DK0569573T3 - High linearity capacitive pressure measuring device - Google Patents
High linearity capacitive pressure measuring deviceInfo
- Publication number
- DK0569573T3 DK0569573T3 DK92923790T DK92923790T DK0569573T3 DK 0569573 T3 DK0569573 T3 DK 0569573T3 DK 92923790 T DK92923790 T DK 92923790T DK 92923790 T DK92923790 T DK 92923790T DK 0569573 T3 DK0569573 T3 DK 0569573T3
- Authority
- DK
- Denmark
- Prior art keywords
- measuring device
- pressure measuring
- capacitive pressure
- high linearity
- linearity
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4139162 | 1991-11-28 | ||
| DE19914142101 DE4142101A1 (en) | 1991-11-28 | 1991-12-19 | PRESSURE MEASUREMENT ARRAY WITH HIGH LINEARITY |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DK0569573T3 true DK0569573T3 (en) | 1996-08-19 |
Family
ID=25909578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK92923790T DK0569573T3 (en) | 1991-11-28 | 1992-11-25 | High linearity capacitive pressure measuring device |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP0569573B1 (en) |
| JP (1) | JPH06507723A (en) |
| CA (1) | CA2101068A1 (en) |
| DE (2) | DE4142101A1 (en) |
| DK (1) | DK0569573T3 (en) |
| ES (1) | ES2085655T3 (en) |
| WO (1) | WO1993011415A1 (en) |
Families Citing this family (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1995003534A1 (en) * | 1993-07-24 | 1995-02-02 | Endress + Hauser Gmbh + Co. | High linearity capacitive pressure sensor |
| JP3216955B2 (en) * | 1994-05-31 | 2001-10-09 | 株式会社日立製作所 | Capacitive sensor device |
| JP3125675B2 (en) * | 1996-03-29 | 2001-01-22 | 三菱電機株式会社 | Capacitive sensor interface circuit |
| US5753820A (en) * | 1996-10-25 | 1998-05-19 | Arthur D. Little, Inc. | Fluid pressure sensing unit incorporating diaphragm deflection sensing array |
| EP1071934B1 (en) * | 1998-04-09 | 2002-02-13 | Plöchinger, Heinz | Capacitive pressure or force sensor structure and method for producing the same |
| JP2000065664A (en) * | 1998-08-26 | 2000-03-03 | Hitachi Ltd | Capacitive dynamic quantity sensor |
| DE10212947C1 (en) * | 2002-03-22 | 2003-09-18 | Nord Micro Ag & Co Ohg | Pressure sensor determining absolute pressure capacitatively comprises main body, membrane, spacer and holder forming measurement cell assembly |
| US7924029B2 (en) | 2005-12-22 | 2011-04-12 | Synaptics Incorporated | Half-bridge for capacitive sensing |
| WO2008041607A1 (en) * | 2006-10-02 | 2008-04-10 | Panasonic Electric Works Co., Ltd. | Pressure sensor |
| EP2189774B1 (en) | 2008-11-20 | 2014-12-31 | VEGA Grieshaber KG | Method of detecting and compensating for a quick temperature change to a pressure measurement cell |
| DE102009035973B4 (en) * | 2009-08-04 | 2011-07-07 | Baumer Innotec Ag | Arrangement and method for capacitive pressure measurement |
| SG182731A1 (en) * | 2010-02-02 | 2012-08-30 | Mks Instr Inc | Capacitive pressure sensor |
| DE102010040932B4 (en) | 2010-09-16 | 2024-04-25 | Robert Bosch Gmbh | Method for configuring a capacitive pressure measuring arrangement with a non-linear characteristic and pressure measuring arrangement configured in this way |
| US9156673B2 (en) | 2010-09-18 | 2015-10-13 | Fairchild Semiconductor Corporation | Packaging to reduce stress on microelectromechanical systems |
| KR101352827B1 (en) | 2010-09-18 | 2014-01-17 | 페어차일드 세미컨덕터 코포레이션 | Micromachined 3-axis accelerometer with a single proof-mass |
| US9278846B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | Micromachined monolithic 6-axis inertial sensor |
| DE112011103124T5 (en) | 2010-09-18 | 2013-12-19 | Fairchild Semiconductor Corporation | Bearing for reducing quadrature for resonant micromechanical devices |
| EP2619536B1 (en) * | 2010-09-20 | 2016-11-02 | Fairchild Semiconductor Corporation | Microelectromechanical pressure sensor including reference capacitor |
| DE102010062622A1 (en) | 2010-12-08 | 2012-06-14 | Ifm Electronic Gmbh | Method for self-monitoring of a ceramic pressure measuring cell of a capacitive pressure sensor and an evaluation circuit for carrying out the method |
| DE102011083133B4 (en) | 2011-09-21 | 2019-01-24 | Ifm Electronic Gmbh | Method for self-monitoring of a ceramic pressure measuring cell of a capacitive pressure sensor and an evaluation circuit for carrying out the method |
| US9488693B2 (en) | 2012-04-04 | 2016-11-08 | Fairchild Semiconductor Corporation | Self test of MEMS accelerometer with ASICS integrated capacitors |
| EP2648334B1 (en) | 2012-04-05 | 2020-06-10 | Fairchild Semiconductor Corporation | Mems device front-end charge amplifier |
| EP2647955B8 (en) | 2012-04-05 | 2018-12-19 | Fairchild Semiconductor Corporation | MEMS device quadrature phase shift cancellation |
| US9625272B2 (en) | 2012-04-12 | 2017-04-18 | Fairchild Semiconductor Corporation | MEMS quadrature cancellation and signal demodulation |
| US9240296B2 (en) | 2012-08-06 | 2016-01-19 | Synaptics Incorporated | Keyboard construction having a sensing layer below a chassis layer |
| US10183857B2 (en) * | 2012-08-21 | 2019-01-22 | Robert Bosch Gmbh | MEMS pressure sensor with multiple membrane electrodes |
| DE102013014881B4 (en) | 2012-09-12 | 2023-05-04 | Fairchild Semiconductor Corporation | Enhanced silicon via with multi-material fill |
| US9310269B2 (en) * | 2012-11-30 | 2016-04-12 | Sensata Technologies, Inc. | Analog front-end compensation |
| DE102014108748A1 (en) * | 2014-06-23 | 2015-12-24 | Endress + Hauser Gmbh + Co. Kg | Capacitive differential pressure sensor and method for its manufacture |
| DE102018118646B3 (en) * | 2018-08-01 | 2019-11-07 | Ifm Electronic Gmbh | Method for monitoring the function of a pressure measuring cell of a capacitive pressure sensor |
| DE102018118645B3 (en) | 2018-08-01 | 2019-11-07 | Ifm Electronic Gmbh | Method for monitoring the function of a pressure measuring cell of a capacitive pressure sensor |
| DE102018121463A1 (en) * | 2018-09-03 | 2020-03-05 | Ifm Electronic Gmbh | Capacitive pressure sensor with a pressure measuring cell and an evaluation unit, which are spatially separated from each other |
| DE102018126382B3 (en) | 2018-10-23 | 2020-01-16 | Ifm Electronic Gmbh | Capacitive pressure sensor |
| DE102019129264B4 (en) | 2019-10-30 | 2021-07-15 | Ifm Electronic Gmbh | Method for monitoring the function of a capacitive pressure measuring cell |
| DE102020122128B3 (en) | 2020-08-25 | 2021-11-04 | Ifm Electronic Gmbh | Method for monitoring the function of a capacitive pressure measuring cell |
| DE102022105693B3 (en) | 2022-03-10 | 2023-03-16 | Ifm Electronic Gmbh | Method for operating a pressure measuring cell of a capacitive pressure sensor |
| DE102022120883B3 (en) | 2022-08-18 | 2023-08-03 | Ifm Electronic Gmbh | Process for monitoring the function of a capacitive pressure measuring cell |
| DE102023107963B3 (en) | 2023-03-29 | 2024-05-02 | Ifm Electronic Gmbh | Method for compensating a temperature shock on a capacitive pressure measuring cell |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4227419A (en) * | 1979-09-04 | 1980-10-14 | Kavlico Corporation | Capacitive pressure transducer |
| US4422335A (en) * | 1981-03-25 | 1983-12-27 | The Bendix Corporation | Pressure transducer |
| US4542436A (en) * | 1984-04-10 | 1985-09-17 | Johnson Service Company | Linearized capacitive pressure transducer |
| US4743836A (en) * | 1985-12-06 | 1988-05-10 | United Technologies Corporation | Capacitive circuit for measuring a parameter having a linear output voltage |
| DE4107345C2 (en) * | 1991-03-07 | 1995-12-07 | Fraunhofer Ges Forschung | Pressure measuring arrangement |
-
1991
- 1991-12-19 DE DE19914142101 patent/DE4142101A1/en not_active Withdrawn
-
1992
- 1992-11-25 JP JP5509796A patent/JPH06507723A/en active Pending
- 1992-11-25 DE DE59205971T patent/DE59205971D1/en not_active Expired - Fee Related
- 1992-11-25 ES ES92923790T patent/ES2085655T3/en not_active Expired - Lifetime
- 1992-11-25 CA CA002101068A patent/CA2101068A1/en not_active Abandoned
- 1992-11-25 DK DK92923790T patent/DK0569573T3/en active
- 1992-11-25 WO PCT/EP1992/002713 patent/WO1993011415A1/en active IP Right Grant
- 1992-11-25 EP EP92923790A patent/EP0569573B1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE4142101A1 (en) | 1993-06-03 |
| CA2101068A1 (en) | 1993-05-29 |
| WO1993011415A1 (en) | 1993-06-10 |
| JPH06507723A (en) | 1994-09-01 |
| EP0569573B1 (en) | 1996-04-10 |
| EP0569573A1 (en) | 1993-11-18 |
| DE59205971D1 (en) | 1996-05-15 |
| ES2085655T3 (en) | 1996-06-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DK0569573T3 (en) | High linearity capacitive pressure measuring device | |
| DE69212734D1 (en) | Pressure measuring device | |
| DE69535508D1 (en) | Capacitive displacement measuring device | |
| DE69215479D1 (en) | Non-contact pressure gauge | |
| DE69212111D1 (en) | Substrate displacement measuring device | |
| DE69207983D1 (en) | Calibration and measuring device | |
| DE69207708D1 (en) | Pressure sensor | |
| DE69720626T2 (en) | Capacitive displacement measuring device | |
| DE58901978D1 (en) | PRESSURE MEASURING DEVICE. | |
| DE69211217D1 (en) | Distance measuring device | |
| DE69208704D1 (en) | Resonance pressure sensor | |
| DE69310447D1 (en) | Pressure sensor device | |
| BR9201579A (en) | SENSOR DEVICE | |
| DE69232149D1 (en) | Measuring device | |
| FR2629196B1 (en) | CAPACITIVE SENSOR | |
| DE69215884D1 (en) | Measuring device | |
| DE59400388D1 (en) | Capacitive measuring device | |
| DE69201145D1 (en) | Dimension measuring device. | |
| DE69308669D1 (en) | Absolute capacitive position measuring device | |
| DK0658754T3 (en) | Pressure Measuring Device | |
| BR9204720A (en) | PRESSURE SENSOR | |
| DE69530074D1 (en) | Capacitive measuring device | |
| DE59202195D1 (en) | Compensated differential pressure measuring device. | |
| DE69227414D1 (en) | Distance measuring device | |
| BR9200144A (en) | SENSOR DEVICE |