GB2603971A - Filtering module for use with a vacuum pump - Google Patents

Filtering module for use with a vacuum pump Download PDF

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Publication number
GB2603971A
GB2603971A GB2104636.2A GB202104636A GB2603971A GB 2603971 A GB2603971 A GB 2603971A GB 202104636 A GB202104636 A GB 202104636A GB 2603971 A GB2603971 A GB 2603971A
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GB
United Kingdom
Prior art keywords
filtering
casing
separator
vacuum pump
filtering module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB2104636.2A
Other versions
GB202104636D0 (en
Inventor
Desiron Andries
Daniel Jozef De Bock Andries
Shi Gary
Yu Alex
Yang Chuanlei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Tianjin International Trade Co Ltd
Original Assignee
Leybold Tianjin International Trade Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Tianjin International Trade Co Ltd filed Critical Leybold Tianjin International Trade Co Ltd
Publication of GB202104636D0 publication Critical patent/GB202104636D0/en
Publication of GB2603971A publication Critical patent/GB2603971A/en
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
    • B01D45/12—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D50/00—Combinations of methods or devices for separating particles from gases or vapours
    • B01D50/20—Combinations of devices covered by groups B01D45/00 and B01D46/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/16—Filtration; Moisture separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/20—Filtering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/026—Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member

Abstract

A filtering module 100 for a vacuum pump comprising a separator 108 and a filtering element 104. The separator comprises a first inlet 110 and a first outlet 112, and a separation means 224 therebetween configured to separate and remove at least some component part of a mixture of fluids to provide a separated fluid. The filtering element comprises a filtering wall 122 at least partially defining an internal volume 124 and an inlet 126 through the filtering wall, such that separated fluid is supplied to the internal volume of the filtering element and flows to an outside of the filtering element to filter said fluid. Also disclosed is a method of removing a filtering module from a vacuum pump, comprising the steps of decoupling the filtering module from the casing and moving the filter module from a side of the casing in a direction away from the casing.

Description

FILTERING MODULE FOR USE WITH A VACUUM PUMP
FIELD OF THE INVENTION
The present invention relates to filters for use with pumps including, but not limited to, rotary vane pumps such as oil-sealed rotary vane pumps.
BACKGROUND
Vacuum pumps are used in various technical processes to create a vacuum for the respective process Rotary vane pumps are a common type of vacuum pump. Examples of rotary vane pumps include single-stage and two-stage rotary vane pumps. Typically, rotary vane pumps include a rotor positioned eccentrically within a pumping chamber. As the rotor rotates, vanes mounted to the rotor slide in and out of the rotor such that radially outer edges of the vanes contact the inner walls of the pumping chamber, creating sealed vane volumes. On an intake side of the rotary vane pump, the vane volumes increase in volume as the rotor rotates, thereby drawing fluid into the pumping chamber via an inlet. On a discharge side of the rotary vane pump, the vane volumes decrease in volume as the rotor rotates, thereby forcing fluid out of the pumping chamber via an outlet.
Typically, oil is used to lubricate the moving parts of the rotary vane pump, as well as for sealing and cooling. In the pumping chamber of the pump, the pumped fluid and the oil mix. This mixture is filtered to remove the oil (which may be in the form of oil mist), thereby producing an oil-free fluid output. Such filtering may be performed externally of the pump, or by an exhaust filter located within a casing of the pump.
SUMMARY OF THE INVENTION
In an aspect, there is provided a filtering module for use with a vacuum pump. The filtering module comprises a separator (which may be considered to be a "pre-separator", a "separator module", or a "separator element") and a -2 -filtering element. The separator comprises a first inlet orifice, a first outlet orifice, and separation means between the first inlet orifice and the first outlet orifice, the first inlet orifice being for receiving a mixture of fluids, the separation means being configured to separate and remove at least some component part from the mixture of fluids thereby to provide a separated fluid, and the first outlet orifice being for discharging the separated fluid. The filtering element comprises a filtering wall at least partially defining an internal volume, and a second inlet orifice through the filtering wall. The first outlet orifice is connected to the second inlet orifice such that the separator is arranged to discharge the separated fluid into to the internal volume of the filtering element via the second inlet orifice. The filtering wall is configured to allow flow therethrough of the separated fluid from the internal volume to an outside of the filtering element, thereby to filter the separated fluid.
The separator may comprise one or more separators selected from the group of separators consisting of: a cyclone separator, a labyrinth separator, a blade separator, and a maze separator.
The separator and the filtering element may be integrally formed.
The separator and the filtering element may be attached together by means of an adhesive or one or more bolts or fasteners.
The filtering element may be an elongate element having a first end and a second end opposite to the first end. The first end may be a closed end. The second end may comprise the second inlet orifice. The filtering wall may extend between the first end and the second end.
In a further aspect, there is provided a vacuum pump comprising the filtering module of any of preceding aspect, arranged to process a flow of a fluid in the vacuum pump.
The vacuum pump may further comprise a pumping chamber for pumping the fluid, and a pump outlet orifice for discharging the pumped fluid from the vacuum pump. The filtering module may be disposed between the pumping 30 chamber and the outlet orifice such that fluid pumped from the pumping chamber -3 -is filtered by the filtering module prior to being discharged from the vacuum pump via the outlet orifice The vacuum pump may further comprise a casing having a casing inlet orifice and a casing outlet orifice. The separator may be sealingly engaged with the inlet orifice of the casing. The filtering element may extend from the inlet orifice of the casing towards the casing outlet orifice. The filtering element and the casing may define a flow a flowpath for fluid exiting the filtering element to flow from the filtering element to the casing outlet orifice.
The filtering module may be removably mounted to a casing of the vacuum pump.
The separator may further comprise a first flange, the first flange being sealingly engaged with a casing of the vacuum pump. The separator may further comprise a second flange, the second flange being sealingly engaged with a casing of the vacuum pump, e.g., at a position different to that at which the first flange is sealingly engaged with the casing.
The vacuum pump may be a pump selected from the group of pumps consisting of: a positive displacement pump, a rotary vane pump, a single-stage rotary vane pump, and a two-stage rotary vane pump.
In a further aspect, there is provided a method of removing a filtering module from a vacuum pump, the vacuum pump comprising a casing having a first side and a second side opposite to the first side, the first side comprising an exhaust outlet arranged to discharge, in a first direction, an exhaust fluid from the vacuum pump. The method comprises decoupling the filtering module from the casing, and moving the filtering module from the second side of the casing, away from the casing in a second direction, the second direction being opposite to the first direction.
The filtering module may be in accordance with any preceding aspect.
Decoupling the filtering module from the casing may comprise decoupling the separator from the casing.
The method may further comprise replacing the removed filtering module with a further filtering module. The further filtering module may be in accordance -4 -with any of the preceding aspects. The replacing may comprise: inserting the further filtering module into the casing at the second side of the casing, including moving the further filtering module in the first direction; and coupling the further filtering module to the casing.
In a further aspect, there is provided a method of processing a mixture of fluids in a vacuum pump. The method comprises: receiving, by a separator, the mixture of fluids; separating, by the separator, the mixture of fluids, thereby to provide a separated fluid; discharging, by the separator, the separated fluid into an internal volume of a filtering element, the internal volume being at least partially defined by a filtering wall of the filtering element; and causing the separated fluid to traverse the filtering wall to an outside of the filtering element, thereby to filter the separated fluid.
BRIEF DESCRIPTION OF THE DRAWINGS
Figure 1 is a schematic illustration (not to scale) showing an exploded perspective view of a filtering module; Figure 2 is a schematic illustration (not to scale) of a cross section of a vacuum pump in which the filtering module is implemented; Figure 3 is a schematic illustration (not to scale) showing a portion of the vacuum pump and illustrating attachment of the filtering module to a casing of the vacuum pump; and Figure 4 is a schematic illustration (not to scale) of a cross section through a separator of the filtering module.
DETAILED DESCRIPTION
It will be appreciated that relative terms such as above and below, horizontal and vertical, top and bottom, front and back, and so on, are used herein merely for ease of reference to the Figures, and these terms are not limiting as such, and any two differing directions or positions and so on may be implemented -5 -rather than truly above and below, horizontal and vertical, top and bottom, and so on Figure 1 is a schematic illustration (not to scale) showing an exploded perspective view of a filtering module 100 for use with a vacuum pump.
The filtering module comprises an inlet connector 102, a filtering element 104, and a cover 106.
Although shown spaced apart in Figure 1, i.e. in an exploded view, it will be appreciated by those skilled in the art that the inlet connector 102, the filtering element 104, and the cover 106 are attached together to form a single item, 1() module or cartridge for use with a vacuum pump.
The inlet connector 102, the filtering element 104, and the cover 106 may be attached together in any appropriate way, including but not limited to by an adhesive or by bolts/fasteners. In some embodiments, at least some of the inlet connector 102, the filtering element 104, and the cover 106 are integrally formed.
The inlet connector 102 is described in more detail later below with reference to Figures 2 to 4. The inlet connector 102 comprises a so-called pre-separator 108, a first inlet orifice 110, a first outlet orifice 112, a first flange 114, and a second flange 116.
The first inlet orifice 110 is configured to, in use, receive one or more fluids being pumped by a vacuum pump, as described in more detail later below with reference to Figure 2. In this embodiment, the first inlet orifice 110 is located on a bottom of the pre-separator 108. The first inlet orifice 110 is an inlet of the pre-separator 108.
The first outlet orifice 112 is configured to, in use, discharge one or more fluids that have flowed through the pre-separator 108, as described in more detail later below with reference to Figure 2. In this embodiment, the first outlet orifice 112 is located on a first side of the of the pre-separator 108, directed towards the filtering element 104. The first outlet orifice 112 is an outlet of the pre-separator 108.
The pre-separator 108 is a separator configured to separate a mixture of fluids flowing between the first inlet orifice 110 and the first outlet orifice 112, as -6 -will be described in more detail later below. The terminology "pre-separator" is used since this element separates the mixture of fluid prior the fluid being filtered by the filtering element 104, i.e. pre-filtering. The pre-separator 108 comprises a separation means (not shown in Figure 1) disposed between the first inlet orifice 110 and the first outlet orifice 112.
The first flange 114 is located at the first side of the pre-separator 108, and surrounds the first outlet orifice 112.
The second flange 116 is located at a second side of the pre-separator 108, the second side of the pre-separator 108 being opposite to the first side of 10 the pre-separator 108. The second flange 116 is formed by a plate 117 or cover located at a second side of the pre-separator 108.
The inlet connector 102 is made of a metal or alloy, for example aluminium, a plastic, or a composite material, such as a carbon fibre composite material which may be a plastic material in which are embedded carbon fibres.
The filtering element 104 is an elongate element having a first end 118 and a second end 120 opposite to the first end. The filtering element 104 comprises a filtering wall 122 extending between the first end 118 and the second end 120. The filtering wall 122 at least partially defines an internal volume 124. The filtering element 104 comprises a second inlet orifice 126 located at the second end 120, and a second outlet orifice 128 located at the first end 118. (As described below, the second outlet 128 orifice is not an outlet for exhaust fluid as it is sealed by the cover 106, and thus will hereafter be referred to the "second orifice" 128.) The second inlet orifice 126 is an inlet to the internal volume 124. The second inlet orifice 126 may be considered to be an orifice through the filtering wall 122. The second inlet orifice 126 is coupled or attached to the first outlet orifice 112 such that the separator is arranged to discharge fluid into the internal volume 124 of the filtering element 104 via the second inlet orifice 126.
In this embodiment, the filtering wall 122 is a substantially cylindrical tube.
The filtering wall 122 may comprise any appropriate filtering material medium, -7 -including but not limited to net, such as a metal net, a paper membrane or a paper filter, a non-woven filter, a woven filter, or any combination thereof.
The cover 106 is attached to the first end 118 of the filtering element 104, thereby to seal the second orifice 128. The cover 106 may be considered to be an end cover, a closure, a disc or a plate. The cover 106 may comprise a valve, which may be considered to be a safety valve, that is configured to open if a pressure within the internal volume 124 exceeds a threshold pressure, thereby to allow passage of exhaust fluid and decrease the pressure within the internal volume 124. The cover 106 may be made from any appropriate material to including, but not limited to, a metal or alloy, for example aluminium, a plastic, or a composite material, such as a carbon fibre composite material which may be a plastic material in which are embedded carbon fibres.
Figure 2 is a schematic illustration (not to scale) of a cross section of an oil casing of a vacuum pump 200 in which the filtering module 100 is implemented.
In this embodiment, the vacuum pump 200 is a positive displacement pump. More specifically, the vacuum pump 200 is a rotary vane pump such as a single-stage rotary vane pump or a two-stage rotary vane pump.
The vacuum pump 200 comprises a casing 202, an exhaust or outlet orifice (hereinafter referred to as "the casing outlet orifice" 204), a pumping chamber outlet 206, and an orifice in which the filtering module 100 is received (hereinafter referred to as "the module-reception orifice" 208) and two flanges for mounting the filtering module 100 to the casing 202 (hereinafter referred to as the "first mounting flange" 210 and the "second mounting flange" 212).
The casing 202 comprises a first side 214 and a second side 216 opposite to the first side 214.
The casing outlet orifice 204 is an outlet through the casing 202 via which, in use, an exhaust fluid is discharged, as will be described in more detail later below. The casing outlet orifice 204 is located on the first side 214 of the casing 202. The casing outlet orifice 204 is arranged to discharge exhaust fluid in a first direction 217, away from the casing 202. (The first direction 217 is indicated by -8 -an arrow in Figure 2.) In operation, the casing outlet orifice 204 may be coupled to a pipe for conveying the exhaust fluid away from the vacuum pump 200.
The pumping chamber outlet 206 is an outlet of a pumping chamber (not shown in the Figures) of the vacuum pump 200.
The module-reception orifice 208 is an orifice in the casing 202. The module-reception orifice 208 is configured to receive the filtering module 100, thereby to allow for the filtering module 100 to be inserted and removed from an internal volume within the casing 202, as will be described in more detail later below with reference to Figure 3. The module-reception orifice 208 is located on the second side 216 of the casing 202.
The first mounting flange 210 circumscribes the module-reception orifice 208.
The second mounting flange 212 is located within the internal volume of the casing 202 between the module-reception orifice 208 and the casing outlet orifice 204 The first mounting flange 210 and the second mounting flange 212 are for replaceably mounting the filtering module 100 to the casing 202, within the internal volume of the casing 202, as described in more detail later below with reference to Figure 3.
In this embodiment, the second mounting flange 212 circumscribes an internal orifice within the casing 202. The filtering element 104 of the filtering module 100 is positioned through this internal orifice. This internal orifice may be considered to be an inlet orifice to a chamber or volume within the casing 202, that chamber being defined between the second mounting flange 212, the casing 202, the filtering element 104 and the cover 106, and in fluid communication with the casing outlet orifice 204.
What will now be described with reference to Figure 3 is further details of the mounting of the filtering module 100 within the casing 202.
Figure 3 is a schematic illustration (not to scale) showing a portion of the vacuum pump 200 and illustrating attachment of the filtering module 100 to the casing 202. -9 -
In this embodiment, the filtering module 100 is positioned through the module-reception orifice 208 such that the first flange 114 of the inlet connector 102 abuts or engages the second mounting flange 212, and such that the second flange 116 of the inlet connector 102 abuts or engages the first mounting flange 210.
The plate 117 that forms the second flange 116 seals or closes the module-reception orifice 208.
A first 0-ring type seal 300 is disposed between the first flange 114 and the second mounting flange 212, thereby to provide a gas-tight seal between the to first flange 114 and the second mounting flange 212. This advantageously tends to prevent or oppose, in use, a fluid flowpath that bypasses the filtering element 104.
A second 0-ring type seal 302 is disposed between the second flange 116 and the first mounting flange 210, thereby to provide a gas-tight seal between the second flange 116 and the first mounting flange 210. This advantageously tends to prevent or oppose pumped fluid leaking from the vacuum pump 200 via the module-reception orifice 208, and maintains a pressure differential thereby ensuring effective working of the pump.
In this embodiment, the filtering module 100 is fixed to the casing 202 by one or more fasteners (not shown in the Figures) that pass through the second flange 116 and the first mounting flange 210, and securely fasten those flanges 116, 210 together. Thus, the filtering module 100 is fastened to the casing 202 at the second side 216 of the casing 202.
In this embodiment, the filtering module 100 is removably attached to the casing 202. The filtering module 100 may be removed from the casing 202 for repair or maintenance (such as cleaning) of the filtering module 100 and/or casing 202. The filtering module 100 may be removed from the casing 202 (e.g. when used or spent) and replaced by a new, replacement filtering module 100. It may be possible to recycle or recondition used or spent filtering modules 100.
To remove the filtering module 100 from the casing 202, any fasteners (e.g., through the second flange 116 and the first mounting flange 210) fastening -10 -the filtering module 100 to the casing 202 are first removed. The filtering module 100 is then moved (e.g., slid or pulled) out of the casing 202 via the module-reception orifice 208. In other words, the filtering module 100 is moved away from the second side 216 of the casing 202 in a second direction 304. The second direction 304 (indicated by an arrow in Figures 2 and 3) is substantially opposite to the first direction 217. In this way, the filtering module 100 may be removed from the casing 202 without having to disassemble any connectors or pipework attached to the casing outlet orifice 204. This advantageously tends to facilitate repair or maintenance (such as cleaning) of the filtering module 100 and/or casing 202, and the replacement of used or spent filtering modules 100.
In some embodiments, alternatively or additionally, one or more fasteners may be positioned through the first flange 114 and the second mounting flange 212 to securely fasten those flanges 114, 212 together.
Returning now to the description of Figure 2, what will now be described 15 is a process by which fluid pumped by the vacuum pump 200 is processed by the filtering module 100.
In operation, in the pumping chamber of the vacuum pump 200, the pumped fluid and an oil used to lubricate the moving parts of the pump 200 are mixed together, thereby to form a mixture. This mixture is pumped out of the pumping chamber via the pumping chamber outlet 206, as indicated in Figure 2 by an arrow and the reference numeral 220 The mixture is then pumped into the inlet connector 102 via the first inlet orifice 110, as indicated in Figure 2 by an arrow and the reference numeral 222. The mixture is then pumped through the separation means 224 of the pre-separator 108. The mixture is pumped through the separation means 224, from the first inlet orifice 110 to the first outlet orifice 112.
The separation means 224 separates the mixture of fluids flowing therethrough. This separation of fluids by the separation means 224 is described in more detail later below with reference to Figure 4. In this embodiment, the separation means 224 separates the oil and the pumped gas, and removes at least some of the oil from the mixture flowing through the separation means 224.
The mixture of fluids, after having at least some of the oil removed therefrom by the separation means 224, is then pumped out of the inlet connector 102 via the first outlet orifice 112, as indicated in Figure 2 by an arrow and the reference numeral 226. This fluid output by the inlet connector 102 may be referred to as a separated fluid, as it has undergone a separation process by the inlet connector 102. The separated fluid (i.e. the mixture of fluids that has had at least some of the oil removed) is pumped out of the first outlet orifice 112 and directly into the internal volume 124 of the filtering element 104, via the second inlet orifice 126.
The separated fluid is then directed along the internal volume 124 from the second end 120 of the filtering element 104 to the first end 118 of the filtering element 104.
By virtue of the first end 118 (i.e. the second orifice 128) being sealed by the cover 106, the separated fluid is then forced through the filtering wall 122 from the internal volume 124 to an outside of the filtering element. This flow of fluid is indicated in Figure 2 by arrows and the reference numerals 228. The filtering wall 122 filters the separated fluid passing through it, thereby to filter the separated fluid. More specifically, the filtering wall 122 further removes oil from the mixture of fluids flowing through the filtering wall 122. The fluid exiting the filtering element 104 may be substantially oil-free. This fluid output by the filtering element 104 may be referred to as a filtered fluid, as it has undergone a filtration process by the filtering element 104.
On exiting the filtering element 104 via the filtering wall 122, the filtered fluid enters the chamber that is defined between the second mounting flange 212, the casing 202, the filtering element 104 and the cover 106, and is in fluid communication with the casing outlet orifice 204.
The filtered fluid is then pumped out of the casing 202 via the casing outlet orifice 204, as indicated in Figure 2 by arrows and the reference numerals 230. The filtered fluid is discharged from the casing 202 substantially in the first direction 217.
Thus, a process by which fluid pumped by the vacuum pump 200 is processed by the filtering module 100 is provided.
-12 -Figure 4 is a schematic illustration (not to scale) of a cross section through the pre-separator 108 of the inlet connector 102 of this embodiment.
In this embodiment, the pre-separator 108 is a cyclone separator. The separation means 224 of the pre-separator 108 defines a spiral flow path for fluid between the first inlet orifice 110 an the first outlet orifice 112.
The pre-separator 108 uses the principle of inertia to remove oil and relatively heavier components from the mixture of fluids flowing therethrough.
More specifically, in operation, the mixture of oil and pumping fluids output from the pumping chamber enters the pre-separator 108 via the first inlet orifice 110, as indicated by arrow 222. The mixture flows around the spiral path of the separation means 224, from the first inlet orifice 110 towards the first outlet orifice 112, as indicated in Figure 4 by arrows and the reference numerals 400.
Relatively lighter components of the mixture (e.g. the pumping fluids) have less inertia than the relatively heavier components of the mixture (e.g. oil droplets dispersed in the mixture). As such, in operation, the relatively lighter components of the mixture follow the spiral path of the separation means 224, and are discharged from the pre-separator 108 via the first outlet orifice 112. In contrast, the relatively heavier components of the mixture tend to have too much inertia to follow the curve of the spiral path, and thus strike the walls of the separation means 224. The relatively heavier components of the mixture, including oil, tend to accumulate on the surfaces of the separation means 224, and fall (via gravity) out of the pre-separator 108 via the first inlet orifice 110 or a drain hole 402, as indicated in Figure 4 by dashed arrows and the reference numerals 404.
Thus, in operation, the pre-separator 108 separates the received mixture of fluids and removes at least some component part from the mixture of fluids thereby to provide the separated fluid.
The pre-separator may be considered a "pre-separator" as it arranged to perform separation of the mixture, and removal of at least some of the oil from the mixture prior to filtering by the filtering element. This pre-separation, including removal of at least some of the oil prior to filtering, advantageously tends to -13 -extend the life of the filtering element, for example since, for a given volume of gas being filtered, less oil tends to be present.
Furthermore, the pre-separator may reduce the flow rate of fluid flowing into and through the filtering element. This may increase the time it takes fluid to traverse the filtering wall, thereby tending to increase filtering effectiveness.
Also, the above-described filtering module advantageously tends to increase oil mist separating efficiency, and tends to reduce oil content in the exhaust fluid.
The above-described filtering module and its mounting to the casing of the vacuum pump advantageously tends to facilitate servicing, maintenance, and repair of the filtering module and the pump, and also tends to facilitate replacement of the filtering module. For example, disassembly of a casing exhaust flange at the casing outlet orifice in order to replace the filtering module tends to be avoided.
In the above embodiments, the pre-separator is a cyclone separator.
However, in other embodiments, the pre-separator is a different type of separator other than a cyclone separator. Examples of appropriate separators include, but are not limited to, labyrinth separators, maze separators, and blade separators.
In the above embodiments, the vacuum pump is a rotary vane pump such 20 as a single-stage rotary vane pump or a two-stage rotary vane pump. However, in other embodiments, the vacuum pump is a different type of pump, such as a different type of positive displacement pump.
In the above embodiments, at least some of the pre-separator, the filtering element, and the cover may be integrally formed together. Although it is preferred that the filtering module is realised as a single piece, it will be appreciated by those skilled in the art that other variants are possible for assembly of the different constituent parts of the filtering module relating to different technical functions that they fulfil, without departing from the scope of invention. For example, the filtering module may be provided as independent pieces that may be assembled together in any suitable manner. Moreover, any of the component parts of the -14 -filtering module may have different geometric shapes to those shown in the Figures and described above.
-15 -
REFERENCE NUMERAL KEY
-filtering module 102 -inlet connector 104 -filtering element 106 -cover 108 -pre-separator 110-inlet orifice 112 -first outlet orifice 114 -first flange to 116 -second flange 117-plate 118 -first end 120-second end 122 -filtering wall 124-internal volume 126-second inlet orifice 128-second orifice 200 -vacuum pump 202 -casing 204 -casing outlet orifice 206 -pumping chamber outlet 208 -module-reception orifice 210 -first mounting flange 212-second mounting flange 214 -first side 216-second side 217 -first direction 222, 224, 226, 228, 300, 400-flow directions 300 -first 0-ring type seal 302 -second 0-ring type seal 304 -second direction 402 -drain hole 404 -oil drain direction

Claims (15)

  1. -17 -CLAIMS1. A filtering module for use with a vacuum pump, the filtering module comprising: a separator; and a filtering element; wherein the separator comprises a first inlet orifice, a first outlet orifice, and separation means between the first inlet orifice and the first outlet orifice, the first inlet orifice being for receiving a mixture of fluids, the separation means being configured to separate and remove at least some component part from the mixture of fluids thereby to provide a separated fluid, and the first outlet orifice being for discharging the separated fluid; the filtering element comprises a filtering wall at least partially defining an internal volume, and a second inlet orifice through the filtering wall; the first outlet orifice is connected to the second inlet orifice such that the separator is arranged to discharge the separated fluid into the internal volume of the filtering element via the second inlet orifice; and the filtering wall is configured to allow flow therethrough of the separated fluid from the internal volume to an outside of the filtering element, thereby to filter the separated fluid.
  2. 2. The filtering module of claim 1, wherein the separator comprises one or more separators selected from the group of separators consisting of: a cyclone separator, a labyrinth separator, a blade separator, and a maze separator.
  3. 3. The filtering module of claim 1 or 2, wherein the separator and the filtering element are integrally formed.
  4. 4. The filtering module of claim 1 01 2, wherein the separator and the filtering element are attached together by means of an adhesive or one or more bolts or fasteners.
  5. 5. The filtering module of any of claims 1 to 4, wherein: the filtering element is an elongate element having a first end and a second end opposite to the first end; the first end is a closed end; the second end comprises the second inlet orifice; and the filtering wall extends between the first end and the second end.
  6. 6. A vacuum pump comprising: the filtering module of any of claims 1 to 5, arranged to process a flow of a fluid in the vacuum pump.
  7. The vacuum pump of claim 6, further comprising: a pumping chamber for pumping the fluid; and a pump outlet orifice for discharging the pumped fluid from the vacuum pump; wherein the filtering module is disposed between the pumping chamber and the outlet orifice such that fluid pumped from the pumping chamber is filtered by the filtering module prior to being discharged from the vacuum pump via the outlet orifice.
  8. 8. The vacuum pump of claim 6 or 7, further comprising: a casing having a casing inlet orifice and a casing outlet orifice; the separator is sealingly engaged with the inlet orifice of the casing; -19 -the filtering element extends from the inlet orifice of the casing towards the casing outlet orifice; the filtering element and the casing define a flow a flowpath for fluid exiting the filtering element to flow from the filtering element to the casing outlet orifice.
  9. 9. The vacuum pump of any of claims 6 to 8, wherein the filtering module is removably mounted to a casing of the vacuum pump.
  10. 10. The vacuum pump of any of claims 6 to 9, wherein the separator further comprises a first flange and a second flange, the first and second flanges being sealingly engaged with different respective portions of a casing of the vacuum pump.
  11. 11. The vacuum pump of any of claims 6 to 10, wherein the vacuum pump is a pump selected from the group of pumps consisting of: a positive displacement pump, a rotary vane pump, a single-stage rotary vane pump, and a two-stage rotary vane pump.
  12. 12. A method of removing a filtering module from a vacuum pump, the vacuum pump comprising a casing having a first side and a second side opposite to the first side, the first side comprising an exhaust outlet arranged to discharge, in a first direction, an exhaust fluid from the vacuum pump, the method comprising: decoupling the filtering module from the casing; and moving the filtering module from the second side of the casing, away from the casing in a second direction, the second direction being opposite to the first direction. -20 -
  13. 13. The method of claim 12, wherein the filtering module is in accordance with any of claims 1 to 5, and decoupling the filtering module from the casing comprises decoupling the separator from the casing.
  14. 14. The method of claim 12 of 13, further comprising replacing the removed filtering module with a further filtering module, the further filtering module being in accordance with any of claims 1 to 5, wherein the replacing comprises: inserting the further filtering module into the casing at the second side of the casing, including moving the further filtering module in the first direction; and coupling the further filtering module to the casing.
  15. 15. A method of processing a mixture of fluids in a vacuum pump, the method comprising: receiving, by a separator, the mixture of fluids, separating, by the separator, the mixture of fluids, thereby to provide a separated fluid; discharging, by the separator, the separated fluid into an internal volume of a filtering element, the internal volume being at least partially defined by a filtering wall of the filtering element; and causing the separated fluid to traverse the filtering wall to an outside of the filtering element, thereby to filter the separated fluid.
GB2104636.2A 2021-02-19 2021-03-31 Filtering module for use with a vacuum pump Pending GB2603971A (en)

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GB (1) GB2603971A (en)
TW (1) TW202302200A (en)
WO (1) WO2022175827A1 (en)

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GB2619102A (en) * 2022-05-27 2023-11-29 Leybold France S A S A lubricant sealed pump system, inner compartment for a lubricant reservoir and method of manufacture

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CN115430245B (en) * 2022-09-29 2024-02-23 上海协微环境科技有限公司 Dust capturing device

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JPH08159619A (en) * 1994-12-02 1996-06-21 Mitsubishi Heavy Ind Ltd Oil separator and air compressor equipped with the separator
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JP6166970B2 (en) * 2013-07-04 2017-07-19 株式会社モリタホールディングス Oil separator for oil circulation vacuum pump
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US4657487A (en) * 1984-12-07 1987-04-14 Siemens Aktiengesellschaft Vacuum generating apparatus including liquid ring pump, pre-separator, two heat exchangers and fine separator
JPH08159619A (en) * 1994-12-02 1996-06-21 Mitsubishi Heavy Ind Ltd Oil separator and air compressor equipped with the separator
US20110056379A1 (en) * 2009-09-09 2011-03-10 Ingersoll-Rand Company Multi-stage oil separation system including a cyclonic separation stage
US20180335033A1 (en) * 2015-12-01 2018-11-22 Ateliers Busch Sa Filtering element and associated mounting device for vacuum pump

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GB2619102A (en) * 2022-05-27 2023-11-29 Leybold France S A S A lubricant sealed pump system, inner compartment for a lubricant reservoir and method of manufacture

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CN116981506A (en) 2023-10-31
WO2022175827A1 (en) 2022-08-25
TW202302200A (en) 2023-01-16
EP4294546A1 (en) 2023-12-27

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