DE69840314D1 - Piezoelektrischer Resonator in Dickenausdehnungsmode des Typs mit eingefangener Energie - Google Patents

Piezoelektrischer Resonator in Dickenausdehnungsmode des Typs mit eingefangener Energie

Info

Publication number
DE69840314D1
DE69840314D1 DE69840314T DE69840314T DE69840314D1 DE 69840314 D1 DE69840314 D1 DE 69840314D1 DE 69840314 T DE69840314 T DE 69840314T DE 69840314 T DE69840314 T DE 69840314T DE 69840314 D1 DE69840314 D1 DE 69840314D1
Authority
DE
Germany
Prior art keywords
trapped
energy
piezoelectric resonator
type thickness
extensional mode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69840314T
Other languages
English (en)
Inventor
Hiroaki Kaida
Mitsuhiro Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Application granted granted Critical
Publication of DE69840314D1 publication Critical patent/DE69840314D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/178—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of a laminated structure of multiple piezoelectric layers with inner electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02062—Details relating to the vibration mode
    • H03H9/0207—Details relating to the vibration mode the vibration mode being harmonic
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
DE69840314T 1997-06-12 1998-05-27 Piezoelektrischer Resonator in Dickenausdehnungsmode des Typs mit eingefangener Energie Expired - Lifetime DE69840314D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15528397A JP3695615B2 (ja) 1997-06-12 1997-06-12 エネルギー閉じ込め型厚み縦圧電共振子

Publications (1)

Publication Number Publication Date
DE69840314D1 true DE69840314D1 (de) 2009-01-22

Family

ID=15602523

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69840314T Expired - Lifetime DE69840314D1 (de) 1997-06-12 1998-05-27 Piezoelektrischer Resonator in Dickenausdehnungsmode des Typs mit eingefangener Energie

Country Status (5)

Country Link
US (1) US6051916A (de)
EP (1) EP0884842B1 (de)
JP (1) JP3695615B2 (de)
CN (1) CN1105415C (de)
DE (1) DE69840314D1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3461453B2 (ja) * 1998-12-16 2003-10-27 株式会社村田製作所 厚み縦圧電共振子及び圧電共振部品
JP2000183683A (ja) * 1998-12-17 2000-06-30 Murata Mfg Co Ltd 厚み縦圧電共振子及び圧電共振部品
JP3324536B2 (ja) * 1998-12-18 2002-09-17 株式会社村田製作所 厚み縦圧電共振子及び圧電共振部品
JP3334669B2 (ja) * 1999-03-29 2002-10-15 株式会社村田製作所 圧電共振部品
US6420945B1 (en) * 1999-04-09 2002-07-16 Murata Manufacturing Co. Ltd Piezoelectric resonator having internal electrode films, piezoelectric component and ladder filter formed therefrom
EP1077092A3 (de) * 1999-08-16 2004-03-17 Murata Manufacturing Co., Ltd. Piezoelektrisches Element
JP2001068961A (ja) 1999-08-26 2001-03-16 Murata Mfg Co Ltd 厚み縦圧電共振子、ラダー型フィルタ及び圧電共振部品
KR20130016647A (ko) * 2011-08-08 2013-02-18 삼성전기주식회사 초음파 센서
CA2842778C (en) * 2011-08-08 2016-01-19 Socpra Sciences Et Genie S.E.C. Piezoelectric sensors and sensor arrays for the measurement of wave parameters in a fluid, and method of manufacturing therefor
US8987976B2 (en) 2011-09-23 2015-03-24 Qualcomm Incorporated Piezoelectric resonator having combined thickness and width vibrational modes
JP1565481S (de) * 2016-05-25 2016-12-19
USD857020S1 (en) * 2016-05-25 2019-08-20 Tdk Corporation Piezoelectric element

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3699484A (en) * 1970-06-24 1972-10-17 Vernitron Corp Width extensional resonator and coupled mode filter
US4384229A (en) * 1980-02-14 1983-05-17 Nippon Electric Co., Ltd. Temperature compensated piezoelectric ceramic resonator unit
EP0092428B1 (de) * 1982-04-20 1990-04-04 Fujitsu Limited Herstellungsverfahrenfür einen Piezoelektrischen Resonator
JPS59115609A (ja) * 1982-12-22 1984-07-04 Murata Mfg Co Ltd 圧電フイルタ
JPS60124108A (ja) * 1983-12-08 1985-07-03 Murata Mfg Co Ltd 圧電共振子および圧電共振部品
JP2790178B2 (ja) * 1987-06-26 1998-08-27 株式会社村田製作所 電歪共振装置
JPS6412711A (en) * 1987-07-07 1989-01-17 Murata Manufacturing Co Chip type resonator
US5045744A (en) * 1988-12-23 1991-09-03 Murata Mfg. Co. Energy-trapping-by-frequency-lowering-type piezoelectric-resonance device
US5065066A (en) * 1989-07-19 1991-11-12 Murata Mfg. Co., Ltd. Piezoelectric resonator
JPH08242026A (ja) * 1995-03-03 1996-09-17 Fujitsu Ltd 圧電振動子及びこれを具備する圧電振動子デバイス並びに該デバイスを具備する回路装置

Also Published As

Publication number Publication date
CN1105415C (zh) 2003-04-09
JPH114135A (ja) 1999-01-06
EP0884842A2 (de) 1998-12-16
US6051916A (en) 2000-04-18
EP0884842B1 (de) 2008-12-10
JP3695615B2 (ja) 2005-09-14
CN1204183A (zh) 1999-01-06
EP0884842A3 (de) 2000-03-22

Similar Documents

Publication Publication Date Title
DE69511996T2 (de) Piezoelektrische Motoreinheit
DE69533824D1 (de) Beschleunigungsmessaufnehmer mit piezoelektrischem element
GB9503703D0 (en) Piezoelectric oscillator
DE59908886D1 (de) Piezoelektrischer antrieb
DE69840314D1 (de) Piezoelektrischer Resonator in Dickenausdehnungsmode des Typs mit eingefangener Energie
DE69805095D1 (de) Mit verschiedenen oberflächen gekoppelter resonator
FR2746985B1 (fr) Resonateur piezoelectrique
DE69522134T2 (de) Piezoelektrischer Vibrator
DE69900734D1 (de) Piezoelektrischer Antrieb des aufgestapelten Typs
NL1010853A1 (nl) Piezo-elektrische resonator.
NO971939L (no) Piezoelektrisk komponent
DE69521515T2 (de) Quantenkryptographie
DE69702724T2 (de) Vibrator
FR2743225B1 (fr) Resonateur piezoelectrique
DE69028640D1 (de) Piezoelektrischer schichtachtiger festkörpermotor
DE69521447T2 (de) Wandler mit Schwingelement
DE69812757T2 (de) Reinigungsgerät mit Vibrator
DE69724869D1 (de) Piezoelektrisches Bauelement
FI961984A0 (fi) Oscillatorkrets
PT1021614E (pt) Ecra com limpeza mecanica
DE69725372D1 (de) Piezoelektrischer Resonator
DE69508143D1 (de) Piezoelektrischer Vibrator
DE29722319U1 (de) Piezoelektrischer Motor
FR2745667B1 (fr) Resonateur piezoelectrique a excitation selective
KR950022207U (ko) 압전 세라믹 진동자

Legal Events

Date Code Title Description
8364 No opposition during term of opposition