DE69900734D1 - Piezoelektrischer Antrieb des aufgestapelten Typs - Google Patents
Piezoelektrischer Antrieb des aufgestapelten TypsInfo
- Publication number
- DE69900734D1 DE69900734D1 DE69900734T DE69900734T DE69900734D1 DE 69900734 D1 DE69900734 D1 DE 69900734D1 DE 69900734 T DE69900734 T DE 69900734T DE 69900734 T DE69900734 T DE 69900734T DE 69900734 D1 DE69900734 D1 DE 69900734D1
- Authority
- DE
- Germany
- Prior art keywords
- piezoelectric drive
- stacked type
- stacked
- type
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10138769A JPH11341838A (ja) | 1998-05-20 | 1998-05-20 | 積層型圧電アクチュエータ |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69900734D1 true DE69900734D1 (de) | 2002-02-28 |
DE69900734T2 DE69900734T2 (de) | 2002-10-17 |
Family
ID=15229776
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69900734T Expired - Fee Related DE69900734T2 (de) | 1998-05-20 | 1999-05-19 | Piezoelektrischer Antrieb des aufgestapelten Typs |
Country Status (5)
Country | Link |
---|---|
US (1) | US6215230B1 (de) |
EP (1) | EP0961329B1 (de) |
JP (1) | JPH11341838A (de) |
DE (1) | DE69900734T2 (de) |
HK (1) | HK1022782A1 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19928190A1 (de) * | 1999-06-19 | 2001-01-11 | Bosch Gmbh Robert | Piezoaktor |
JP2002054526A (ja) * | 2000-05-31 | 2002-02-20 | Denso Corp | インジェクタ用圧電体素子 |
DE10048928A1 (de) * | 2000-10-04 | 2002-04-25 | Bosch Gmbh Robert | Piezoelement |
JP3506113B2 (ja) * | 2000-11-07 | 2004-03-15 | 株式会社村田製作所 | 電子部品 |
JP4248777B2 (ja) * | 2000-12-28 | 2009-04-02 | 株式会社デンソー | インジェクタ用圧電体素子及びその製造方法,並びにインジェクタ |
KR100429116B1 (ko) * | 2001-05-14 | 2004-04-28 | 삼성전자주식회사 | 반도체 ic 소자의 검사 공정 손실 요인 자동 분석 및관리 시스템과 그 방법 |
JP2003086854A (ja) * | 2001-08-30 | 2003-03-20 | Oce Technologies Bv | 多層圧電アクチュエータ |
EP1289027A1 (de) * | 2001-08-30 | 2003-03-05 | Océ-Technologies B.V. | Piezoelektrischer Vielschichtaktuator |
US7174792B2 (en) * | 2004-08-09 | 2007-02-13 | Xinetics, Inc. | Multi-axis transducer |
KR100675329B1 (ko) | 2004-08-17 | 2007-01-26 | 한국기계연구원 | 강성제어를 통한 수평구동형 박막압전 엑츄에이터 |
JP4911066B2 (ja) * | 2007-02-26 | 2012-04-04 | 株式会社デンソー | 積層型圧電素子 |
DE102010049574A1 (de) * | 2010-07-30 | 2012-02-02 | Epcos Ag | Piezoelektrischer Vielschichtaktor |
JP2021061336A (ja) * | 2019-10-08 | 2021-04-15 | Tdk株式会社 | 積層型圧電素子 |
US20230176313A1 (en) * | 2021-12-02 | 2023-06-08 | Plx, Inc. | Self-aligning active retroreflector system and method |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3378704A (en) * | 1966-01-05 | 1968-04-16 | Bourns Inc | Piezoelectric multilayer device |
DE3378393D1 (en) * | 1982-05-11 | 1988-12-08 | Nec Corp | Multilayer electrostrictive element which withstands repeated application of pulses |
US4803763A (en) * | 1986-08-28 | 1989-02-14 | Nippon Soken, Inc. | Method of making a laminated piezoelectric transducer |
JP2567046B2 (ja) * | 1987-09-25 | 1996-12-25 | 日立金属株式会社 | 積層型変位素子 |
ATE161362T1 (de) * | 1989-04-07 | 1998-01-15 | Mitsui Petrochemical Ind | Geschichtete keramikanordnung und verfahren zur deren herstellung |
DE68926166T2 (de) * | 1989-11-14 | 1996-12-12 | Battelle Memorial Institute | Verfahren zur Herstellung einer piezoelektrischen Stapelantriebsvorrichtung |
FR2701188B1 (fr) * | 1993-01-29 | 1995-03-03 | Thomson Csf | Procédé de fabrication de composant piézoélectrique. |
JP3271517B2 (ja) * | 1996-04-05 | 2002-04-02 | 株式会社村田製作所 | 圧電共振子およびそれを用いた電子部品 |
DE19802302A1 (de) * | 1998-01-22 | 1999-07-29 | Bosch Gmbh Robert | Piezoelektrischer Aktor |
-
1998
- 1998-05-20 JP JP10138769A patent/JPH11341838A/ja not_active Withdrawn
-
1999
- 1999-05-17 US US09/313,018 patent/US6215230B1/en not_active Expired - Fee Related
- 1999-05-19 DE DE69900734T patent/DE69900734T2/de not_active Expired - Fee Related
- 1999-05-19 EP EP99109873A patent/EP0961329B1/de not_active Expired - Lifetime
-
2000
- 2000-03-21 HK HK00101727A patent/HK1022782A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0961329B1 (de) | 2002-01-02 |
DE69900734T2 (de) | 2002-10-17 |
US6215230B1 (en) | 2001-04-10 |
EP0961329A1 (de) | 1999-12-01 |
HK1022782A1 (en) | 2000-08-18 |
JPH11341838A (ja) | 1999-12-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |