DE3875499D1 - Vakuumpumpe mit einer einrichtung zur drehzahlmessung. - Google Patents

Vakuumpumpe mit einer einrichtung zur drehzahlmessung.

Info

Publication number
DE3875499D1
DE3875499D1 DE8888101450T DE3875499T DE3875499D1 DE 3875499 D1 DE3875499 D1 DE 3875499D1 DE 8888101450 T DE8888101450 T DE 8888101450T DE 3875499 T DE3875499 T DE 3875499T DE 3875499 D1 DE3875499 D1 DE 3875499D1
Authority
DE
Germany
Prior art keywords
vacuum pump
measuring device
speed measuring
sensor
ferromagnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888101450T
Other languages
English (en)
Inventor
Hans Amrath
Zoltan Szoecs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to DE8888101450T priority Critical patent/DE3875499D1/de
Application granted granted Critical
Publication of DE3875499D1 publication Critical patent/DE3875499D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
    • F04D15/0094—Indicators of rotational movement
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/86—Detection
DE8888101450T 1987-02-28 1988-02-02 Vakuumpumpe mit einer einrichtung zur drehzahlmessung. Expired - Fee Related DE3875499D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE8888101450T DE3875499D1 (de) 1987-02-28 1988-02-02 Vakuumpumpe mit einer einrichtung zur drehzahlmessung.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE8703108U DE8703108U1 (de) 1987-02-28 1987-02-28
DE8888101450T DE3875499D1 (de) 1987-02-28 1988-02-02 Vakuumpumpe mit einer einrichtung zur drehzahlmessung.

Publications (1)

Publication Number Publication Date
DE3875499D1 true DE3875499D1 (de) 1992-12-03

Family

ID=6805337

Family Applications (2)

Application Number Title Priority Date Filing Date
DE8703108U Expired DE8703108U1 (de) 1987-02-28 1987-02-28
DE8888101450T Expired - Fee Related DE3875499D1 (de) 1987-02-28 1988-02-02 Vakuumpumpe mit einer einrichtung zur drehzahlmessung.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE8703108U Expired DE8703108U1 (de) 1987-02-28 1987-02-28

Country Status (4)

Country Link
US (1) US4822251A (de)
EP (1) EP0280892B1 (de)
JP (1) JPS63215887A (de)
DE (2) DE8703108U1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
JPH04219493A (ja) * 1990-08-10 1992-08-10 Ebara Corp ターボ分子ポンプ
JP3408309B2 (ja) * 1994-02-10 2003-05-19 株式会社東芝 密閉形コンプレッサならびにこのコンプレッサを用いた冷凍装置
JP3010529B1 (ja) * 1998-08-28 2000-02-21 セイコー精機株式会社 真空ポンプ、及び真空装置
JP3047292B1 (ja) * 1998-11-24 2000-05-29 セイコー精機株式会社 ターボ分子ポンプ及び真空装置
US6491829B2 (en) * 1999-12-24 2002-12-10 Takashi Nishimoto Method and unit for processing contaminated liquid
JP2002070787A (ja) * 2000-08-25 2002-03-08 Kashiyama Kogyo Kk 真空ポンプ
JP2002295398A (ja) * 2001-03-28 2002-10-09 Boc Edwards Technologies Ltd ターボ分子ポンプの保護装置、及びターボ分子ポンプの保護方法
DE10150015A1 (de) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür
DE102004024554B4 (de) * 2004-05-18 2018-01-25 Pfeiffer Vacuum Gmbh Ölgedichtete Drehschiebervakuumpumpe
FR2925592A3 (fr) * 2007-12-19 2009-06-26 Renault Sas Dispositif pour produire un signal de synchronisation du cycle de fonctionnement d'un moteur a combustion interne
JP5719592B2 (ja) * 2008-07-14 2015-05-20 エドワーズ株式会社 真空ポンプ
DE102010012850A1 (de) * 2010-03-25 2011-09-29 Sauer-Danfoss Aps Fluid-Rotationsmaschine mit einer Sensoranordnung
DE112011101506A5 (de) * 2010-04-30 2013-04-11 Conti Temic Microelectronic Gmbh Hydraulische Fördereinrichtung und elektrohydraulisches Steuerungsmodul
US9336990B2 (en) * 2013-08-29 2016-05-10 Varian Semiconductor Equipment Associates, Inc. Semiconductor process pumping arrangements
CN104295358A (zh) * 2014-10-20 2015-01-21 广西玉柴机器股份有限公司 一种发动机的水泵
JP6762369B2 (ja) * 2016-10-31 2020-09-30 三菱電機株式会社 劣化診断装置および空気調和機
CN107061286A (zh) * 2016-12-12 2017-08-18 无锡吴创环境科技有限公司 罗茨风机轴承游隙消除及端面间隙调整结构
WO2020095768A1 (ja) * 2018-11-09 2020-05-14 Ｋｙｂ株式会社 電動ポンプ

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1927799A (en) * 1932-03-07 1933-09-19 Goulds Pumps Rotary pump
FR1142139A (fr) * 1955-03-12 1957-09-13 Charmilles Sa Ateliers Circulateur comprenant un dispositif pour indiquer son sens de rotation
US4180375A (en) * 1977-01-21 1979-12-25 Altex Scientific, Inc. Liquid chromatography pump
US4328824A (en) * 1979-12-10 1982-05-11 General Electric Company Flow divider with plural metering gears, unrestrained spacers there-between and lubricated end roller bearings
US4384825A (en) * 1980-10-31 1983-05-24 The Bendix Corporation Personal sampling pump
DE3047699A1 (de) * 1980-12-18 1982-07-01 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Waelzkolbenpumpe mit druckausgleichskammer
US4500268A (en) * 1982-09-30 1985-02-19 Chandler Evans Inc Rotary pump having brake means with thermal fuse
JPS5963709U (ja) * 1982-10-21 1984-04-26 三菱電機株式会社 圧力機器の制御装置
JPS59131061U (ja) * 1983-02-22 1984-09-03 株式会社ボッシュオートモーティブ　システム ベ−ン型圧縮機の回転検出器
DE3335864A1 (de) * 1983-10-03 1985-04-11 Robert Bosch Gmbh, 7000 Stuttgart Induktiver stabsensor mit elektrischer spule
JPS60178985A (ja) * 1984-02-24 1985-09-12 Sanden Corp 回転数検出機能を有する圧縮機
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
FR2578018B1 (fr) * 1985-02-26 1990-04-27 Electricfil Perfectionnements aux capteurs electromagnetiques
DE3542962C2 (de) * 1985-12-05 1996-03-28 Teves Metallwaren Alfred Induktiver Impulsgeber

Also Published As

Publication number Publication date
JPS63215887A (ja) 1988-09-08
US4822251A (en) 1989-04-18
DE8703108U1 (de) 1988-03-31
EP0280892B1 (de) 1992-10-28
EP0280892A2 (de) 1988-09-07
EP0280892A3 (en) 1989-04-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee