DE69922728D1 - Verfahren und Vorrichtungen zur Regelung des Ablieferns von Dampf beim Herstellen von optische Vorformen - Google Patents

Verfahren und Vorrichtungen zur Regelung des Ablieferns von Dampf beim Herstellen von optische Vorformen

Info

Publication number
DE69922728D1
DE69922728D1 DE69922728T DE69922728T DE69922728D1 DE 69922728 D1 DE69922728 D1 DE 69922728D1 DE 69922728 T DE69922728 T DE 69922728T DE 69922728 T DE69922728 T DE 69922728T DE 69922728 D1 DE69922728 D1 DE 69922728D1
Authority
DE
Germany
Prior art keywords
steam
delivery
manufacture
controlling
methods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69922728T
Other languages
English (en)
Other versions
DE69922728T2 (de
Inventor
Fred Paul Partus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nokia of America Corp
Original Assignee
Lucent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lucent Technologies Inc filed Critical Lucent Technologies Inc
Publication of DE69922728D1 publication Critical patent/DE69922728D1/de
Application granted granted Critical
Publication of DE69922728T2 publication Critical patent/DE69922728T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/008—Feed or outlet control devices
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/86—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid by bubbling a gas through the liquid
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/87—Controlling the temperature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
DE69922728T 1998-04-09 1999-03-29 Verfahren und Vorrichtungen zur Regelung des Ablieferns von Dampf beim Herstellen von optische Vorformen Expired - Lifetime DE69922728T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/057,840 US6161398A (en) 1998-04-09 1998-04-09 Methods of and systems for vapor delivery control in optical preform manufacture
US57840 2001-10-26

Publications (2)

Publication Number Publication Date
DE69922728D1 true DE69922728D1 (de) 2005-01-27
DE69922728T2 DE69922728T2 (de) 2005-12-15

Family

ID=22013051

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69922728T Expired - Lifetime DE69922728T2 (de) 1998-04-09 1999-03-29 Verfahren und Vorrichtungen zur Regelung des Ablieferns von Dampf beim Herstellen von optische Vorformen

Country Status (5)

Country Link
US (1) US6161398A (de)
EP (1) EP0949212B1 (de)
JP (1) JP3654494B2 (de)
CN (1) CN1231380A (de)
DE (1) DE69922728T2 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6311959B1 (en) * 1999-04-22 2001-11-06 Applied Materials, Inc. Method and apparatus for generating controlled mixture of organic vapor and inert gas
DE60021955T2 (de) * 1999-06-03 2006-06-14 Shinetsu Chemical Co Verfahren und Vorrichtung zum Verdampfen von einem flüssigen Glasvorläufer für die Herstellung von Vorformen für optische Fasern
US6984415B2 (en) * 1999-08-20 2006-01-10 International Business Machines Corporation Delivery systems for gases for gases via the sublimation of solid precursors
US6561498B2 (en) 2001-04-09 2003-05-13 Lorex Industries, Inc. Bubbler for use in vapor generation systems
US7003984B2 (en) * 2001-04-30 2006-02-28 Verrillon, Inc. Hybrid manufacturing process for optical fibers
KR20030005648A (ko) * 2001-07-09 2003-01-23 주식회사 세미텔 자동 리필 기능을 갖는 버블러
US6701066B2 (en) * 2001-10-11 2004-03-02 Micron Technology, Inc. Delivery of solid chemical precursors
US20030123080A1 (en) * 2001-12-27 2003-07-03 Toshiba Tec Kabushiki Kaisha Image forming device and method for controling the same
US7011299B2 (en) * 2002-09-16 2006-03-14 Matheson Tri-Gas, Inc. Liquid vapor delivery system and method of maintaining a constant level of fluid therein
KR100511936B1 (ko) * 2003-01-15 2005-09-02 엘에스전선 주식회사 수정화학기상증착용 광섬유 모재 제조장치
KR101160642B1 (ko) 2003-12-12 2012-06-28 세미이큅, 인코포레이티드 고체로부터 승화된 증기의 유동제어
EP1566464B1 (de) * 2004-02-20 2011-04-13 Cs Clean Systems Ag Vorrichtung und Verfahren zum Nachfüllen eines Blasenverdampfers
US20070175242A1 (en) * 2004-02-27 2007-08-02 Masaaki Hirano Method and device for producing optical fiber matrix
KR20060097425A (ko) * 2005-03-09 2006-09-14 엘에스전선 주식회사 유량 제어가 가능한 ｍｃｖｄ용 버블 발생 장치
US8348248B2 (en) * 2009-03-11 2013-01-08 L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Bubbling supply system for stable precursor supply
JP5690498B2 (ja) * 2009-03-27 2015-03-25 ローム・アンド・ハース・エレクトロニック・マテリアルズ，エル．エル．シー． 基体上に膜を堆積する方法および気化前駆体化合物を送達する装置
JP5410235B2 (ja) * 2009-10-15 2014-02-05 小島プレス工業株式会社 有機高分子薄膜の形成方法及び形成装置
US8997775B2 (en) * 2011-05-24 2015-04-07 Rohm And Haas Electronic Materials Llc Vapor delivery device, methods of manufacture and methods of use thereof
US9243325B2 (en) * 2012-07-18 2016-01-26 Rohm And Haas Electronic Materials Llc Vapor delivery device, methods of manufacture and methods of use thereof
DE102013103603A1 (de) * 2013-04-10 2014-10-16 Osram Opto Semiconductors Gmbh Verfahren zum Versorgen eines Prozesses mit einem angereicherten Trägergas
CN105384333A (zh) * 2015-10-28 2016-03-09 江苏亨通光电股份有限公司 一种四氯化锗的鼓泡罐装置以及四氯化锗的鼓泡方法
US11168394B2 (en) 2018-03-14 2021-11-09 CeeVeeTech, LLC Method and apparatus for making a vapor of precise concentration by sublimation
DE102018118771B4 (de) * 2018-08-02 2022-07-07 Leoni Kabel Gmbh Verfahren und Vorrichtung zum reproduzierbaren Erzeugen einer Preform für die Glasfaserherstellung
JP6476342B1 (ja) 2018-10-15 2019-02-27 オリジン電気株式会社 還元ガス供給装置及び処理済対象物の製造方法
DE102019115928B4 (de) * 2019-06-12 2023-07-27 J-Fiber Gmbh Quarzfaser mit Wasserstoff-Barriereschicht und Verfahren zu deren Herstellung
JP7220847B2 (ja) * 2019-06-26 2023-02-13 住友金属鉱山株式会社 四塩化ケイ素の測定ユニット、四塩化ケイ素の品質評価方法、四塩化ケイ素の品質管理方法、炭化ケイ素基板の製造方法、および、炭化ケイ素基板製造装置
CN110836946B (zh) * 2019-11-19 2024-03-29 中国科学技术大学 一种可定量及可控制蒸气浓度的鼓泡装置及浓度测量方法
CN111153590B (zh) * 2019-12-31 2022-03-25 江苏通鼎光棒有限公司 一种高精度的四氯化锗鼓泡装置
DE102020100058A1 (de) 2020-01-03 2021-07-08 Leoni Kabel Gmbh Faseroptische Temperaturmessung mit Quantendot-Nanokomposit

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3583685A (en) * 1968-09-26 1971-06-08 Ibm Method and apparatus for controlling quantity of a vapor in a gas
US3801294A (en) * 1971-12-15 1974-04-02 Corning Glass Works Method of producing glass
US3826560A (en) * 1972-03-30 1974-07-30 Corning Glass Works Method of forming a light focusing fiber waveguide
US4217027A (en) * 1974-02-22 1980-08-12 Bell Telephone Laboratories, Incorporated Optical fiber fabrication and resulting product
US4194807A (en) * 1976-04-09 1980-03-25 Georg Gliemeroth Optical fiber wave-guides for signal transmission comprising multiple component glass with an adjusted expansion co-efficient between the core and mantle
US4276243A (en) * 1978-12-08 1981-06-30 Western Electric Company, Inc. Vapor delivery control system and method
US4220460A (en) * 1979-02-05 1980-09-02 Western Electric Company, Inc. Vapor delivery system and method
US4278458A (en) * 1979-02-07 1981-07-14 Bell Telephone Laboratories, Incorporated Optical fiber fabrication method and apparatus
US4235829A (en) * 1979-05-07 1980-11-25 Western Electric Company, Inc. Vapor delivery system and method of maintaining a constant level of liquid therein
JPS5934420B2 (ja) * 1980-05-20 1984-08-22 ジエイ・シ−・シユ−マ−カ−・カンパニ− 化学蒸気分配システム
US5277889A (en) * 1983-10-21 1994-01-11 Corning Incorporated Method for depositing pure metal halide compositions
US4582480A (en) * 1984-08-02 1986-04-15 At&T Technologies, Inc. Methods of and apparatus for vapor delivery control in optical preform manufacture
JPH085690B2 (ja) * 1987-01-14 1996-01-24 住友電気工業株式会社 原料供給方法および装置
US5145508A (en) * 1988-03-04 1992-09-08 Nippon Telegraph And Telephone Corporation Method of making fluoride glass using barium β-diketones
JP2554356B2 (ja) * 1988-05-17 1996-11-13 住友電気工業株式会社 ガラス原料供給方法及びガラス原料供給装置
US5051096A (en) * 1989-10-23 1991-09-24 International Business Machines Corp. Planar board support structure
JPH04342434A (ja) * 1991-05-17 1992-11-27 Fujikura Ltd 光ファイバ母材製造装置
US5425902A (en) * 1993-11-04 1995-06-20 Tom Miller, Inc. Method for humidifying air
US5392635A (en) * 1993-12-30 1995-02-28 At&T Corp. Acoustic analysis of gas mixtures
US5558687A (en) * 1994-12-30 1996-09-24 Corning Incorporated Vertical, packed-bed, film evaporator for halide-free, silicon-containing compounds
US5599371A (en) * 1994-12-30 1997-02-04 Corning Incorporated Method of using precision burners for oxidizing halide-free, silicon-containing compounds
JP3157693B2 (ja) * 1995-03-16 2001-04-16 信越化学工業株式会社 シリカガラス系堆積体の製造方法

Also Published As

Publication number Publication date
CN1231380A (zh) 1999-10-13
JP3654494B2 (ja) 2005-06-02
EP0949212A1 (de) 1999-10-13
JPH11320556A (ja) 1999-11-24
EP0949212B1 (de) 2004-12-22
DE69922728T2 (de) 2005-12-15
US6161398A (en) 2000-12-19

Similar Documents

Publication Publication Date Title
DE69922728D1 (de) Verfahren und Vorrichtungen zur Regelung des Ablieferns von Dampf beim Herstellen von optische Vorformen
DE60010522D1 (de) Verfahren zur kontrollierten herstellung von polyethylen und seinen copolymeren
DE10084417T1 (de) Verfahren und Apparat zur therapeutischen Laserbehandlung
DE69830782D1 (de) Verfahren und Vorrichtung zur Korrektur des optischen Proximity-Effekts
DE60117008D1 (de) Giessform und verfahren zur herstellung von ophthalmischen linsen
DE60144122D1 (de) Verfahren zur kontrollierten Erhöhung des Molekulargewichts von Polyethylen und Polyethylenmischungen
DE69433693D1 (de) Kunststeinzusammensetzung und verfahren zur herstellung von kunststeinen
DE69403797T2 (de) Nichtgewebte materialien und methode zur herstellung derselben
DE60011716D1 (de) Verfahren zur Einrichtung und Steuerung des Flusses der Einschliessmedien beim Laserschock-Behandeln
DE69427631D1 (de) Superabsorbierendes Polymer und Verfahren zur Herstellung
DE69839801D1 (de) Intraokularlinsen und verfahren zur herstellung von eingesgossenen intraokularlinsen
DE69717922T2 (de) CD-ROM Wiedergabegerät und Verfahren zur Steuerung desselben
DE60123308D1 (de) Glaswerkstoff, glaskeramisches Produkt, und Verfahren zur Herstellung des Glaswerkstoffes
DE69512288D1 (de) Verfahren zur Herstellung von Hexafluorpropan und Perfluorpropan
DE60129376D1 (de) Verfahren und Vorrichtung zur Herstellung von Quarzglaskörpern
DE59502641D1 (de) Verfahren zur Herstellung von Kieselsäuregranulat und Verwendung des so hergestellten Granulats
DE68906438T2 (de) Verfahren und Vorrichtung zur Steuerung der Kühlung bei der Herstellung von Glasfasern.
DE60001845D1 (de) Verfahren zur erzeugung und anpassung von kontaktlinsen unter berücksichtigung der materialeigenschaften von linsen
DE69515697T2 (de) Blockcopolymere und verfahren zur herstellung
DE69520166D1 (de) Vorrichtung zur Herstellung von Steinformlingen in der Ziegelindustrie
DE69531132D1 (de) Blattförmiger Sauerstoff-Absorber und Verfahren zur Herstellung
DE69735398D1 (de) Verfahren zur Herstellung optischer Komponenten zur Verwendung im ultravioletten Gebiet
DE69700351D1 (de) Verfahren zur Herstellung von Thermistoren und Werkstoff dafür
DE69719920D1 (de) Prozess zur herstellung eines emulgators und emulgierte zusammensetzung
ATE435484T1 (de) Verfahren, optische aufzeichnungsvorrichtung mit diesen verfahren und optisches aufzeichnungsmedium zur verwendung in den verfahren und der vorrichtung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition