EP0000169B1 - Halbleitersperrschichtkapazität in integrierter Bauweise und Bootstrap-Schaltung mit einer derartigen Halbleitersperrschichtkapazität - Google Patents

Halbleitersperrschichtkapazität in integrierter Bauweise und Bootstrap-Schaltung mit einer derartigen Halbleitersperrschichtkapazität Download PDF

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Publication number
EP0000169B1
EP0000169B1 EP78100194A EP78100194A EP0000169B1 EP 0000169 B1 EP0000169 B1 EP 0000169B1 EP 78100194 A EP78100194 A EP 78100194A EP 78100194 A EP78100194 A EP 78100194A EP 0000169 B1 EP0000169 B1 EP 0000169B1
Authority
EP
European Patent Office
Prior art keywords
transistor
base
emitter
diode
collector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP78100194A
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German (de)
English (en)
French (fr)
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EP0000169A1 (de
Inventor
James Joseph Tomczak
Richard Norman Wilson
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International Business Machines Corp
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International Business Machines Corp
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Publication date
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Publication of EP0000169A1 publication Critical patent/EP0000169A1/de
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/0805—Capacitors only
    • H01L27/0808—Varactor diodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
    • H01L27/07—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common
    • H01L27/0744—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common without components of the field effect type
    • H01L27/075—Bipolar transistors in combination with diodes, or capacitors, or resistors, e.g. lateral bipolar transistor, and vertical bipolar transistor and resistor
    • H01L27/0755—Vertical bipolar transistor in combination with diodes, or capacitors, or resistors
    • H01L27/0777—Vertical bipolar transistor in combination with capacitors only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H01L29/92—Capacitors having potential barriers
    • H01L29/93—Variable capacitance diodes, e.g. varactors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K19/00—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
    • H03K19/01—Modifications for accelerating switching
    • H03K19/013—Modifications for accelerating switching in bipolar transistor circuits
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K19/00—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
    • H03K19/0175—Coupling arrangements; Interface arrangements
    • H03K19/018—Coupling arrangements; Interface arrangements using bipolar transistors only
    • H03K19/01806—Interface arrangements

Definitions

  • the invention relates to a semiconductor junction capacitance in integrated design according to the preamble of claim 1 and their use. in a bootstrap circuit.
  • Bipolar circuits are often used for applications in logic circuits and for clocks, whereas field effect circuits are used for memory applications. Since bipolar circuits generally operate at voltages well below the values required to operate field effect circuits, buffer circuits are required to raise the bipolar signal levels to the level of field effect circuits. Bipolar circuits are usually used to implement this buffer function.
  • Patent 3,656,004 the built-in capacitance between the base and emitter itself is used to provide additional stored charge that allows the output emitter follower to remain conductive for a sufficient period of time after the base driver circuitry has been completed has become non-conductive, so that the output voltage reaches the value of the supply potential.
  • the article "Bipolar Bootstrap Circuit" in IBM Technical Disclosure Bulletin, Feb. 76, pages 2818 to 2819 describes a similar charge storage technique in which the base-collector capacitance of a bipolar transistor is used to add additional current deliver with which the driver circuit is kept in a conductive state after switching its source. In both examples, the amount of charge that can be retained is limited by the large interference capacitances between the circuit elements and the substrate of the integrated circuit, and by the time required for charging the internal capacitances after the output signal has started.
  • Fig. 1 shows a simplified drive circuit of bootstrap type in which an input signal V is applied to T1, and an inverted output signal Vout appears at the voltage node A. If V is a high level logic signal, T1 is conducting, and thus T4, which connects node A to ground.
  • T1 When T1 conducts, the base of T2 is near ground potential and T 2 is off. The voltage drop across R1 allows the feedback capacitor Cfb to charge to approximately VL minus Vbe of the diode D1.
  • T1 and T4 When the input signal transitions from its high to low logic level, T1 and T4 are turned off. The base of T2 then rises in potential and thus turns on T2, which also makes T3 conductive and causes the output signal V out to rise.
  • the rate at which the potential in node A increases is determined by the size of the applied capacitive load (which is not shown), the size of Cfb and the size of various parasitic capacities, which are summarized as variable capacitance Cp.
  • FIG. 3A is a schematic representation of the in FIG. 2 shows the capacitor
  • FIG. 3B is a representation of the capacitive effects of the capacitor when the potential at node A increases.
  • the characteristics of the reverse polarity diode correspond to a variable capacitor CP, the capacitance of which increases as the potential at node A increases. Since the ratio of Cfb to Cp can be small, the effectiveness of the feedback is reduced.
  • other capacitor structures for example junction capacitance as in US Pat. No. 3,474,309 can be used, they also have large parasitic capacitances which are coupled to the capacitor connections and reduce the effectiveness of this circuit.
  • Layer diode the area corresponding to the base together with an area corresponding to the collector, wherein a plurality of areas corresponding to the emitter are further arranged in a area corresponding to the base and connected to a common output terminal.
  • a semiconductor junction capacitance does not allow parasitic capacitances, e.g. in bootstrap circuits.
  • the object of the present invention is to provide an improved integrated bipolar semiconductor junction capacitance, with which in particular the disturbing effects of parasitic capacitances in bootstrap circuits are reduced.
  • the invention uses a semiconductor junction capacitance with a plurality of semiconductor boundary layers, in which three pn boundary layers connected in series are arranged between a reference potential and an output terminal, and in which the middle pn boundary layer is reversely polarized with respect to the other two boundary layers.
  • the use of the voltage-dependent capacitance as Bootstrap - capacity in a bipolar driver circuit provides a circuit which has a wide working range, mainly due to the built-in load capacitance, which is provided for the input signal by the capacity of the central pn junction.
  • Fig. 4 shows an embodiment of the invention in the form of a bipolar bootstrap driver circuit with an emitter follower of the Darlington type.
  • V e; " which is supplied by a bipolar logic circuit
  • the circuit is intended to deliver an output signal V out , the voltage of which Level between the ground potential and the supply voltage V ⁇ for the drain electrodes of a driven field effect transistor (FET) circuit.
  • the circuit comprises an input transistor T 1 , the base of which is coupled to V a and the collector of which is connected to the input of a Darlington amplifier pair T2 and T3.
  • the emitter of T1 is grounded through resistor R2 and is connected directly to the base of transistor T4, which is used to quickly step down the output signal.
  • the collector of T1 is also connected via a transistor connected as a diode, resistor R1 is further connected to a low-level voltage VL.
  • the amplifier or driver part of the circuit contains transistors T2 and T3, the collectors of which are connected to the supply potential VH of the PET drain electrodes.
  • the output of the amplifier is connected to the collector of transistor T4 at voltage node A.
  • an element T5 which is similar to a bipolar transistor and whose base is connected to both the node A and to V out .
  • the collector of T5 is connected to VH, the emitter to voltage node B between R1 and D1.
  • the bias of T5 is such that no transistor effect occurs and the element acts only as a pair of boundary layer capacitances which give the output signal V out via the feedback capacitance Cfb to node B and couple the output signal V out to VH via the internal load capacitance CLi.
  • the circuit works according to Figure 4 is as follows: If V assumes a high level, T1 is conductive and a current flows from VL through D1, R1, T1 and R2 to ground. Current through R2 causes the base of T4 to rise above the value Vbe and thus turns on the transistor T4, which then sets the nodes A and Vout to ground potential. The voltage division by D1, R1 and R2 keeps the base potential of T2 so low that T2 and T3 remain non-conductive. However, node B maintains a voltage that is approximately equal to VL minus Vbe of D1, and thus causes the emitter / base interface of T5 to be reverse biased and charges Cfb. The collector of T5 connected to VH supplies a reverse voltage for the collector-base boundary layer, which loads the CLi.
  • T1 switches off and thus also T4, so that the output signal is no longer held at ground potential.
  • T1 switches off, the potential at the base of T2 increases, both T2 and T3 switch on and the potential at node A and the voltage V out increase in the direction of VH.
  • the transistor effect of T2 would be limited to the area where node A is more than about two to three Vbe voltage drops below VL because R1 would not be able to carry current to deliver to the base of T2 when the voltage difference at R1 becomes zero.
  • the voltage due to the precharge on Cfb is capacitively coupled to node B, which thereby rises to a potential V out plus the precharge voltage (VL minus Vbe) and thus causes node B to rise considerably above the precharge potential (VL minus Vbe) .
  • the voltage rise enables T2 and T3 to remain conductive until V out essentially reaches VH; the desired goal has been achieved.
  • the internal load capacitance CLi which is formed by blocking the collector-base junction of T5, acts as a limiter for the rise time of the output signal.
  • the ratio of Cfb and CLi can be adjusted during the manufacturing process so that both the desired feedback and the desired internal load capacity result. It should be noted here that, unlike in the prior art (FIG. 1), this circuit does not have a relatively large parasitic capacitance Cp between the output and ground.
  • Fig. 5A is an illustration of the diode characteristics of the capacitive element T5; thereafter it consists of pn-junction diodes connected in series, namely the emitter-base diode, ie the first pn-junction diode 10, the base-collector diode ie the second pn-junction diode 12 and the collector-isolation diode, ie the third pn - Boundary layer diode, 14. All of these three pn boundary layers are permanently polarized in the reverse direction.
  • the first pn junction diode 10 is initially kept at the voltage (VL minus Vbe) via the output terminal B and at zero V via the input terminal A.
  • the second pn junction diode 12 lies between the voltages VH and and zero V.
  • the first pn junction diode 10 remains polarized in the reverse direction, since the output terminal B is capacitively coupled so that it assumes a higher potential than the input terminal A. ; the second pn junction diode 12 is made between the voltages VH and V,
  • Fig. 5B shows schematically the purely capacitive effect of T5 between terminals A and B.
  • Cfb and CLi are shown as variable capacitances, since they are formed by reverse polarized pn boundary layers (junction capacitance), the different Reverse voltage conditions are subject.
  • the third pn junction diode 14 in Fig. 5A is shown as a fixed capacitance Cp; it actually has no influence on the functioning of the circuit. In cases where Cp is large, as in Fig. 3B, care must be taken that Cp does not affect the effect of bootstrap capacity Cfb.
  • FIG. 6 shows a second embodiment of the invention in the form of a NAND driver circuit with two input signals.
  • the circuit consists of an AND gate with two inputs A and B, which are connected to the emitters of the transistors T6A and T6B.
  • the transistor D4 connected as a diode between the base and the collector of T6A and T6B prevents them from reaching deep into the saturation region.
  • the T6A and T6B collectors are coupled to the bases of T1 and T7 via resistor R7.
  • the emitters of T1 and T7 are connected to the base of transistor T4, which serves to reduce the voltage to ground potential.
  • the collector of T1 is connected to the input of the amplification transistor T2, as well as to the diodes D2 and D3, which are coupled to VH via R4 to avoid deep saturation of T1.
  • the emitter of T2 is connected to the base of the output driver transistor T3, the emitter of which is in turn connected to the output V out .
  • the collector of T7 is coupled to the base of T8, whose emitter is connected to the base of T3 to provide additional driver current for T3.
  • the current for driving T2 is provided by the combination T9, R1, R12 and R13, which together are functionally equivalent to D1 and R1 in FIG. 4.
  • the element T5 supplies the voltage-dependent capacitances Cfb and Cli, which are coupled to the output at the emitter of T3.
  • T5 is designed as a bipolar element with five emitters and multiple base contacts; this structure will be discussed in more detail later.
  • Transistors D8, D5 and D6, connected as diodes, help to supply current via T1 and T7 to T4 when the output signal is driven to ground by the value VH.
  • the diode D7 prevents T2 from reaching deep into the saturation range.
  • the circuit of Figure 6 operates in a similar manner to that of Figure 4 when that; additional logical AND gate at the input is taken into account. If one or both of the input signals A and / or B 'are at the low logic level (zero V), then either T6A or T6B conducts or both and result in the base of T1 and T7 having a potential close to the ground potential ( See zero V). Since T1 and T7 do not conduct, T4 also remains non-conductive. At this point in time, the output signal V out has already reached a value of essentially VH and maintains this potential until both input signals A and B 'have returned to the high logic level.
  • Resistor voltage divider R13 and R14 is now between VH and ground (excluding the base of T5) and the potential at the base of T9 turns on T9 and charges the multiple emitters of T5 to a potential that is approximately one Vbe voltage drop below the potential lies, which is determined by the voltage divider R13 and R14. The This feeds back capacitance Cfb to the same potential. At the same time, the internal load capacity CLi is loaded onto VH.
  • T3 and V out can also rise.
  • the rise in V out leads to capacitive coupling of the reverse emitters of T5 and to a sufficiently high potential to lower current at T2 until V out rises to the value VH. If the potential at the multiple emitters of T5 increases, T9 blocks because its emitter has a higher potential than its base.
  • FIGS. 7A and 7B show the structure of the element T5 as it is built into the circuit of FIG. 6; a common manufacturing process is used for all transistors.
  • the capacitive element is formed in an insulated diffusion trough in the form of a region 16 made of epitaxial N silicon which corresponds to the collector and was produced on a P substrate 18; the tub is delimited by the insulation areas 20.
  • the diffusion well is essentially identical to that used for the other bipolar elements on the circuit board.
  • the remaining transistor structures on the substrate use a buried N + subcollector, one is missing in the capacitive element in order to minimize the density of the insulation faults (so-called pipe faults) and to achieve maximum collector resistance.
  • the contact to the collector is made in an extension of the area 16 corresponding to the collector.
  • a single region 22 corresponding to the base having a P-type conductivity is diffused within the region 16 corresponding to the collector and a plurality of regions 24, for example 5, corresponding to the emitter are diffused within the region 22 corresponding to the base.
  • a suitable insulation layer 26 covers the surface of the Elements with the exception of the contact holes, at which the conductor tracks not shown above the structure form an ohmic contact with the different parts of the semiconductor substrate shown. All areas corresponding to the emitter are connected to a common conductor which has finger-like emissions which extend along the areas 24 corresponding to the emitter. In a similar manner, multiple contacts, for example six, are provided for contacting the area 22 corresponding to the base.
  • the capacitance of the feedback capacitor Cfb can be varied by increasing or decreasing the number and size (i.e. the area of the boundary layer) of the emitter regions.
  • the value of Cfb can be changed with little or no change in the capacitance of the base-collector interface so that the ratio of Cfb to CLi can also be adjusted. Since the area 16 corresponding to the collector is connected directly to VH, the normally large capacitance collector insulation and collector substrate are isolated from the active terminals of the element.
  • NPN transistors NPN transistors
  • PNP-type ones instead of NPN transistors
  • the capacitive element labeled T5 has been shown in the drawings with the symbols for a bipolar transistor; this was done mainly to underline the structural similarities of the element with conventional bipolar transistors. However, it must be emphasized that element 5 does not operate in an area where transistor action occurs.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computing Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Ceramic Engineering (AREA)
  • Logic Circuits (AREA)
  • Bipolar Transistors (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Bipolar Integrated Circuits (AREA)
EP78100194A 1977-06-29 1978-06-19 Halbleitersperrschichtkapazität in integrierter Bauweise und Bootstrap-Schaltung mit einer derartigen Halbleitersperrschichtkapazität Expired EP0000169B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US05/811,028 US4191899A (en) 1977-06-29 1977-06-29 Voltage variable integrated circuit capacitor and bootstrap driver circuit
US811028 2001-03-16

Publications (2)

Publication Number Publication Date
EP0000169A1 EP0000169A1 (de) 1979-01-10
EP0000169B1 true EP0000169B1 (de) 1981-10-07

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EP78100194A Expired EP0000169B1 (de) 1977-06-29 1978-06-19 Halbleitersperrschichtkapazität in integrierter Bauweise und Bootstrap-Schaltung mit einer derartigen Halbleitersperrschichtkapazität

Country Status (5)

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US (1) US4191899A (ja)
EP (1) EP0000169B1 (ja)
JP (1) JPS5412577A (ja)
DE (1) DE2861127D1 (ja)
IT (1) IT1112275B (ja)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4321490A (en) * 1979-04-30 1982-03-23 Fairchild Camera And Instrument Corporation Transistor logic output for reduced power consumption and increased speed during low to high transition
US4376252A (en) * 1980-08-25 1983-03-08 International Business Machines Corporation Bootstrapped driver circuit
US4516041A (en) * 1982-11-22 1985-05-07 Sony Corporation Voltage controlled variable capacitor
US4679215A (en) * 1985-12-06 1987-07-07 Sperry Corporation Exceedance counting integrating photo-diode array
US4752913A (en) * 1986-04-30 1988-06-21 International Business Machines Corporation Random access memory employing complementary transistor switch (CTS) memory cells
US4760282A (en) * 1986-11-13 1988-07-26 National Semiconductor Corporation High-speed, bootstrap driver circuit
US4791313A (en) * 1986-11-13 1988-12-13 Fairchild Semiconductor Corp. Bipolar transistor switching enhancement circuit
US5255240A (en) * 1991-06-13 1993-10-19 International Business Machines Corporation One stage word line decoder/driver with speed-up Darlington drive and adjustable pull down
US5680073A (en) * 1993-06-08 1997-10-21 Ramot University Authority For Applied Research & Industrial Development Ltd. Controlled semiconductor capacitors
JP2004241624A (ja) * 2003-02-06 2004-08-26 Mitsubishi Electric Corp 電圧制御発振回路
US7602228B2 (en) 2007-05-22 2009-10-13 Semisouth Laboratories, Inc. Half-bridge circuits employing normally on switches and methods of preventing unintended current flow therein
WO2017041799A1 (de) * 2015-09-10 2017-03-16 Schaeffler Technologies AG & Co. KG Nockenwellenversteller
US10360958B2 (en) * 2017-06-08 2019-07-23 International Business Machines Corporation Dual power rail cascode driver

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1764148A1 (de) * 1968-04-10 1971-05-19 Itt Ind Gmbh Deutsche Spannungsabhaengiger Kondensator,insbesondere fuer Festkoerperschaltungen
US3544862A (en) * 1968-09-20 1970-12-01 Westinghouse Electric Corp Integrated semiconductor and pn junction capacitor
FR2036530A5 (ja) * 1969-03-24 1970-12-24 Radiotechnique Compelec

Also Published As

Publication number Publication date
US4191899A (en) 1980-03-04
JPS5635028B2 (ja) 1981-08-14
JPS5412577A (en) 1979-01-30
EP0000169A1 (de) 1979-01-10
DE2861127D1 (en) 1981-12-17
IT1112275B (it) 1986-01-13
IT7825052A0 (it) 1978-06-28

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