DE69825363D1 - Verfahren zur Schwingungswellenfeststellung und Schwingungswellendetektor - Google Patents

Verfahren zur Schwingungswellenfeststellung und Schwingungswellendetektor

Info

Publication number
DE69825363D1
DE69825363D1 DE69825363T DE69825363T DE69825363D1 DE 69825363 D1 DE69825363 D1 DE 69825363D1 DE 69825363 T DE69825363 T DE 69825363T DE 69825363 T DE69825363 T DE 69825363T DE 69825363 D1 DE69825363 D1 DE 69825363D1
Authority
DE
Germany
Prior art keywords
vibration wave
detection method
detector
wave detection
wave detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69825363T
Other languages
English (en)
Other versions
DE69825363T2 (de
Inventor
Shigeru Ando
Takaya Miyano
Toshiyuki Matsumoto
Muneo Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of DE69825363D1 publication Critical patent/DE69825363D1/de
Publication of DE69825363T2 publication Critical patent/DE69825363T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H3/00—Measuring characteristics of vibrations by using a detector in a fluid
    • G01H3/04—Frequency
    • G01H3/08—Analysing frequencies present in complex vibrations, e.g. comparing harmonics present
DE69825363T 1997-05-26 1998-05-22 Verfahren zur Schwingungswellenfeststellung und Schwingungswellendetektor Expired - Fee Related DE69825363T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP13556497 1997-05-26
JP13556497A JP3248452B2 (ja) 1997-05-26 1997-05-26 音響センサ

Publications (2)

Publication Number Publication Date
DE69825363D1 true DE69825363D1 (de) 2004-09-09
DE69825363T2 DE69825363T2 (de) 2005-07-28

Family

ID=15154771

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69825363T Expired - Fee Related DE69825363T2 (de) 1997-05-26 1998-05-22 Verfahren zur Schwingungswellenfeststellung und Schwingungswellendetektor

Country Status (9)

Country Link
US (2) US6012334A (de)
EP (1) EP0881477B1 (de)
JP (1) JP3248452B2 (de)
KR (1) KR100283358B1 (de)
AU (1) AU709224B2 (de)
CA (1) CA2238205C (de)
DE (1) DE69825363T2 (de)
DK (1) DK0881477T3 (de)
TW (1) TW369597B (de)

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JP3248452B2 (ja) * 1997-05-26 2002-01-21 住友金属工業株式会社 音響センサ
JP3348687B2 (ja) * 1998-05-22 2002-11-20 住友金属工業株式会社 振動波検出方法及び装置
EP1067513A1 (de) * 1999-07-08 2001-01-10 Sony International (Europe) GmbH Automatisches Spracherkennungssystem
EP1067514A1 (de) 1999-07-08 2001-01-10 Sony International (Europe) GmbH System zur automatischen Spracherkennung
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US7116035B2 (en) 2002-02-01 2006-10-03 Yo Sugawara Sound/vibration resonance separating device
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US7231094B2 (en) * 2002-10-01 2007-06-12 The Charles Stark Draper Laboratory, Inc. Low-power signal processing using MEMS
JP3958206B2 (ja) * 2002-12-27 2007-08-15 独立行政法人科学技術振興機構 マルチカンチレバーの振動周波数の計測方法及び装置
US6822929B1 (en) * 2003-06-25 2004-11-23 Sandia Corporation Micro acoustic spectrum analyzer
DE102004045528B4 (de) * 2004-09-20 2006-11-02 Siemens Ag Vibrationssensor
JP2007051952A (ja) * 2005-08-18 2007-03-01 Tokyo Electron Ltd 音響センサ装置，音響解析診断装置および音響センサの製造方法
DE102005042085A1 (de) * 2005-09-05 2007-03-15 Siemens Ag Vibrationsmesssystem
DE102005050351A1 (de) * 2005-10-20 2007-04-26 Siemens Ag Vibrationsmesssystem
JP2008008683A (ja) * 2006-06-27 2008-01-17 Univ Of Tokyo 振動波検出方法及び装置
KR100804513B1 (ko) 2006-07-28 2008-02-20 한국표준과학연구원 압전 외팔보를 이용한 음향센서
DE102007026288A1 (de) * 2007-06-06 2009-01-15 Bröckling, Andreas, Dipl.-Ing. (FH) Akustischer Druck-, Schallsensor
GB2459863B (en) * 2008-05-07 2011-01-19 Wolfson Microelectronics Plc Mems transducers
DE102008035423A1 (de) * 2008-07-30 2010-02-04 Airbus Uk Ltd. Resonanter Strömungssensor sowie Verwendung und Herstellverfahren desselben
KR102207928B1 (ko) * 2014-08-13 2021-01-26 삼성전자주식회사 음향 센싱 소자 및 주파수 정보 획득 방법
KR20180037841A (ko) * 2016-10-05 2018-04-13 삼성전자주식회사 공진기를 포함하는 필터 시스템
JP7048619B2 (ja) 2016-12-29 2022-04-05 サムスン エレクトロニクス カンパニー リミテッド 共振器を利用した話者認識方法及びその装置
KR102335774B1 (ko) * 2017-09-01 2021-12-06 삼성전자주식회사 다중 공진기 어레이를 포함하는 소리 방향 탐지 센서
KR102623514B1 (ko) 2017-10-23 2024-01-11 삼성전자주식회사 음성신호 처리장치 및 그 동작방법
CN108562360B (zh) * 2018-03-20 2020-11-27 上海集成电路研发中心有限公司 一种新型红外传感器结构
DE102018221181A1 (de) * 2018-12-07 2020-06-10 Zf Friedrichshafen Ag Resonatoranordnung
CN111829646B (zh) * 2020-07-27 2022-06-28 中国电子科技集团公司第三研究所 一种宽响应频带的质点振速传感器
KR20220121631A (ko) * 2021-02-25 2022-09-01 삼성전자주식회사 음성 인증 방법 및 이를 이용한 장치
TWI778545B (zh) * 2021-03-15 2022-09-21 群光電子股份有限公司 振動錄製裝置、振動錄製系統以及振動錄製方法

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US3457463A (en) * 1965-07-07 1969-07-22 Lewis Balamuth Method and apparatus for generating electric currents of small magnitude
JPS599009B2 (ja) 1976-09-18 1984-02-28 川崎重工業株式会社 低ＮＯｘ燃焼方法
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JPS55162037A (en) * 1979-06-04 1980-12-17 Nippon Soken Inc Knocking detector for internal combustion engine
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JPS582640A (ja) 1981-06-29 1983-01-08 Shimadzu Corp 非分散型赤外分析計
JPS582640U (ja) * 1981-06-30 1983-01-08 日本精密測器株式会社 振動片型周波数計
JPS5938621A (ja) * 1982-08-27 1984-03-02 Nissan Motor Co Ltd 振動分析装置
JPS59135328A (ja) * 1983-01-23 1984-08-03 Shimadzu Corp 振動検出センサ
JPS62251670A (ja) * 1986-04-25 1987-11-02 Fuji Elelctrochem Co Ltd 加速度センサ−
JPH0754268B2 (ja) * 1986-09-03 1995-06-07 株式会社小松製作所 音響振動解析装置およびその製造方法
US4852170A (en) * 1986-12-18 1989-07-25 R & D Associates Real time computer speech recognition system
DE3703946A1 (de) * 1987-02-09 1988-08-18 Fraunhofer Ges Forschung Frequenzselektiver schwingungssensor
EP0334988A3 (de) * 1988-03-30 1990-01-24 TELENORMA Telefonbau und Normalzeit GmbH Schwingungs-Sensor
JPH0477626A (ja) 1990-07-20 1992-03-11 Canon Inc 周波数分折器及び周波数表示器
JPH0552643A (ja) * 1991-08-28 1993-03-02 Nec Corp 音響信号表示装置
JP3241841B2 (ja) * 1993-02-05 2001-12-25 明星電気株式会社 自動車の異常振動検出方法及び異常振動検出装置
JP3029001B2 (ja) * 1993-10-28 2000-04-04 トヨタ自動車株式会社 振動子
US5856722A (en) * 1996-01-02 1999-01-05 Cornell Research Foundation, Inc. Microelectromechanics-based frequency signature sensor
JP3248452B2 (ja) * 1997-05-26 2002-01-21 住友金属工業株式会社 音響センサ

Also Published As

Publication number Publication date
EP0881477A3 (de) 2000-06-14
KR100283358B1 (ko) 2001-03-02
DK0881477T3 (da) 2004-12-06
CA2238205A1 (en) 1998-11-26
TW369597B (en) 1999-09-11
JPH10325753A (ja) 1998-12-08
DE69825363T2 (de) 2005-07-28
EP0881477A2 (de) 1998-12-02
US6227054B1 (en) 2001-05-08
US6012334A (en) 2000-01-11
AU709224B2 (en) 1999-08-26
JP3248452B2 (ja) 2002-01-21
AU6710798A (en) 1998-12-03
CA2238205C (en) 2003-02-25
EP0881477B1 (de) 2004-08-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee