Figure 1(a), except that a pulsing unit 6 replaces the switch unit 5.
  • the unit 6 periodically interrupts one or both of the connections between the power source 1 and the cell but does not reverse them. This produces the effect shown in Figure 2(b), again a graph showing the relationship between voltage applied to the cell and time.
  • a fairly high frequency is required, up to 5,000 cycles per second or more and the only suitable construction for the unit 6 is a solid state device, such as an array of field-effect transistors which may be controlled by a microprocessor.
  • Pulse plating can have various beneficial effects. It can refine the crystal structure of the deposit, reduce its porosity or stress, or improve throwing power.
  • the facility for varying the voltage of the source 1 can be retained and further control of the process is usually provided by adjustment of the frequency at which the unit 6 "chops" this supply or the proportion of each cycle for which it is “on” or “off", that is, the "mark-space ratio".
  • electrolytes used for electrodeposition purposes generally contain, apart from appropriate metal ions, organic additives which are there for the specific purpose of modifying the structure and/or brightness of the metal deposit. These additives are usually adsorbed or diffused onto the deposit surface and cause changes in deposit structures some of which are not always desirable.
  • the object of the invention is to improve the performance of an electrochemical process, more particularly - but not exclusively - electrodeposition.
  • a method of operating an -electrochemical process comprises the application of at least two independently-controlled voltages in alternation. It will be evident that if more than two independently-controlled voltages are utilised they will be applied cyclicly. Preferably, one of the two or more voltages will be reversed. Alternatively one of the voltages may modulate the other or another voltage. One or each voltage may be pulsed.
  • Another aspect of the present invention is the provision of equipment for operating an electrochemical process comprising at least two independently-controlled electrical power sources and switching means for applying them in alternation.
  • the switching means could be adapted to apply more than two independently-controlled voltages cyclicly.
  • the switching means is adapted to reverse one of the two or more applied electrical power sources.
  • the switching means is adapted to cause one electrical power source to modulate the other or another.
  • the switching means may also be adapted to pulse one or each electrical power source.
  • a third aspect of the invention is the provision of an electrolyte for enhancing the process as operated in accordance with the invention, the electrolyte comprising at least two organic additives, at least one being a polariser the effects of which are inhibited by reverse voltages, and the other being a depolariser that is preferentially adsorbed.
  • a basic arrangement of equipment in accordance with the invention is shown diagrammatically in Figure 4(a) of the accompanying drawings.
  • the unit 9 switches in the source 8 to modulate the output from source 7.
  • Figure 5 shows a typical control arrangement for such a unit.
  • the control unit is normally capable of producing pulses of frequency and mark-space ratio which are independently adjustable for each supply and for adjustable periods before switching from one to another.
  • the programme may provide for more than one such setting for either or both supplies.
  • Several different voltages may be applied to the cell in each direction, in which case the control unit may need to provide for connection to more than two power supplies.
  • An example of the use of such a facility would be a requirement for the pulsed voltage to fall not to zero but to some other value •'during each pulse.
  • the settings of the control unit or the voltages of the power supplies may be arranged to vary with time or with total current passed so as to provide optimum conditions at various stages of a process.
  • Electrodepo sited copper is used to provide electrical conduction in through holes used for component connection and for connection between surfaces and intermediate layers.
  • the conventional, process employs an aqueous electrolyte of copper sulphate and sulphuric acid to which are usually added chloride ions and organic additives to assist with anode dissolution and to give deposits with suitable mechanical properties.
  • the current distribution on many boards makes it very difficult to deposit sufficient copper on some parts of the board, eg. high aspect ratio through holes, without excessive thicknesses on other areas, eg. fine tracks and isolated pads. This in itself causes problems with dry film solder resists applied at a subsequent stage.
  • the electrolyte comprises an acid copper sulphate solution containing high molecular weight polyethers, sulphur propyl sulphides and chloride ions which together change the polarisation characteristics of the solution at different current densities thus effecting an improvement in the distribution of copper over complex shapes such as printed circuit boards. It is true that the above additives, singly or together, have little or no beneficial effect on the distribution of copper when using direct current. It is also true that singly these additives have no effect on distribution when using pulsed or differential pulse reverse current.
  • the polarisation of the cathode is primarily effected by adsorption of the polyether and sulphide.
  • diffusion effects of the sulphide become dominant.
  • the polyether has an inhibiting effect on the deposition of copper and the sulphide has a depolarising (stimulating) effect which is therefore diminished at higher current density areas giving an overall improvement in metal distribution.
  • the acid copper solution which forms part of the invention preferably contains: Copper Sulphate 10 - 350 g/1
  • R is a sulphur containing group eg. mercapto propane sulphonic acid Polyether HO - (CH 2 - CH 2 - 0) n - (CH 2 - CH - 0) m - R (10 - 70ppm)

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Hybrid Cells (AREA)
EP89901720A 1988-01-27 1989-01-18 Electrochemical processes Withdrawn EP0396610A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB888801827A GB8801827D0 (en) 1988-01-27 1988-01-27 Improvements in electrochemical processes
GB8801827 1988-01-27

Publications (1)

Publication Number Publication Date
EP0396610A1 true EP0396610A1 (en) 1990-11-14

Family

ID=10630626

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89901720A Withdrawn EP0396610A1 (en) 1988-01-27 1989-01-18 Electrochemical processes

Country Status (5)

Country Link
EP (1) EP0396610A1 (es)
AU (1) AU2947189A (es)
ES (1) ES2010390A6 (es)
GB (2) GB8801827D0 (es)
WO (1) WO1989007162A1 (es)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19539865A1 (de) * 1995-10-26 1997-04-30 Lea Ronal Gmbh Durchlauf-Galvanikanlage
DE19545231A1 (de) * 1995-11-21 1997-05-22 Atotech Deutschland Gmbh Verfahren zur elektrolytischen Abscheidung von Metallschichten
DE19547948C1 (de) * 1995-12-21 1996-11-21 Atotech Deutschland Gmbh Verfahren und Schaltungsanordnung zur Erzeugung von Strompulsen zur elektrolytischen Metallabscheidung
DE19633796B4 (de) * 1996-08-22 2012-02-02 Hans Höllmüller Maschinenbau GmbH Vorrichtung zum Galvanisieren von elektronischen Leiterplatten
DE19653681C2 (de) * 1996-12-13 2000-04-06 Atotech Deutschland Gmbh Verfahren zur elektrolytischen Abscheidung von Kupferschichten mit gleichmäßiger Schichtdicke und guten optischen und metallphysikalischen Eigenschaften und Anwendung des Verfahrens
DE19707905C1 (de) 1997-02-27 1998-02-05 Atotech Deutschland Gmbh Verfahren zur Pulsstromversorgung von Galvanisieranlagen
MY144574A (en) 1998-09-14 2011-10-14 Ibiden Co Ltd Printed circuit board and method for its production
JP3918142B2 (ja) * 1998-11-06 2007-05-23 株式会社日立製作所 クロムめっき部品、クロムめっき方法およびクロムめっき部品の製造方法
USRE40386E1 (en) 1998-11-06 2008-06-17 Hitachi Ltd. Chrome plated parts and chrome plating method
CN1137511C (zh) * 1999-01-21 2004-02-04 阿托特德国有限公司 生产集成电路时由高纯铜电镀形成导体结构的方法
US6297155B1 (en) * 1999-05-03 2001-10-02 Motorola Inc. Method for forming a copper layer over a semiconductor wafer
EP1225972A4 (en) * 1999-09-24 2006-08-30 Semitool Inc MODEL-RELATED DEVELOPMENT OF THE SURFACE PROFILE OF ELECTROCHEMICALLY SEPARATE METAL
GB2358194B (en) * 2000-01-17 2004-07-21 Ea Tech Ltd Electrolytic treatment
US20050061674A1 (en) 2002-09-16 2005-03-24 Yan Wang Endpoint compensation in electroprocessing
US7112270B2 (en) * 2002-09-16 2006-09-26 Applied Materials, Inc. Algorithm for real-time process control of electro-polishing
US7842169B2 (en) 2003-03-04 2010-11-30 Applied Materials, Inc. Method and apparatus for local polishing control
DE602005022650D1 (de) 2004-04-26 2010-09-16 Rohm & Haas Elect Mat Verbessertes Plattierungsverfahren
SE0403047D0 (sv) * 2004-12-14 2004-12-14 Polymer Kompositer I Goeteborg Pulse-plating method and apparatus
EP2072644A1 (en) * 2007-12-21 2009-06-24 ETH Zürich, ETH Transfer Device and method for the electrochemical deposition of chemical compounds and alloys with controlled composition and or stoichiometry

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US2524912A (en) * 1945-09-29 1950-10-10 Westinghouse Electric Corp Process of electrodepositing copper, silver, or brass
US2575712A (en) * 1945-09-29 1951-11-20 Westinghouse Electric Corp Electroplating
GB676565A (en) * 1949-07-18 1952-07-30 Du Pont Improvements in current reversal electroplating
GB779906A (en) * 1954-09-30 1957-07-24 Electro Chem Eng Improvements in or relating to electro-plating process and apparatus
GB794930A (en) * 1955-11-25 1958-05-14 Marconi Wireless Telegraph Co Improvements in or relating to methods of electro-depositing metal
US3328273A (en) * 1966-08-15 1967-06-27 Udylite Corp Electro-deposition of copper from acidic baths
DE2360892A1 (de) * 1972-12-14 1974-06-20 M & T Chemicals Inc Waessriges saures galvanisches kupferbad
US4666567A (en) * 1981-07-31 1987-05-19 The Boeing Company Automated alternating polarity pulse electrolytic processing of electrically conductive substances
US4517059A (en) * 1981-07-31 1985-05-14 The Boeing Company Automated alternating polarity direct current pulse electrolytic processing of metals
US4466864A (en) * 1983-12-16 1984-08-21 At&T Technologies, Inc. Methods of and apparatus for electroplating preselected surface regions of electrical articles
US4555315A (en) * 1984-05-29 1985-11-26 Omi International Corporation High speed copper electroplating process and bath therefor

Non-Patent Citations (1)

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Title
See references of WO8907162A1 *

Also Published As

Publication number Publication date
WO1989007162A1 (en) 1989-08-10
GB2214520A (en) 1989-09-06
ES2010390A6 (es) 1989-11-01
GB8801827D0 (en) 1988-02-24
GB8901091D0 (en) 1989-03-15
AU2947189A (en) 1989-08-25

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