DE69926955T2 - Diffraktives optisches Element - Google Patents
Diffraktives optisches Element Download PDFInfo
- Publication number
- DE69926955T2 DE69926955T2 DE69926955T DE69926955T DE69926955T2 DE 69926955 T2 DE69926955 T2 DE 69926955T2 DE 69926955 T DE69926955 T DE 69926955T DE 69926955 T DE69926955 T DE 69926955T DE 69926955 T2 DE69926955 T2 DE 69926955T2
- Authority
- DE
- Germany
- Prior art keywords
- grating
- diffraction
- optical
- element according
- diffraction gratings
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title claims description 128
- 239000011295 pitch Substances 0.000 claims description 40
- 239000000463 material Substances 0.000 claims description 24
- 238000013461 design Methods 0.000 claims description 22
- 238000006073 displacement reaction Methods 0.000 claims description 9
- 239000006185 dispersion Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- 238000001429 visible spectrum Methods 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 4
- 230000003595 spectral effect Effects 0.000 claims description 3
- NCGICGYLBXGBGN-UHFFFAOYSA-N 3-morpholin-4-yl-1-oxa-3-azonia-2-azanidacyclopent-3-en-5-imine;hydrochloride Chemical compound Cl.[N-]1OC(=N)C=[N+]1N1CCOCC1 NCGICGYLBXGBGN-UHFFFAOYSA-N 0.000 claims description 2
- 238000012634 optical imaging Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 8
- 230000004075 alteration Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 230000007423 decrease Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000009467 reduction Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000003848 UV Light-Curing Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 101150101567 pat-2 gene Proteins 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18568098 | 1998-06-16 | ||
| JP18568098 | 1998-06-16 | ||
| JP09740399A JP4336412B2 (ja) | 1998-06-16 | 1999-04-05 | 回折光学素子及びそれを用いた光学系 |
| JP9740399 | 1999-04-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69926955D1 DE69926955D1 (de) | 2005-10-06 |
| DE69926955T2 true DE69926955T2 (de) | 2006-06-08 |
Family
ID=26438576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69926955T Expired - Lifetime DE69926955T2 (de) | 1998-06-16 | 1999-06-15 | Diffraktives optisches Element |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6587272B2 (enExample) |
| EP (1) | EP0965864B1 (enExample) |
| JP (1) | JP4336412B2 (enExample) |
| DE (1) | DE69926955T2 (enExample) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3530776B2 (ja) * | 1999-07-28 | 2004-05-24 | キヤノン株式会社 | 回折光学素子及びそれを用いた光学系 |
| JP3619165B2 (ja) * | 2000-04-20 | 2005-02-09 | キヤノン株式会社 | 回折光学素子を用いた撮像装置 |
| JP2002062417A (ja) | 2000-06-07 | 2002-02-28 | Canon Inc | 回折光学素子、該回折光学素子を有する光学系及び光学機器、回折光学素子の製造方法、回折光学素子製造用の金型 |
| US6762880B2 (en) | 2001-02-21 | 2004-07-13 | Ibsen Photonics A/S | Grating structures and methods of making the grating structures |
| KR100673680B1 (ko) * | 2002-03-18 | 2007-01-24 | 가부시키가이샤 니콘 | 회절광학소자 및 그 제조방법, 및 광학장치 |
| EP1351073B1 (en) | 2002-04-04 | 2009-12-16 | Canon Kabushiki Kaisha | Diffractive optical element with a plurality of diffraction gratings and optical system using the same |
| AU2003267004A1 (en) | 2002-08-24 | 2004-04-30 | Carl Zeiss Smt Ag | Binary blazed diffractive optical element |
| DE10322238B4 (de) | 2003-05-17 | 2007-10-31 | Carl Zeiss Smt Ag | Diffraktives optisches Element sowie Projektionsobjektiv mit einem solchen Element |
| DE10322239B4 (de) | 2003-05-17 | 2011-06-30 | Carl Zeiss SMT GmbH, 73447 | Geblazetes diffraktives optisches Element sowie Projektionsobjektiv mit einem solchen Element |
| US6982838B2 (en) | 2003-06-04 | 2006-01-03 | Pentax Corporation | Objective lens for optical pick-up |
| US7239598B2 (en) * | 2003-06-17 | 2007-07-03 | Pentax Corporation | Objective lens for optical pick-up |
| US7038862B2 (en) | 2003-06-17 | 2006-05-02 | Pentax Corporation | Objective lens for optical pick-up |
| WO2006025393A1 (ja) * | 2004-08-31 | 2006-03-09 | Japan Science And Technology Agency | ナノスケールの低次元量子構造体の製造方法、及び、当該製造方法を用いた集積回路の製造方法 |
| DE102005036633A1 (de) * | 2005-08-04 | 2007-06-21 | Carl Zeiss Ag | Achromatisches diffraktives optisches Element sowie Verfahren zum Entwerfen eines solchen |
| DE102007044228A1 (de) | 2007-08-17 | 2009-04-02 | Carl Zeiss Surgical Gmbh | Optische Einrichtung |
| EP2028520A3 (de) | 2007-08-17 | 2010-01-20 | Carl Zeiss Surgical GmbH | Optische Einrichtung |
| CN101726771A (zh) * | 2008-10-27 | 2010-06-09 | 深圳富泰宏精密工业有限公司 | 扩散透镜及具有该扩散透镜的光源组件 |
| KR20110114972A (ko) * | 2010-04-14 | 2011-10-20 | 삼성전자주식회사 | 레이저 빔을 이용한 기판의 가공 방법 |
| JP5676930B2 (ja) * | 2010-06-11 | 2015-02-25 | キヤノン株式会社 | 回折光学素子、光学系および光学機器 |
| JP5676929B2 (ja) | 2010-06-11 | 2015-02-25 | キヤノン株式会社 | 回折光学素子、光学系および光学機器 |
| JP2012083382A (ja) * | 2010-10-06 | 2012-04-26 | Canon Inc | 回折光学素子、光学系および光学機器 |
| JP6278625B2 (ja) | 2012-07-30 | 2018-02-14 | キヤノン株式会社 | 測色装置及びそれを備える画像形成装置 |
| US9644107B2 (en) * | 2014-06-02 | 2017-05-09 | Vadient Optics, LLC. | Achromatic optical-dispersion corrected gradient refractive index optical-element |
| US10649119B2 (en) * | 2018-07-16 | 2020-05-12 | Facebook Technologies, Llc | Duty cycle, depth, and surface energy control in nano fabrication |
| US11550083B2 (en) | 2019-06-26 | 2023-01-10 | Meta Platforms Technologies, Llc | Techniques for manufacturing slanted structures |
| US11644683B2 (en) * | 2020-06-17 | 2023-05-09 | Himax Technologies Limited | Optical element including at least two diffractive layers |
| CN115031925B (zh) * | 2022-08-10 | 2022-12-09 | 歌尔光学科技有限公司 | 一种光栅检测方法、装置、系统以及计算机可读存储介质 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4426130A (en) | 1981-02-19 | 1984-01-17 | Rca Corporation | Semi-thick transmissive and reflective sinusoidal phase grating structures |
| DE3303623A1 (de) * | 1983-02-03 | 1984-08-09 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Optische phasengitteranordnung und schaltvorrichtungen mit einer solchen anordnung |
| US5048925A (en) | 1985-05-28 | 1991-09-17 | Advanced Environmental Research Group | Quasi volume diffracting structures |
| US5029154A (en) * | 1988-11-21 | 1991-07-02 | Ricoh Company, Ltd. | Optical reproducing apparatus |
| JPH03152052A (ja) | 1989-11-09 | 1991-06-28 | Pilot Seiko Kk | 長尺薄物材の位置自動矯正装置 |
| US5044706A (en) | 1990-02-06 | 1991-09-03 | Hughes Aircraft Company | Optical element employing aspherical and binary grating optical surfaces |
| US5175647A (en) * | 1991-06-26 | 1992-12-29 | Eastman Kodak Company | Optical device |
| JPH06194123A (ja) * | 1992-12-24 | 1994-07-15 | Canon Inc | 変位検出装置 |
| JPH06324262A (ja) | 1993-05-11 | 1994-11-25 | Olympus Optical Co Ltd | 撮像光学系 |
| JP3152052B2 (ja) | 1994-03-04 | 2001-04-03 | 住友電装株式会社 | ワイヤハーネスのスプライス方法および構造 |
| US5446588A (en) | 1994-07-29 | 1995-08-29 | The University Of Rochester | Wide-angle eyepiece optical system employing refractive and diffractive optical elements |
| US5847877A (en) | 1994-09-12 | 1998-12-08 | Olympus Optical Co., Ltd. | Diffractive optical element |
| IL111392A (en) * | 1994-10-25 | 2000-02-17 | Elop Electrooptics Ind Ltd | Linear beam steering |
| US5737113A (en) | 1995-08-04 | 1998-04-07 | Canon Kabushiki Kaisha | Optical modulators and color image display device employing the same |
| US6157488A (en) | 1995-08-29 | 2000-12-05 | Olympus Optical Company Ltd. | Diffractive optical element |
| JP3618464B2 (ja) | 1995-08-29 | 2005-02-09 | オリンパス株式会社 | 回折光学素子、およびそれを用いる光学装置 |
| JPH10133149A (ja) | 1996-11-01 | 1998-05-22 | Canon Inc | 回折光学素子及びそれを用いた光学系 |
| JP3472092B2 (ja) | 1997-07-28 | 2003-12-02 | キヤノン株式会社 | 回折光学素子及びそれを用いた光学系 |
-
1999
- 1999-04-05 JP JP09740399A patent/JP4336412B2/ja not_active Expired - Fee Related
- 1999-06-08 US US09/327,474 patent/US6587272B2/en not_active Expired - Fee Related
- 1999-06-15 EP EP99111594A patent/EP0965864B1/en not_active Expired - Lifetime
- 1999-06-15 DE DE69926955T patent/DE69926955T2/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP0965864A3 (en) | 2000-03-08 |
| DE69926955D1 (de) | 2005-10-06 |
| JP4336412B2 (ja) | 2009-09-30 |
| US6587272B2 (en) | 2003-07-01 |
| EP0965864B1 (en) | 2005-08-31 |
| US20020012170A1 (en) | 2002-01-31 |
| EP0965864A2 (en) | 1999-12-22 |
| JP2000075118A (ja) | 2000-03-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |