DK0569573T3 - Kapacitativ trykmåleindretning med høj linearitet - Google Patents

Kapacitativ trykmåleindretning med høj linearitet

Info

Publication number
DK0569573T3
DK0569573T3 DK92923790T DK92923790T DK0569573T3 DK 0569573 T3 DK0569573 T3 DK 0569573T3 DK 92923790 T DK92923790 T DK 92923790T DK 92923790 T DK92923790 T DK 92923790T DK 0569573 T3 DK0569573 T3 DK 0569573T3
Authority
DK
Denmark
Prior art keywords
measuring device
pressure measuring
capacitive pressure
high linearity
linearity
Prior art date
Application number
DK92923790T
Other languages
English (en)
Inventor
Hubert Benzel
Original Assignee
Endress Hauser Gmbh Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress Hauser Gmbh Co filed Critical Endress Hauser Gmbh Co
Application granted granted Critical
Publication of DK0569573T3 publication Critical patent/DK0569573T3/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
DK92923790T 1991-11-28 1992-11-25 Kapacitativ trykmåleindretning med høj linearitet DK0569573T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4139162 1991-11-28
DE19914142101 DE4142101A1 (de) 1991-11-28 1991-12-19 Druckmessanordnung mit hoher linearitaet

Publications (1)

Publication Number Publication Date
DK0569573T3 true DK0569573T3 (da) 1996-08-19

Family

ID=25909578

Family Applications (1)

Application Number Title Priority Date Filing Date
DK92923790T DK0569573T3 (da) 1991-11-28 1992-11-25 Kapacitativ trykmåleindretning med høj linearitet

Country Status (7)

Country Link
EP (1) EP0569573B1 (da)
JP (1) JPH06507723A (da)
CA (1) CA2101068A1 (da)
DE (2) DE4142101A1 (da)
DK (1) DK0569573T3 (da)
ES (1) ES2085655T3 (da)
WO (1) WO1993011415A1 (da)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995003534A1 (de) * 1993-07-24 1995-02-02 Endress + Hauser Gmbh + Co. Kapazitive drucksensoren mit hoher linearität
JP3216955B2 (ja) * 1994-05-31 2001-10-09 株式会社日立製作所 容量式センサ装置
JP3125675B2 (ja) * 1996-03-29 2001-01-22 三菱電機株式会社 容量型センサインターフェース回路
US5753820A (en) * 1996-10-25 1998-05-19 Arthur D. Little, Inc. Fluid pressure sensing unit incorporating diaphragm deflection sensing array
ATE213326T1 (de) * 1998-04-09 2002-02-15 Heinz Ploechinger Kapazitive druck- oder kraftsensorstruktur und verfahren zur herstellung derselben
JP2000065664A (ja) * 1998-08-26 2000-03-03 Hitachi Ltd 静電容量式力学量センサ
DE10212947C1 (de) * 2002-03-22 2003-09-18 Nord Micro Ag & Co Ohg Drucksensor, insbesondere zur kapazitiven Bestimmung des Absolutdrucks
US7924029B2 (en) 2005-12-22 2011-04-12 Synaptics Incorporated Half-bridge for capacitive sensing
KR101050334B1 (ko) * 2006-10-02 2011-07-19 파나소닉 전공 주식회사 압력센서
EP2189774B1 (de) 2008-11-20 2014-12-31 VEGA Grieshaber KG Verfahren zur Detektion und zur Kompensation einer schnellen Temperaturänderung an einer Druckmesszelle
DE102009035973B4 (de) * 2009-08-04 2011-07-07 Baumer Innotec Ag Anordnung und Verfahren zur kapazitiven Druckmessung
US8333118B2 (en) * 2010-02-02 2012-12-18 Mks Instruments, Inc. Capacitive pressure sensor
DE102010040932B4 (de) 2010-09-16 2024-04-25 Robert Bosch Gmbh Verfahren zur Konfigurierung einer kapazitiven Druckmessanordnung mit nichtlinearer Kennlinie und derartig konfigurierte Druckmessanordnung
US9278846B2 (en) 2010-09-18 2016-03-08 Fairchild Semiconductor Corporation Micromachined monolithic 6-axis inertial sensor
US9856132B2 (en) 2010-09-18 2018-01-02 Fairchild Semiconductor Corporation Sealed packaging for microelectromechanical systems
DE112011103124T5 (de) 2010-09-18 2013-12-19 Fairchild Semiconductor Corporation Biegelager zum Verringern von Quadratur für mitschwingende mikromechanische Vorrichtungen
EP2616772B1 (en) 2010-09-18 2016-06-22 Fairchild Semiconductor Corporation Micromachined monolithic 3-axis gyroscope with single drive
KR101332701B1 (ko) 2010-09-20 2013-11-25 페어차일드 세미컨덕터 코포레이션 기준 커패시터를 포함하는 미소 전자기계 압력 센서
DE102010062622A1 (de) 2010-12-08 2012-06-14 Ifm Electronic Gmbh Verfahren zur Selbstüberwachung einer keramischen Druckmesszelle eines kapazitiven Drucksensors und eine Auswerteschaltung zur Durchführung des Verfahrens
DE102011083133B4 (de) 2011-09-21 2019-01-24 Ifm Electronic Gmbh Verfahren zur Selbstüberwachung einer keramischen Druckmesszelle eines kapazitiven Drucksensors und eine Auswerteschaltung zur Durchführung des Verfahrens
US9488693B2 (en) 2012-04-04 2016-11-08 Fairchild Semiconductor Corporation Self test of MEMS accelerometer with ASICS integrated capacitors
KR102058489B1 (ko) 2012-04-05 2019-12-23 페어차일드 세미컨덕터 코포레이션 멤스 장치 프론트 엔드 전하 증폭기
EP2647955B8 (en) 2012-04-05 2018-12-19 Fairchild Semiconductor Corporation MEMS device quadrature phase shift cancellation
US9625272B2 (en) 2012-04-12 2017-04-18 Fairchild Semiconductor Corporation MEMS quadrature cancellation and signal demodulation
US9240296B2 (en) 2012-08-06 2016-01-19 Synaptics Incorporated Keyboard construction having a sensing layer below a chassis layer
US10183857B2 (en) 2012-08-21 2019-01-22 Robert Bosch Gmbh MEMS pressure sensor with multiple membrane electrodes
DE102013014881B4 (de) 2012-09-12 2023-05-04 Fairchild Semiconductor Corporation Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien
US9310269B2 (en) * 2012-11-30 2016-04-12 Sensata Technologies, Inc. Analog front-end compensation
DE102014108748A1 (de) * 2014-06-23 2015-12-24 Endress + Hauser Gmbh + Co. Kg Kapazitiver Differenzdrucksensor und Verfahren zu seiner Herstellung
DE102018118646B3 (de) 2018-08-01 2019-11-07 Ifm Electronic Gmbh Verfahren zur Funktionsüberwachung einer Druckmesszelle eines kapazitiven Drucksensors
DE102018118645B3 (de) 2018-08-01 2019-11-07 Ifm Electronic Gmbh Verfahren zur Funktionsüberwachung einer Druckmesszelle eines kapazitiven Drucksensors
DE102018121463A1 (de) * 2018-09-03 2020-03-05 Ifm Electronic Gmbh Kapazitiver Drucksensor mit einer Druckmesszelle und einer Auswerteeinheit, die räumlich getrennt voneinander angeordnet sind
DE102018126382B3 (de) 2018-10-23 2020-01-16 Ifm Electronic Gmbh Kapazitiver Drucksensor
DE102019129264B4 (de) 2019-10-30 2021-07-15 Ifm Electronic Gmbh Verfahren zur Funktionsüberwachung einer kapazitiven Druckmesszelle
DE102020122128B3 (de) 2020-08-25 2021-11-04 Ifm Electronic Gmbh Verfahren zur Funktionsüberwachung einer kapazitiven Druckmesszelle
DE102022105693B3 (de) 2022-03-10 2023-03-16 Ifm Electronic Gmbh Verfahren zum Betreiben einer Druckmesszelle eines kapazitiven Drucksensors
DE102022120883B3 (de) 2022-08-18 2023-08-03 Ifm Electronic Gmbh Verfahren zur Funktionsüberwachung einer kapazitiven Druckmesszelle
DE102023107963B3 (de) 2023-03-29 2024-05-02 Ifm Electronic Gmbh Verfahren zur Kompensation eines Temperaturschocks an einer kapazitiven Druckmesszelle

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4227419A (en) * 1979-09-04 1980-10-14 Kavlico Corporation Capacitive pressure transducer
US4422335A (en) * 1981-03-25 1983-12-27 The Bendix Corporation Pressure transducer
US4542436A (en) * 1984-04-10 1985-09-17 Johnson Service Company Linearized capacitive pressure transducer
US4743836A (en) * 1985-12-06 1988-05-10 United Technologies Corporation Capacitive circuit for measuring a parameter having a linear output voltage
DE4107345C2 (de) * 1991-03-07 1995-12-07 Fraunhofer Ges Forschung Druckmeßanordnung

Also Published As

Publication number Publication date
CA2101068A1 (en) 1993-05-29
EP0569573A1 (de) 1993-11-18
DE4142101A1 (de) 1993-06-03
JPH06507723A (ja) 1994-09-01
DE59205971D1 (de) 1996-05-15
ES2085655T3 (es) 1996-06-01
WO1993011415A1 (de) 1993-06-10
EP0569573B1 (de) 1996-04-10

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