DE69909546D1 - Piezoelektrisches/elektrostriktives Element - Google Patents

Piezoelektrisches/elektrostriktives Element

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Publication number
DE69909546D1
DE69909546D1 DE69909546T DE69909546T DE69909546D1 DE 69909546 D1 DE69909546 D1 DE 69909546D1 DE 69909546 T DE69909546 T DE 69909546T DE 69909546 T DE69909546 T DE 69909546T DE 69909546 D1 DE69909546 D1 DE 69909546D1
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Germany
Prior art keywords
piezoelectric
electrostrictive element
electrostrictive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69909546T
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English (en)
Other versions
DE69909546T2 (de
Inventor
Yukihisa Takeuchi
Koji Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
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NGK Insulators Ltd
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Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE69909546D1 publication Critical patent/DE69909546D1/de
Publication of DE69909546T2 publication Critical patent/DE69909546T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
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    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
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    • C04B35/49Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047Membrane type
    • H10N30/706
    • BPERFORMING OPERATIONS; TRANSPORTING
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    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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    • C04B2237/582Forming a gradient in composition or in properties across the laminate or the joined articles by joining layers or articles of the same composition but having different additives
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N11/00Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
    • G01N11/10Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material
    • G01N11/16Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material by measuring damping effect upon oscillatory body
DE69909546T 1998-03-27 1999-03-26 Piezoelektrisches/elektrostriktives Element Expired - Lifetime DE69909546T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP8232898 1998-03-27
JP8232898 1998-03-27
JP8774998 1998-03-31
JP8774998 1998-03-31

Publications (2)

Publication Number Publication Date
DE69909546D1 true DE69909546D1 (de) 2003-08-21
DE69909546T2 DE69909546T2 (de) 2004-06-09

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US (1) US6246156B1 (de)
EP (1) EP0949693B1 (de)
DE (1) DE69909546T2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3517876B2 (ja) * 1998-10-14 2004-04-12 セイコーエプソン株式会社 強誘電体薄膜素子の製造方法、インクジェット式記録ヘッド及びインクジェットプリンタ
JP2003513691A (ja) 1999-10-25 2003-04-15 シーラス、コーポレイション 血管を封止するための集束超音波の使用
US6626855B1 (en) 1999-11-26 2003-09-30 Therus Corpoation Controlled high efficiency lesion formation using high intensity ultrasound
JP3783534B2 (ja) * 2000-08-18 2006-06-07 株式会社村田製作所 圧電磁器焼結体および圧電磁器素子
JP3957528B2 (ja) * 2002-03-05 2007-08-15 日本碍子株式会社 圧電/電歪膜型素子
WO2007009118A2 (en) * 2005-07-13 2007-01-18 Acoustx Corporation Systems and methods for performing acoustic hemostasis of deep bleeding trauma in limbs
DE102005043036B4 (de) * 2005-09-09 2011-03-24 Siemens Ag Vorrichtung zur Ermittlung der viskosen Eigenschaften einer Flüssigkeit
US20070213616A1 (en) 2005-10-20 2007-09-13 Thomas Anderson Systems and methods for arteriotomy localization
JP2008226386A (ja) * 2007-03-14 2008-09-25 Fujitsu Ltd 記憶装置、制御装置、振動検出方法
US8986231B2 (en) 2009-10-12 2015-03-24 Kona Medical, Inc. Energetic modulation of nerves
US9119951B2 (en) 2009-10-12 2015-09-01 Kona Medical, Inc. Energetic modulation of nerves
US8986211B2 (en) 2009-10-12 2015-03-24 Kona Medical, Inc. Energetic modulation of nerves
US9174065B2 (en) 2009-10-12 2015-11-03 Kona Medical, Inc. Energetic modulation of nerves
US20160059044A1 (en) 2009-10-12 2016-03-03 Kona Medical, Inc. Energy delivery to intraparenchymal regions of the kidney to treat hypertension
US20110092880A1 (en) 2009-10-12 2011-04-21 Michael Gertner Energetic modulation of nerves
US20110118600A1 (en) 2009-11-16 2011-05-19 Michael Gertner External Autonomic Modulation
US8517962B2 (en) 2009-10-12 2013-08-27 Kona Medical, Inc. Energetic modulation of nerves
US8295912B2 (en) 2009-10-12 2012-10-23 Kona Medical, Inc. Method and system to inhibit a function of a nerve traveling with an artery
US8469904B2 (en) 2009-10-12 2013-06-25 Kona Medical, Inc. Energetic modulation of nerves
CN101774812B (zh) * 2010-02-02 2012-05-09 天津大学 溶胶凝胶技术制备钽酸镁微波陶瓷粉体的方法
US10925579B2 (en) 2014-11-05 2021-02-23 Otsuka Medical Devices Co., Ltd. Systems and methods for real-time tracking of a target tissue using imaging before and during therapy delivery
CN110403288B (zh) * 2019-07-10 2022-09-23 林爱迪 一种安全气囊头盔及其专用头盔加速计

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2842448B2 (ja) 1989-07-11 1999-01-06 日本碍子株式会社 圧電/電歪膜型アクチュエータ
JPH07108102B2 (ja) * 1990-05-01 1995-11-15 日本碍子株式会社 圧電/電歪膜型アクチュエータの製造方法
JP2693291B2 (ja) 1990-07-26 1997-12-24 日本碍子株式会社 圧電/電歪アクチュエータ
US5210455A (en) * 1990-07-26 1993-05-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
JP3272004B2 (ja) 1991-10-03 2002-04-08 日本碍子株式会社 圧電/電歪膜型素子
EP0526048B1 (de) 1991-07-18 1997-11-12 Ngk Insulators, Ltd. Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid
JP3126212B2 (ja) 1992-03-21 2001-01-22 日本碍子株式会社 圧電/電歪膜型素子
JP3009945B2 (ja) 1991-07-18 2000-02-14 日本碍子株式会社 圧電/電歪膜型素子
US5545461A (en) 1994-02-14 1996-08-13 Ngk Insulators, Ltd. Ceramic diaphragm structure having convex diaphragm portion and method of producing the same
JP3128681B2 (ja) 1994-07-08 2001-01-29 新日本製鐵株式会社 可動モールド式連続鋳造機のモールド用コーティング剤

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