EP0124019B1 - Oberflächenwellen-Resonatorfilter - Google Patents

Oberflächenwellen-Resonatorfilter Download PDF

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Publication number
EP0124019B1
EP0124019B1 EP84104363A EP84104363A EP0124019B1 EP 0124019 B1 EP0124019 B1 EP 0124019B1 EP 84104363 A EP84104363 A EP 84104363A EP 84104363 A EP84104363 A EP 84104363A EP 0124019 B1 EP0124019 B1 EP 0124019B1
Authority
EP
European Patent Office
Prior art keywords
metallisation
interruptions
strips
surface acoustic
acoustic wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP84104363A
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German (de)
English (en)
French (fr)
Other versions
EP0124019A3 (en
EP0124019A2 (de
Inventor
Wolf-Eckhart Dipl.-Phys. Bulst
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to AT84104363T priority Critical patent/ATE48210T1/de
Publication of EP0124019A2 publication Critical patent/EP0124019A2/de
Publication of EP0124019A3 publication Critical patent/EP0124019A3/de
Application granted granted Critical
Publication of EP0124019B1 publication Critical patent/EP0124019B1/de
Expired legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02637Details concerning reflective or coupling arrays
    • H03H9/02685Grating lines having particular arrangements
    • H03H9/02771Reflector banks

Definitions

  • the present invention relates to a surface acoustic wave resonator filter according to the preamble of patent claim 1.
  • a surface acoustic wave resonator filter is known whose reflector structure, as shown in FIG. 1 there, has an array of metallization points instead of continuous metallization strips, in a regular waffle distribution.
  • the metallization spots which follow one another in the direction transverse to the direction of wave propagation replace a respective metallization strip of conventional reflector structure.
  • the individual metallization spots have dimensions in the order of the wavelength or fractions of the wavelength of those waves for which the respective reflector structure is intended. With a strip length of z. B. a hundred wavelengths then result for each individual strip z. B. fifty interruptions. Fig.
  • GB-A-2 060 305 Analogously, the same is shown in GB-A-2 060 305, namely again reflector fingers resolved into individual metallization points, but here arranged obliquely, according to the angle at which the reflector structure of the GB-A should reflect the wave.
  • the metallization points are also arranged or distributed here quite regularly.
  • the arrangement according to FIG. 6 is also regular with regard to or in the direction of the “reflector fingers”.
  • the regular gradation of the size and spacing of the metallization points of successive “reflector fingers” corresponds to the dispersion specified for this special case.
  • FIG. 1 A reflector structure designed for a different purpose, namely for finger weighting, is shown in FIG. 1 in Electronics Letters, Vol. 16 (October 9, 1980), pages 793-794. This corresponds to US-A-4 267 534. It is provided there for a portion of the reflector structure, instead of providing continuous reflector elements over the entire width of the structure, omitting the proportions of length of this element corresponding to the weighting provided for the respective reflector element.
  • a single weighted reflector element consists of individual reflector element pieces - in the direction of the individual reflector element, that is to say seen transversely to the wave propagation of the surface wave - between which there are considerable distances (in this transverse direction) .
  • the reflector element pieces all have the same length and their above-mentioned distances (in the transverse direction) from each other are more or less large for each reflector element according to the predetermined weighting of the individual reflector element.
  • JP-A-55-26 723 shows a surface wave structure which has no reflection and diffraction effects for a particular direction for waves incident from any direction. This is achieved there by two-dimensional random distribution from Tru.
  • a stripe can have the same subdivision as its neighboring stripe, depending on the probability of randomness. Regarding the totality of the metallization strips, however, no order of the respective subdivision of the individual metallization strips can be specified. From each unordered subdivision of the individual strips, it then necessarily follows that the respective one of the individual strips consists of the number of interruptions of the respective strip in accordance with randomly dimensioned partial lengths.
  • the random distribution to be used according to the invention can e.g. B. can be specified according to the statement of a random generator, with an equal number of interruptions randomly distributed over its length, z. B. two or five or ten interruptions for the individual metallization strips can be specified. Within the scope of the invention, however, it can also be additionally provided that the number of interruptions in a respective metallization strip is left to chance, i. H. also in this regard a random distribution z. B. between at least two interruptions and a maximum of ten interruptions.
  • a maximum of ten interruptions for a respective metallization strip of such a reflector structure are completely sufficient in order to achieve very substantial and, in practice, generally sufficient suppression of the secondary waves which otherwise occur.
  • the gaps caused by these interruptions are short for the task to be solved, namely as is required for a task-related electrical interruption.
  • the invention at least does not make the manufacturing process of the usual reflector structures significantly more difficult.
  • Generating individual interruptions in a metallization strip is a constant practice for finger-weighted interdigital structures.
  • there is also a relief that the accuracy of the position of a respective interruption within a respective metallization strip and thus also the resulting sections of the strip are practically insignificant, since their position is anyway “random”.
  • Another important advantage of the invention is that, with a small number of interruptions of the individual metallization strips for the entire resonator filter, as indicated, the wave propagation speed does not change significantly, specifically compared to a filter with a reflector structure without any interruptions.
  • a resonator filter according to the invention therefore does not require a new design or a new filter design because the few interruptions of each strip weighted in this way have no serious influence on the speed of propagation of the wave.
  • a filter according to the above-mentioned document there is a significantly different frequency position of the resonance compared to the filter without such a waffle structure of the reflector.
  • the structure in question is advantageously first produced with metallization strips without interruptions and only then are the interruptions - mathema according to the invention table randomly distributed - attached.
  • a resonator filter 1 shows a resonator filter 1 according to the invention, which is located on a quartz substrate 2.
  • 3 denotes an interdigital structure as usual, which is used as an input and / or output converter.
  • a section of the resonator filter 1 is shown, namely only with a single reflector structure 4 (which generally includes a similar reflector structure on the side of the transducer 3 opposite in the x direction).
  • the individual metallization strips of the reflector structure are designated by 5. For the sake of clarity, only a small number of strips 5 are shown. In the case of a reflector structure designed in accordance with the invention, at least a plurality, better all, of the metallization strips are provided with such randomly distributed interruptions.
  • first metallization strip 5 on the left side which has two interruptions 15, so that this metallization strip 5 in three (as shown different) partial lengths 5 ', 5 ", 5"' (each with a small length of Interruptions 15) disintegrates.
  • the next metallization strip on the right has three breaks in this example.
  • the metallization strip, which in turn follows next, has four interruptions in this example, i. H. five part lengths. This representation is intended to explain the principle, specifically with the further configuration with a randomly different number of interruptions in the individual metallization strips 5.
  • the two metallization strips, designated separately with 25, can each have two interruptions, as shown, which are located next to one another at the same location. This does not contradict the principle of coincidence, but occurs extremely rarely within the entire reflector structure.
  • Fig. 2 shows four frequency curves for the group delay. They correspond essentially to Fig. 4 of the above-mentioned document.
  • the frequency curve designated 21 was measured on a surface acoustic wave resonator filter which had reflector structures without interruptions in the metallization strips.
  • Curve 22, on the other hand, was measured on a resonator filter, in which all the metallization strips of the reflector structures each have only a single interruption, but these have already been distributed according to chance. Clear secondary maxima 121 and 122 can be seen in both curves 21 and 22. It should be noted that their heights are much higher, as is the adjustment that is necessary in operation, and can easily extend up to the desired maximum of the filter curve.
  • Curve 24 was measured on a filter with reflector structures, the metallization strips of which each had three interruptions.
  • these two or three interruptions within the individual metallization strips are mathematically randomly distributed over the respective entire reflector structure, i. H. there is not only a random distribution for the partial lengths 5 ', 5 ", 5"' ... of the individual strip 5, but also a random distribution for all strips 5, 25 among one another.
  • Fig. Clearly shows the surprising result, namely that already two interruptions per strip 5, 25 deliver a practically completely satisfactory result. From this it can be seen that the manufacturing cost of a resonator filter according to the invention, i. H. a resonator filter in which complete elimination of the secondary maxima has already been achieved, can be implemented without significant additional effort and, in particular, does not require any fine division of the metallization strips, as are prescribed in accordance with the above-mentioned document.

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
EP84104363A 1983-04-22 1984-04-17 Oberflächenwellen-Resonatorfilter Expired EP0124019B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT84104363T ATE48210T1 (de) 1983-04-22 1984-04-17 Oberflaechenwellen-resonatorfilter.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3314725 1983-04-22
DE19833314725 DE3314725A1 (de) 1983-04-22 1983-04-22 Oberflaechenwellen-resonatorfilter

Publications (3)

Publication Number Publication Date
EP0124019A2 EP0124019A2 (de) 1984-11-07
EP0124019A3 EP0124019A3 (en) 1986-05-21
EP0124019B1 true EP0124019B1 (de) 1989-11-23

Family

ID=6197146

Family Applications (1)

Application Number Title Priority Date Filing Date
EP84104363A Expired EP0124019B1 (de) 1983-04-22 1984-04-17 Oberflächenwellen-Resonatorfilter

Country Status (5)

Country Link
US (1) US4623855A (enrdf_load_stackoverflow)
EP (1) EP0124019B1 (enrdf_load_stackoverflow)
JP (1) JPS59207719A (enrdf_load_stackoverflow)
AT (1) ATE48210T1 (enrdf_load_stackoverflow)
DE (2) DE3314725A1 (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NO855284L (no) * 1985-01-18 1986-07-21 Siemens Ag Filter som arbeider med akustiske boelger.
NO855285L (no) * 1985-01-22 1986-07-23 Siemens Ag Filter som arbeider med akustiske boelger.
ATE85869T1 (de) * 1986-08-29 1993-03-15 Siemens Ag Oberflaechenwellen-resonatorstruktur mit in teilstuecke unterbrochenen metallisierungsstreifen von reflektorfingern.
DE3731309A1 (de) * 1987-09-17 1989-03-30 Siemens Ag Oberflaechenwellenanordnung mit konversionsstruktur zur vermeidung unerwuenschter reflektierter wellen
DE4213800A1 (de) * 1992-04-27 1993-10-28 Siemens Ag Gewichteter Reflektor für eine Oberflächenwellenanordnung
DE60008508T9 (de) * 1999-04-01 2012-06-14 Dsm Ip Assets B.V. Agglomerate durch kristallisation
JP3780415B2 (ja) * 2001-06-12 2006-05-31 株式会社村田製作所 縦結合共振子型弾性表面波フィルタ、およびそれを用いた通信機装置
JP3926633B2 (ja) * 2001-06-22 2007-06-06 沖電気工業株式会社 Sawデバイス及びその製造方法
US6847272B2 (en) * 2003-02-28 2005-01-25 Northrop Grumman Corporation Weighted SAW reflector using distributed acoustic reflective dots
EP1813538A3 (en) * 2006-01-30 2008-04-09 Fujifilm Corporation Cartridge accomodating case
JP4571200B2 (ja) * 2008-03-10 2010-10-27 富士通メディアデバイス株式会社 弾性波フィルタ
JP4766121B2 (ja) * 2009-02-10 2011-09-07 株式会社デンソー 弾性表面波素子、その製造方法およびその共振周波数調整方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3952269A (en) 1975-04-28 1976-04-20 Hughes Aircraft Company Surface acoustic wave delay line
GB1513466A (en) 1975-09-19 1978-06-07 Mullard Ltd Acoustic surface wave devices
US4155056A (en) * 1977-08-25 1979-05-15 Bell Telephone Laboratories, Incorporated Cascaded grating resonator filters with external input-output couplers
US4249146A (en) 1979-02-23 1981-02-03 Trw Inc. Surface acoustic wave resonators utilizing harmonic frequencies
JPS5925525B2 (ja) * 1979-08-31 1984-06-19 株式会社東芝 弾性表面波共振子
GB2060305B (en) * 1979-09-20 1983-05-25 Secr Defence Acoustic wave device including a reflective array
JPS56132807A (en) * 1980-03-24 1981-10-17 Hitachi Ltd Surface wave circuit equipment
US4267534A (en) * 1980-05-23 1981-05-12 Sperry Corporation Surface acoustic wave reflectors with weighted arrays of segmented and non-segmented lineal elements

Also Published As

Publication number Publication date
DE3314725A1 (de) 1984-10-25
EP0124019A3 (en) 1986-05-21
US4623855A (en) 1986-11-18
JPH0351327B2 (enrdf_load_stackoverflow) 1991-08-06
EP0124019A2 (de) 1984-11-07
JPS59207719A (ja) 1984-11-24
DE3480578D1 (en) 1989-12-28
ATE48210T1 (de) 1989-12-15

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