DE69901854D1 - Halbleitergassensor auf der Basis von wasserfreiem Zinkantimonat und Verfahren zur Herstellung desselben - Google Patents

Halbleitergassensor auf der Basis von wasserfreiem Zinkantimonat und Verfahren zur Herstellung desselben

Info

Publication number
DE69901854D1
DE69901854D1 DE69901854T DE69901854T DE69901854D1 DE 69901854 D1 DE69901854 D1 DE 69901854D1 DE 69901854 T DE69901854 T DE 69901854T DE 69901854 T DE69901854 T DE 69901854T DE 69901854 D1 DE69901854 D1 DE 69901854D1
Authority
DE
Germany
Prior art keywords
producing
same
gas sensor
sensor based
semiconductor gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69901854T
Other languages
English (en)
Other versions
DE69901854T2 (de
Inventor
Jun Tamaki
Isao Ota
Hideo Sakata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Chemical Corp
Original Assignee
Nissan Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Chemical Corp filed Critical Nissan Chemical Corp
Application granted granted Critical
Publication of DE69901854D1 publication Critical patent/DE69901854D1/de
Publication of DE69901854T2 publication Critical patent/DE69901854T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/0044—Sulphides, e.g. H2S
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
DE69901854T 1998-03-11 1999-03-11 Halbleitergassensor auf der Basis von wasserfreiem Zinkantimonat und Verfahren zur Herstellung desselben Expired - Fee Related DE69901854T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05943098A JP3823520B2 (ja) 1998-03-11 1998-03-11 無水アンチモン酸亜鉛半導体ガスセンサー及びその製造方法

Publications (2)

Publication Number Publication Date
DE69901854D1 true DE69901854D1 (de) 2002-07-25
DE69901854T2 DE69901854T2 (de) 2002-11-07

Family

ID=13113057

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69901854T Expired - Fee Related DE69901854T2 (de) 1998-03-11 1999-03-11 Halbleitergassensor auf der Basis von wasserfreiem Zinkantimonat und Verfahren zur Herstellung desselben

Country Status (4)

Country Link
US (1) US6311545B1 (de)
EP (1) EP0942277B1 (de)
JP (1) JP3823520B2 (de)
DE (1) DE69901854T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6985082B1 (en) * 2001-07-12 2006-01-10 The Ohio State University Reasearch Foundation Carbon monoxide sensor and method of use
JP2003321223A (ja) * 2002-05-07 2003-11-11 Nissan Chem Ind Ltd 五酸化アンチモンゾルの製造方法
CA2429977A1 (en) * 2002-05-27 2003-11-27 Shinko Electric Industries Co., Ltd. Sensor and device for detecting sulfur
JP4110961B2 (ja) * 2002-12-24 2008-07-02 株式会社デンソー ガスセンサ用ガス感応膜の製造方法
JP5048221B2 (ja) * 2004-04-02 2012-10-17 新コスモス電機株式会社 ガスセンサチップ及びその製造方法
JP4605375B2 (ja) * 2004-04-21 2011-01-05 日産化学工業株式会社 無水アンチモン酸亜鉛ゾル及びその製造方法
KR100812357B1 (ko) * 2005-12-23 2008-03-11 한국과학기술연구원 초고감도 금속산화물 가스센서 및 그 제조방법
CN101302358B (zh) * 2007-05-09 2011-12-14 北京有色金属研究总院 一种无水纳米锑酸锌溶胶及其制备方法
US8697757B2 (en) 2008-07-17 2014-04-15 Nissan Chemical Industries, Ltd. Hydrophobic organic solvent-dispersed sol of anhydrous zinc antimonate colloidal particles and method for producing the same
CN102866189B (zh) * 2012-08-26 2014-03-19 吉林大学 复合金属氧化物为敏感电极的nasicon基h2s传感器
EP2966034B1 (de) * 2014-07-09 2016-08-31 Honeywell Romania S.R.L. Schwefelwasserstoffsensor und Verfahren
CN105470507B (zh) * 2015-11-30 2018-02-09 中南大学 一种锂离子电池的ZnSb2O6负极材料及其制备方法
US11513091B2 (en) 2016-05-27 2022-11-29 Carrier Corporation Gas detection device and method of manufacturing the same
CN110988039A (zh) * 2019-12-24 2020-04-10 苏州慧闻纳米科技有限公司 气敏材料及制备方法、气体传感器的制作方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE792125A (fr) 1971-12-27 1973-03-16 Petrow Henry G Sol colloidal d'oxyde d'antimoine, son procede de preparation et son utilisation
JPS51132890A (en) * 1975-05-14 1976-11-18 Toshiba Corp Gas sensitive body
ZA764022B (en) 1975-08-07 1977-06-29 American Cyanamid Co Colloidal antimony ocide
US4110247A (en) 1977-04-07 1978-08-29 The Harshaw Chemical Company Method of preparing colloidal sol of antimony oxide
JPS5918116A (ja) 1982-07-20 1984-01-30 Nippon Seikou Kk 微粒三酸化アンチモンの製造方法および製造装置
JPS6041536A (ja) 1983-08-16 1985-03-05 Nissan Chem Ind Ltd 五酸化アンチモンゾルの製造法
US4542640A (en) * 1983-09-15 1985-09-24 Clifford Paul K Selective gas detection and measurement system
JPS6269157A (ja) * 1985-09-21 1987-03-30 Shinkosumosu Denki Kk 硫化水素選択検知用センサ
JPS62125849A (ja) 1985-11-26 1987-06-08 Japan Exlan Co Ltd 十三酸化六アンチモン水性ゾル
JPH0696451B2 (ja) 1986-02-06 1994-11-30 日産化学工業株式会社 五酸化アンチモンゾルの製造方法
JPH01189553A (ja) 1988-01-25 1989-07-28 Riken Corp ガスセンサー用酸化スズ半導体およびその製造方法
JP3221132B2 (ja) * 1993-01-29 2001-10-22 日産化学工業株式会社 導電性粒子及びその製造法
JP3366117B2 (ja) * 1994-06-28 2003-01-14 株式会社ニチレイ 食品の品質検知用ガスセンサ

Also Published As

Publication number Publication date
EP0942277A3 (de) 2000-01-26
JPH11258193A (ja) 1999-09-24
EP0942277A2 (de) 1999-09-15
DE69901854T2 (de) 2002-11-07
EP0942277B1 (de) 2002-06-19
US6311545B1 (en) 2001-11-06
JP3823520B2 (ja) 2006-09-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee