EP0359336A2 - Dispositif pour la transmission des micro-ondes - Google Patents

Dispositif pour la transmission des micro-ondes Download PDF

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Publication number
EP0359336A2
EP0359336A2 EP89202301A EP89202301A EP0359336A2 EP 0359336 A2 EP0359336 A2 EP 0359336A2 EP 89202301 A EP89202301 A EP 89202301A EP 89202301 A EP89202301 A EP 89202301A EP 0359336 A2 EP0359336 A2 EP 0359336A2
Authority
EP
European Patent Office
Prior art keywords
waveguide
pump
pump stage
microwave
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP89202301A
Other languages
German (de)
English (en)
Other versions
EP0359336A3 (fr
EP0359336B1 (fr
Inventor
Georg Dr. Gärtner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Intellectual Property and Standards GmbH
Koninklijke Philips NV
Original Assignee
Philips Patentverwaltung GmbH
Philips Gloeilampenfabrieken NV
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Patentverwaltung GmbH, Philips Gloeilampenfabrieken NV, Koninklijke Philips Electronics NV filed Critical Philips Patentverwaltung GmbH
Publication of EP0359336A2 publication Critical patent/EP0359336A2/fr
Publication of EP0359336A3 publication Critical patent/EP0359336A3/fr
Application granted granted Critical
Publication of EP0359336B1 publication Critical patent/EP0359336B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/30—Auxiliary devices for compensation of, or protection against, temperature or moisture effects ; for improving power handling capability

Definitions

  • microwave powers of the order of 0.1 to 1 MW the thermal load on the known materials used for microwave windows becomes too great, as a result of which the output power is limited.
  • powers of at most 0.3 MW one helps to widen the waveguide and to additionally cool the window, which consists, for example, of A1 2 0 3 .
  • the pump stages are preferably pressure-controllable, the flow resistances of the waveguide sections between the pump stages, the suction powers of the pumps and the pressure controls being dimensioned or adjustable in such a way that a predetermined pressure difference between the waveguide regions is generated and maintained - in other words: the suction power of the respective pump is in the target pressure range greater than or equal to the flow resistance of the waveguide section between the inlet or the pump stage with higher pressure and the pump-down point and the pressure control is set for the target pressure range at the pump-off point (at which there is also a pressure sensor or a pressure gauge).
  • This embodiment is based on the basic idea of differential pumping.
  • the waveguide is pumped out through the slots in successive pump stages, so that the microwave is either guided from a region of high internal gas pressure (e.g. air under atmospheric pressure) to a region of low internal gas pressure (e.g. 10 hpa) in the waveguide or in the opposite direction from a region low is led into an area of high internal gas pressure.
  • a region of high internal gas pressure e.g. air under atmospheric pressure
  • a region of low internal gas pressure e.g. 10 hpa
  • the waveguide in the region of the first pump stage is filled with a gas with a high dielectric strength.
  • the waveguide is filled with a purge gas, an extinguishing gas or reactive gases. This is explained in more detail below.
  • a waveguide area with high pressure (e.g. air, 1000 hpa) is designated with a and a waveguide area with low pressure with b.
  • a TE 10 microwave is guided either from a to b or from b to a in a multiply coiled curved rectangular waveguide line 1.
  • Pump nozzles 6, 7, 8, 9 are attached to the outside of these slots, via which the line in direction b is successively evacuated to lower pressure using various vacuum pumps (not shown).
  • the pressure difference Ap p a - p b to be set between a and b is determined by the suction power and the final pressure of the pumps, the number of pump stages, the spacing of the slots and the cross section of the respective waveguide type.
  • a large pressure difference for example, is easier to achieve for the E-band (60 to 90 GHz) than for the X-band (8 to 12 GHz), due to the large cross-sectional area reduction of the E-band waveguide compared to the X-band - waveguide.
  • the device according to FIG. 1 is used for the microwave plasma-activated CVD of electrically conductive substances.
  • the spatial extent of this arrangement for the X-band is still quite compact with an outer diameter of approximately 37 cm and a height of approximately 30 cm.
  • the arrangement shown in FIG. 3 relates to use with a microwave plasma reactor.
  • the microwave transmission takes place through a waveguide 1, which is sealed airtight at one point with a microwave window 11 made of dielectric material, for example glass, quartz, PTFE, against the vacuum side 12.
  • a gas prevents a plasma from forming in the waveguide in spite of the low gas pressure and thus almost no microwave power reaching the reaction chamber.
  • the pump connection 13 is omitted and, for example, WFs or SF 6 is introduced at this point.
  • WFs which serves for the tungsten deposition in the reaction chamber
  • the pump connection 14 and the slots 4 and 5 are also omitted, and the gas is removed at an outlet opening from the reaction chamber.
  • a further possibility is the use of one or more low-damping directional couplers with rectangular waveguides arranged in parallel, which are pumped or gas-purged separately and in which the coupling holes represent an additional flow resistance ("orifice plate").
  • an additional flow resistance orifice plate
  • a third embodiment of the invention is the jet microwave window.
  • Fig. 4 shows such an arrangement.
  • the microwaves (arrow 16) are radiated through a double-walled resonance diaphragm 17, which is designed as a nozzle 18 for a large-area liquid jet (arrows 19 and 20), again from an inner waveguide area of approximately atmospheric pressure into a low-pressure area.
  • nozzle jet microwave window is, among other things, that no additional window cooling is required and that there is no longer any limitation at high microwave powers.
  • pumping effect of the nozzle jet can also be exploited here, such as that e.g. is used in water jet pumps or in diffusion pumps. There is a microwave transmission through a pump.
  • a steam jet nozzle can then be used instead of a liquid jet nozzle.

Landscapes

  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Waveguide Connection Structure (AREA)
  • Other Liquid Machine Or Engine Such As Wave Power Use (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
EP89202301A 1988-09-16 1989-09-13 Dispositif pour la transmission des micro-ondes Expired - Lifetime EP0359336B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3831453 1988-09-16
DE3831453A DE3831453A1 (de) 1988-09-16 1988-09-16 Vorrichtung zur mikrowellenuebertragung

Publications (3)

Publication Number Publication Date
EP0359336A2 true EP0359336A2 (fr) 1990-03-21
EP0359336A3 EP0359336A3 (fr) 1991-03-27
EP0359336B1 EP0359336B1 (fr) 1995-12-06

Family

ID=6363043

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89202301A Expired - Lifetime EP0359336B1 (fr) 1988-09-16 1989-09-13 Dispositif pour la transmission des micro-ondes

Country Status (4)

Country Link
US (1) US5028897A (fr)
EP (1) EP0359336B1 (fr)
JP (1) JPH02147847A (fr)
DE (2) DE3831453A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1087458A2 (fr) * 1999-09-17 2001-03-28 Spinner GmbH Elektrotechnische Fabrik Filtre passe-bande

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19529760C1 (de) * 1995-08-12 1996-11-14 Alcatel Kabel Ag Anordnung zur Übertragung von Hochfrequenz-Energie
JP4636663B2 (ja) * 2000-10-11 2011-02-23 四国計測工業株式会社 高温高圧容器への化学反応促進用マイクロ波供給装置
DE102011111884B3 (de) * 2011-08-31 2012-08-30 Martin Weisgerber Verfahren und Vorrichtung zur Erzeugung von thermodynamisch kaltem Mikrowellenplasma
DE102012204447B4 (de) * 2012-03-20 2013-10-31 Forschungsverbund Berlin E.V. Vorrichtung und Verfahren zur Erzeugung eines Plasmas
US9928993B2 (en) * 2015-01-07 2018-03-27 Applied Materials, Inc. Workpiece processing chamber having a rotary microwave plasma antenna with slotted spiral waveguide

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2407069A (en) * 1942-09-15 1946-09-03 Gen Electric Dielectric wave guide system
GB644749A (en) * 1948-09-08 1950-10-18 Standard Telephones Cables Ltd Improvements in or relating to electromagnetic wave guides
DE1031383B (de) * 1956-04-19 1958-06-04 Philips Nv Vorrichtung zum Ventilieren eines Wellenleitersystems
JPS60244102A (ja) * 1984-05-18 1985-12-04 Mitsubishi Electric Corp 導波管加圧装置
US4688007A (en) * 1985-09-03 1987-08-18 The Johns Hopkins University Air inlet for internal cooling of overmoded waveguide
EP0252548A1 (fr) * 1986-07-05 1988-01-13 Philips Patentverwaltung GmbH Procédé de fabrication d'objets façonnés électroconducteurs par dépôt chimique réactif par plasma en phase vapeur

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3287674A (en) * 1964-07-16 1966-11-22 Jr George H Stiegler Pressurized waveguide shut-off
US3778799A (en) * 1972-03-28 1973-12-11 Cables De Lyon Geoffroy Delore Safety device for pipe lines under gas pressure
US4286240A (en) * 1979-12-03 1981-08-25 Varian Associates, Inc. Circular electric mode microwave window

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2407069A (en) * 1942-09-15 1946-09-03 Gen Electric Dielectric wave guide system
GB644749A (en) * 1948-09-08 1950-10-18 Standard Telephones Cables Ltd Improvements in or relating to electromagnetic wave guides
DE1031383B (de) * 1956-04-19 1958-06-04 Philips Nv Vorrichtung zum Ventilieren eines Wellenleitersystems
JPS60244102A (ja) * 1984-05-18 1985-12-04 Mitsubishi Electric Corp 導波管加圧装置
US4688007A (en) * 1985-09-03 1987-08-18 The Johns Hopkins University Air inlet for internal cooling of overmoded waveguide
EP0252548A1 (fr) * 1986-07-05 1988-01-13 Philips Patentverwaltung GmbH Procédé de fabrication d'objets façonnés électroconducteurs par dépôt chimique réactif par plasma en phase vapeur

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
INSTRUMENTS AND CONTROL SYSTEMS. vol. 38, no. 9, September 1965, RADNOR US Seiten 135 - 139; H.D.BAUMANN: "Why limit outlet velocities in reducing valves? " *
PATENT ABSTRACTS OF JAPAN vol. 10, no. 104 (E-397)(2161) 19 April 1986, & JP-A-60 244102 (MITSUBISHI DENKI K.K.) 04 Dezember 1985, *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1087458A2 (fr) * 1999-09-17 2001-03-28 Spinner GmbH Elektrotechnische Fabrik Filtre passe-bande
EP1087458A3 (fr) * 1999-09-17 2002-08-07 Spinner GmbH Elektrotechnische Fabrik Filtre passe-bande

Also Published As

Publication number Publication date
JPH02147847A (ja) 1990-06-06
US5028897A (en) 1991-07-02
EP0359336A3 (fr) 1991-03-27
DE3831453A1 (de) 1990-03-22
DE58909526D1 (de) 1996-01-18
EP0359336B1 (fr) 1995-12-06

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