KR960025294U - 확산공정의 가스공급장치 - Google Patents

확산공정의 가스공급장치

Info

Publication number
KR960025294U
KR960025294U KR2019940032779U KR19940032779U KR960025294U KR 960025294 U KR960025294 U KR 960025294U KR 2019940032779 U KR2019940032779 U KR 2019940032779U KR 19940032779 U KR19940032779 U KR 19940032779U KR 960025294 U KR960025294 U KR 960025294U
Authority
KR
South Korea
Prior art keywords
supply device
gas supply
diffusion process
diffusion
gas
Prior art date
Application number
KR2019940032779U
Other languages
English (en)
Other versions
KR0118594Y1 (ko
Inventor
이중재
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019940032779U priority Critical patent/KR0118594Y1/ko
Publication of KR960025294U publication Critical patent/KR960025294U/ko
Application granted granted Critical
Publication of KR0118594Y1 publication Critical patent/KR0118594Y1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
KR2019940032779U 1994-12-03 1994-12-03 확산공정의 가스공급장치 KR0118594Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940032779U KR0118594Y1 (ko) 1994-12-03 1994-12-03 확산공정의 가스공급장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940032779U KR0118594Y1 (ko) 1994-12-03 1994-12-03 확산공정의 가스공급장치

Publications (2)

Publication Number Publication Date
KR960025294U true KR960025294U (ko) 1996-07-22
KR0118594Y1 KR0118594Y1 (ko) 1998-08-01

Family

ID=19400323

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940032779U KR0118594Y1 (ko) 1994-12-03 1994-12-03 확산공정의 가스공급장치

Country Status (1)

Country Link
KR (1) KR0118594Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100496854B1 (ko) * 1998-07-09 2005-09-02 삼성전자주식회사 반도체 웨이퍼의 제조 방법

Also Published As

Publication number Publication date
KR0118594Y1 (ko) 1998-08-01

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