DE69829788D1 - Reinigung von elektronischen Spezialgasen durch Dampfphasenumfüllung - Google Patents

Reinigung von elektronischen Spezialgasen durch Dampfphasenumfüllung

Info

Publication number
DE69829788D1
DE69829788D1 DE69829788T DE69829788T DE69829788D1 DE 69829788 D1 DE69829788 D1 DE 69829788D1 DE 69829788 T DE69829788 T DE 69829788T DE 69829788 T DE69829788 T DE 69829788T DE 69829788 D1 DE69829788 D1 DE 69829788D1
Authority
DE
Germany
Prior art keywords
cleaning
vapor phase
phase transfer
special electronic
electronic gases
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69829788T
Other languages
English (en)
Other versions
DE69829788T2 (de
Inventor
John Borzio
Tracey Jacksier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Air Liquide America Corp
Original Assignee
Air Liquide SA
LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude
Air Liquide America Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude, Air Liquide America Corp filed Critical Air Liquide SA
Application granted granted Critical
Publication of DE69829788D1 publication Critical patent/DE69829788D1/de
Publication of DE69829788T2 publication Critical patent/DE69829788T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/01—Chlorine; Hydrogen chloride
    • C01B7/07—Purification ; Separation
    • C01B7/0706—Purification ; Separation of hydrogen chloride
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/09—Bromine; Hydrogen bromide
    • C01B7/093—Hydrogen bromide
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B9/00—General methods of preparing halides
    • C01B9/02—Chlorides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B9/00—General methods of preparing halides
    • C01B9/08—Fluorides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01C—AMMONIA; CYANOGEN; COMPOUNDS THEREOF
    • C01C1/00—Ammonia; Compounds thereof
    • C01C1/02—Preparation, purification or separation of ammonia
    • C01C1/024—Purification
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/08—Separating gaseous impurities from gases or gaseous mixtures or from liquefied gases or liquefied gaseous mixtures

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Gas Separation By Absorption (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Manufacture And Refinement Of Metals (AREA)
DE69829788T 1997-02-03 1998-01-27 Reinigung von elektronischen Spezialgasen durch Dampfphasenumfüllung Expired - Lifetime DE69829788T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US794346 1997-02-03
US08/794,346 US6004433A (en) 1997-02-03 1997-02-03 Purification of electronic specialty gases by vapor phase transfilling

Publications (2)

Publication Number Publication Date
DE69829788D1 true DE69829788D1 (de) 2005-05-25
DE69829788T2 DE69829788T2 (de) 2006-01-19

Family

ID=25162385

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69829788T Expired - Lifetime DE69829788T2 (de) 1997-02-03 1998-01-27 Reinigung von elektronischen Spezialgasen durch Dampfphasenumfüllung

Country Status (11)

Country Link
US (3) US6004433A (de)
EP (1) EP0856715B1 (de)
JP (2) JPH10323501A (de)
KR (1) KR100559109B1 (de)
CN (1) CN1225297C (de)
BR (1) BR9800538A (de)
CA (1) CA2227715A1 (de)
DE (1) DE69829788T2 (de)
SG (1) SG67475A1 (de)
TW (1) TW346536B (de)
ZA (1) ZA98582B (de)

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US6402821B1 (en) * 1998-08-18 2002-06-11 Tokyo Electron Limited Filter unit and solution treatment unit
GB2348826B (en) * 1999-04-17 2003-03-26 Michael Cole Evaporation of liquids
US6290088B1 (en) * 1999-05-28 2001-09-18 American Air Liquide Inc. Corrosion resistant gas cylinder and gas delivery system
US7175696B2 (en) * 2002-02-19 2007-02-13 American Air Liquide, Inc. Method and apparatus for corrosive gas purification
US20040038803A1 (en) * 2002-02-19 2004-02-26 Derong Zhou Adsorbent for removing water vapor during corrosive gas purification and method for preparing the adsorbent
GB0404270D0 (en) * 2004-02-26 2004-03-31 Sonander Sven O Flash distillation system
US7297181B2 (en) * 2004-07-07 2007-11-20 Air Liquide America L.P. Purification and transfilling of ammonia
US7850683B2 (en) * 2005-05-20 2010-12-14 Myoscience, Inc. Subdermal cryogenic remodeling of muscles, nerves, connective tissue, and/or adipose tissue (fat)
US20070163273A1 (en) * 2006-01-17 2007-07-19 American Air Liquide, Inc. Liquid Purge for a Vaporizer
US20070204631A1 (en) * 2006-03-03 2007-09-06 American Air Liquide, Inc. Liquefied Chemical Gas Delivery System
PT2361659E (pt) * 2007-04-04 2012-12-03 Markus Lehmann Processo para a destilação de um material de partida e instalação para a execução de um processo deste género
CN103191682B (zh) * 2013-04-02 2015-11-11 北京大学 用于气体为介质的非接触固相无机反应的分离式反应炉
US11427907B2 (en) 2016-07-20 2022-08-30 Showa Denko K.K. Gas supply apparatus and gas supply method
CN108341078B (zh) * 2018-01-26 2020-05-08 中国工程物理研究院核物理与化学研究所 一种微升级液体注入控制方法
JP7144032B2 (ja) * 2018-06-25 2022-09-29 株式会社高純度化学研究所 蒸発原料用容器の製造方法

Family Cites Families (44)

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CA686420A (en) * 1964-05-12 Rohm And Haas Company Purification apparatus
US2463188A (en) * 1944-05-01 1949-03-01 Phillips Petroleum Co Method of producing liquid anhydrous hydrogen chloride by distillation
DE858103C (de) * 1944-12-16 1952-12-04 Total Foerstner & Co Verfahren zum Reinigen und Abfuellen verfluessigter Gase
US2797145A (en) * 1953-08-12 1957-06-25 Allied Chem & Dye Corp Production of anhydrous hydrochloric acid gas from aqueous hydrochloric acid solution
US3640331A (en) * 1966-10-18 1972-02-08 Aisaburo Yagishita Heating and concentrating tower for plating waste recovery unit
US3635664A (en) * 1969-08-20 1972-01-18 Daido Chem Eng Corp REGENERATION OF HYDROCHLORIC ACID PICKLING WASTE BY H{11 SO{11 {0 ADDITION, DISTILLATION AND FeSO{11 {0 Precipitation
US3686076A (en) * 1969-12-18 1972-08-22 Gulf Research Development Co Separation of dry hbr from a dilute aqueous solution of hbr
FR2227216B1 (de) * 1973-04-24 1976-11-12 Commissariat Energie Atomique
JPS545391A (en) * 1977-06-15 1979-01-16 Hitachi Ltd Manufacture of semiconductor device
IT1086097B (it) * 1977-09-21 1985-05-28 Montedison Spa Procedimento per preparare soluzioni acquose limpide di acido solforico
US4219725A (en) * 1978-08-01 1980-08-26 The Dow Chemical Company Heating apparatus for vaporizing liquefied gases
US4222997A (en) * 1979-03-09 1980-09-16 Voss Steel Corporation Method of recovering hydrochloric acid from spent hydrochloric acid pickle waste
US4368058A (en) * 1980-07-30 1983-01-11 Phillips Petroleum Company Maximizing flow of absorption liquid in absorption methods
US4365969A (en) * 1981-01-05 1982-12-28 Karpov Jury A Method for quantitative analysis of chemical composition of inorganic material
DE3108444A1 (de) * 1981-03-06 1983-01-20 Vereinigte Elektrizitätswerke Westfalen AG, 4600 Dortmund Verfahren und anlage zum aufbereiten von chloride enthaltenden abwaessern
US4406748A (en) * 1981-09-25 1983-09-27 Hoffman Frank W Liquid purification system
US4382916A (en) * 1981-10-07 1983-05-10 Voss Steel Corporation Method of preparing hydrochloric acid and high purity ferrous sulfate hydrate crystals from hydrochloric acid waste pickle liquor
JPS58209113A (ja) * 1982-05-31 1983-12-06 Semiconductor Energy Lab Co Ltd 半導体用反応性気体精製方法
CA1204074A (en) * 1984-01-30 1986-05-06 Howard Diebel Automatically operable distillation apparatus
NL8402751A (nl) * 1984-09-10 1986-04-01 Philips Nv Inrichting voor het opwerken van beits- en etsvloeistoffen.
US5354428A (en) * 1986-10-06 1994-10-11 Athens Corp. Apparatus for the continuous on-site chemical reprocessing of ultrapure liquids
JP2528854B2 (ja) * 1987-01-27 1996-08-28 多摩化学工業株式会社 高純度薬品の製造方法及びその装置
US4980032A (en) * 1988-08-12 1990-12-25 Alameda Instruments, Inc. Distillation method and apparatus for reprocessing sulfuric acid
US4936955A (en) * 1988-08-12 1990-06-26 Alameda Instruments, Inc. Hydrofluoric acid reprocessing for semiconductor standards
JP2890434B2 (ja) * 1989-01-27 1999-05-17 東ソー株式会社 臭化水素酸およびメタノールの回収方法
US5205843A (en) * 1989-11-07 1993-04-27 Membrane Technology And Research, Inc. Process for removing condensable components from gas streams
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US5236555A (en) * 1991-01-29 1993-08-17 Athens Corp. Apparatus for concentration of liquids
JPH0673564A (ja) * 1991-03-22 1994-03-15 Nittetsu Kakoki Kk ニッケル含有エッチング廃液を処理する方法
JP3157605B2 (ja) * 1992-04-28 2001-04-16 東京エレクトロン株式会社 プラズマ処理装置
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US5426944A (en) * 1993-08-31 1995-06-27 American Air Liquide, Inc. Chemical purification for semiconductor processing by partial condensation
JP3072876B2 (ja) * 1993-09-17 2000-08-07 日曹エンジニアリング株式会社 エッチング液の精製方法
US6098425A (en) * 1993-10-01 2000-08-08 Stothers; William R. Thermodynamic separation
US5846386A (en) * 1994-01-07 1998-12-08 Startec Ventures, Inc. On-site ammonia purification for semiconductor manufacture
US5632866A (en) * 1994-01-12 1997-05-27 Fsi International, Inc. Point-of-use recycling of wafer cleaning substances
US5417955A (en) * 1994-03-01 1995-05-23 Connolly; David W. Manufacture of ferric sulfate and hydrochloric acid from ferrous chloride
US5665902A (en) * 1994-05-10 1997-09-09 American Air Liquide, Inc. Method to analyze particle contaminants in compressed gases
DE4421627C1 (de) * 1994-06-21 1996-02-22 Eppendorf Geraetebau Netheler Verfahren und Vorrichtung zur quantitativen Anreicherung von flüchtigen Verbindungen durch Kapillar-Destillation
US5670028A (en) * 1994-11-22 1997-09-23 Ube Industries, Ltd. Process for preparing high purity hydrogen peroxide aqueous solution
US5591273A (en) * 1994-12-30 1997-01-07 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process for distributing ultra high purity gases with minimized contamination and particulates
US6137840A (en) * 1995-03-31 2000-10-24 Qualcomm Incorporated Method and apparatus for performing fast power control in a mobile communication system
US5673562A (en) * 1996-02-23 1997-10-07 L'air Liquide, S.A. Bulk delivery of ultra-high purity gases at high flow rates
JP3525371B2 (ja) * 1996-06-25 2004-05-10 信越化学工業株式会社 有機金属化合物の精製方法

Also Published As

Publication number Publication date
BR9800538A (pt) 1999-08-10
KR100559109B1 (ko) 2006-07-12
CN1201078A (zh) 1998-12-09
US6517686B2 (en) 2003-02-11
DE69829788T2 (de) 2006-01-19
KR19980070988A (ko) 1998-10-26
SG67475A1 (en) 1999-09-21
EP0856715A3 (de) 1998-12-09
JP5231155B2 (ja) 2013-07-10
CN1225297C (zh) 2005-11-02
EP0856715B1 (de) 2005-04-20
US6277246B1 (en) 2001-08-21
JP2009072779A (ja) 2009-04-09
ZA98582B (en) 1998-07-23
EP0856715A2 (de) 1998-08-05
CA2227715A1 (en) 1998-08-03
JPH10323501A (ja) 1998-12-08
US6004433A (en) 1999-12-21
TW346536B (en) 1998-12-01
US20010015316A1 (en) 2001-08-23

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Legal Events

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