DK1216602T3 - MEMS transducer for digital til akutisk omsætning med fejlundertrykkelse - Google Patents

MEMS transducer for digital til akutisk omsætning med fejlundertrykkelse

Info

Publication number
DK1216602T3
DK1216602T3 DK00961871T DK00961871T DK1216602T3 DK 1216602 T3 DK1216602 T3 DK 1216602T3 DK 00961871 T DK00961871 T DK 00961871T DK 00961871 T DK00961871 T DK 00961871T DK 1216602 T3 DK1216602 T3 DK 1216602T3
Authority
DK
Denmark
Prior art keywords
diaphragm
micromachined
depositing
digital
substrate
Prior art date
Application number
DK00961871T
Other languages
Danish (da)
English (en)
Inventor
Wayne A Loeb
Kaigham J Gabriel
John J Neumann Jr
Original Assignee
Univ Carnegie Mellon
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Carnegie Mellon filed Critical Univ Carnegie Mellon
Application granted granted Critical
Publication of DK1216602T3 publication Critical patent/DK1216602T3/da

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Soundproofing, Sound Blocking, And Sound Damping (AREA)
  • Details Of Audible-Bandwidth Transducers (AREA)
  • Micromachines (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Alarm Systems (AREA)
DK00961871T 1999-09-13 2000-09-13 MEMS transducer for digital til akutisk omsætning med fejlundertrykkelse DK1216602T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/395,073 US6829131B1 (en) 1999-09-13 1999-09-13 MEMS digital-to-acoustic transducer with error cancellation
PCT/US2000/025062 WO2001020948A2 (en) 1999-09-13 2000-09-13 Mems digital-to-acoustic transducer with error cancellation

Publications (1)

Publication Number Publication Date
DK1216602T3 true DK1216602T3 (da) 2008-12-15

Family

ID=23561585

Family Applications (1)

Application Number Title Priority Date Filing Date
DK00961871T DK1216602T3 (da) 1999-09-13 2000-09-13 MEMS transducer for digital til akutisk omsætning med fejlundertrykkelse

Country Status (8)

Country Link
US (3) US6829131B1 (de)
EP (1) EP1216602B1 (de)
JP (1) JP4987201B2 (de)
AT (1) ATE405130T1 (de)
AU (1) AU7376500A (de)
DE (1) DE60039898D1 (de)
DK (1) DK1216602T3 (de)
WO (1) WO2001020948A2 (de)

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Also Published As

Publication number Publication date
DE60039898D1 (de) 2008-09-25
US7019955B2 (en) 2006-03-28
JP2003509984A (ja) 2003-03-11
ATE405130T1 (de) 2008-08-15
US7215527B2 (en) 2007-05-08
WO2001020948A2 (en) 2001-03-22
US20050061770A1 (en) 2005-03-24
EP1216602A2 (de) 2002-06-26
EP1216602B1 (de) 2008-08-13
AU7376500A (en) 2001-04-17
JP4987201B2 (ja) 2012-07-25
US20050013455A1 (en) 2005-01-20
US6829131B1 (en) 2004-12-07
WO2001020948A3 (en) 2002-01-31

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