EP0139128A2 - Arbeitsplatz mit Reinluftversorgung - Google Patents
Arbeitsplatz mit Reinluftversorgung Download PDFInfo
- Publication number
- EP0139128A2 EP0139128A2 EP84109352A EP84109352A EP0139128A2 EP 0139128 A2 EP0139128 A2 EP 0139128A2 EP 84109352 A EP84109352 A EP 84109352A EP 84109352 A EP84109352 A EP 84109352A EP 0139128 A2 EP0139128 A2 EP 0139128A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- air
- working space
- curtain
- blower
- air curtain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/02—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area using chambers or hoods covering the area
- B08B15/023—Fume cabinets or cupboards, e.g. for laboratories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/20—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for shielding the work area
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F9/00—Use of air currents for screening, e.g. air curtains
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2215/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B2215/003—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area with the assistance of blowing nozzles
Definitions
- This invention relates to clean benches each equipped with an air curtain, and more particularly it is concerned with a construction of a clean bench suitable for shutting off the noxious gases generated in a working space from the outside of the working space.
- FIG. 1 One constructional form of a clean bench of the prior art for handling noxious gases is disclosed in Japanese Utility Model publication No. 23514/69, and its construction is shown in Fig. 1, in which a working space 1 has a HEPA filter 2 mounted in its upper portion and air in a chamber 9 in which the clean bench is installed is directed to the HEPA filter 2 through a fan 3, so that clean air can be supplied to the working space 1.
- the working space 1 is enclosed by side plates 4 and a back plate 5 on three sides except for the front in which a shutter 6 with vertical sliding movement is mounted.
- the air supplied to the interior of the working space 1 is drawn by suction into a suction port 7' formed in the bench in a lower portion of the working space 1 together with dust produced in the working space 1 and gases, such as an organic solvent in vapor form, which should not be released to the atmosphere.
- the air and gas are vented by an exhaust fan 8 through an exhaust duct 12 communicating with the suction port 7'.
- the volume of the exhausts should be grater than the volume of air supplied to the working space 1 through the HEPA filter 2 in order to prevent the noxious gas in the working space 1 from being released to outside the working space 1 even if the shutter 6 is opened during operation.
- the volume of the exhausts is usually set at a level 1-1.3 times as great as the volume of air supplied to the working space 1.
- the air in the vicinity of the working space 1 has been exhausted in large volumes to the atmosphere, applying a high load to an air conditioning unit 10 in the chamber 9.
- air containing a large volume of dust has been admitted to the working space 1, causing a reduction of the cleanliness in the working space 1.
- a proposal has been made to mount an air curtain at an opening 17 for working as shown in Fig.
- Figs. 2A and 2B show one embodiment of the invention disclosed therein, and Fig. 3 shows another embodiment thereof.
- a HEPA filter 14' for air curtain is mounted in addition to the HEPA filter 2 mounted in an upper portion of the working space, and clean air is blown through a blowing port 13' to provide an air curtain, so that introduction of dust from the outside into the working space can be avoided even if the shutter 6' is fully opened.
- This is conductive to improved operability.
- the problem that the volume of exhausted air is great and increases the load applied to an air conditioning unit, not shown, mounted in the chamber 9.
- an air conditioning unit not shown, mounted in the chamber 9.
- the air supplied to the working space and the air supplied for providing an air curtain both flow in circulation through the system.
- This embodiment offers the advantage that the volume of exhausted air is small and no increase is caused to the load applied to the air conditioning unit.
- gases cannot be removed by the HEPA filter and noxious gases might find their way into the air for providing the air curtain. When this is the case, if the operator stuck his arm into the working space, air containing noxious gases might flow out of the working space through the operator's arm, or when the air curtain is broken by a sudden movement of the operator, noxious gas might flow out of the working space.
- the object of this invention is to provide a clean bench equipped with an air curtain capable of preventing mutual contamination of the inside and the outside of a working space at a low load applied to the air conditioning unit, and particularly capable of avoiding release of noxious gases generated in the working space to the outside of the working space.
- a clean bench comprising a working space formed with air blowing ports and air suction ports, an air circulation flow passage provided so as to communicate the air blowing ports with the air suction ports, a first blower means for producing a circulating air current in an air circulation system composed of the working space and the air circulation flow passage, a filter mounted in the air circulation system, a second blower means for feeding air of the outside of the air circulation system, an air curtain blowing port means for supplying the air fed by the second blower to an opening for working formed in the working space so as to provide an air curtain, and exhaust means located in the air circulation flow passage for releasing a portion of the air current to the atmosphere.
- the volume of the air released by the exhaust means may be set at a range between over onefold and below twofold volume of air required for providing the air curtain.
- the inventon provides a clean bench equipped with an air curtain capable of preventing mutual contamination of the inside and the outside of the working space at a low load applied to the air conditioning unit, and particularly capable of avoiding release of noxious gases generated in the working space to the outside of the working space.
- a working space 1 is defined by a HEPA filter 2 mounted on its upper portion serving as a filter and air blowing parts 18, a bench formed by a perforated board and mounted on its lower portion including suction apertures 7 which serve as air suction ports, side plates 4 located on opposite sides thereof, a back plate 5 located on the rear and an opening 17 for working located in the front thereof.
- the opening 17 for working is defined by an air curtain blowing port 13 located in an upper portion and an air curtain suction port 16 located in a lower portion.
- the air curtain blowing port 13 is communicated through a HEPA filter 14 with an outlet port of an air curtain fan 15 serving as the second blower located on the upstream side of the HEPA filter 14 which draws air by suction from a chamber 9 to form an air curtain between the air curtain blowing port 13 and air curtain suction port 16.
- the air supplied through the air curtain blowing port 13 is fed from the outside of the working space 1, so that the air supplied through the port 13 to form the air curtain is free from the noxious gases even if the noxious gases are generated in the working space 1, thereby the safety of operation is increased.
- the outlet port of the air curtain fan 15 may be directly connected with the air curtain blowing port 13 without using the HEPA filter 14.
- the air suction ports 7 and air curtain suction port 16 are communicated with each other and a return duct 11 at the back of the working space 1 and providing an air return passage. In this embodiment, the air suction ports 7 and air curtain suction port 16 are separate from and independent of each other.
- the invention is not limited to this specific form of the embodiment and the air suction ports 7 may concurrently serve as the air curtain suction port 16.
- the return duct 11 is communicated with an inlet port of a fan 3 serving as the first blower which is located above the HEPA filter 2 and communicated at its outlet port with the HEPA filter 2 at its upstream side.
- An exhaust fan 8 located at an exhaust duct 12 branching from the return duct 11 cooperates with the exhaust duct 12 to constitute exhaust means. It is not essential that the return duct 11 be formed integrally with a main body of the clean bench.
- the return duct 11 may be formed separately from the main body of the clean bench and installed at its fixing place in such a manner that the return duct is connected with the first connection lla which communicates with the inlet port of the fan 3 and with the second connection llb which communicates with the suction port 16.
- the fan 3 is set to supply a volume of air Q 1 to the HEPA filter 2
- the air curtain fan 15 is set to supply a volume of air Q 2 to the HEPA filter 14 to provide an air curtain.
- the exhaust fan 8 is set to exhaust a volume of air Q 3 to the atmosphere.
- the volume of air Q l allows an air current to flow in the working space 1 at a mean flow rate of 0.2 to 0.7 m/s which is usually used for the clean bench.
- the volume of air Q 2 allows an air current to flow through the air curtain blowing port 13 at a flow rate of 0.7 to 20 m/s which is necessary volume to achieve the air curtain effects and which is not below a minimum flow rate of air currents necessary for preventing the organic solvents poisoning between the air curtain blowing port 13 and the air curtain suction port 16.
- Q 3 ⁇ Q 2' it is possible to prevent the pressure in the working space 1 from becoming positive.
- the minimum flow rate of air currents necessary for preventing the organic solvents poisoning it is prescribed by the "Rule for Preventing the Organic Solvents Poisoning" which is a government ordinance issued by the Ministry of Labor that it be 0.5 m/s.
- this flow rate has been set for the air currents flowing through the working space 1.
- the invention is not limited to this specific flow rate of air currents, and any flow rate may be adopted which would conform to the rules and regulations of the respective countries.
- the "Rule for Preventing the Organic Solvents Poisoning" referred to hereinabove prescribes that the width of an air curtain suction port be twice that of the air curtain blowing port.
- the ratio of the width of the air curtain suction port to that of the air curtain blowing port has been set at a value described hereinabove.
- Fig. 4A showing the flow of air currents in the prior art
- the volume of exhausted air is denoted by Q 3 ':Q 1 ⁇ Q 3 ' ⁇ 1.3Q 1 .
- 10/39 ⁇ Q 3 /Q 3 ' ⁇ 2/3 the volume of air exhausted from the working space in this embodiment is about 26-67% of that of the prior art.
- a volume of air equal to the volume of air exhausted by the exhaust fan 8 is introduced through the air conditioning unit 10 into the chamber 9 in which the working space 1 is installed and applies to the air conditioning unit 10 a load in the form of a thermal load by outdoor air.
- the volume of the exhausted air can be reduced to about 26-67% of that of the prior art.
- the provision of the air curtain eliminates the need of provision of a shutter in the opening 17 for working which would interfere with the operation, thereby increasing opeation efficiency and making it possible to connect the clean bench to the production line. Even if the shut off effect of the air curtain is transiently disturbed due to a hasty action of the operator, no problem is raised. Since the exhaust fan 8 releases to the outside the volume of air Q 3 which is greater than the volume Q 2 of the air curtain, the air inside of the chamber 9 in which the working space 1 is installed would immediately be drawn by suction in a volume (Q 3 - Q 2 ) through the air curtain suction port 16, so that the air leaked from the working space 1 to the chamber 9 would be quickly drawn into the air curtain suction port 16.
- Fig. 6 shows a second embodiment of the invention in which one air curtain is formed in the front of the working space 1 and another air curtain is formed in the rear thereof.
- This arrangement allows work to be done from both sides of the working space 1, thereby improving operability.
- the air curtains have been described as being provided in the front and rear of the working space 1, the invention is not limited to this specific form of the embodiment, and air curtains may be provided to the front and one side or to opposite sides. The number of the air curtains may be 3 or more.
- Fig. 7 shows a third embodiment of the invention in which the exhaust fan 8 is mounted in the same case as the fan 3, and the exhaust duct 12 is connected to the outside of the working space 1. This arrangement eliminates the need to perform an operation for providing wiring to the exhaust fan 8.
- Fig. 8 shows a fourth embodiment of the invention in which the fan 3 is mounted in a case including a portion projecting through the back of the chamber 9 to the outside for supporting the exhaust fan 8. This arrangement eliminates the need to provide an exhaust duct and does away with an operation for installation, thereby facilitating the operation of installing the clean bench.
- Fig. 9 shows a fifth embodiment of the invention in which the air currents are made to flow horizontally and a return duct is installed on a bottom surface of the working space 1. This arrangement allows the operator to do work through a top surface of the working space 1.
- Fig. 10 shows a sixth embodiment of the invention which suits a working space in which it is not essential to maintain the cleanliness at a high level.
- the filter 2 is mounted on the upstream side of the fan 3.
- Fig. 11 shows a seventh embodiment of the invention in which the fan 3 has a high capacity.
- the exhaust fan 8 need not be mounted in the exhaust duct 12.
- a damper 19 for regulating the volume of air, it is possible to readily effect adjustments of the volume of exhausted air and the volume of air flowing in circulation through the working space 1.
- a check valve may be mounted in the exhaust duct 12.
- the first blower, the second blower, the air curtain blowing port, the air curtain suction port and the air suction ports are contained in the same case as a unit.
- the invention is not limited to this specific form and the system may be split in which case the first blower, the second blower and the air curtain blowing port may be in one package and the air curtain suction port and the suction ports may be in another, so that the two packages can be installed in one building operation.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
- Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP153257/83 | 1983-08-24 | ||
| JP58153257A JPH0649279B2 (ja) | 1983-08-24 | 1983-08-24 | 清浄作業台 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP0139128A2 true EP0139128A2 (de) | 1985-05-02 |
| EP0139128A3 EP0139128A3 (en) | 1986-05-28 |
| EP0139128B1 EP0139128B1 (de) | 1988-11-02 |
Family
ID=15558498
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP84109352A Expired EP0139128B1 (de) | 1983-08-24 | 1984-08-07 | Arbeitsplatz mit Reinluftversorgung |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0139128B1 (de) |
| JP (1) | JPH0649279B2 (de) |
| KR (1) | KR920000021B1 (de) |
| DE (1) | DE3474996D1 (de) |
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4832717A (en) * | 1988-05-10 | 1989-05-23 | Nu Aire, Inc. | Clean air cabinet |
| US4890780A (en) * | 1984-11-22 | 1990-01-02 | Hitachi, Ltd. | Manufacturing apparatus |
| DE3936815A1 (de) * | 1989-11-06 | 1991-05-08 | Prettl Rolf | Arbeitstisch fuer einen reinraum |
| US5167572A (en) * | 1991-02-26 | 1992-12-01 | Aerospace Engineering And Research Consultants Limited | Air curtain fume cabinet and method |
| DE4209297A1 (de) * | 1992-03-21 | 1993-09-23 | Meissner & Wurst | Behandlungseinrichtung fuer den reinraumbereich |
| EP0710803A1 (de) * | 1994-10-22 | 1996-05-08 | Howorth Airtech Limited | System für saubere Luft |
| EP0687512A3 (de) * | 1994-06-01 | 1996-09-18 | Waldner Laboreinrichtungen | Sicherheitslaborabzugschrank |
| DE19712975A1 (de) * | 1997-03-27 | 1998-10-01 | Gwe Ges Fuer Wasseraufbereitun | Verfahren zur Optimierung der Luftführung in einer Reinluft-Kabine |
| WO2000016017A1 (de) * | 1998-09-15 | 2000-03-23 | Siemens Axiva Gmbh & Co. Kg | Verfahren und vorrichtung zum schutz von personen und/oder produkten vor luftgetragenen partikeln |
| FR2785370A1 (fr) * | 1998-11-04 | 2000-05-05 | Ensmse | Dispositif et procede de traitement d'air realisant une isolation par rideau d'air |
| EP0879099A4 (de) * | 1995-09-27 | 2000-12-27 | Maxtor Corp | Miniaturisierter kleinraum zum handhaben von material |
| WO2002018068A1 (en) * | 2000-08-28 | 2002-03-07 | Bengt Lennart Lundin | Ventilated work chamber arrangement |
| EP1188994A1 (de) * | 2000-09-19 | 2002-03-20 | Alfred Schneider Dr. | Kanal für Reinstluftbedingungen |
| US6626971B1 (en) | 1998-09-15 | 2003-09-30 | Siemens Axiva Gmbh & Co. Kg | Method and device for protecting persons and/or products from air-borne particles |
| KR100875206B1 (ko) | 2008-06-12 | 2008-12-19 | 최윤수 | 흄 후드설비 시스템 및 그 시스템의 티라인 노즐 분사식 에어커튼 |
| EP2014365A3 (de) * | 2007-06-01 | 2009-06-17 | Institute of Occupational Safety and Health, Council of Labor Affairs | Luftvorhangisolierter Biosicherheitsschrank |
| EP3165283A4 (de) * | 2014-08-01 | 2018-02-28 | Airtech Japan, Ltd. | Sicherheitsschrank |
| IT201700045556A1 (it) * | 2017-04-27 | 2018-10-27 | Omicron Italia S R L | Cappa aspirante da laboratorio |
| IT202300008970A1 (it) * | 2023-05-05 | 2024-11-05 | Kros Way Srls | cappa o apparato di sicurezza di classe II con barriera d’aria secondaria e relativo metodo di areazione |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100517905B1 (ko) * | 2002-10-21 | 2005-10-04 | 주식회사 오리엔트바이오 | 무균동물 사육용 청정 작업대 |
| JP5214584B2 (ja) * | 2009-12-21 | 2013-06-19 | 興研株式会社 | 一様流吹き出しプッシュフード |
| JP5399434B2 (ja) * | 2011-03-29 | 2014-01-29 | 株式会社日本医化器械製作所 | 増設用換気システム |
| KR102218480B1 (ko) * | 2020-07-30 | 2021-03-05 | 박규태 | 생물안전 작업대 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4532066Y1 (de) * | 1967-04-27 | 1970-12-08 | ||
| GB1593597A (en) * | 1978-05-23 | 1981-07-22 | Howarth Air Eng Ltd | Work cabinet |
| DE3127680C2 (de) * | 1981-07-14 | 1985-06-05 | J. Wolfferts GmbH & Co KG, 5000 Köln | Selbstbelüfteter Abzug |
-
1983
- 1983-08-24 JP JP58153257A patent/JPH0649279B2/ja not_active Expired - Lifetime
-
1984
- 1984-07-23 KR KR1019840004352A patent/KR920000021B1/ko not_active Expired
- 1984-08-07 DE DE8484109352T patent/DE3474996D1/de not_active Expired
- 1984-08-07 EP EP84109352A patent/EP0139128B1/de not_active Expired
Cited By (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4890780A (en) * | 1984-11-22 | 1990-01-02 | Hitachi, Ltd. | Manufacturing apparatus |
| US5015425A (en) * | 1984-11-22 | 1991-05-14 | Hitachi, Ltd. | Manufacturing apparatus |
| US4832717A (en) * | 1988-05-10 | 1989-05-23 | Nu Aire, Inc. | Clean air cabinet |
| DE3936815A1 (de) * | 1989-11-06 | 1991-05-08 | Prettl Rolf | Arbeitstisch fuer einen reinraum |
| US5167572A (en) * | 1991-02-26 | 1992-12-01 | Aerospace Engineering And Research Consultants Limited | Air curtain fume cabinet and method |
| DE4209297A1 (de) * | 1992-03-21 | 1993-09-23 | Meissner & Wurst | Behandlungseinrichtung fuer den reinraumbereich |
| EP0687512A3 (de) * | 1994-06-01 | 1996-09-18 | Waldner Laboreinrichtungen | Sicherheitslaborabzugschrank |
| US6110244A (en) * | 1994-10-22 | 2000-08-29 | Howorth Airtech Limited | Clean air system |
| EP0710803A1 (de) * | 1994-10-22 | 1996-05-08 | Howorth Airtech Limited | System für saubere Luft |
| EP0879099A4 (de) * | 1995-09-27 | 2000-12-27 | Maxtor Corp | Miniaturisierter kleinraum zum handhaben von material |
| DE19712975A1 (de) * | 1997-03-27 | 1998-10-01 | Gwe Ges Fuer Wasseraufbereitun | Verfahren zur Optimierung der Luftführung in einer Reinluft-Kabine |
| US6626971B1 (en) | 1998-09-15 | 2003-09-30 | Siemens Axiva Gmbh & Co. Kg | Method and device for protecting persons and/or products from air-borne particles |
| WO2000016017A1 (de) * | 1998-09-15 | 2000-03-23 | Siemens Axiva Gmbh & Co. Kg | Verfahren und vorrichtung zum schutz von personen und/oder produkten vor luftgetragenen partikeln |
| FR2785370A1 (fr) * | 1998-11-04 | 2000-05-05 | Ensmse | Dispositif et procede de traitement d'air realisant une isolation par rideau d'air |
| WO2002018068A1 (en) * | 2000-08-28 | 2002-03-07 | Bengt Lennart Lundin | Ventilated work chamber arrangement |
| EP1188994A1 (de) * | 2000-09-19 | 2002-03-20 | Alfred Schneider Dr. | Kanal für Reinstluftbedingungen |
| US10232363B2 (en) | 2004-08-01 | 2019-03-19 | Airteck Japan, Ltd. | Safety cabinet |
| EP2014365A3 (de) * | 2007-06-01 | 2009-06-17 | Institute of Occupational Safety and Health, Council of Labor Affairs | Luftvorhangisolierter Biosicherheitsschrank |
| KR100875206B1 (ko) | 2008-06-12 | 2008-12-19 | 최윤수 | 흄 후드설비 시스템 및 그 시스템의 티라인 노즐 분사식 에어커튼 |
| EP3165283A4 (de) * | 2014-08-01 | 2018-02-28 | Airtech Japan, Ltd. | Sicherheitsschrank |
| IT201700045556A1 (it) * | 2017-04-27 | 2018-10-27 | Omicron Italia S R L | Cappa aspirante da laboratorio |
| EP3395453A1 (de) * | 2017-04-27 | 2018-10-31 | Omicron Italia S.R.L. | Laborabsaughaube |
| IT202300008970A1 (it) * | 2023-05-05 | 2024-11-05 | Kros Way Srls | cappa o apparato di sicurezza di classe II con barriera d’aria secondaria e relativo metodo di areazione |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0649279B2 (ja) | 1994-06-29 |
| EP0139128B1 (de) | 1988-11-02 |
| EP0139128A3 (en) | 1986-05-28 |
| KR850002801A (ko) | 1985-05-20 |
| KR920000021B1 (ko) | 1992-01-06 |
| DE3474996D1 (en) | 1988-12-08 |
| JPS6048268A (ja) | 1985-03-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0139128A2 (de) | Arbeitsplatz mit Reinluftversorgung | |
| KR0155387B1 (ko) | 반도체 처리 장치 | |
| US2649727A (en) | Chemical fume hood | |
| JPS6231258B2 (de) | ||
| MY124543A (en) | Cross flow blower | |
| CN217726586U (zh) | 一种导流结构和通风柜 | |
| CN115007590A (zh) | 一种通风柜 | |
| JPH08219511A (ja) | 危険な加工道具のための小環境 | |
| JP4486727B2 (ja) | 循環型クリーンルーム | |
| CN219817423U (zh) | 一种通风柜 | |
| JP3773327B2 (ja) | 空調装置 | |
| CN217857913U (zh) | 一种上补风模块和通风柜 | |
| CN217726587U (zh) | 一种侧补风组件和通风柜 | |
| JP4377469B2 (ja) | エアーカーテン付き低露点作業装置及びエアーカーテン付き低露点作業設備 | |
| JPH01107851A (ja) | ドラフトチャンバーにおける送風排気方法及びその装置 | |
| JPS57139233A (en) | Moving operation chamber with carbon monoxide removing device | |
| JPH029321Y2 (de) | ||
| JPS61168735A (ja) | クリ−ンル−ム | |
| CN223518236U (zh) | 一种补风型通风柜 | |
| CN222447645U (zh) | 洁净室 | |
| JPH0197579A (ja) | プッシュプル型遮断作業台 | |
| JPH03129230A (ja) | 空気清浄装置 | |
| JPH06109280A (ja) | 空調換気装置 | |
| JP2590616B2 (ja) | 空調換気装置 | |
| JPS62739A (ja) | 半導体製造用空気調和方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
| AK | Designated contracting states |
Designated state(s): DE FR GB NL SE |
|
| PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
|
| AK | Designated contracting states |
Kind code of ref document: A3 Designated state(s): DE FR GB NL SE |
|
| 17P | Request for examination filed |
Effective date: 19860609 |
|
| 17Q | First examination report despatched |
Effective date: 19861007 |
|
| GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
| AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): DE FR GB NL SE |
|
| REF | Corresponds to: |
Ref document number: 3474996 Country of ref document: DE Date of ref document: 19881208 |
|
| ET | Fr: translation filed | ||
| PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
| 26N | No opposition filed | ||
| EAL | Se: european patent in force in sweden |
Ref document number: 84109352.9 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: NL Payment date: 19960831 Year of fee payment: 13 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 19961029 Year of fee payment: 13 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 19970616 Year of fee payment: 14 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: SE Payment date: 19970618 Year of fee payment: 14 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 19970728 Year of fee payment: 14 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: NL Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 19980301 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 19980501 |
|
| NLV4 | Nl: lapsed or anulled due to non-payment of the annual fee |
Effective date: 19980301 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 19980807 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: SE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 19980808 |
|
| GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 19980807 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 19990430 |
|
| EUG | Se: european patent has lapsed |
Ref document number: 84109352.9 |
|
| REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST |