EP0187786A1 - Strahlrohr zum auskoppeln von röntgenlicht - Google Patents
Strahlrohr zum auskoppeln von röntgenlichtInfo
- Publication number
- EP0187786A1 EP0187786A1 EP85903226A EP85903226A EP0187786A1 EP 0187786 A1 EP0187786 A1 EP 0187786A1 EP 85903226 A EP85903226 A EP 85903226A EP 85903226 A EP85903226 A EP 85903226A EP 0187786 A1 EP0187786 A1 EP 0187786A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- membrane
- area
- jet pipe
- pipe according
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/001—Arrangements for beam delivery or irradiation
Definitions
- the invention relates to a beam pipe for decoupling X-ray light from a UHV region of an X-ray radiation source according to the preamble of patent claim 1.
- the X-ray radiation source can, for example, be an electronic circulation system, such as. an electron storage ring. or a. Be electron synchrotron.
- the synchrotron radiation of such electron circulation systems has recently been increasingly used as a powerful X-ray light or X-ray radiation source for scientific experiments, for material analysis or in the semiconductor industry.
- beam tubes For coupling out the synchrotron radiation from such electron circulation systems, so-called beam tubes are used, which establish the connection between the electron circulation system and the area (application area) in which the x-ray radiation is used, for example, for one of the aforementioned purposes.
- the jet pipes are used over their entire length and also the second area, i.e. the application area is carried out in ultra-high vacuum technology, since the beam tube creates a direct connection between the electron circulation system and the application area.
- the beam tubes are designed as continuous tubes, so that in order to maintain the ultra-high vacuum in the electron circulation system, the beam tube and the area of application must also be implemented in UHV technology. This leads to a considerable increase in costs, since ultra-high vacuum components are several times more expensive than, for example, fine vacuum components.
- a pressure reduction in the jet pipe has not yet been considered.
- differential pressure stages are used for such pressure reductions. These essentially consist of a very long and narrow pipe, into which additional screens may be installed, which increase the line resistance.
- the pressure reduction of such differential pressure stages is not only very limited, the constricted pipe cross-section also has the disadvantage that the optical path is also greatly restricted. This is very disadvantageous if, for example, the full geometrical extent of the synchrotron light is to be used.
- differential pressure stages there would be great problems with adjusting the beam path in the beam pipe which has these narrow points.
- a large aperture is required if the light beam by means of optical elements te, for example with mirrors, etc. to be able to illuminate large areas in the vertical direction.
- such elements must be in the ultra-high vacuum part in order to maintain their optical quality. All of this has resulted in the average person having developed a prejudice against pressure reduction in the jet pipe.
- the invention has for its object to provide a beam pipe for coupling out X-ray light according to the preamble of claim 1, which allows a pressure reduction for the X-ray light with a large aperture.
- this thin membrane seals the UHV area of the X-ray source and the smaller UHV part of the jet pipe in a vacuum-tight manner against a second area of the jet pipe as well as, if applicable, the area of application in which there is a higher pressure, for example a fine vacuum of approx. 10 -2 hPa.
- a vacuum-tight membrane - as has been recognized according to the invention - can nevertheless be almost transparent to X-rays.
- the steel tube according to the invention has the same aperture as the prior art with the same geometric dimensions. It is particularly advantageous if - as claimed in claim 2 - the membrane consists of materials with a low mass number because of the strong mass dependence of the X-ray absorption.
- membrane In claim 3 it is characterized that preferred materials for the membrane are metals or semiconductors, for example aluminum, beryllium, magnesium or silicon and their compounds.
- the use of the membrane according to the invention for reducing the pressure has the advantage that the jet pipe is easy to handle and the membrane takes up little space. Since the absorption, particularly of the elements to be used with preference, is very high in the long-wave range, the heat load for the subsequent components is very low. The good thermal stability and the high thermal conductivity of silicon, for example, allow the use of this material, inter alia, even at the highest radiation intensities. This is another surprising advantage of the membrane according to the invention.
- Fig. 2 shows another way to attach the membrane
- Fig. 3 shows a preferred embodiment of a membrane according to the invention.
- Fig. 1 shows part of a jet pipe.
- a thin, but vacuum-tight membrane 1 separates an ultra-high vacuum area A of the jet pipe from an area B in which a substantially higher pressure, for example a pressure in the fine vacuum or high vacuum area, is maintained.
- Area B is followed by the application area, not shown, in which experimental setups are arranged; a vacuum connection between the application area and area B is not absolutely necessary.
- the area A is directly connected in terms of vacuum to the X-ray radiation source, which is designed using UHV technology.
- the pressure is typically a few 10 -9 hPa, while in range B the pressure is typically 10 -2 hpa is.
- the membrane 1 is attached to a window flange 2.
- the window flange 2 is connected to the flanges 4 and 5 of the jet pipe using conventional vacuum sealing technology.
- the known vacuum sealing technology is only shown schematically by the elements 3, for example O-rings.
- the thin membrane 1 is connected to the window flange 2 in a vacuum-tight manner by means of sealing rings 6 and a retaining ring 7.
- the two sealing rings 6 can preferably be arranged slightly offset, so that the membrane 1 is simultaneously slightly tensioned.
- the sealing rings 6 can be conventional vacuum sealing elements, for example O-rings, but soft metal rings, for example made of gold, indium or lead, can also be used as sealing rings.
- a window flange 2 which carries the membrane 1
- the membrane 1 can be easily replaced in the event of damage or if another radiation source is used.
- FIG. 2 shows a further possibility of attaching the membrane 1 to the window flange 2 in a vacuum-tight manner.
- the membrane 1 is tightly connected to the window flange 2 by means of a sealing and adhesive compound 8, which is very thin.
- Vacuum-compatible adhesives commonly used, for example two-component adhesives, can be used as sealants and adhesives. Since the adhesive surfaces are very small, the emission rate of the adhesive is very low.
- FIG. 3 shows a special embodiment of the thin membrane 1.
- the membrane 1 has a circular area 1 a on, the thickness of which is very small compared to the surrounding annular area 1b.
- Such a membrane can be produced, for example, by etching a 400 to 500 ⁇ m thick silicon wafer in such a way that the circular region 1a is formed.
- the annular area 1b, ie the edge also serves as a clamping frame for the film 1a and can be connected to the window flange 2, for example in the manner shown in FIGS. 1 and 2, without the actual membrane 1a itself being mechanically stressed.
- the use of a membrane according to the invention has the advantage that an excellent pressure reduction is achieved.
- a membrane according to the invention has the advantage that an excellent pressure reduction is achieved.
- Silicon foil with a thickness of 1.5 ⁇ m and an area of 15 cm 2 can achieve pressure reductions of 10 -9 hPa against 10 -2 hPa at any time.
- the membrane can be connected to the window flange by means of a sintering or diffusion process.
- Silver for example, can be used as the diffusion material.
- This method of vacuum-tight fastening has the advantage that the window flange 2 together with the membrane can also be heated to higher temperatures when the UHV part of the vacuum system is heated.
- the x-ray permeable membrane can also have a rectangular or other shape.
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- X-Ray Techniques (AREA)
- Particle Accelerators (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3425146 | 1984-07-07 | ||
DE19843425146 DE3425146A1 (de) | 1984-07-07 | 1984-07-07 | Strahlrohr zum auskoppeln von roentgenlicht aus einer synchrotronstrahlungsquelle |
Publications (1)
Publication Number | Publication Date |
---|---|
EP0187786A1 true EP0187786A1 (de) | 1986-07-23 |
Family
ID=6240135
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP85903226A Withdrawn EP0187786A1 (de) | 1984-07-07 | 1985-07-08 | Strahlrohr zum auskoppeln von röntgenlicht |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0187786A1 (de) |
JP (1) | JPS62501110A (de) |
DE (1) | DE3425146A1 (de) |
WO (1) | WO1986000752A1 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3711293A1 (de) * | 1987-04-03 | 1988-10-27 | Fraunhofer Ges Forschung | Schnellschliessendes durchgangsventil eines vakuum-schutzsystems |
JPH04363700A (ja) * | 1990-08-01 | 1992-12-16 | Canon Inc | X線透過窓およびその取付け方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE760042C (de) * | 1940-09-20 | 1954-02-22 | Siemens & Halske A G | Schnellverschluss fuer ein vakuumdichtes Gefaess, insbesondere ein Zyklotron |
US4342917A (en) * | 1978-01-16 | 1982-08-03 | The Perkin-Elmer Corporation | X-ray lithography apparatus and method of use |
DE2951387C2 (de) * | 1979-12-20 | 1984-04-05 | Deutsches Elektronen-Synchrotron Desy, 2000 Hamburg | Schnellschlußklappenventil für Hochvakuum- oder Ultrahochvakuumbetrieb |
DE3022127A1 (de) * | 1980-06-10 | 1982-01-07 | Hahn-Meitner-Institut für Kernforschung Berlin GmbH, 1000 Berlin | Strahlendurchtrittsfenster mit einer in einen rahmen gefassten duennen metallfolie |
WO1983003674A1 (en) * | 1982-04-14 | 1983-10-27 | Battelle Development Corp | Providing x-rays |
-
1984
- 1984-07-07 DE DE19843425146 patent/DE3425146A1/de not_active Withdrawn
-
1985
- 1985-07-08 EP EP85903226A patent/EP0187786A1/de not_active Withdrawn
- 1985-07-08 JP JP60503221A patent/JPS62501110A/ja active Pending
- 1985-07-08 WO PCT/DE1985/000236 patent/WO1986000752A1/de not_active Application Discontinuation
Non-Patent Citations (1)
Title |
---|
See references of WO8600752A1 * |
Also Published As
Publication number | Publication date |
---|---|
JPS62501110A (ja) | 1987-04-30 |
WO1986000752A1 (en) | 1986-01-30 |
DE3425146A1 (de) | 1986-01-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE CH DE FR GB IT LI LU NL SE |
|
17P | Request for examination filed |
Effective date: 19860730 |
|
17Q | First examination report despatched |
Effective date: 19871106 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 19880201 |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: BETZ, HANS Inventor name: BRUCKER, BERTRAM Inventor name: SCHEUNEMANN, HEINZ-ULRICH |