EP0186776B1 - Dispositif de production d'un vide - Google Patents

Dispositif de production d'un vide Download PDF

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Publication number
EP0186776B1
EP0186776B1 EP85114893A EP85114893A EP0186776B1 EP 0186776 B1 EP0186776 B1 EP 0186776B1 EP 85114893 A EP85114893 A EP 85114893A EP 85114893 A EP85114893 A EP 85114893A EP 0186776 B1 EP0186776 B1 EP 0186776B1
Authority
EP
European Patent Office
Prior art keywords
separator
gas
fine separator
cooler
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP85114893A
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German (de)
English (en)
Other versions
EP0186776A1 (fr
Inventor
Siegfried Dipl.-Ing. Schönwald
Hans-Georg Trojahn
Norbert Dipl.-Ing. Schmid
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to AT85114893T priority Critical patent/ATE40583T1/de
Publication of EP0186776A1 publication Critical patent/EP0186776A1/fr
Application granted granted Critical
Publication of EP0186776B1 publication Critical patent/EP0186776B1/fr
Expired legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation

Definitions

  • the invention relates to a device for generating a vacuum, which contains a liquid ring pump driven by an electric motor as a vacuum pump, in which device the vacuum pump is followed by a pre-separator provided with a storage space for separating the conveyed gas from the auxiliary liquid carried with the auxiliary liquid from the storage space from a liquid cooler to the liquid ring pump and the gas still loaded with a remainder of the auxiliary liquid is fed to a fine separator downstream of the pre-separator, which is provided with a return line for the auxiliary liquid separated in it.
  • a cooler is arranged downstream of a pre-separator for the lubricating oil which serves as a collecting space and via which the compressed air is arranged in a spatially separate manner from the cooler Fine separator is fed.
  • the compressed air is cooled in the cooler, so that the lubricating oil particles which are still entrained condense into larger droplets and can thus be better deposited in the fine separator.
  • the invention has for its object to improve a device of the type described above in that the liquid separation is significantly improved by appropriate cooling, without condensation of the moisture contained in the sucked gas within the pump and the pre-separator must be accepted. This task should also be solved with the least possible design effort.
  • the pre-separator and the fine separator are arranged spatially separate and the gas still loaded with a remainder of the auxiliary liquid is fed to the fine separator via a gas cooler arranged separately from the liquid cooler, the two coolers being dimensioned such that the Gas is cooled to a lower temperature than the outlet temperature of the auxiliary liquid measured at the outlet of the liquid cooler.
  • the spatially separated arrangement of the two separators achieves a thermal decoupling of the fine separator from the pre-separator, which is strongly heated by the auxiliary liquid and the compressed gas. Only the auxiliary liquid flowing back to the vacuum pump is cooled via the liquid cooler, it being possible for the liquid cooler to be designed such that a favorable operating temperature of the auxiliary liquid is achieved.
  • the liquid cooler can be dimensioned accordingly small.
  • the gas cooler arranged between the pre-separator and the fine separator need only apply the smaller cooling capacity necessary for cooling the gas. It can be dimensioned such that a favorable low temperature necessary for separating the auxiliary liquid is reached.
  • a separate fan for the liquid cooler and the gas cooler can be avoided by arranging these coolers in the cooling air flow of the electric motor.
  • an embodiment of the liquid cooler which does not take up any additional space results from the fact that it is designed as a coiled tube which is arranged concentrically around the electric motor or between it and the vacuum pump. Additional space is also not claimed if a double-walled fan hood is provided as a gas cooler on the electric motor, surrounding the fan, through the cavity of which the gas is passed.
  • the described design of the two coolers therefore has the advantage that they are inevitably in the cooling air flow of the fan of the electric motor, the gas cooler being acted upon by the fresh air which has not yet been heated.
  • both the pre-separator and the fine separator are each installed in a tubular housing part and the two housing parts are arranged with their longitudinal axes parallel to the longitudinal axis of the electric motor. It is particularly advantageous here that both the inlet and outlet connections of the vacuum pump are directed upwards and the two separators are each attached to one of the two connections lying above the electric motor.
  • Such an arrangement of the separators above the engine is particularly favorable for the lateral connection of the gas lines to the fan cover.
  • the gas lines led out from the side of the fan hood are led laterally into the pre-separator or fine separator, so that there is a very short and simple pipe guide for the gas lines.
  • both the separators and the gas lines are at least partially covered by the cooling air flow from the engine fan.
  • the pre-separator and the fine separator each consist of a head part containing the connection points for the lines to be connected and a head part that can be connected to this head part and contains the elements of the respective separator.
  • An easily detachable connection of the container parts to the head parts is possible in that the container parts are cylindrical bushings that have a radially outwardly projecting bead on their open side, with which they can be fastened on by means of a clamping lock that overlaps this bead and a corresponding bead formed on the head part Headboard are attached.
  • a simple design of the pre-separator is characterized in that a gas guide line connected to the head part runs parallel to the upper boundary wall of the container part, which ends near the bottom of the container part and that the lower region of the container part forms the storage space which has a Opening is connected to a drain opening of the head part connected to the liquid cooler.
  • a hollow roller-shaped filter is arranged in the fine separator and its cavity is connected to the gas supply opening of the head part. This means that no further line elements for the gas between the feed opening of the head part and the filter are necessary.
  • a return of the auxiliary liquid accumulating in the fine separator to the pump circuit is possible without separate return lines by providing a bore in the head part of the fine separator which is below the level of the surface of the auxiliary liquid collecting in the fine separator and opens into the lateral tube attachment of the suction nozzle of the vacuum pump. If, on the other hand, a return line is provided, it is expedient that this leads into the inlet connection of the vacuum pump or into the sector between the inlet and outlet opening of the working space of the vacuum pump. Due to the higher pressure prevailing in the container part of the fine separator in relation to the mouth into the vacuum pump, the auxiliary liquid is conveyed to the vacuum pump in both cases.
  • a condensate separator in it. In this separator, any condensates contained in the auxiliary liquid are separated from the latter.
  • the auxiliary liquid can be introduced into the working space of the pump at such a point where the suction process has already been completed.
  • the intake volume flow is then only slightly influenced by the evaporating condensate. In such a case, a separate condensate separator is not necessary if the accumulation of condensate is only occasional and limited.
  • a return of the auxiliary liquid accumulating in the fan cover without a separate conveying device is possible in that a discharge line of small cross-section is connected at the lowest point of the fan cover and is guided into the fine separator above the level of the auxiliary liquid accumulating in the fine separator.
  • a pressure drop arises between the interior thereof and the container space surrounding the hollow roller-shaped filter. This pressure drop is effective on the discharge line leading from the fan cover to the fine separator and ensures that the auxiliary liquid is conveyed from the fan cover into the fine separator.
  • a liquid ring pump 2 is mounted as a vacuum pump.
  • an upward inlet connection 4 and an outlet connection 5 are each formed.
  • a pipe extension 6 is connected to the outlet nozzle 5, to which a pre-separator 7 is connected.
  • the pre-separator 7 has a head part 8 serving to connect various pipelines and a container part 9 receiving the separator elements.
  • the head and container parts 8 and 9 are detachably connected to one another by means of a tension lock 10.
  • a gas line 11 leads from the head part 8 of the pre-separator 7 to a fan hood 13 which encloses the fan 12 of the electric motor 1 and which forms a gas cooler.
  • the fan cover 13 is double-walled, so that the gas supplied via the gas line 11 connected laterally to the fan cover 13 can flow through the cavity 16 existing between the walls 14 and 15 of the fan cover 13.
  • the gas is introduced into the head part 18 of a fine separator 19 via a further gas line 17 connected laterally to the circumference of the fan cover 13.
  • a container part 20 is connected to the top plate 18 of the fine separator 19, in the same way as for the pre-separator 7, by means of a tension lock 10.
  • An outlet opening 21 for the gas is present in the head part 18 of the fine separator 19.
  • the head part 18 itself is screwed onto a tubular extension 22 of the inlet connector 4 and is carried by the latter.
  • a liquid cooler 23 designed as a tube coil is arranged between the electric motor 1 and the housing of the liquid ring pump 2 concentrically with the housing of the electric motor 1. Depending on the size of the liquid cooler 23, it can extend more or less over the length of the motor housing.
  • the liquid cooler 23 is connected at its one end 24 to the head part 8 of the pre-separator 7.
  • the other end 25 of the liquid cooler 23 either opens into the inlet connection 4 or into the sector between the inlet and outlet opening of the working space of the liquid ring pump 2.
  • a discharge line 26 is connected, which is led into the fine separator 19 from the end face of the head part 18 of the fine separator 19 above the level of the surface of the auxiliary liquid 33 accumulating in the fine separator 19.
  • a return line 27 connected to a drain hole 43 of the head part 18 also leads from the head part 18 to the inlet connection 4 of the liquid ring pump 2.
  • the pre-separator 7 shown in a slightly schematic representation in FIG. 5 is screwed with an inlet opening 28 provided in its head part 8 onto the pipe extension 6 of the outlet connection 5 of the liquid ring pump 2.
  • a gas guide line 29 is connected to the inlet bore 28.
  • the gas guide line 29 runs parallel to the boundary wall of the container part 9 and ends shortly before the bottom 30 of the container part 9.
  • a shield 31 pointing downward is arranged on the gas guide line 29 and a deflection plate 32 extending perpendicularly from the bottom 30 is arranged on the bottom of the container part 9.
  • the gas emerging from the gas guide line 29 and loaded with auxiliary liquid 33 is deflected twice by the screen 31 and the deflection plate 32 by 90 ° each.
  • auxiliary liquid 33 The majority of the auxiliary liquid 33 is separated out and collects in the lower region of the container part 9. A further part of the auxiliary liquid 33 is separated from the gas by means of a separating filter 34 arranged transversely in the container part 9. The gas flows behind the separating filter 34 to an outlet bore 35, whereby it is redirected again by a transverse wall 36. During this redirection, a further part of the auxiliary liquid 33 can precipitate on the transverse wall 36 and flow down from here.
  • the gas line 11 leading to the fan cover 13 is connected to the outlet bore 35. Below the level of the surface of the auxiliary liquid 33 accumulating in the container part 9, a drain opening 37 is provided, to which the liquid cooler 23 is connected at its one end 24.
  • the fine separator 19 shown schematically in FIG. 7 also has a gas supply opening 38 to which a hollow roller-shaped filter 40 is connected by means of a tube 39.
  • the gas still loaded with a residual auxiliary liquid 33 enters the cavity of the filter 40 via the gas supply opening 38 and flows through it from the inside to the outside. Since the gas in the fan cover 13 has been cooled to a relatively low temperature after leaving the pre-separator 7, a high degree of separation is achieved in the filter 40. After flowing through the filter 40, the gas leaves the fine separator 19 via a post-filter 42 via the outlet opening 21.
  • a drain bore 43 Below the surface of the auxiliary liquid 33 that collects in the lower area of the fine separator 19 is a drain bore 43, and the return line 27 is connected.
  • a hole 44 leading into the lateral pipe socket 22 can also be provided, via which the auxiliary liquid 33 flows into the pipe socket 22 and from here into the inlet connection 4 of the liquid ring pump.
  • the return line 27 must be provided if, prior to the return of the auxiliary liquid 33 into the liquid ring pump 2, a condensate present in the auxiliary liquid 33 is separated by means of a condensate separator or if the auxiliary liquid 33 is located at a certain point between the inlet and outlet openings of the working space of the vacuum pump to be reintroduced into the pump.
  • FIGS. 6 and 8 show that these head parts have the same shape and size.
  • Appropriate finish bores then prepare the head sections either for use on the pre-separator or fine separator.
  • the inlet bore 28 and the drain opening 37 must be made on the head part 8 for the pre-separator 7 and the outlet opening 21 and the drain bore 43 and the bore 44 on the head part 18 for the fine separator 19.
  • the device works as follows: Air is drawn in from a space in which a vacuum is to be created, via the inlet connection 4. The air is compressed in the liquid ring pump and, together with part of the auxiliary liquid 33 present in the liquid ring pump 2, is expelled into the pre-separator 7 via the outlet connection 5 and the pipe extension 6 connected to it. Most of the auxiliary liquid 33 is already separated out of the air-liquid mixture in the pre-separator 7. The auxiliary liquid 33 accumulating in the pre-separator 7 is conveyed into the liquid cooler 23 by the pressure prevailing in the pre-separator 7 and is cooled there by a certain temperature difference.
  • the auxiliary liquid 33 flows from the liquid cooler 23 back into the inlet connection 4 or into the sector between the inlet and outlet opening of the working space of the pump and is thus available again for the further operation of the liquid ring pump 2.
  • the liquid cooler 23 is dimensioned such that the auxiliary liquid 33 is cooled only by a relatively small temperature difference and leaves the liquid cooler 23 at a temperature which is favorable for the operation of the liquid ring pump 2.
  • the air When flowing through the fan cover 13, the air is cooled down to a temperature which is substantially, ie. that is, by more than 10 ° C., below the outlet temperature of the auxiliary liquid 33 when it emerges from the liquid cooler 25.
  • condensation of the auxiliary liquid vapors still present in it sets in, by means of which the separation of the auxiliary liquid 33 in the filter 40 is promoted.
  • the air After flowing through the filter 40, the air leaves the fine separator 19 through the outlet opening 21.
  • the auxiliary liquid 33 that accumulates in the fine separator 19 is returned to the circuit of the device via the drain hole 43 and the return line 27 or the hole 44 connected to it.
  • the auxiliary liquid 33 By cooling the gas in the fan cover 13, part of the auxiliary liquid 33 can already condense here and collects at the lowest point of the fan cover 13. From here, the auxiliary liquid 33 is conveyed into the fine separator 19 via the discharge line 26. Since the discharge line 26 opens into the fine separator behind the filter 40, there is a pressure difference between their connection to the fan cover 13 and the opening in the fine separator 19, which pressure difference is sufficient to convey the auxiliary liquid 33 from the fan cover 13 into the fine separator. As a result of this arrangement of the discharge line 26, there is no need for a separate conveying device for the removal of the auxiliary liquid 33 from the fan cover 13.
  • a liquid ring pump 2 as a vacuum pump is particularly advantageous for the operation of the liquid cooler 23 at a temperature level which is substantially higher than the temperature level of the Gaa cooler 13.
  • a relatively large amount of auxiliary liquid 33 is expelled together with the compressed gas. This means that a large mass of liquid is available for the removal of the heat lost in the pump. It is therefore sufficient to have a relatively small temperature difference in the cooling of the auxiliary liquid in the liquid cooler in order to dissipate the heat loss to the outside.
  • a relatively small gas cooler 13 is required to cool this gas.
  • This gas cooler 13 is dimensioned such that the gas is cooled in the liquid cooler 23 by a substantially greater temperature difference than the auxiliary liquid 33.
  • the respective coolers Due to the separate cooling of the auxiliary liquid 33 and the gas, the respective coolers can be designed specifically for the cooling capacity required in each case. Overall, this leads to less cooling effort.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Motor Or Generator Cooling System (AREA)
  • Extrusion Moulding Of Plastics Or The Like (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Compressor (AREA)
  • Separation By Low-Temperature Treatments (AREA)

Claims (17)

1. Dispositif de production d'un vide,, qui comporte, comme pompe à vide, une pompe à anneau liquide, entraînée par un moteur électrique, dispositif dans lequel est monté, en aval de la pompe à vide, un préséparateur muni d'une chambre formant réservoir et destiné à séparer le gaz pompé du liquide auxiliaire entraîné, le liquide auxiliaire étant retourné de la chambre formant réservoir à la pompe à anneau liquide en passant par un dispositif de refroidissement du liquide et le gaz encore chargé d'un reste de liquide auxiliaire étant envoyé à un séparateur fin monté en aval du pré-séparateur et muni d'un conduit de recyclage du liquide auxiliaire qui s'y est déposé, caractérisé en ce que le préséparateur (7) et le séparateur fin (19) sont distincts dans l'espace et le gaz encore chargé d'un reste de liquide auxiliaire (33) est envoyé au séparateur fin (19) par un dispositif de refroidissement du gaz (13) distinct du dispositif de refroidissement du liquide (23), les dimensions des deux dispositifs de refroidissement (23 et 13) étant telles que le gaz est refroidi à une température plus basse que la température de sortie du liquide auxiliaire (33), mesurée à la sortie du dispositif de refroidissement du liquide.
2. Dispositif suivant la revendication 1, caractérisé en ce que, le dispositif de refroidissement du liquide (23) et/ou le dispositif de refroidissement du gaz (13) sont disposés dans le courant d'air de refroidissement du moteur électrique (1).
3. Dispositif suivant la revendication 2, caractérisé en ce que, le dispositif de refroidissement du liquide (23) est constitué en serpentin disposé concentriquement autour du moteur électrique (1) ou entre celui-ci et la pompe à vide.
4. Dispositif suivant la revendication 1, 2, ou 3, caractérisé en ce que, il est prévu, comme dispositif de refroidissement du gaz sur le moteur électrique (1), un capot de ventilateur (13) à double paroi, qui entoure le ventilateur (12) du moteur électrique (1) et à l'intérieur (16) duquel passe le gaz.
5. Dispositif suivant la revendication 4, caractérisé en ce que, d'un côté du pourtour du capot du ventilateur (13) est raccordé un conduit de gaz (11) communiquant avec le préséparateur (7) et, du côté opposé du capot du ventilateur (13), un conduit de gaz (17) communiquant avec le séparateur fin (19).
6. Dispositif suivant l'une ou plusieurs des revendications précédentes, caractérisé en ce que, à la fois le préséparateur (7) et le séparateur fin (19) sont logés chacun dans une pièce tubulaire formant enveloppe, et les deux pièces formant enveloppe sont disposées en ayant leur axe longitudinal parallèle à l'axe longitudinal du moteur électrique.
7. Dispositif suivant la revendication 6, caractérisé en ce que, à la fois la tubulure d'aspiration (4) et la tubulure de refoulement (5) de la pompe à vide sont dirigées vers le haut, et les deux séparateurs (7 et 19) sont fixés, chacun pour soi. horizontalement sur l'une des deux tubulures (4 et 5), au-dessus du moteur électrique (1).
8. Dispositif suivant la revendication 7, caractérisé en ce que, le préséparateur (7) est fixé, par son orifice d'entrée (28), à un prolongement tubulaire (6) de la tubulure de refoulement (5), qui est tourné vers le moteur et qui forme l'orifice de refoulement de la pompe à vide, et le séparateur fin (19) est fixé à un prolongement tubulaire (22) latéral de la tubulure d'admission (24).
9. Dispositif suivant la revendication 8, caractérisé en ce que, le préséparateur (7) et le séparateur fin (19) sont constitués, chacun, d'une pièce formant tête (8 et 18) comportant les emplacements de raccordement des conduits à raccorder et d'une pièce formant cuve (9 et 20), qui peut être raccordée à cette pièce formant tête (8 et 18) et qui reçoit les éléments du séparateur.
10. Dispositif suivant la revendication 9, caractérisé en ce que, les pièces formant tête (8 et 18) et les pièces formant cuve (9 et 20) du préséparateur (7) et du séparateur fin (19) ont la même forme et les mêmes dimensions.
11. Dispositif suivant la revendication 9 ou 10, caractérisé en ce que, les pièces formant cuve (9 et 20) sont des boîtes cylindriques qui comportent, sur leur côté ouvert, un rebord en bourrelet faisant saillie radialement vers l'extérieur, par lequel elles sont fixées à la pièce formant tête (8 et 18), au moyen d'un dispositif de .blocage passant sur ce bord en bourrelet et sur un bord en bourrelet correspondant ménagé sur la partie formant tête (8 et 18).
12. Dispositif suivant la revendication 9, 10 ou 11, caractérisé en ce que, dans le préséparateur (7) s'étend, parallèlement à la paroi supérieure délimitant la partie formant cuve (9), un conduit pour du gaz (29) qui communique avec la partie formant tête (8) et qui se termine à proximité du fond (30) de la partie formant cuve (9), et en ce que la région inférieure de la partie formant cuve (9) constitue la chambre formant réservoir qui communique, par un orifice, avec un orifice d'évacuation (37) de la partie formant tête (8) qui communique avec le dispositif de refroidissement du liquide (23).
13. Dispositif suivant la revendication 9, 10 ou 11, caractérisé en ce que, dans le séparateur fin (19) est monté un filtre (40) en forme de cylindre creux, dont l'intérieur communique avec l'orifice (38) d'amenée des gaz de la pièce formant tête (18).
14. Dispositif suivant la revendication 8 ou 13, caractérisé en ce que, dans la partie formant tête (18) du séparateur fin (19) est prévu un perçage (44) qui se trouve en dessous de la surface du liquide auxiliaire (33) qui se rassemble dans le séparateur fin (19) et qui débouche dans le prolongement tubulaire (22) latéral de la tubulure d'aspiration (4) de la pompe à vide.
15. Dispositif suivant la revendication 1 ou 13, caractérisé en ce que, le conduit de recyclage (27) communiquant avec le séparateur fin (19) débouche dans la tubulure d'aspiration (4) de la pompe à vide ou dans le secteur de la chambre de travail de la pompe à vide qui est compris entre l'orifice d'aspiration et l'orifice de refoulement.
16. Dispositif suivant la revendication 15, caractérisé en ce que, dans le conduit de recyclage (27) est prévu un séparateur pour le produit condensé.
17. Dispositif suivant la revendication 4 ou 13, caractérisé en ce que, à l'endroit le plus bas du capot du ventilateur (13) est raccordé un conduit d'évacuation (26) de faible section transversale, qui mène, au-dessus de la surface du liquide auxiliaire (33) qui se rassemble dans le séparateur fin (19), au séparateur fin (19).
EP85114893A 1984-12-07 1985-11-25 Dispositif de production d'un vide Expired EP0186776B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT85114893T ATE40583T1 (de) 1984-12-07 1985-11-25 Vorrichtung zur erzeugung eines vakuums.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3444731 1984-12-07
DE3444731 1984-12-07

Publications (2)

Publication Number Publication Date
EP0186776A1 EP0186776A1 (fr) 1986-07-09
EP0186776B1 true EP0186776B1 (fr) 1989-02-01

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP85114893A Expired EP0186776B1 (fr) 1984-12-07 1985-11-25 Dispositif de production d'un vide

Country Status (8)

Country Link
US (1) US4657487A (fr)
EP (1) EP0186776B1 (fr)
JP (1) JPS61138897A (fr)
CN (1) CN1005642B (fr)
AT (1) ATE40583T1 (fr)
DE (1) DE3568071D1 (fr)
ES (1) ES8701917A1 (fr)
IN (1) IN162159B (fr)

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GB2603971A (en) * 2021-02-19 2022-08-24 Leybold Tianjin Int Trade Co Ltd Filtering module for use with a vacuum pump
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Also Published As

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CN85106797A (zh) 1986-06-10
IN162159B (fr) 1988-04-09
DE3568071D1 (en) 1989-03-09
US4657487A (en) 1987-04-14
CN1005642B (zh) 1989-11-01
ES8701917A1 (es) 1986-12-01
EP0186776A1 (fr) 1986-07-09
ATE40583T1 (de) 1989-02-15
JPS61138897A (ja) 1986-06-26
ES549668A0 (es) 1986-12-01

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