EP0280892B1 - Pompe à vide avec dispositif de comptage des tours - Google Patents

Pompe à vide avec dispositif de comptage des tours Download PDF

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Publication number
EP0280892B1
EP0280892B1 EP88101450A EP88101450A EP0280892B1 EP 0280892 B1 EP0280892 B1 EP 0280892B1 EP 88101450 A EP88101450 A EP 88101450A EP 88101450 A EP88101450 A EP 88101450A EP 0280892 B1 EP0280892 B1 EP 0280892B1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
sensor
pump according
pot
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP88101450A
Other languages
German (de)
English (en)
Other versions
EP0280892A2 (fr
EP0280892A3 (en
Inventor
Hans Amrath
Zoltan Szöcs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Publication of EP0280892A2 publication Critical patent/EP0280892A2/fr
Publication of EP0280892A3 publication Critical patent/EP0280892A3/de
Application granted granted Critical
Publication of EP0280892B1 publication Critical patent/EP0280892B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
    • F04D15/0094—Indicators of rotational movement
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/86—Detection

Definitions

  • the invention relates to a vacuum pump with the features of the preamble of claim 1.
  • Roots vacuum pumps with canned motor drive are completely encapsulated so that all rotating parts are inside the pump housing. Furthermore, the side chambers of the Roots pumps are usually under vacuum during operation. After all, Roots pumps are often used for aggressive fluids whose penetration into the side spaces cannot be prevented. It is therefore difficult to measure the speed directly using a mechanical coupling with one of the stub shafts. In turbomolecular vacuum pumps, too, the rotor shaft usually ends in a room, e.g. in the engine compartment, which is under pre-vacuum while the pump is operating.
  • a feed pump for central heating systems is known from the first-mentioned document.
  • This has a drive motor, the rotor of which is located within a sealed capsule 2.
  • the rotor of the drive motor is equipped with two magnets which generate a magnetic field through the capsule 2 and through the bottom of a further housing 8, which influences the position of a disk 9.
  • the position of the disc 9 is indicated by means of a pointer 12.
  • the main purpose of this device is to be able to recognize the direction of rotation of the motor.
  • DE-A-33 35 864 describes an inductive rod sensor with an electrical coil which interacts with a rotating, magnetically conductive part.
  • the object of the present invention is to propose a vacuum pump with a device for measuring the speed of its piston or its rotor, which is simple and robust and which does not require any mechanical coupling.
  • the housing ring is denoted by 2 and the pistons rotating therein by 3 and 4.
  • the cross section of the pistons is again shown separately and designated 3 'and 4'.
  • the shafts 5 and 6 of the pistons 3 and 4 are mounted in lateral end shields, of which only the wheel-side end shield 7 is shown.
  • the housing ring 2 and the end shields form the scooping chamber 8 of the Roots pump 1 shown.
  • the cover 9 forms the side space 11 on the wheel side.
  • the gearwheels 12 and 13 which are fastened on the stumps of the shafts 5 and 6 protruding into the side space 11. They serve to synchronize the movement of the pistons 3 and 4.
  • the side space 11 has an oil sump 14. Immersed in the oil is the spray disc 15, which is fastened together with the gear 13 on the stump of the shaft 6 and supplies both the bearings of the shafts 5 and 6 and the engagement of the gears 12 and 13 with lubricant.
  • a rotating element 17 is fastened to the stump of the shaft 6, which in this exemplary embodiment is designed as a disk with peripheral openings 18.
  • the cover 9 is provided with an opening 19 through which a pot 21 projects into the side space 11.
  • a sensor generally designated 22, which comprises a ring coil and a magnetic core arranged therein.
  • At least the bottom 20 of the pot 21 is made of non-magnetic material.
  • the pot 21 is equipped with a flange 23 which is attached to the cover 9 in a vacuum-tight manner. Upstream of the pot 21 is a housing 24 which forms a chamber 25. In this chamber 25 electronic components, for. B. the pulse amplifier housed.
  • the pot 21, flange 23 and housing 24 are expediently in one piece educated. To fix the electronic components in the chamber and also the sensor 22 in the pot 21, it may be expedient to pour these parts in goat resin. Via the cable 26, the amplified pulses are fed to a display device, not shown.
  • FIG. 2 shows a combined molecular-turbomolecular vacuum pump 29, the housing of which is designated 31. It is equipped with a central bearing plate 32 which projects inwardly in the form of a bushing and in which a shaft 33 is supported by means of a spindle bearing 34.
  • the armature of the drive motor 35, the rotor 36 of the molecular pump stage and the rotor 37 of the turbomolecular pump stage are coupled to the shaft 33.
  • the rotor 37 is equipped with the rotor blades 38 which, together with the stator blades 39 held in the housing 1, form the turbomolecular pump stage.
  • the respective pump is connected to the recipient to be evacuated by means of the flange 41.
  • the molecular pump stage comprises the bell-shaped rotor 36 which overlaps the storage space 42 and is equipped on its outside with thread-like grooves 43. In these grooves, gas is pumped from the high vacuum side to the fore vacuum side when the pump is operating.
  • An axially approximately equal length stator 44 is assigned to the rotor 36.
  • a device 18 to 26 of the type shown in FIG. 1 is provided.
  • the rotating element 17 is attached to the end of the shaft 33 which passes through the motor 35.
  • the engine compartment is encapsulated with the help of the cover 45.
  • By an opening 19 in the cover 45 projects the pot 21 with the sensor 22 into the engine compartment.
  • 18 current pulses are induced in the coil of the sensor 22 as a result of the interruptions. These can be amplified and used for the electronic measurement of the speed of the rotor 36 or 37.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Measuring Volume Flow (AREA)
  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Claims (10)

  1. Pompe à vide avec un dispositif pour mesurer la vitesse de rotation de son ou ses piston(s) (3, 4) ou de son ou ses rotor(s) (36, 37), comportant au moins un piston ou rotor dont l'arbre est monté dans au moins un flasque de palier (7, 32), et une chambre latérale dans laquelle pénètre un bout de l'arbre, caractérisée par le fait que le bout de l'arbre porte un élément rotatif (17) en matière ferromagnétique, doté d'ajours périphériques (18), par le fait qu'un capteur (22) équipé d'un aimant permanent est maintenu sur la paroi de carter (9, 45) formant la chambre latérale, à hauteur des ajours périphériques (18) de l'élément rotatif (17), par le fait que le capteur est séparé de l'intérieur de la chambre latérale par une paroi (20) en matière non-magnétique, par le fait que le capteur est agencé dans un pot (21) qui, au moins dans la région de son fond (20), est en matière non-magnétique, et par le fait que, par son côté fermé, le pot traverse une ouverture dans la paroi de carter (9, 45), est tourné vers les ajours périphériques (18) et pénètre à l'intérieur de la chambre latérale.
  2. Pompe à vide selon revendication 1, caractérisée par le fait que l'élément rotatif (17) est réalisé sous la forme d'un disque perforé ou denté.
  3. Pompe à vide selon revendication 1 ou 2, caractérisée par le fait que le capteur (22) comporte un aimant permanent et une bobine entourant celui-ci.
  4. Pompe à vide selon revendication 3, caractérisée par le fait que le pot (21) est équipé d'une collerette de bridage (23) par laquelle il est fixé sur la paroi de carter (9, 45).
  5. Pompe à vide selon revendication 3 ou 4, caractérisée par le fait que le pot (21) est suivi d'une chambre pour l'agencement de composants électroniques.
  6. Pompe à vide selon revendications 4 et 5, caractérisée par le fait que le pot (21), la collerette de bridage (23) et l'enceinte (24) formant la chambre sont en une seule pièce.
  7. Pompe à vide selon revendication 5 ou 6, caractérisée par le fait que le capteur et/ou les composants électroniques sont pris dans de la résine coulée, à l'intérieur du pot (21) ou, selon le cas, de la chambre (25).
  8. Pompe à vide selon l'une des revendications précédentes, caractérisée par le fait que la pompe à vide est une pompe (1) à deux arbres et par le fait que l'élément rotatif (17) ainsi que le capteur (22) sont agencés du côté roues.
  9. Pompe à vide selon revendication 8, caractérisée par le fait que le capteur (22) est fixé sur le couvercle (9) de la chambre latérale (11) située côté roues.
  10. Pompe à vide selon l'une des revendications 1 à 7, caractérisée par le fait que la pompe à vide est une pompe moléculaire ou turbomoléculaire (29) et par le fait que l'élément rotatif (17) et le capteur (22) sont agencés côté moteur.
EP88101450A 1987-02-28 1988-02-02 Pompe à vide avec dispositif de comptage des tours Expired - Lifetime EP0280892B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE8703108U 1987-02-28
DE8703108U DE8703108U1 (de) 1987-02-28 1987-02-28 Vakuumpumpe mit einer Einrichtung zur Drehzahlmessung

Publications (3)

Publication Number Publication Date
EP0280892A2 EP0280892A2 (fr) 1988-09-07
EP0280892A3 EP0280892A3 (en) 1989-04-05
EP0280892B1 true EP0280892B1 (fr) 1992-10-28

Family

ID=6805337

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88101450A Expired - Lifetime EP0280892B1 (fr) 1987-02-28 1988-02-02 Pompe à vide avec dispositif de comptage des tours

Country Status (4)

Country Link
US (1) US4822251A (fr)
EP (1) EP0280892B1 (fr)
JP (1) JPS63215887A (fr)
DE (2) DE8703108U1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004024554A1 (de) * 2004-05-18 2005-12-15 Pfeiffer Vacuum Gmbh Ölgedichtete Drehschiebervakuumpumpe

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
JPH04219493A (ja) * 1990-08-10 1992-08-10 Ebara Corp ターボ分子ポンプ
JP3408309B2 (ja) * 1994-02-10 2003-05-19 株式会社東芝 密閉形コンプレッサならびにこのコンプレッサを用いた冷凍装置
JP3010529B1 (ja) * 1998-08-28 2000-02-21 セイコー精機株式会社 真空ポンプ、及び真空装置
JP3047292B1 (ja) * 1998-11-24 2000-05-29 セイコー精機株式会社 ターボ分子ポンプ及び真空装置
US6491829B2 (en) * 1999-12-24 2002-12-10 Takashi Nishimoto Method and unit for processing contaminated liquid
JP2002070787A (ja) * 2000-08-25 2002-03-08 Kashiyama Kogyo Kk 真空ポンプ
JP2002295398A (ja) * 2001-03-28 2002-10-09 Boc Edwards Technologies Ltd ターボ分子ポンプの保護装置、及びターボ分子ポンプの保護方法
DE10150015A1 (de) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür
FR2925592A3 (fr) * 2007-12-19 2009-06-26 Renault Sas Dispositif pour produire un signal de synchronisation du cycle de fonctionnement d'un moteur a combustion interne
EP2314877B1 (fr) * 2008-07-14 2018-08-22 Edwards Japan Limited Pompe à vide
DE102010012850A1 (de) * 2010-03-25 2011-09-29 Sauer-Danfoss Aps Fluid-Rotationsmaschine mit einer Sensoranordnung
DE102011017011A1 (de) * 2010-04-30 2011-11-03 Conti Temic Microelectronic Gmbh Hydraulische Fördereinrichtung und elektrohydraulisches Steuerungsmodul
US9336990B2 (en) * 2013-08-29 2016-05-10 Varian Semiconductor Equipment Associates, Inc. Semiconductor process pumping arrangements
CN104295358A (zh) * 2014-10-20 2015-01-21 广西玉柴机器股份有限公司 一种发动机的水泵
EP3534081B1 (fr) * 2016-10-31 2021-03-10 Mitsubishi Electric Corporation Dispositif de diagnostic de détérioration et climatiseur
CN107061286A (zh) * 2016-12-12 2017-08-18 无锡吴创环境科技有限公司 罗茨风机轴承游隙消除及端面间隙调整结构
JP6928726B2 (ja) * 2018-11-09 2021-09-01 Ｋｙｂ株式会社 電動ポンプ

Family Cites Families (14)

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Publication number Priority date Publication date Assignee Title
US1927799A (en) * 1932-03-07 1933-09-19 Goulds Pumps Rotary pump
FR1142139A (fr) * 1955-03-12 1957-09-13 Charmilles Sa Ateliers Circulateur comprenant un dispositif pour indiquer son sens de rotation
US4180375A (en) * 1977-01-21 1979-12-25 Altex Scientific, Inc. Liquid chromatography pump
US4328824A (en) * 1979-12-10 1982-05-11 General Electric Company Flow divider with plural metering gears, unrestrained spacers there-between and lubricated end roller bearings
US4384825A (en) * 1980-10-31 1983-05-24 The Bendix Corporation Personal sampling pump
DE3047699A1 (de) * 1980-12-18 1982-07-01 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Waelzkolbenpumpe mit druckausgleichskammer
US4500268A (en) * 1982-09-30 1985-02-19 Chandler Evans Inc Rotary pump having brake means with thermal fuse
JPS5963709U (ja) * 1982-10-21 1984-04-26 三菱電機株式会社 圧力機器の制御装置
JPS59131061U (ja) * 1983-02-22 1984-09-03 株式会社ボッシュオートモーティブ　システム ベ−ン型圧縮機の回転検出器
DE3335864A1 (de) * 1983-10-03 1985-04-11 Robert Bosch Gmbh, 7000 Stuttgart Induktiver stabsensor mit elektrischer spule
JPS60178985A (ja) * 1984-02-24 1985-09-12 Sanden Corp 回転数検出機能を有する圧縮機
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
FR2578018B1 (fr) * 1985-02-26 1990-04-27 Electricfil Perfectionnements aux capteurs electromagnetiques
DE3542962C2 (de) * 1985-12-05 1996-03-28 Teves Metallwaren Alfred Induktiver Impulsgeber

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004024554A1 (de) * 2004-05-18 2005-12-15 Pfeiffer Vacuum Gmbh Ölgedichtete Drehschiebervakuumpumpe
DE102004024554B4 (de) * 2004-05-18 2018-01-25 Pfeiffer Vacuum Gmbh Ölgedichtete Drehschiebervakuumpumpe

Also Published As

Publication number Publication date
EP0280892A2 (fr) 1988-09-07
EP0280892A3 (en) 1989-04-05
DE8703108U1 (de) 1988-03-31
JPS63215887A (ja) 1988-09-08
US4822251A (en) 1989-04-18
DE3875499D1 (de) 1992-12-03

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