EP0089617B1 - Mit akustischen Wellen arbeitendes elektronisches Bauelement - Google Patents

Mit akustischen Wellen arbeitendes elektronisches Bauelement Download PDF

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Publication number
EP0089617B1
EP0089617B1 EP83102608A EP83102608A EP0089617B1 EP 0089617 B1 EP0089617 B1 EP 0089617B1 EP 83102608 A EP83102608 A EP 83102608A EP 83102608 A EP83102608 A EP 83102608A EP 0089617 B1 EP0089617 B1 EP 0089617B1
Authority
EP
European Patent Office
Prior art keywords
finger
sub
groups
fingers
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP83102608A
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German (de)
English (en)
French (fr)
Other versions
EP0089617A3 (en
EP0089617A2 (de
Inventor
Gerd Dipl.-Ing. Dr. Riha
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
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Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP0089617A2 publication Critical patent/EP0089617A2/de
Publication of EP0089617A3 publication Critical patent/EP0089617A3/de
Application granted granted Critical
Publication of EP0089617B1 publication Critical patent/EP0089617B1/de
Expired legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H03H9/02685—Grating lines having particular arrangements
    • H03H9/02716—Tilted, fan shaped or slanted grating lines

Definitions

  • the present invention relates to an electronic component as specified in the preamble of claim 1.
  • a variety of embodiments of electronic components are known from the prior art, which work with acoustic waves and are used as electrical frequency filters, signal generators, oscillators and the like. As a rule, they have at least one input converter and at least one output converter, which depending on the embodiment can also functionally coincide in one converter.
  • Such transducers can have the structure of an interdigital structure with interdigitated electrode fingers.
  • Embodiments of such electronic components are of importance which, in addition to input transducers and output transducers, have one or more reflector structures which likewise each consist of a plurality of fingers or digit strips or configurations corresponding to these.
  • Other reflector arrangements of this type have two or more reflector structures arranged next to one another, the fingers each having a reflector structure at an angle of approximately 90 ° are arranged to the fingers of another reflector structure (oblique incidence).
  • An electronic component of the types described above can be dimensioned such that it carries out a signal processing corresponding to a predetermined transfer function and emits the output signal corresponding to this function.
  • the finger spacing and the weighting of the individual fingers are measured, with changing finger spacing being provided for filters with a dispersive property.
  • the necessary dimensions are determined mathematically by forming the Fourier transform of the transfer function. This Fourier transform is also referred to as a filter impulse response. It can function as a complex
  • This function requires at least one weighted digital structure for a (t) * const in the component.
  • the weighting of a digit structure or the individual fingers of this structure is a targeted reduction in the mechanical or electromechanical effectiveness of these fingers in the structure.
  • For an interdigital structure it is known to have the electrode fingers that are adjacent to one another and at different potentials overlap one another to different extents. With strong weighting there is only very little overlap locally, which leads to disadvantageous wave deflections.
  • 'dots' For reflector structures there is, in addition to the mostly very disadvantageous measure of a more or less severe shortening of the respective finger, the provision of a series of individual points corresponding to the strip instead of a finger (continuous weight) which is designated as 'dots'.
  • This more or less large density and / or size of the 'dots' corresponds to a more or less shortened and thus weighted finger (and such a respective structure replacing a finger is also referred to here as a finger or digit strip).
  • a disadvantage of such an embodiment is that the 'dots' cause interference signals due to undesirable reflection and scattering behavior (in particular with greater weighting, i.e. low density of the 'dots').
  • the original embodiment of weighted fingers in a reflector structure consists in realizing these as pits or trenches in the surface of the substrate and making such a trench more or less deep in accordance with the weighting.
  • This technology has the disadvantage that it is extremely expensive and difficult to control.
  • This surface acoustic wave filter has a finger structure with a group arrangement of these fingers, which are spaced apart by half the wavelength of the center frequency of the filter. Where different groups of fingers meet, there are finger distances the size of a quarter or three quarters of the wavelength.
  • FIG. 2 c shows differential finger displacement of a finger, which also represents a finger displacement weighting.
  • the invention is based on the following considerations and findings.
  • 1 shows the predetermined amplitude profile 1 of a transfer function over the frequency plotted on the abscissa 2 (the amplitude is plotted on the ordinate). 1 also shows with dashed curve 4 (to which the group delay is plotted on the ordinate) the predetermined curve of the group delay T (f) associated with the predetermined amplitude curve 1 of the entire required transfer function of the component according to the invention which works with acoustic waves.
  • the transfer function shown is an example of how it typically occurs for pulse compression filters. This transfer function consisting of the two curves 1 and 4 corresponds to a certain Fourier transform, which is the filter impulse response dependent on time:
  • the amplitude function a (t) has been converted into the phase function b (t), which is accordingly decisive for the dimensioning of the displacement of finger edges according to the invention for the purpose of weighting the structure in question.
  • This weighting a (t) to be implemented in the invention results from the transfer function given for the component in question according to amount 1 and group delay 4 of the same.
  • This mathematical transformation from s (t) to s (t) is accompanied by the occurrence of the expression r (t) and the convolution function g (t).
  • the function r (t) is the envelope of the digital structure not equipped with the additional phase weighting according to the invention.
  • this function r (t) can also contain an additional amplitude modulation which, in the case of a component according to the invention, according to one of the known, e.g. B. above, methods of finger weighting would be realized.
  • the convolution function g (t) essentially represents the filter impulse response of the input and / or output converter in an interdigital structure or an 'in-line' reflector structure, or it corresponds to that of the aperture of a reflector structure with inclined reflector fingers, i. H. with two 90 ° reflection, own fold-like integration (filtering).
  • This function g (t) is folded using the function s (t) equation (11) modified according to the invention.
  • This process which is mathematically referred to as convolution, corresponds to a filtering out of sidebands in the frequency range (as shown in FIG. 1). In Fig. 1 such occurring in connection with the invention side bands with dotted curve and shown at 5.
  • the mentioned sidebands 5 are filtered away in connection with the invention, primarily by appropriately dimensioning the input converter and / or the output converter. As also said in other words, this can be done for the reflector structure with inclined fingers by choosing a correspondingly large aperture value, i.e. correspondingly long fingers of the structure can be achieved. For the sake of completeness, it should be pointed out that this filtering can also take place outside the actual component according to the invention, e.g. B. in further filter-acting assemblies of an entire device. Because of the very simple possibility of filtering out such side bands 5, which is offered in a component according to the invention, the latter option is rarely used.
  • finger edges are shifted in an oscillating manner (with a minimum frequency) in a digital structure according to the invention, in relation to a local position (in the structure) which would result for a corresponding digital structure if this would have no weighting at the relevant location of the respective finger edge, ie the fingers would be unweighted there.
  • the fingers and thus also their finger edges are arranged at equidistant intervals, for example with interdigital arrangements (without 'split fingers') and in 'in-line' reflector structures at 1 ⁇ 2 and 2 intervals and with a reflector structure with inclined fingers and twice 90 ° reflection at intervals 1 . . 0 , measured parallel to the main axis or normal of the wavefront of the acoustic wave.
  • the displacement of the finger edges provided according to the invention takes place in accordance with the function b (t) (to be discussed further), in groups for the finger edges.
  • a respective number of finger edges is combined into individual subgroups, that is to say the same measure of displacement in terms of amount and direction applies to all finger edges of a respective subgroup.
  • a large number of subgroups are present in a weighted region of a digital structure according to the invention.
  • Each subgroup has at least two real finger edges, but can also include a larger number of finger edges.
  • These additional finger edges can be real and virtual finger edges.
  • a real finger edge is such an edge of a finger or digit strip that is actually z.
  • B. is present as a metallization strip.
  • a virtual finger edge is a finger edge of a finger or digit strip, which is omitted in the structure. It is not necessary for a digital structure that it corresponds to the measure of the wavelength of the center frequency with the maximum possible number of fingers or digit strip is provided. As is known, a digital structure also has the corresponding effect if a more or less large number of fingers are omitted (thinned digital structure).
  • a subgroup includes the possibility that it consists of two real finger edges, these two real finger edges belonging to one and the same finger (s). Another possibility is that it again consists of two real finger edges, but these two finger edges are the finger edges of two adjacent fingers that are adjacent to one another. The border between two neighboring subgroups runs through a finger accordingly.
  • a subgroup can, for example, also consist of three real finger edges, which then comprise a complete finger and half of an adjacent finger, the other half of which already belongs to the next subgroup. Is z. B. in a digital structure concerned, every second finger is omitted, a smallest subgroup consists of four finger edges, namely two real and two virtual finger edges, i.e. from a complete finger or from two halves of one finger each with one finger left out.
  • a number of subgroups for dimensioning the finger edge displacement according to the invention are combined to form a main group.
  • Each main group contains at least two real, i.e. subgroups actually represented in the structure by fingers.
  • the rule applies that the finger edges of one subgroup are shifted in the opposite direction (towards or away from each other) to the finger edges of the other subgroup.
  • a main group of four subgroups e.g. B. one or two subgroups remain undisplaced.
  • the amounts of the real subgroup shifts of a main group need not be the same. However, the sum of the displacements of all subgroups of such a main group must be zero, apart from the fact that with different finger spacings due to a predetermined dispersion or non-constant group delay, the dimension of these finger spacing differences (as a very small correction variable) is included and / or disregarded that fingers of a respective subgroup have different electromechanical (interdigital transducers) mechanical (reflector) efficiency and / or that their number is different.
  • n the minimum number of main groups, namely that n must be at least equal to or greater than the time-bandwidth product (TB), where T is the duration of the filter impulse response and B is the bandwidth the predetermined transfer function (see Fig. 1).
  • the input converter 12 has a conventional structure.
  • the converter 13, however, is designed according to the invention.
  • the finger weighting of this transducer 13, which would be carried out in a conventional manner by different lengths of the individual fingers, is realized here by a displacement AZ of the individual fingers of a respective subgroup, as measured according to the invention, all fingers generally having the same length. With more or less slightly different finger lengths, an additional weighting could be provided, but this has nothing to do with the invention.
  • the 'in-line' reflector component shown in Fig. 3 has a converter 12 which serves both as an input converter and as an output converter. It can correspond to the converter 12 of FIG. 2 in practically all details of the structure. 3, the converter 12 can be so broadband that it does not affect the entire required transfer function 1.
  • 23 designates a reflector structure designed according to the invention, which consists of individual digit strips which are generally of equal length. According to the conventional method, the weighting of such a reflector structure would be realized by correspondingly different depths of etched trenches or by more or less large density of 'dots' (with the disadvantages described above). In contrast, in the invention, the digit strips of this structure 23, i.e.
  • the finger edges of the digit strips shifted by the respective dimension AZ according to the invention.
  • this shift A results as a shift compared to an equidistant finger-center distance. If the digital structure 23 has a dispersion, it already has non-equidistant finger-center distances in the unweighted case, on which the same modulated respective shift AZ of the individual finger edges is then superimposed.
  • While such an embodiment of the invention is shown for the converter 13 according to FIG. 2, in which the fingers or digit strips continue to have the same width among one another and only have different distances from one another according to the invention (individual fingers also being omitted as virtual fingers), shows the representation of Fig. 3 fingers or digit strips, which have different widths. These different widths result from the shifting of finger edges, whereby for single fingers the two edges of this single finger are shifted towards one another (narrower fingers) and with other individual fingers the two edges of such a finger are shifted away from one another (wider fingers).
  • FIG. 4 shows what a 90 ° reflector structure should be understood.
  • Such a component according to the invention also has an input converter 12 and an output converter 12, both of which can be designed to match.
  • An example of a wave path is indicated by dashed lines at 31.
  • the arrow Z again indicates the main shaft direction or abscissa of the displacement AZ of the fingers of the structures 33 and 33 '.
  • the two structures 33, 33 ' have virtual fingers, i.e. fingers are omitted accordingly in gaps.
  • the structures 33, 33 ' are weighted by the finger edge displacement ⁇ Z.
  • the aperture of such a structure mentioned above is the projects of the actual finger length to the normal of the abscissa z, i.e. equal to the width of the individual structures 33, 33 '.
  • the respective displacement AZ according to the invention is parallel to the abscissa Z, i.e. is measured here in a direction oblique to the direction of the finger.
  • the explanations given for the following figures relate to fingers or finger edges oriented perpendicular to the abscissa Z. These explanations below also apply mutatis mutandis to inclined fingers or finger edges, as they occur in the structures 33, 33 '.
  • FIG. 5 shows, on a substrate 51 broken off in both directions Z - in a basic representation - a portion of a digital structure 52 designed according to the invention, ie weighted according to the invention. From left to right, ie in direction Z, a number of real and virtual subgroups follow one another. The first subgroup seen from the left in the illustration in FIG. 5 is designated 53. The next subgroup is labeled 54. In accordance with the arrows 55 shown above, the finger edges and thus the fingers of these two subgroups 53 and 54 are displaced towards one another. The extent of the displacement is given below with a mathematical-analytical expression.
  • the shift .DELTA.Z applies to each finger edge of the subgroup 53, is directed to the right and is also a function of the spatial coordinate Z; (the middle) of subgroup 53.
  • the digit strips shown with solid lines are real fingers with real finger edges.
  • Dashed lines and designated 56 indicate two finger positions, ie virtual fingers, which are actually not present in the structure shown. These two fingers are advantageously omitted because, as can be seen from the figure, their distance from one another is greatly reduced by the mutually opposite displacement AZ of the two subgroups 53 and 54. Such a very small distance between two fingers results in major problems if such a structure is an interdigital structure in which, as shown in FIG.
  • the finger edges of the fingers of subgroup 57 are shifted to the left, those of subgroup 59 to the right and those of subgroup 58 are not shifted.
  • the subgroups 53 and 54 together form a main group 152.
  • the total shift is + AZ; and -d i + 1 substantially zero.
  • the individual main groups correspond to the required minimum number n of main groups and follow one another along the abscissa Z.

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
EP83102608A 1982-03-18 1983-03-16 Mit akustischen Wellen arbeitendes elektronisches Bauelement Expired EP0089617B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19823209962 DE3209962A1 (de) 1982-03-18 1982-03-18 Mit akustischen wellen arbeitendes elektronisches bauelement
DE3209962 1982-03-18

Publications (3)

Publication Number Publication Date
EP0089617A2 EP0089617A2 (de) 1983-09-28
EP0089617A3 EP0089617A3 (en) 1985-10-16
EP0089617B1 true EP0089617B1 (de) 1988-06-08

Family

ID=6158651

Family Applications (1)

Application Number Title Priority Date Filing Date
EP83102608A Expired EP0089617B1 (de) 1982-03-18 1983-03-16 Mit akustischen Wellen arbeitendes elektronisches Bauelement

Country Status (4)

Country Link
US (1) US4484160A (enrdf_load_stackoverflow)
EP (1) EP0089617B1 (enrdf_load_stackoverflow)
JP (1) JPS58170211A (enrdf_load_stackoverflow)
DE (2) DE3209962A1 (enrdf_load_stackoverflow)

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Also Published As

Publication number Publication date
EP0089617A3 (en) 1985-10-16
EP0089617A2 (de) 1983-09-28
DE3209962A1 (de) 1983-09-29
JPH0237132B2 (enrdf_load_stackoverflow) 1990-08-22
US4484160A (en) 1984-11-20
JPS58170211A (ja) 1983-10-06
DE3377042D1 (en) 1988-07-14

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