DK0517735T3 - Fremgangsmåde til stabil drift af en plasmatron med vanddamp som plasmages - Google Patents

Fremgangsmåde til stabil drift af en plasmatron med vanddamp som plasmages

Info

Publication number
DK0517735T3
DK0517735T3 DK91904221.8T DK91904221T DK0517735T3 DK 0517735 T3 DK0517735 T3 DK 0517735T3 DK 91904221 T DK91904221 T DK 91904221T DK 0517735 T3 DK0517735 T3 DK 0517735T3
Authority
DK
Denmark
Prior art keywords
plasma
pct
steam
stable operation
tray
Prior art date
Application number
DK91904221.8T
Other languages
English (en)
Inventor
Hans-Ulrich Dummersdorf
Dietrich Hebecker
Dirk Von Lengerken
Carsten Winter
Original Assignee
Grimma Masch Anlagen Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Grimma Masch Anlagen Gmbh filed Critical Grimma Masch Anlagen Gmbh
Application granted granted Critical
Publication of DK0517735T3 publication Critical patent/DK0517735T3/da

Links

Classifications

    • A—HUMAN NECESSITIES
    • A62—LIFE-SAVING; FIRE-FIGHTING
    • A62D—CHEMICAL MEANS FOR EXTINGUISHING FIRES OR FOR COMBATING OR PROTECTING AGAINST HARMFUL CHEMICAL AGENTS; CHEMICAL MATERIALS FOR USE IN BREATHING APPARATUS
    • A62D3/00—Processes for making harmful chemical substances harmless or less harmful, by effecting a chemical change in the substances
    • A62D3/10—Processes for making harmful chemical substances harmless or less harmful, by effecting a chemical change in the substances by subjecting to electric or wave energy or particle or ionizing radiation
    • A62D3/19—Processes for making harmful chemical substances harmless or less harmful, by effecting a chemical change in the substances by subjecting to electric or wave energy or particle or ionizing radiation to plasma
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/28—Cooling arrangements
    • A—HUMAN NECESSITIES
    • A62—LIFE-SAVING; FIRE-FIGHTING
    • A62D—CHEMICAL MEANS FOR EXTINGUISHING FIRES OR FOR COMBATING OR PROTECTING AGAINST HARMFUL CHEMICAL AGENTS; CHEMICAL MATERIALS FOR USE IN BREATHING APPARATUS
    • A62D2101/00—Harmful chemical substances made harmless, or less harmful, by effecting chemical change
    • A62D2101/20—Organic substances
    • A62D2101/22—Organic substances containing halogen

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Paints Or Removers (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Paper (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass Fibres Or Filaments (AREA)
  • External Artificial Organs (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Drying Of Semiconductors (AREA)
  • Treatment Of Fiber Materials (AREA)
DK91904221.8T 1990-02-26 1991-02-26 Fremgangsmåde til stabil drift af en plasmatron med vanddamp som plasmages DK0517735T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD90338145A DD299613A7 (de) 1990-02-26 1990-02-26 Verfahren zum stabilen betrieb von plasmatrons mit wasserdampf als plasmagas

Publications (1)

Publication Number Publication Date
DK0517735T3 true DK0517735T3 (da) 1996-03-18

Family

ID=5616667

Family Applications (1)

Application Number Title Priority Date Filing Date
DK91904221.8T DK0517735T3 (da) 1990-02-26 1991-02-26 Fremgangsmåde til stabil drift af en plasmatron med vanddamp som plasmages

Country Status (12)

Country Link
US (1) US5498826A (da)
EP (1) EP0517735B1 (da)
JP (1) JPH0821474B2 (da)
AT (1) ATE132316T1 (da)
DD (1) DD299613A7 (da)
DE (1) DE59107163D1 (da)
DK (1) DK0517735T3 (da)
ES (1) ES2084155T3 (da)
FI (1) FI923813A0 (da)
GR (1) GR3019093T3 (da)
RU (1) RU2067790C1 (da)
WO (1) WO1991013532A1 (da)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2724806A1 (fr) * 1994-09-16 1996-03-22 Pompes Maupu Entreprise Procede et dispositif d'assistance par plasma au vapo-craquage non-catalytique de composes hydrocarbones et halogeno-organiques
JP2985762B2 (ja) * 1996-03-18 1999-12-06 日本電気株式会社 排気ガスの処理方法及び処理装置
WO2004048851A1 (en) * 2002-11-25 2004-06-10 David Systems Technology, S.L. Integrated plasma-frequency induction process for waste treatment, resource recovery and apparatus for realizing same
WO2014124521A1 (en) 2013-02-15 2014-08-21 Pyrogenesis Canada Inc. High power dc non transferred steam plasma torch system
RU2721931C1 (ru) * 2020-01-13 2020-05-25 Общество С Ограниченной Ответственностью "Плазариум" Прямоточный парогенератор для плазменной системы, плазменная система с таким парогенератором и способ генерации перегретого пара
CN111246649A (zh) * 2020-01-16 2020-06-05 江苏河海新能源股份有限公司 水蒸汽等离子发生装置
CN111586954B (zh) * 2020-06-08 2022-09-09 江苏帕斯玛环境科技有限公司 水蒸气等离子体产生的方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE215325C (da) *
DE218984C (da) * 1908-04-16
DE1417746A1 (de) * 1960-11-28 1969-02-13 Berghaus Elektrophysik Anst Verfahren zur Durchfuehrung chemischer Prozesse
HU184389B (en) * 1981-02-27 1984-08-28 Villamos Ipari Kutato Intezet Method and apparatus for destroying wastes by using of plasmatechnic
DD218984A1 (de) * 1983-06-01 1985-02-20 Adw Ddr Verduesungsvorrichtung fuer fluessigkeiten in hochtemperaturplasmen
US4582004A (en) * 1983-07-05 1986-04-15 Westinghouse Electric Corp. Electric arc heater process and apparatus for the decomposition of hazardous materials
DE3330750A1 (de) * 1983-08-26 1985-03-14 Chemische Werke Hüls AG, 4370 Marl Verfahren zur erzeugung von acetylen und synthese- oder reduktionsgas aus kohle in einem lichtbogenprozess
US4642440A (en) * 1984-11-13 1987-02-10 Schnackel Jay F Semi-transferred arc in a liquid stabilized plasma generator and method for utilizing the same
SE453920B (sv) * 1985-03-01 1988-03-14 Skf Steel Eng Ab Sett och anordning for forgasning av fossila brenslen samt reformering av gasformiga brenslen
CA1324823C (en) * 1988-08-08 1993-11-30 Robert Chrong-Wen Chang Method and apparatus for plasma pyrolysis of liquid waste
DE3922383C2 (de) * 1988-08-11 1994-06-09 Grimma Masch Anlagen Gmbh Verfahren zur Vernichtung toxischer Abprodukte und Vorrichtung zur Durchführung des Verfahrens
JPH084707B2 (ja) * 1988-11-10 1996-01-24 工業技術院長 有機ハロゲン化合物の分解方法
US5026464A (en) * 1988-08-31 1991-06-25 Agency Of Industrial Science And Technology Method and apparatus for decomposing halogenated organic compound
JPH0722607B2 (ja) * 1989-09-01 1995-03-15 工業技術院長 プラズマ反応法による有機ハロゲン化合物の分解方法および装置
JPH03242158A (ja) * 1990-02-20 1991-10-29 Mitsubishi Heavy Ind Ltd フルオロカーボンの分解処理方法
JP2617144B2 (ja) * 1990-04-13 1997-06-04 新日本製鐵株式会社 ハロゲン化有機化合物のプラズマ分解処理方法

Also Published As

Publication number Publication date
JPH05506536A (ja) 1993-09-22
GR3019093T3 (en) 1996-05-31
RU2067790C1 (ru) 1996-10-10
EP0517735A1 (de) 1992-12-16
EP0517735B1 (de) 1995-12-27
FI923813A (fi) 1992-08-25
FI923813A0 (fi) 1992-08-25
JPH0821474B2 (ja) 1996-03-04
DE59107163D1 (de) 1996-02-08
DD299613A7 (de) 1992-04-30
ES2084155T3 (es) 1996-05-01
WO1991013532A1 (de) 1991-09-05
ATE132316T1 (de) 1996-01-15
US5498826A (en) 1996-03-12

Similar Documents

Publication Publication Date Title
AU2002303965A1 (en) High temperature electrostatic chuck
KR920704551A (ko) 아아크 토치용 개스 냉각 캐소드
DK0517735T3 (da) Fremgangsmåde til stabil drift af en plasmatron med vanddamp som plasmages
ATE164093T1 (de) Vorrichtung und verfahren zur rückgewinnung von dampf
Zhukov et al. Near-electrode processes in arc discharges
Pfender Energy transport in thermal plasmas
KR20110086075A (ko) 불소가스 발생장치를 포함하는 반도체 제조설비
FR2511386B1 (da)
KR960017901A (ko) 윈도우재료 및 그 준비방법
KR910005405A (ko) 화학증착장치의 서셉터에서 적층물을 제거하기 위한 개선된 세정공정
SU1667639A3 (ru) Способ рекуперации тепла дымового газа
JPS57191407A (en) Rankine cycle system
WO2002047445A3 (en) Chemical plasma cathode
KR900014623A (ko) 산화 탄탈륨 필름의 침착 방법 및 이에 사용되는 화학 증착 시스템
SU844178A1 (ru) Способ плазменной обработки
DK0948995T3 (da) Fremgangsmåde til fjernelse af halogenerede forbindelser, der er indeholdt i en gas eller en væske, ved hjælp af en sammensætning på basis af mindst et metallisk grundstof
KR950021200A (ko) 포토레지스트 제거 방법
DK0835530T3 (da) Højtemperatur-brændstofcelleanlæg og fremgangsmåde til dets drift
GB1265976A (da)
SU598947A1 (ru) Способ термической обработки инструмента
JP3626961B2 (ja) 高周波誘導熱プラズマ装置
JPS56158143A (en) Reduced pressure type vapor phase growing device
JPS5288573A (en) Removal of chlorine in gas
JPS57143196A (en) Fan for high temperature use
SU894691A2 (ru) Устройство дл стабилизации температуры резистивных испарителей