EP0383792A1 - Systeme de fabrication de substrats semi-conducteurs - Google Patents

Systeme de fabrication de substrats semi-conducteurs

Info

Publication number
EP0383792A1
EP0383792A1 EP19880908948 EP88908948A EP0383792A1 EP 0383792 A1 EP0383792 A1 EP 0383792A1 EP 19880908948 EP19880908948 EP 19880908948 EP 88908948 A EP88908948 A EP 88908948A EP 0383792 A1 EP0383792 A1 EP 0383792A1
Authority
EP
European Patent Office
Prior art keywords
module
stations
modules
substrates
manufacturing system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19880908948
Other languages
German (de)
English (en)
Inventor
Horst Kunze-Concewitz
Wolfgang Schmutz
Roland Mann
Herbert Olbrich
Joseph Gentischer
Wolfgang FRÜHAUF
Johann Dorner
Günther BREITSCHWERDT
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Convac GmbH
Original Assignee
Convac GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Convac GmbH filed Critical Convac GmbH
Publication of EP0383792A1 publication Critical patent/EP0383792A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/25—Pc structure of the system
    • G05B2219/25005—Fluid bus for communication in process system with several fluidic control modules
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/51—Plural diverse manufacturing apparatus including means for metal shaping or assembling
    • Y10T29/5136—Separate tool stations for selective or successive operation on work

Definitions

  • the invention relates to a production system for disk-shaped substrates, in particular wafers, glass masks, ceramic carriers with individual process stations for the treatment and / or processing of the individual substrates under a clean environment, and a transport device for transporting the substrates between the individual process stations.
  • Such a production system is known from EP 35 844 A2, in which several process stations are accommodated in a single process space. Variations in the production process, for example adding a further process, are not possible. If a process station is contaminated, there is a risk that the neighboring process stations will also be contaminated and a high proportion of rejects will be caused.
  • the object of the present invention is to design a production system so that the effort required to maintain the clean environment is reduced as far as possible with complete training and contamination that may occur in one process station does not immediately endanger the purity in the other process stations and that such a production disruption can be remedied quickly, easily and in a time-saving manner and reject parts can be discharged from the production process without significant disruption to the production process of the other parts.
  • the manufacturing system is composed of several easily exchangeable transport modules and process modules. that at least the process modules have a symmetrical structure and at least one plane of symmetry that is symmetrical to the Plane of symmetry at a distance a from this plane of symmetry, locking points are fixed, that these locking points are also symmetrical to a transverse axis, each having a distance a from this transverse axis, that further locking points are provided and that these locking points have a distance a of at least one of the adjacent rest points and that the rest points are occupied with handling devices serving as a transport device, that these handling devices have a range a and that the others Resting points are occupied by process stations or serve as shelves, or that input and / or output stations are arranged there, whereby the handling devices allow the substrates to be transported independently from one rest point to an adjacent rest point, in particular also from one module to the adjacent module.
  • Operation of two practically independent parallel production lines by a process module can be achieved in that it has at least four locking points for handling devices, which are each arranged in a square at a distance 2a from one another.
  • each process module has one or more process stations and at least one or more shelves and in each case at least one handling device that has access to and through 2 process stations that the substrates from process station to process station can be transported from module to module via one or more shelves, if necessary, that the individual interchangeable modules can be encapsulated and that supply lines and channels and disposal channels of the adjacent modules are connected to one another, in particular for the media supply and -Disposal, such as the supply and removal of the clean atmosphere, the energy supply, the connection for control lines, the supply and removal of materials, chemicals and the like required for the manufacturing process.
  • Each process module is provided with a fixed station grid, which is interchangeably prepared for process stations and / or storage areas, thus enabling variable configurations.
  • At least one shelf of the module is arranged in a particularly advantageous manner so that it can be operated by all handling devices of the module. In this way, individual process stations can be bypassed, if necessary, and re-routing or rejection is also possible. It can be particularly advantageous to be able to reach three process stations or trays with each handling device of a module.
  • a particularly versatile use is made possible because four handling devices are provided in the module and at least one central storage space which can be accessed by all four handling devices.
  • For further transport of the Substrates between the individual modules can additionally be provided in the transfer area from one module to the next module, two shelves which can be operated via at least one handling device of the neighboring module.
  • two further trays or stations for auxiliary processes can additionally be provided on one end side, so that the substrates can be continuously passed on in a circuit in the modules connected to one another and can also be stored temporarily.
  • a particularly versatile use is possible in that 4 handling devices, 3 shelves and two process stations are provided in a standard module.
  • the substrates can be entered either manually or automatically via cassettes and the finished substrates can be stored in cassettes and transported away.
  • the risk of contamination can be significantly reduced by the fact that the handling devices, the shelves and the process stations are provided on a horizontal grid, that the work equipment drives, controls, disposal channels and lines are provided below this grid and the supply of the clean atmosphere if necessary with Fans and filters are spaced above the grille and handling devices, shelves and process stations is, in which case the clean atmosphere with any impurities flows through the grille from top to bottom, so that any abrasion of the moving parts is carried down and cannot pass through the grille.
  • the modules can be replaced much more easily if they have at least partially completely independent controls for the process stations and the associated handling devices.
  • the pure atmosphere circulation can also be controlled independently, in order to implement and maintain microclimate control with the least effort.
  • the modules can be constructed in the manner of a channel section, with the supply lines and channels on top, the disposal lines and channels below and the handling devices and process stations for the substrates between them above the grid, the areas being laterally closed off via side walls.
  • end walls with possibly lockable pass-through openings for the handling devices can be provided for the further transport of the substrates between the individual modules. Due to the practically lockable partition walls, module replacement can be carried out in a particularly simple and time-saving manner with a substantial reduction in the risk of dirt particles being introduced.
  • the shelves themselves and the grippers of the handling devices can serve as buffers, so that the individual process stations do not have to work in time with one another.
  • one or more trays can be designed as cassette stations, for the introduction and / or removal of the substrates and also for intermediate storage if necessary, if this should be necessary for certain processing processes.
  • process modules can also be networked with each other via transport modules, so that a diverse design of the production system with individual, if necessary, adapted modules is possible, whereby individual modules can also be designed as control stations, either for fully automatic control or also by visual control the substrates in order to be able to discover manufacturing defects as soon as possible and, if necessary, to be able to remove unusable substrates from the manufacturing process. In this way it can be avoided that rejects have to go through the entire manufacturing process, as is usually necessary in a closed manufacturing chain.
  • Figure 1 is a schematic plan view of the Arrangement grid of handling devices, process stations and / or shelves,
  • FIG. 1a shows a schematic partial plan view of a part of a production system with transport modules and process modules
  • FIG. 2 shows an oblique view of two adjacent process modules
  • FIG. 3 shows a schematic plan view of a standard module
  • FIG. 4 shows a plan view of a termination module corresponding to FIG. 3,
  • FIG. 5 shows an arrangement of different module groups corresponding to FIG. 1 as part of a production system
  • FIG. 10 is a schematic arrangement of two process modules and components of media supply and disposal
  • the same reference symbols are used for corresponding parts of the different modules.
  • FIG. 1 of two process modules 4 1 , 4 2 adjoining one another with their module boundaries 19, 19 ' four grid points H1 to H4 are provided square with a distance 2a, the grid points H1 and H4 from their closest module boundary 1 9 a distance from and the two have other grid points H2 and H3 a distance from their nearest module limit 19 '.
  • Halftone dots H further halftone dots S are arranged at a distance of a and expediently all symmetrical to a plane of symmetry 20.
  • handling devices 9 1 to 9 4 are arranged with a range of a so that through Handling devices the grid points S can be operated.
  • the grid points S for independent transport of the disk-shaped substrates, for example the grid points S., S 1 ' , S 5 ' S 6 'S 6 'are formed as shelves, while the grid points S 4 , S 2 , S 2 , S 3 , S 3 ' , can be designed as process stations 10, 10', as will be described in more detail below.
  • cassettes 3 can also be arranged for the feeding and removal of the substrates.
  • a cassette input and output module 1 with SMIF stations 1 '(standard mechanical interface - Semistandard USA) via a transport module 2 cassettes 3 to a process module 4.
  • SMIF stations 1 ' standard mechanical interface - Semistandard USA
  • transport module 2 cassettes 3
  • process module 4 two process modules 4, 4 1 are arranged one behind the other, then a control module 5 and a supply module 6.
  • the individual modules 4, 4 1 are supplied by the supply module 6 via a media bus 7 . . . 4 n , 5 and possibly also external
  • Module 8 supplied with the required transportable process media.
  • the electrical lines for the process control can also be integrated in the media bus 7.
  • the substrates to be processed are removed from the cassette 3 via a handling device 9 and fed to an adjacent process station 10.
  • the cassette 3, the process station 10 and a tray 11 can be reached by the handling device 9.
  • a total of four handling devices 9 to 9 4 are arranged in the modules 4 and 5, by means of which the substrates to be processed can be passed on to the individual process stations 10, 10 'or trays 11, 11', 11 ".
  • the finished substrates in the process circuit of the modules 4 and 5 are collected and then via the transport module 2' to external module 8 or transported anywhere else.
  • Substrates can be stored in the cassettes 3 and 2 'of the control module 5, which turn out to be useless during the control or require special further treatment. If necessary, they can be removed from the control module 5 if appropriate exit points are provided there.
  • the cassettes 3 ′′ can also serve as intermediate storage for the substrates to be checked or the substrates being checked.
  • the structure of a process module 4 is shown in more detail in Figure 2.
  • the handling devices 9 1 to 9 are arranged on a grid 12 made of perforated sheet metal, the actual drive and control elements being arranged below the grid 12.
  • the cassettes 3, 3 ' can be operated by the handling devices 9 1 and 9 2 .
  • the handling device 9 1 can operate the process station 10 and the tray 11, while the handling device 9 2 , the cassette 3 ', the process station 10' and also the tray 11 can operate.
  • the handling device 9 3 can in turn serve the process station 10 and the tray 11 but also the tray 11 'of the adjacent process module 4, just as the handling device 9 4 , the tray 11 can serve the process station 10' and the tray 11 "of the adjacent process module 4 Accordingly the handling devices 9 1 to 9 4 of the rear process module 4 also pass on or take over the substrates, as is indicated by the dash-dotted arrows.
  • the air supply 7 for supplying and circulating the pure atmosphere with the necessary fans is arranged filters, while below the grid 12 the drives and controls for the handling devices 9 are arranged in each process module 4 for themselves.
  • the end faces perpendicular to the direction of transport are closed by partitions 14 with the exception of pass-through openings 15, as is indicated in FIG. 2.
  • the pass-through openings 15 can also be closed, for example, by means of sliders 16, as is indicated by dash-dotted lines in FIG. 2, in order to allow access to the interior of the module 4, 5 or 6 when a module 4, 5, 6, foreign bodies or substances are replaced refuse.
  • FIG. 3 shows a schematic plan view of a standard process module 4. It can be seen from this that the distance of the process modules 10, 10 'and the shelves 11, 11', 11 "from the center of rotation of the handling devices 9 1 to 94 is the same everywhere, so that each handling device 9 has three stations in the form of process stations 10 , 10 'or trays 11, 11', 11 "and substrates there can be picked up or stored.
  • the handling devices 93 and 9 work together with the shelves 11 ', 11 "of the adjacent module 4 or 5.
  • FIG. 4 shows a termination module which largely corresponds to the process module 4 of FIG. 3, only there are additional trays 11 "'and 11""above the handling devices 93 and 94, so that there is an easier diversion of the production flow at the end of a production system A reversal is also possible without these shelves 11 "'and 11'"'', since the central shelf 11 is accessible to the handling devices 9 3 and 9 4.
  • the system is Suitable for both a vertical and parallel arrangement of the process modules 4 with respect to the transport modules 2, 2 '.
  • a module group of three process modules is arranged along the transport modules 2, 2 'once in the vertical direction and a further group of three process modules is arranged parallel to the transport module 2', fresh substrates being fed in once via the cassettes and 3 via the cassettes 3 'The partially or finished substrates are returned to the transport modules 2 and 2' for further transport.
  • the module groups and the transport modules 2, 2 ' are tightly sealed, so that the clean atmosphere or pure atmosphere within the modules 2, 4, 5 always preserved.
  • the installation rooms for the manufacturing system itself do not necessarily have to have a clean atmosphere, at least operators can carry out checks and, if necessary, interventions without impairing the manufacturing process.
  • FIGS. 6 to 9 The various possible transport routes for substrates are shown schematically in FIGS. 6 to 9.
  • the substrates are removed from the cassettes 3 and transported in parallel through the modules 4 to the cassettes 3 '.
  • the substrates are circulated from the cassette via the process modules 4 back to the cassette 3 '.
  • the substrates of the cassette 3 are removed and practically zigzag through the process modules 4 through to the cassette 3 '.
  • the cassettes 3 and 3 ' can also be fed by hand via transport modules 2, 2' or removed from the production system.
  • FIG. 10 the linkage of a media module 17 with two process modules 4 is shown in a schematic manner, the media being transported via lines and channels correspondingly coupled to one another via the media bus 4.
  • a mobile supply station 18 or several such mobile supply stations can also be connected in order to be able to supply the required substances and media and, if appropriate, to discharge waste products.
  • the lines and ducts are connected so that the individual modules 2,4,4 1 ...
  • modules 2,4,5,6 The special arrangement allows random access to the individual modules 2,4,5,6. Individual modules 2, 4, 5, 6 can easily be exchanged in order to implement changes in the production process with little effort. A very flexible assembly of the individual modules 4, 5, 6 is possible.
  • the material flow can also be varied very flexibly during the manufacturing process, if faults occur or if different products are alternately manufactured in the manufacturing process.
  • modules 2, 4, 5, 6 can also be connected laterally for further variation of the manufacturing processes, so that the material flow and the manufacturing process can be further varied without long assembly times being required. This is possible even during operation without significantly disrupting the production process. Before the replacement a module 2,4,5,6, this can be run empty, so that there is no rejects at all.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

Un système de fabrication de substrats en forme de disques, notamment plaquettes gaufrées, masques en verre, supports en céramique, comprend des stations séparées de traitement (10, 10') et/ou de façonnage des substrats individuels dans un environnement stérile et des convoyeurs des substrats entre les différentes stations de traitement (10, 10'). Afin d'obtenir un agencement compact et aisément modifiable des stations de traitement dans un environnement qui n'est pas particulièrement stérile, les stations se composent de plusieurs modules de transport (2, 2') et modules de traitement (4, 41, 42,...4n) facilement échangeables. Au moins les modules de traitement (4) sont symétriquement construits, avec au moins un plan de symétrie (20). Des points de montage fixes (H1...H4) sont agencés symétriquement par rapport à ce plan de symétrie (20), à une certaine distance (a) de celui-ci, et par rapport à un axe transversal (20'), à une certaine distance (a) de celui-ci. D'autres points de montage (S1...n, S'...n) sont agencés à une distance 2 x a d'au moins un des points de montage adjacents (H). Les points de montage (H1...H4) sont pourvus d'appareils de manutention (91...4) qui servent de dispositifs de transport et ont une portée 2 x a. Les points de montage supplémentaires (S) sont pourvus de stations de traitement (10, 10'), servent de dépôts (11, 11', 11'', 11''', 11'''') ou sont pourvus d'une ou de plusieurs stations de sortie (stations SMIF-1, cassettes 3, 3', 3''). Les appareils de manutention (91 à 94) permettent de transporter indépendamment les substrats d'un point de montage (S) à un point de montage adjacent (S), notamment d'un module (2, 2', 41...n, 5) à un module adjacent (2, 2', 41...n, 5).
EP19880908948 1987-10-20 1988-10-19 Systeme de fabrication de substrats semi-conducteurs Withdrawn EP0383792A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19873735449 DE3735449A1 (de) 1987-10-20 1987-10-20 Fertigungssystem fuer halbleitersubstrate
DE3735449 1987-10-20

Publications (1)

Publication Number Publication Date
EP0383792A1 true EP0383792A1 (fr) 1990-08-29

Family

ID=6338692

Family Applications (2)

Application Number Title Priority Date Filing Date
EP88908954A Withdrawn EP0386034A1 (fr) 1987-10-20 1988-10-19 Systeme de fabrication de substrats semi-conducteurs
EP19880908948 Withdrawn EP0383792A1 (fr) 1987-10-20 1988-10-19 Systeme de fabrication de substrats semi-conducteurs

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP88908954A Withdrawn EP0386034A1 (fr) 1987-10-20 1988-10-19 Systeme de fabrication de substrats semi-conducteurs

Country Status (5)

Country Link
US (1) US5083364A (fr)
EP (2) EP0386034A1 (fr)
JP (2) JPH03500711A (fr)
DE (1) DE3735449A1 (fr)
WO (2) WO1989004054A1 (fr)

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EP0386034A1 (fr) 1990-09-12
DE3735449A1 (de) 1989-05-03
US5083364A (en) 1992-01-28
WO1989004054A1 (fr) 1989-05-05
WO1989004053A1 (fr) 1989-05-05
JPH03500833A (ja) 1991-02-21
JPH03500711A (ja) 1991-02-14

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