EP0112858A1 - Verfahren und einrichtung zum erzeugen von molekularstrahlen und verwendung dieses verfahrens. - Google Patents
Verfahren und einrichtung zum erzeugen von molekularstrahlen und verwendung dieses verfahrens.Info
- Publication number
- EP0112858A1 EP0112858A1 EP83901909A EP83901909A EP0112858A1 EP 0112858 A1 EP0112858 A1 EP 0112858A1 EP 83901909 A EP83901909 A EP 83901909A EP 83901909 A EP83901909 A EP 83901909A EP 0112858 A1 EP0112858 A1 EP 0112858A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- evaporation
- molecules
- carrier gas
- gas jet
- jet nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H3/00—Production or acceleration of neutral particle beams, e.g. molecular or atomic beams
- H05H3/02—Molecular or atomic beam generation
Definitions
- the invention is based on a method for generating molecular beams, in which a Prohensbstanz is converted (evaporated) by supplying energy from the non-gaseous phase into the gaseous phase, the free molecules resulting from the transfer are mixed with a carrier gas and the carrier gas the molecules of the proth substance are cooled adiabatically by expansion of a beam of the carrier gas.
- the invention further relates to a device for carrying out the above-mentioned method, comprising a gas jet nozzle for generating a carrier gas jet, a carrier gas supply device for supplying the carrier gas to the gas jet nozzle, an evaporation and mixing chamber for transferring a sample substance from the non-gaseous to the gaseous phase (evaporation) and for admixing this phase to the carrier gas, and an energy supply device for supplying evaporation energy to the evaporation and mixing chamber.
- any molecular beams can be generated which consist of a carrier gas, which is usually a noble gas, such as argon, and molecules added to the carrier gas, provided that these molecules are of a volatile substance that can be vaporized at a temperature is at which the molecules do not decompose at all, that is, if they are thermally stable molecules.
- a carrier gas which is usually a noble gas, such as argon
- molecular beams are produced by means of a method and a device of the type mentioned above, which are only known for thermally stable molecules, by evaporating or otherwise evaporating the molecules in the carrier gas atmosphere, for example in an argon atmosphere, and after the formation of a molecular beam by means of a gas jet nozzle, they are jointly cooled by expansion, so that they thereby obtain a very low temperature, which is particularly suitable for their examination by means of mass spectroscopy or other molecular or ion examination methods.
- the evaporation of the molecules added to the carrier gas takes place in the upstream of the gas jet nozzle provided evaporation and mixing chamber by simple thermal heating in the latter directly in front of the gas jet nozzle, through which the mixture of the molecules to be examined and the carrier gas emerges and forms the gas jet, if provided the volatile substance, which consists of the molecules to be examined or contains these molecules, does not evaporate on its own due to its vapor pressure at room temperature.
- Preferred examination methods by means of which such molecular beams are examined, are examination by means of tunable laser radiation either in fluorescence or by multiphoton ionization (MPI) by mass spectroscopy.
- MPI multiphoton ionization
- thermally unstable molecules have been evaporated directly into a vacuum, i.e. without carrier gas, whereby these thermally unstable molecules were more or less decomposed.
- an ionization and an examination by ion examination methods such as, for example, mass spectrometric methods, took place.
- thermally unstable molecules there are a number of methods, most of which have been developed in recent times, with which these thermally unstable molecules can be evaporated directly into vacuum under ionization and examined by mass spectrometry.
- the most important methods here are, for example
- the present invention is intended to generate molecular beams with large, thermally unstable molecules which exist under normal conditions.
- Such molecules can never form in the molecular beam by mere addition, as is the case with the aforementioned complexes, but must be introduced as such into a molecular beam.
- US Pat. No. 4,091,256 describes a method and a device in which so much energy is supplied to a substance that the substance decomposes down to the individual atoms and thus provides a beam of neutral atoms. Large, thermally unstable molecules cannot be converted into the gas phase at all without decomposition using this method and this device.
- a non-volatile substance is to be understood in particular as a substance which is non-volatile under normal conditions (20 ° C. and 1 bar).
- the invention is based on the object of developing a method of the type mentioned in such a way that it is possible to bring large, thermally unstable molecules, that is to say molecules of substances which cannot be vaporized without decomposition, undamaged into a molecular beam which, for spectroscopic purposes, especially mass spectroscopy.
- the carrier gas supply device supplies the carrier gas to the gas jet nozzle upstream of the latter at a temperature which is substantially lower than the evaporation or
- the decomposition temperature of the sample substance is that the evaporation and mixing chamber, at least with the part in which the molecules are mixed into the carrier gas, is arranged downstream of and adjacent to the outlet opening of the gas jet nozzle, and that the energy supply device emits high energy in pulsed operation.
- thermally unstable molecules are to be understood to mean molecules of those substances whose molecules already disintegrate at temperatures which are far below the evaporation temperature.
- the molecules are evaporated off under conditions in which there are more undecomposed molecules in the gas phase than corresponds to the thermodynamic equilibrium at the prevailing temperature, while in the state of thermodynamic equilibrium no undecomposed molecules in the case of substances, consisting of large, thermally unstable molecules.
- the second process consists in exposing the evaporated, thermally unstable molecules to heat dissipation in the carrier gas jet immediately after they have evaporated, by exposing the expanding carrier gas jet to a temperature which is substantially lower than the evaporation or decomposition temperature of the large, thermally unstable molecules is admixed, namely they are introduced into the area of the "cool" carrier gas jet in which this begins to expand. This prevents these thermally unstable molecules from disintegrating after the transition to the gas phase.
- the "stabilization cooling” that occurs here is to be distinguished from the adiabatic cooling, which takes place later and has a completely different purpose, the molecules to be examined cool down to an examination temperature of a few degrees Kelvin.
- the invention makes it possible to generate molecular beams in which the large, thermally unstable molecules are available undamaged for a variety of tests, in particular for optical spectroscopy, for reaction kinetics, in which molecular beams are known to be widely used for test purposes be, as well as for mass spectrometry.
- evaporation or “evaporation” or “evaporation” should be understood to mean all types of converting molecules into the gas phase; this transfer can therefore take place both from the solid substance which contains the molecules to be examined or consists of these molecules, and from a surface on which the 2-molecules are attached or adsorbed.
- the large, thermally unstable molecules are preferably vaporized by means of laser radiation; This type of evaporation has the advantage that it is particularly possible to carry out the very rapid, relatively high temperature evaporation of the large, thermally unstable molecules.
- Another preferred embodiment of the method according to the invention is characterized in that the large, thermally unstable molecules are each evaporated into a carrier gas jet pulse by means of evaporation pulses.
- the molecules can be well examined without the substance from which they are evaporated being continuously heated and thus largely decomposed; rather, only the top layer of the substance is always heated to the high evaporation temperature which serves for rapid evaporation.
- the large, thermally unstable molecules get directly into the relatively cool carrier gas jet which is at the beginning of its expansion after they have passed into the gas phase, they are preferably vaporized by a sample surface which runs essentially parallel to the axis of the carrier gas jet and is adjacent to the outlet opening of the gas jet nozzle , this sample surface nevertheless not protruding into the carrier gas jet, so that an undisturbed expansion of the carrier gas jet is made possible.
- the device for carrying out the method according to the invention is preferably designed such that the large, thermally unstable molecules are exposed to the stabilization cooling mentioned immediately after their entry into the gas phase, in such a way that the evaporation point in from the outlet opening of the gas jet nozzle a longitudinal distance that is less than or equal to 20 times the effective diameter of the Outlet opening is arranged laterally from the outlet opening, the longitudinal distance being that along the axis of the gas jet nozzle and the effective diameter being the diameter corresponding to a circular outlet opening.
- the effective diameter in the above sense means the diameter of a circular outlet opening which has the same area of outflow as the annular outlet opening.
- the evaporation point is preferably arranged at a transverse distance from the axis of the gas jet nozzle which is less than or equal to 20 times, preferably less than or equal to 10 times, the effective diameter of the outlet opening.
- the transverse distance be less than half the longitudinal distance.
- the device can furthermore be designed such that the evaporation and mixing chamber has a preferably cylindrical expansion channel for the carrier gas jet, downstream of the outlet opening of the gas jet nozzle, on or in the wall of which the evaporation point is provided.
- These evaporation parts can in particular be provided in an obliquely, preferably perpendicularly, to the axis of the gas jet nozzle arranged sample channel, which is formed in the side wall of the expansion channel.
- a laser beam channel lying in the axial extension of the sample channel can be formed in the side wall of the expansion channel.
- the distance of the sample surface from the side wall of the expansion channel is preferably less than or equal to the diameter of the sample channel, the sample diameter preferably being equal to the diameter of the sample channel.
- Figure 1 is a graph showing the relationship between evaporation and decomposition of large, thermally unstable molecules
- FIG. 2 shows a longitudinal section through a gas jet nozzle and part of an evaporation and mixing chamber, as are preferably used to carry out the method according to the invention
- FIG. 3 shows a preferred embodiment of a device according to the invention with the adjoining field plates of a mass spectrometer, but without the device with which the evaporation energy is supplied to the sample located in the evaporation and mixing chamber;
- Figure 4 shows an embodiment of the device with which the evaporation energy is generated and supplied to the sample
- FIG. 5 to 12 test results in curve form, as they have been obtained by means of the method and the device according to the invention.
- FIG. 1 in which the natural logarithm of the reaction constant k for the decomposition (straight line I) and for the evaporation (straight line II) is shown schematically as a function of the reciprocal of the absolute temperature T are shown.
- the evaporation or evaporation of thermally unstable molecules can be done by extremely rapid heating, as is caused by a very short laser pulse with a high power density.
- the distribution of energy over the three evaporation processes, evaporation, decomposition and ionization, depends mainly on the following factors when bombarded with laser radiation: laser energy density, pulse duration and nature of the sample.
- laser energy density The influence of the laser wavelength on the evaporation process seems to be of minor importance; However, it cannot be ruled out that particularly high evaporation rates can be achieved with specific wavelengths, for example in the infrared (resonance desorption).
- the CO 2 laser (wavelength 10.6 ⁇ m) should be preferred to the alternative neodymium YAG laser (wavelength 1.06 ⁇ m), because at 10.6 / um most of the large organic anic molecules vibrational bands, which is not the case at 1.06 ⁇ m.
- a molecular beam is a bundled stream of molecules that move in a preferred direction essentially without jolts. The freedom from bumps is also given for free expansion into a vacuum, but the preferred direction is generally missing here.
- the vaporized molecules are admixed to a carrier gas jet immediately after it emerges from a pulsed gas jet nozzle.
- the still “hot” molecules initially experience collisions with the carrier gas atoms and are thus deactivated by "stabilization cooling", so that the likelihood of a subsequent unimolecular decay greatly decreases.
- stabilization cooling so that the likelihood of a subsequent unimolecular decay greatly decreases.
- the initial nozzle jet changes into a molecular jet after a short running distance.
- This device for generating a pulsed, doped molecular beam has the following four main components:
- a gas jet nozzle 1 which in the present embodiment is designed as an electromagnetically pulsed nozzle valve and is used to generate a carrier gas jet, for example an argon jet;
- a carrier gas supply device 4 for supplying the carrier gas to the gas jet nozzle 1; from this carrier Gas supply device 4 is shown in the drawing, namely in Figure 3, only the connecting piece through which the carrier gas is supplied to the gas jet nozzle 1.
- a molecular beam is generated, of which only the axis 5 is shown, which at the same time represents the axis of the gas jet nozzle 1 and accordingly also the carrier gas jet emerging therefrom and the axis of the carrier gas jet and the mixed gas jet existing in these evaporated molecules, which after adiabatic expansion becomes the molecular jet.
- the ionizing laser is a tunable dye laser that is pumped by a Q-switched neodymium-YAG laser.
- the impulse operation of the nozzle jet (this is how the entire jet is referred to here, which becomes the carrier gas jet via the mixed gas jet to the molecular jet) is not an absolutely necessary feature of the method according to the invention, but it is of extremely important practical importance in order to maintain a sufficient vacuum with a reasonable pumping effort.
- a continuous jet of carrier gas for example made of argon, would have no practical meaning anyway because of the pulsed evaporation.
- Important for the functioning of the method is an exact temporal correlation of the nozzle jet, the evaporation laser pulse and the ionization laser pulse, which is carried out by standard electronic circuits.
- the individual structural units are now explained in more detail below, and then, for example, structural dimensions and preferred optimized operating data are specified.
- the gas jet nozzle is first described in detail with reference to FIGS. 2 and 3:
- the gas jet nozzle 1 is designed as a nozzle valve, in the present case it is a commercial electromagnetically operated valve from Bosch, which was originally intended for the operation of fuel injection engines.
- This nozzle valve has an annular outlet opening 6 which is delimited on the inside by a cylindrical end of a valve tappet 7 and on the outside by a cylindrical opening of a valve seat cylinder 8.
- a conical valve surface 9 connects to the cylindrical end of the valve tappet 7, which cooperates with a complementary conical valve seat surface 10, which adjoins the cylindrical opening of the valve seat cylinder 8.
- the nozzle valve is reworked so that the valve seat cylinder 8 is freely accessible and is provided with an external thread 11 for screwing on the evaporation and mixing chamber 2.
- the annular outlet opening 6 has a radial ring width of approximately 0.1 mm and an outer ring diameter of approximately 1 mm, so that a corresponding ring-shaped carrier gas jet is generated.
- the distance between the valve surface 9 and the valve seat surface 10 when the nozzle valve is open is approximately 0.1 mm.
- the nozzle valve is operated electromagnetically so that a carrier gas pulse of approx. 1 msec duration with rising and falling edges of approximately 200 ⁇ sec is produced. This is achieved by electrical pulses of 500 ⁇ sec that are applied to the magnetic winding of the nozzle valve.
- FIGS. 2 and 3 which, at least with regard to its essential part in which the evaporation and mixing takes place, is arranged downstream of the outlet opening 6 of the gas jet nozzle 1 and adjacent to this outlet opening:
- the evaporation and mixing chamber 2 has a cylindrical expansion channel 12 for the carrier gas jet, the axis of which coincides with the axis 5 of the nozzle jet and which forms an enlarged, downstream extension of the outlet opening 6 of the gas jet nozzle 1 and connects one end directly to the outlet opening 6 .
- the other end of the expansion channel 12 merges into a vacuum for further expansion of the jet.
- the evaporation point 13 is provided, which in the present case is formed by the surface of a sample 14 pressed into a pill.
- This evaporation point 13 is provided in a sample channel 15 which is arranged perpendicular to the axis 5 of the gas jet nozzle 1 and is formed in the lateral wall of the expansion channel 12.
- the evaporation and mixing chamber 2 has a laser beam channel 16, which is also formed in the lateral wall of the expansion channel 12, specifically in the axial extension of the sample channel 15 on the side of the expansion channel 12 opposite the latter is explained below with reference to Figure 4, the evaporation energy supplied.
- the diameter of the latter is substantially larger than the outer diameter of the outlet opening 6. So that the molecules from the sample 14 to the The following conditions are preferably met for the purposes of stabilizing cooling as directly as possible in the expanding carrier gas jet and in an area of the latter which is as close as possible to the beginning of the expansion:
- the longitudinal distance a of the evaporation point 13 from the outlet opening 6 of the gas jet nozzle 1 is less than or equal to 20 times the effective diameter of the outlet opening 6.
- the distance between the outlet opening 6 and the projection point P of the center M is below the longitudinal distance a Evaporation point 13 to understand the axis 5 of the jet.
- the concept of the effective diameter of the outlet opening 6 has already been explained above.
- the transverse distance b of the evaporation point 13 from the axis 5 of the nozzle jet is less than or equal to 20 times, preferably less than or equal to 10 times the effective diameter of the outlet opening 6.
- the transverse distance b is preferably less than half the longitudinal distance a.
- the distance c of the evaporation point 13 from the side wall of the expansion channel 12 is less than or equal to the diameter d of the sample channel 15, which is preferably filled in by the sample 13 in its entire cross section.
- the evaporation and mixing chamber 2 consists of a cylindrical block made of stainless steel, which has a threaded bore 17 which is concentric with the expansion channel 12 and by means of which it is screwed onto the external thread 11 of the valve seat cylinder 8.
- Preferred Ab Measurements of this cylindrical block, of the expansion channel 12 and of the sample channel 15 and laser beam channel 16 passing through from the expansion channel on the outside of the cylindrical block are as follows:
- Diameter e of the laser beam channel 2.5 mm
- Diameter d of the sample channel 2.5 mm
- Diameter g of the expansion channel 2.5 mm axial length h of the expansion channel: 5 mm minimum distance i of the inner wall of the sample and laser beam channel from the face of the cylindrical block facing away from the gas jet nozzle: 1.5 mm diameter m of the evaporation and mixing chamber: 30 mm thickness n of the evaporation and mixing chamber: 13 mm
- the evaporation and mixing chamber 2 can be modified in such a way that at the location of the pressed sample 14 there is a strip coated with the sample substance, which can consist, for example, of copper or Teflon etc., on which the evaporation laser beam 18 acting on the laser beam channel 16 (see FIG. 4) is guided past, so that the surface exposed to the evaporation laser beam can thereby be constantly renewed by continuously or stepwise moving the belt; however, this embodiment is not shown in the drawing.
- This energy supply device 3 comprises, as an energy source, a laser 19, which in the present case is a pulsed CO 2 - TEA laser which, with a beam cross section of 2.3 x 2.5 cm, has evaporation laser beam pulses of 0.3 J / cm 2 and 1 / usec duration returns.
- the repetition frequency is variable in the range from 0 to 10 pulses / second.
- the evaporation laser beam 18 is, as shown in the not to scale drawing of Figure 4, deflected immediately after its exit from the laser 19 by a first gold-coated, flat deflection mirror 20 by 90 and via a first iris diaphragm 21 to a second flat gold-coated Deflecting mirror 22 and via a second iris diaphragm 23 and a third flat gold-coated deflecting mirror 24 are directed to a likewise gold-coated concave mirror 25.
- the two variable iris diaphragms 21 and 23 are provided to attenuate the evaporation laser beam 18, namely, as shown in FIG. 4, an iris diaphragm 21 is attached directly to the output of the laser 19 and the other iris diaphragm 23 is located in the vicinity of the third deflection mirror 24.
- the evaporation laser beam 18 is directed through a window 26 into the interior of the vacuum space 27 containing the evaporation and mixing chamber and through the laser beam channel 16 onto the evaporation point 13, i.e. concentrated on the surface of the sample 14.
- the sample 14 is not exactly in the focal point of the concave mirror 25. Rather, the distance of the concave mirror 25 from the evaporation point 13 can be changed, and this change allows the energy density of the evaporation laser beam 18 impinging on the surface of the sample 14 to be varied in a simple manner.
- ionization laser beam 28 This is done by means of an ionization laser beam 28, which is indicated in FIG. 3 in the plane of the drawing, but actually runs perpendicular to the plane of the drawing.
- a neodymium-YAG dye laser system from Quanta Ray is used to generate this ionization laser beam 28.
- This laser system works optimally at a pulse repetition frequency of 10 Hertz and delivers pulses of approx. 10 nsec duration.
- the basic wavelength of the YAG laser which is at 1064 nm and its harmonics, which go up to the fourth harmonic, which is at 266 nm
- the entire range from approx. 800 to 240 nm can be covered by suitable choice of dye as well as doubling and frequency mixing .
- the ionization laser beam 28 is focused on the intersection A of the molecular beam with the ion-optical axis 29 of the time-of-flight mass spectrometer by means of a lens, not shown, which preferably has a focal length of 20 cm or 50 cm. In the present embodiment, this intersection point A is at a distance r of 2.7 cm from the outlet opening 6 for the carrier gas jet.
- the field plates 30 to 33 and a part of the drift tube 34 of a time-of-flight mass spectrometer of conventional design are indicated, which form a pulling field for extracting the ions generated at the intersection point A, a single lens and a drift space, the latter being provided by aperture plates 35 36 and 37, which are provided in the field plates 31, 32 and 33, are separated from the molecular beam.
- the perforated screens 35, 36 and 37 have, for example, a diameter s of 5 mm each.
- a secondary electron multiplier (not shown).
- the ions are detected via a preamplifier either on a fast oscillograph or on a TRANSIENT DIGITIZER (Tectronix), which is a device that registers and digitizes very fast processes (nanoseconds to picoseconds).
- a preamplifier either on a fast oscillograph or on a TRANSIENT DIGITIZER (Tectronix), which is a device that registers and digitizes very fast processes (nanoseconds to picoseconds).
- the molecular beam space has a buffer volume of approx. 6 1, so that the chamber pressure does not increase so much with every gas pulse; it is kept at a mean pressure of approx. 1.3 / ubar with a Roots pump with a suction capacity of 1000 m 3 / h and with a suitable backing pump.
- the pressure in the drift chamber is kept below 0.013 / ubar by a diffusion pump.
- the gas jet nozzle 1 is screwed as a structural unit into an essentially hollow cylindrical socket 38, which in turn is attached to a larger flange 43, which is attached to a larger flange 43 and a spacer ring 40 and seals 41, 42 tubular part 44 (see Figure 4) is provided.
- This tubular part which is not shown in FIG. 3, is located laterally at a distance from the evaporation and mixing chamber 2 and supports the window 26 via a corresponding holder 45.
- anthracene (2) retinal (vitamin A aldehyde) and (3) tryptophan (an amino acid)
- the measurement curves in FIGS. 7 to 12 are proof that thermally unstable molecules could actually be converted into a molecular beam without being destroyed.
- Anthracene was detected in the molecular beam both by fluorescence and by a mass spectrum.
- Figure 5 shows a resonance fluorescence spectrum at 0-0
- the narrow band - approx. 0.1 nm wide - is characteristic of a molecule cooled to a few K.
- the substance was introduced as a compact in the sample channel of the evaporation chamber.
- Figure 6 shows a mass spectrum of anthracene. It essentially contains the mother mass and a calibration peak of toluene, which has been mixed in trace amounts with the argon. The wavelength of the ionization laser was 266 nm. It should be pointed out that an anthracene molecule is not in itself a thermally unstable molecule, rather anthracene has only been chosen as an example for the functioning of adiabatic cooling; It was found that this adiabatic cooling works even when the molecules are introduced into the carrier gas downstream of the gas jet nozzle.
- Figure 8 shows a spectrum in which almost only the mother ion of the retinais appears.
- the evaporation chamber had been thoroughly cleaned and filled with a fresh retinal sample.
- the incident wavelength was again 266 nm, but with a lower intensity than in FIG. 7.
- the retinal spectra of the following two figures were obtained with an ionizing wavelength of 355 nm, specifically in FIG. 9 at high energy density and in FIG. 10 at low energy density. It can be seen that the fragmentation depends strongly on the intensity and does not result from the evaporation process.
- the last two pictures show mass spectra of tryptophan.
- the ionization wavelength is 266 nm
- the spectrum of FIG. 11 is recorded with a compact, that of FIG. 12 with a tryptophan coating on copper strips. The other conditions are the same.
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Sampling And Sample Adjustment (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3224801A DE3224801C2 (de) | 1982-07-02 | 1982-07-02 | Verfahren und Einrichtung zum Erzeugen von gepulsten Molekularstrahlen, die große, thermisch instabile Moleküle enthalten |
DE3224801 | 1982-07-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0112858A1 true EP0112858A1 (de) | 1984-07-11 |
EP0112858B1 EP0112858B1 (de) | 1987-11-04 |
Family
ID=6167477
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP83901909A Expired EP0112858B1 (de) | 1982-07-02 | 1983-06-30 | Verfahren und einrichtung zum erzeugen von molekularstrahlen und verwendung dieses verfahrens |
Country Status (5)
Country | Link |
---|---|
US (1) | US4570066A (de) |
EP (1) | EP0112858B1 (de) |
JP (1) | JPS59501234A (de) |
DE (2) | DE3224801C2 (de) |
WO (1) | WO1984000276A1 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5009849A (en) * | 1984-12-14 | 1991-04-23 | Monsanto Company | Apparatus for carrying out catalyzed chemical reactions and for studying catalysis |
DE3809504C1 (de) * | 1988-03-22 | 1989-09-21 | Bruker - Franzen Analytik Gmbh, 2800 Bremen, De | |
JPH07117530B2 (ja) * | 1988-05-16 | 1995-12-18 | ニッカ電測株式会社 | ピンホール検出方法および装置 |
IL90970A (en) * | 1989-07-13 | 1993-07-08 | Univ Ramot | Mass spectrometer method and apparatus for analyzing materials |
DE4017805C2 (de) * | 1989-08-22 | 1998-03-26 | Finnigan Mat Gmbh | Verfahren, Präparat und Vorrichtung zur Bereitstellung eines Analytes für eine Untersuchung |
US5034604A (en) * | 1989-08-29 | 1991-07-23 | Board Of Regents, The University Of Texas System | Refractory effusion cell to generate a reproducible, uniform and ultra-pure molecular beam of elemental molecules, utilizing reduced thermal gradient filament construction |
JPH0459456U (de) * | 1990-09-28 | 1992-05-21 | ||
US5055672A (en) * | 1990-11-20 | 1991-10-08 | Ebara Corporation | Fast atom beam source |
DE4108462C2 (de) * | 1991-03-13 | 1994-10-13 | Bruker Franzen Analytik Gmbh | Verfahren und Vorrichtung zum Erzeugen von Ionen aus thermisch instabilen, nichtflüchtigen großen Molekülen |
DE29605650U1 (de) * | 1996-03-27 | 1996-07-25 | Balzers Prozess Systeme Vertri | Anordnung zum Verbinden eines Tiefdruckeinganges eines Gasanalysegerätes |
DE19705762C2 (de) * | 1997-02-14 | 2001-06-07 | Rainer Edmund Weinkauf | Verfahren und Vorrichtung zum Erzeugen von Gasstrahlen |
DE19708658B4 (de) * | 1997-03-04 | 2004-08-05 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Verfahren zum Sortieren und/oder Selektieren von bezüglich ihrer Masse, Größe und/oder Oberflächenbeschaffenheiten unterschiedlichen Partikeln |
DE19822672B4 (de) * | 1998-05-20 | 2005-11-10 | GSF - Forschungszentrum für Umwelt und Gesundheit GmbH | Verfahren und Vorrichtung zur Erzeugung eines gerichteten Gasstrahls |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4091256A (en) * | 1975-01-16 | 1978-05-23 | The United States Of America As Represented By The Secretary Of The Air Force | Pulsed atomic beam apparatus |
DE2654057B1 (de) * | 1976-11-29 | 1978-04-27 | Varian Mat Gmbh | Verfahren zur Ionisierung von organischen Substanzen,sowie dieses Verfahren benutzendes Analysegeraet |
-
1982
- 1982-07-02 DE DE3224801A patent/DE3224801C2/de not_active Expired
-
1983
- 1983-06-30 WO PCT/DE1983/000118 patent/WO1984000276A1/de active IP Right Grant
- 1983-06-30 JP JP58502144A patent/JPS59501234A/ja active Granted
- 1983-06-30 DE DE8383901909T patent/DE3374373D1/de not_active Expired
- 1983-06-30 US US06/598,329 patent/US4570066A/en not_active Expired - Lifetime
- 1983-06-30 EP EP83901909A patent/EP0112858B1/de not_active Expired
Non-Patent Citations (1)
Title |
---|
See references of WO8400276A1 * |
Also Published As
Publication number | Publication date |
---|---|
WO1984000276A1 (en) | 1984-01-19 |
JPS59501234A (ja) | 1984-07-12 |
JPS6318320B2 (de) | 1988-04-18 |
DE3374373D1 (en) | 1987-12-10 |
DE3224801C2 (de) | 1986-04-30 |
EP0112858B1 (de) | 1987-11-04 |
US4570066A (en) | 1986-02-11 |
DE3224801A1 (de) | 1984-01-05 |
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