DE69921434D1 - Durchfluss-Regelventil - Google Patents

Durchfluss-Regelventil

Info

Publication number
DE69921434D1
DE69921434D1 DE69921434T DE69921434T DE69921434D1 DE 69921434 D1 DE69921434 D1 DE 69921434D1 DE 69921434 T DE69921434 T DE 69921434T DE 69921434 T DE69921434 T DE 69921434T DE 69921434 D1 DE69921434 D1 DE 69921434D1
Authority
DE
Germany
Prior art keywords
chamber
valve
diaphragm
diaphragms
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69921434T
Other languages
English (en)
Other versions
DE69921434T2 (de
Inventor
Hironori Matsuzawa
Tsuyoshi Hida
Kimihito Sasao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advance Denki Kogyo KK
Original Assignee
Advance Denki Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=18497038&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69921434(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Advance Denki Kogyo KK filed Critical Advance Denki Kogyo KK
Publication of DE69921434D1 publication Critical patent/DE69921434D1/de
Application granted granted Critical
Publication of DE69921434T2 publication Critical patent/DE69921434T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/03—Control of flow with auxiliary non-electric power
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7781—With separate connected fluid reactor surface
    • Y10T137/7782—With manual or external control for line valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7781—With separate connected fluid reactor surface
    • Y10T137/7784—Responsive to change in rate of fluid flow
    • Y10T137/7787—Expansible chamber subject to differential pressures
    • Y10T137/7791—Pressures across flow line valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7781—With separate connected fluid reactor surface
    • Y10T137/7835—Valve seating in direction of flow
    • Y10T137/7836—Flexible diaphragm or bellows reactor
DE69921434T 1998-12-25 1999-07-06 Durchfluss-Regelventil Expired - Lifetime DE69921434T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP37048698A JP3276936B2 (ja) 1998-12-25 1998-12-25 流量コントロールバルブ
JP37048698 1998-12-25

Publications (2)

Publication Number Publication Date
DE69921434D1 true DE69921434D1 (de) 2004-12-02
DE69921434T2 DE69921434T2 (de) 2006-03-02

Family

ID=18497038

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69921434T Expired - Lifetime DE69921434T2 (de) 1998-12-25 1999-07-06 Durchfluss-Regelventil

Country Status (8)

Country Link
US (1) US6199582B1 (de)
EP (1) EP1014244B1 (de)
JP (1) JP3276936B2 (de)
KR (1) KR100580809B1 (de)
AT (1) ATE280969T1 (de)
DE (1) DE69921434T2 (de)
DK (1) DK1014244T3 (de)
TW (1) TW432261B (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE506853C2 (sv) 1996-06-20 1998-02-16 Anonymity Prot In Sweden Ab Metod för databearbetning
JP3276936B2 (ja) * 1998-12-25 2002-04-22 アドバンス電気工業株式会社 流量コントロールバルブ
JP2002130524A (ja) * 2000-10-17 2002-05-09 Advance Denki Kogyo Kk 流量コントロールバルブの弁機構体
JP4763936B2 (ja) * 2001-09-07 2011-08-31 アドバンス電気工業株式会社 バルブにおけるガスパージ方法及び構造
JP4776120B2 (ja) * 2001-09-26 2011-09-21 旭有機材工業株式会社 背圧弁
JP4022438B2 (ja) * 2001-12-20 2007-12-19 アドバンス電気工業株式会社 定流量弁及び定流量混合方法
JP4142883B2 (ja) * 2002-03-20 2008-09-03 シーケーディ株式会社 薬液弁
JP4263426B2 (ja) * 2002-05-15 2009-05-13 株式会社鷺宮製作所 電動弁
JP3995543B2 (ja) 2002-07-03 2007-10-24 旭有機材工業株式会社 流体制御弁
DE20310832U1 (de) * 2003-07-14 2004-11-18 Nordson Corporation, Westlake Druckregler
JP4049084B2 (ja) * 2003-11-07 2008-02-20 セイコーエプソン株式会社 流体制御弁および液滴吐出装置
US20050252555A1 (en) * 2004-03-25 2005-11-17 Ronnie Browne Valve and pressure regulator biasing assemblies
JP2007102754A (ja) * 2005-09-09 2007-04-19 Advance Denki Kogyo Kk 流量制御装置
JP4694341B2 (ja) * 2005-10-13 2011-06-08 シーケーディ株式会社 流体制御弁
US7644725B2 (en) 2005-12-16 2010-01-12 Advance Electric Japan Kabushiki Kaisha Mixing valve and mixing device
JP4668119B2 (ja) * 2006-05-08 2011-04-13 シーケーディ株式会社 流量制御装置
JP5301805B2 (ja) * 2007-10-17 2013-09-25 サーパス工業株式会社 サックバックバルブシステム及びその閉弁動作制御方法
JP5247298B2 (ja) * 2008-08-18 2013-07-24 サーパス工業株式会社 サックバックバルブ
JP5113774B2 (ja) * 2009-01-23 2013-01-09 Ｃｋｄ株式会社 流体制御弁
JP3168588U (ja) * 2011-04-08 2011-06-16 アドバンス電気工業株式会社 流体供給量調節装置
JP5889649B2 (ja) * 2012-01-26 2016-03-22 サーパス工業株式会社 流量調整装置
CN102720881B (zh) * 2012-06-19 2013-12-04 宁波星箭航天机械有限公司 气控膜片式高压大流量减压阀出口压力控制系统
US9146007B2 (en) 2012-11-27 2015-09-29 Lam Research Ag Apparatus for liquid treatment of work pieces and flow control system for use in same
JP6254815B2 (ja) * 2013-10-11 2017-12-27 アドバンス電気工業株式会社 流量制御弁及びこれを用いた流量制御装置
RU2556922C2 (ru) * 2013-11-22 2015-07-20 Общество с ограниченной ответственностью "Проектно-производственное предприятие Дизельавтоматика" Гидроциклон
JP6749316B2 (ja) 2014-09-09 2020-09-02 プロテウス・インダストリーズ・インコーポレーテッド 冷却液引き戻しのためのシステムおよび方法
US10490429B2 (en) 2014-11-26 2019-11-26 Applied Materials, Inc. Substrate carrier using a proportional thermal fluid delivery system
JP6576217B2 (ja) * 2015-11-10 2019-09-18 株式会社Ｓｃｒｅｅｎホールディングス 処理液供給装置および処理液供給装置の制御方法
JP6695735B2 (ja) * 2016-05-10 2020-05-20 東京エレクトロン株式会社 液処理装置、その制御方法及び記憶媒体
GB2568546B (en) 2017-11-21 2022-10-05 Haldex Brake Prod Ab A valve and valve component
EP3714193B1 (de) 2017-11-21 2023-11-08 Haldex Brake Products AB Ventil und ventilanordnung
CN108902099B (zh) * 2018-06-25 2021-11-12 厦门木图生态科技有限公司 园林用喷射装置
JP7357639B2 (ja) 2018-11-30 2023-10-06 旭有機材株式会社 ダイヤフラム弁
US11313482B2 (en) 2019-11-14 2022-04-26 Entegris, Inc. Welded check valve
JP2022074523A (ja) 2020-11-04 2022-05-18 アドバンス電気工業株式会社 定圧弁
JP2023162518A (ja) 2022-04-27 2023-11-09 アドバンス電気工業株式会社 定圧弁

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA550466A (en) * 1957-12-17 A. St. Clair Theodore Liquid ammonia flow system and valve
US1743127A (en) * 1929-04-11 1930-01-14 Sonner Burner Co Automatic control mechanism for fuel gases
US2160849A (en) * 1937-04-12 1939-06-06 Arthur J Fausek Multistage pressure regulator
US2220496A (en) * 1939-06-30 1940-11-05 Leo A Ringelstetter Flowmeter
JPS6155482A (ja) * 1984-08-27 1986-03-19 Mitsutoyo Mfg Co Ltd 差圧駆動型三方弁
JP2671183B2 (ja) * 1993-04-07 1997-10-29 アドバンス電気工業株式会社 流体コントロールバルブ
GB2308892B (en) * 1996-01-04 1999-10-13 Siemens Measurements Ltd Improvements in or relating to meters
JP3276936B2 (ja) * 1998-12-25 2002-04-22 アドバンス電気工業株式会社 流量コントロールバルブ

Also Published As

Publication number Publication date
JP2000193106A (ja) 2000-07-14
DK1014244T3 (da) 2005-01-17
JP3276936B2 (ja) 2002-04-22
DE69921434T2 (de) 2006-03-02
KR20000048199A (ko) 2000-07-25
EP1014244A1 (de) 2000-06-28
KR100580809B1 (ko) 2006-05-16
US6199582B1 (en) 2001-03-13
EP1014244B1 (de) 2004-10-27
TW432261B (en) 2001-05-01
ATE280969T1 (de) 2004-11-15

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Legal Events

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