DE69933305D1 - Apparat für Extrem-UV-Lithographie mit einer Halbleiterplattenkammer und einem Gasvorhang - Google Patents

Apparat für Extrem-UV-Lithographie mit einer Halbleiterplattenkammer und einem Gasvorhang

Info

Publication number
DE69933305D1
DE69933305D1 DE69933305T DE69933305T DE69933305D1 DE 69933305 D1 DE69933305 D1 DE 69933305D1 DE 69933305 T DE69933305 T DE 69933305T DE 69933305 T DE69933305 T DE 69933305T DE 69933305 D1 DE69933305 D1 DE 69933305D1
Authority
DE
Germany
Prior art keywords
lithography
extreme
gas curtain
plate chamber
semiconductor plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69933305T
Other languages
English (en)
Other versions
DE69933305T2 (de
Inventor
P Kanouff
K Ray-Chaudhuri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EUV LLC
Original Assignee
EUV LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EUV LLC filed Critical EUV LLC
Publication of DE69933305D1 publication Critical patent/DE69933305D1/de
Application granted granted Critical
Publication of DE69933305T2 publication Critical patent/DE69933305T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70233—Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus

Landscapes

  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Environmental & Geological Engineering (AREA)
  • Atmospheric Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Toxicology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE69933305T 1998-11-06 1999-10-27 Apparat für Extrem-UV-Lithographie mit einer Halbleiterplattenkammer und einem Gasvorhang Expired - Lifetime DE69933305T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/187,911 US6198792B1 (en) 1998-11-06 1998-11-06 Wafer chamber having a gas curtain for extreme-UV lithography
US187911 1998-11-06
PCT/US1999/025023 WO2000028384A1 (en) 1998-11-06 1999-10-27 Wafer chamber having a gas curtain for extreme-uv lithography

Publications (2)

Publication Number Publication Date
DE69933305D1 true DE69933305D1 (de) 2006-11-02
DE69933305T2 DE69933305T2 (de) 2007-04-19

Family

ID=22690997

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69933305T Expired - Lifetime DE69933305T2 (de) 1998-11-06 1999-10-27 Apparat für Extrem-UV-Lithographie mit einer Halbleiterplattenkammer und einem Gasvorhang

Country Status (7)

Country Link
US (1) US6198792B1 (de)
EP (1) EP1127294B1 (de)
JP (1) JP4353640B2 (de)
KR (1) KR100676842B1 (de)
AU (1) AU1133400A (de)
DE (1) DE69933305T2 (de)
WO (1) WO2000028384A1 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU4653999A (en) * 1999-07-16 2001-02-05 Nikon Corporation Exposure method and system
US6384473B1 (en) * 2000-05-16 2002-05-07 Sandia Corporation Microelectronic device package with an integral window
TW548524B (en) * 2000-09-04 2003-08-21 Asm Lithography Bv Lithographic projection apparatus, device manufacturing method and device manufactured thereby
US6924492B2 (en) * 2000-12-22 2005-08-02 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method, and device manufactured thereby
US6714624B2 (en) * 2001-09-18 2004-03-30 Euv Llc Discharge source with gas curtain for protecting optics from particles
US7050149B2 (en) * 2002-06-11 2006-05-23 Nikon Corporation Exposure apparatus and exposure method
JP2005057154A (ja) * 2003-08-07 2005-03-03 Canon Inc 露光装置
WO2005031169A1 (en) * 2003-09-26 2005-04-07 The Boc Group Plc Detection of contaminants within fluid pumped by a vacuum pump
JPWO2005083759A1 (ja) * 2004-02-27 2007-08-09 株式会社ニコン 露光装置、及び微細パターンを有するデバイスの製造方法
KR101123187B1 (ko) 2004-03-31 2012-03-19 에이에스엠엘 네델란즈 비.브이. 단파 방사의 생성 동안 방사원에 의해 생성되는 입자를제거하기 위한 방법 및 장치
JP2006269942A (ja) * 2005-03-25 2006-10-05 Canon Inc 露光装置及びデバイス製造方法
JP4922638B2 (ja) * 2005-03-29 2012-04-25 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置、シール、デバイス製造方法、コンピュータプログラム、およびデータ記録媒体
US20070085984A1 (en) * 2005-10-18 2007-04-19 Asml Netherlands B.V. Lithographic projection apparatus, device manufacturing method and device manufactured thereby
DE102005048670B3 (de) * 2005-10-07 2007-05-24 Xtreme Technologies Gmbh Anordnung zur Unterdrückung von unerwünschten Spektralanteilen bei einer plasmabasierten EUV-Strahlungsquelle
JP2007281142A (ja) 2006-04-05 2007-10-25 Canon Inc 露光装置及び方法、並びに、デバイス製造方法
JP2008034770A (ja) * 2006-08-01 2008-02-14 Canon Inc 露光装置
US7671348B2 (en) 2007-06-26 2010-03-02 Advanced Micro Devices, Inc. Hydrocarbon getter for lithographic exposure tools
NL1036153A1 (nl) 2007-11-08 2009-05-11 Asml Netherlands Bv Method and system for determining a suppression factor of a suppression system and a lithographic apparatus.
JP5339742B2 (ja) 2008-03-04 2013-11-13 ウシオ電機株式会社 極端紫外光が出射する装置と極端紫外光が導入される装置との接続装置
NL1036957A1 (nl) * 2008-06-13 2009-12-15 Asml Netherlands Bv Lithographic apparatus and device manufacturing method.
DE102009016319A1 (de) 2009-04-06 2010-10-14 Carl Zeiss Smt Ag Verfahren zur Kontaminationsvermeidung und EUV-Lithographieanlage
JP2012114140A (ja) * 2010-11-22 2012-06-14 Renesas Electronics Corp 露光方法および露光装置
JP5912264B2 (ja) * 2011-02-28 2016-04-27 日本発條株式会社 レーザー加工方法及び装置
KR102098558B1 (ko) 2012-10-23 2020-04-08 삼성전자 주식회사 리소그래피 장치 및 방법과 스테이지 시스템
US9389180B2 (en) * 2013-02-15 2016-07-12 Kla-Tencor Corporation Methods and apparatus for use with extreme ultraviolet light having contamination protection
TWI746907B (zh) * 2017-12-05 2021-11-21 日商斯庫林集團股份有限公司 煙霧判定方法、基板處理方法及基板處理裝置
CN111500005A (zh) * 2019-01-30 2020-08-07 家登精密工业股份有限公司 环烯烃组合物及应用其的半导体容器
CN111736432A (zh) * 2020-06-15 2020-10-02 上海集成电路研发中心有限公司 一种阻隔光阻放气污染的装置
EP4386480A1 (de) * 2022-12-15 2024-06-19 ASML Netherlands B.V. Spülsystem und verfahren für eine lithografische vorrichtung

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4185202A (en) 1977-12-05 1980-01-22 Bell Telephone Laboratories, Incorporated X-ray lithography
US4692934A (en) 1984-11-08 1987-09-08 Hampshire Instruments X-ray lithography system
US4648106A (en) * 1984-11-21 1987-03-03 Micronix Corporation Gas control for X-ray lithographic system
US5267292A (en) 1988-10-05 1993-11-30 Canon Kabushiki Kaisha X-ray exposure apparatus
JP3127511B2 (ja) 1991-09-19 2001-01-29 株式会社日立製作所 露光装置および半導体装置の製造方法
EP0957402B1 (de) 1998-05-15 2006-09-20 ASML Netherlands B.V. Lithographische Vorrichtung
KR100532968B1 (ko) * 2004-04-22 2005-12-01 주식회사 하이닉스반도체 반도체 장치의 패턴 형성 방법

Also Published As

Publication number Publication date
KR20010075675A (ko) 2001-08-09
EP1127294A1 (de) 2001-08-29
AU1133400A (en) 2000-05-29
JP4353640B2 (ja) 2009-10-28
KR100676842B1 (ko) 2007-01-31
EP1127294B1 (de) 2006-09-20
WO2000028384A1 (en) 2000-05-18
US6198792B1 (en) 2001-03-06
DE69933305T2 (de) 2007-04-19
JP2002529927A (ja) 2002-09-10

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