DE69900734D1 - Piezoelektrischer Antrieb des aufgestapelten Typs - Google Patents

Piezoelektrischer Antrieb des aufgestapelten Typs

Info

Publication number
DE69900734D1
DE69900734D1 DE69900734T DE69900734T DE69900734D1 DE 69900734 D1 DE69900734 D1 DE 69900734D1 DE 69900734 T DE69900734 T DE 69900734T DE 69900734 T DE69900734 T DE 69900734T DE 69900734 D1 DE69900734 D1 DE 69900734D1
Authority
DE
Germany
Prior art keywords
piezoelectric drive
stacked type
stacked
type
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69900734T
Other languages
English (en)
Other versions
DE69900734T2 (de
Inventor
Mitsuteru Ide
Hideaki Kosaka
Hirofumi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Tokin Hyogo Ltd
Original Assignee
Tokin Ceramics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokin Ceramics Corp filed Critical Tokin Ceramics Corp
Application granted granted Critical
Publication of DE69900734D1 publication Critical patent/DE69900734D1/de
Publication of DE69900734T2 publication Critical patent/DE69900734T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
DE69900734T 1998-05-20 1999-05-19 Piezoelektrischer Antrieb des aufgestapelten Typs Expired - Fee Related DE69900734T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10138769A JPH11341838A (ja) 1998-05-20 1998-05-20 積層型圧電アクチュエータ

Publications (2)

Publication Number Publication Date
DE69900734D1 true DE69900734D1 (de) 2002-02-28
DE69900734T2 DE69900734T2 (de) 2002-10-17

Family

ID=15229776

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69900734T Expired - Fee Related DE69900734T2 (de) 1998-05-20 1999-05-19 Piezoelektrischer Antrieb des aufgestapelten Typs

Country Status (5)

Country Link
US (1) US6215230B1 (de)
EP (1) EP0961329B1 (de)
JP (1) JPH11341838A (de)
DE (1) DE69900734T2 (de)
HK (1) HK1022782A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19928190A1 (de) * 1999-06-19 2001-01-11 Bosch Gmbh Robert Piezoaktor
JP2002054526A (ja) * 2000-05-31 2002-02-20 Denso Corp インジェクタ用圧電体素子
DE10048928A1 (de) * 2000-10-04 2002-04-25 Bosch Gmbh Robert Piezoelement
JP3506113B2 (ja) * 2000-11-07 2004-03-15 株式会社村田製作所 電子部品
JP4248777B2 (ja) * 2000-12-28 2009-04-02 株式会社デンソー インジェクタ用圧電体素子及びその製造方法，並びにインジェクタ
KR100429116B1 (ko) * 2001-05-14 2004-04-28 삼성전자주식회사 반도체 ｉｃ 소자의 검사 공정 손실 요인 자동 분석 및관리 시스템과 그 방법
JP2003086854A (ja) * 2001-08-30 2003-03-20 Oce Technologies Bv 多層圧電アクチュエータ
EP1289027A1 (de) * 2001-08-30 2003-03-05 Océ-Technologies B.V. Piezoelektrischer Vielschichtaktuator
US7174792B2 (en) * 2004-08-09 2007-02-13 Xinetics, Inc. Multi-axis transducer
KR100675329B1 (ko) 2004-08-17 2007-01-26 한국기계연구원 강성제어를 통한 수평구동형 박막압전 엑츄에이터
JP4911066B2 (ja) * 2007-02-26 2012-04-04 株式会社デンソー 積層型圧電素子
DE102010049574A1 (de) * 2010-07-30 2012-02-02 Epcos Ag Piezoelektrischer Vielschichtaktor
JP2021061336A (ja) * 2019-10-08 2021-04-15 Tdk株式会社 積層型圧電素子
WO2023102309A1 (en) * 2021-12-02 2023-06-08 Plx, Inc. Self-aligning active retroreflector system and method

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3378704A (en) * 1966-01-05 1968-04-16 Bourns Inc Piezoelectric multilayer device
EP0094078B1 (de) * 1982-05-11 1988-11-02 Nec Corporation Elektrostriktives Vielschichtelement welches wiederholter Pulsanwendung widersteht
US4803763A (en) * 1986-08-28 1989-02-14 Nippon Soken, Inc. Method of making a laminated piezoelectric transducer
JP2567046B2 (ja) * 1987-09-25 1996-12-25 日立金属株式会社 積層型変位素子
MY105668A (en) * 1989-04-07 1994-11-30 Mitsui Petrochemical Ind Laminated ceramic device and method of manufacturing the same.
EP0427901B1 (de) * 1989-11-14 1996-04-03 Battelle Memorial Institute Verfahren zur Herstellung einer piezoelektrischen Stapelantriebsvorrichtung
FR2701188B1 (fr) * 1993-01-29 1995-03-03 Thomson Csf Procédé de fabrication de composant piézoélectrique.
JP3271517B2 (ja) * 1996-04-05 2002-04-02 株式会社村田製作所 圧電共振子およびそれを用いた電子部品
DE19802302A1 (de) * 1998-01-22 1999-07-29 Bosch Gmbh Robert Piezoelektrischer Aktor

Also Published As

Publication number Publication date
HK1022782A1 (en) 2000-08-18
JPH11341838A (ja) 1999-12-10
US6215230B1 (en) 2001-04-10
DE69900734T2 (de) 2002-10-17
EP0961329A1 (de) 1999-12-01
EP0961329B1 (de) 2002-01-02

Similar Documents

Publication Publication Date Title
DE59908886D1 (de) Piezoelektrischer antrieb
DE50006733D1 (de) Piezoelektrischer aktor
DE69520931D1 (de) Piezoelektrischer rotierender Antriebapparat
DE59912709D1 (de) Piezoelektrische aktoreinheit
DE60036264D1 (de) Piezoelektrischer Resonator
DE60045628D1 (de) Piezoelektrischer Resonator
DE69305231D1 (de) Piezoelektrischer/elektrostriktiver Antrieb
DE59811430D1 (de) Piezoelektrischer aktor
DE59908385D1 (de) Piezoelektrischer aktor
DE59702942D1 (de) Hochdynamischer piezoelektrischer Antrieb
DE59910346D1 (de) Piezoelektrischer aktor
DE69909546D1 (de) Piezoelektrisches/elektrostriktives Element
DE69900734T2 (de) Piezoelektrischer Antrieb des aufgestapelten Typs
DE59814408D1 (de) Elektromotorischer antrieb
DE59912768D1 (de) Piezoelektrischer aktor
DE69819832D1 (de) Piezoelektrischer Aktuator
NO993327D0 (no) Piezoelektrisk elektroakustisk omvandler
DE69939096D1 (de) Piezoelektrischer Lautsprecher
DE50205472D1 (de) Piezoelektrischer antrieb
DE50010627D1 (de) Piezoelektrische Antriebsvorrichtung
IS6247A (is) Tannbursti með hjámiðjudrifi
DE69840314D1 (de) Piezoelektrischer Resonator in Dickenausdehnungsmode des Typs mit eingefangener Energie
NL1010853A1 (nl) Piezo-elektrische resonator.
DE69510758D1 (de) Piezoelektrische betätigungseinrichtung
FR2786957B1 (fr) Actionneur piezo-electrique ou electrostrictif

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee