GB2459863B - Mems transducers - Google Patents

Mems transducers

Info

Publication number
GB2459863B
GB2459863B GB0808294A GB0808294A GB2459863B GB 2459863 B GB2459863 B GB 2459863B GB 0808294 A GB0808294 A GB 0808294A GB 0808294 A GB0808294 A GB 0808294A GB 2459863 B GB2459863 B GB 2459863B
Authority
GB
United Kingdom
Prior art keywords
mems transducers
mems
transducers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB0808294A
Other versions
GB0808294D0 (en
GB2459863A (en
Inventor
Richard Ian Laming
Robert Errol Mcmullen
Anthony Bernard Traynor
Tsjerk Hans Hoekstra
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cirrus Logic International UK Ltd
Original Assignee
Wolfson Microelectronics PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to GB1012727A priority Critical patent/GB2469410B/en
Application filed by Wolfson Microelectronics PLC filed Critical Wolfson Microelectronics PLC
Priority to GB1012729A priority patent/GB2469412B/en
Priority to GB1012728A priority patent/GB2469411B/en
Priority to GB0808294A priority patent/GB2459863B/en
Publication of GB0808294D0 publication Critical patent/GB0808294D0/en
Priority to PCT/GB2009/050473 priority patent/WO2009136196A2/en
Priority to US12/991,378 priority patent/US20110062535A1/en
Priority to CN200980121004.2A priority patent/CN102056680B/en
Publication of GB2459863A publication Critical patent/GB2459863A/en
Application granted granted Critical
Publication of GB2459863B publication Critical patent/GB2459863B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00214—Processes for the simultaneaous manufacturing of a network or an array of similar microstructural devices
GB0808294A 2008-05-07 2008-05-07 Mems transducers Active GB2459863B (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
GB1012729A GB2469412B (en) 2008-05-07 2008-05-07 MEMS transducers
GB1012728A GB2469411B (en) 2008-05-07 2008-05-07 Mems transducers
GB0808294A GB2459863B (en) 2008-05-07 2008-05-07 Mems transducers
GB1012727A GB2469410B (en) 2008-05-07 2008-05-07 Mems transducers
PCT/GB2009/050473 WO2009136196A2 (en) 2008-05-07 2009-05-07 Mems transducers
US12/991,378 US20110062535A1 (en) 2008-05-07 2009-05-07 Mems transducers
CN200980121004.2A CN102056680B (en) 2008-05-07 2009-05-07 Mems transducers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0808294A GB2459863B (en) 2008-05-07 2008-05-07 Mems transducers

Publications (3)

Publication Number Publication Date
GB0808294D0 GB0808294D0 (en) 2008-06-11
GB2459863A GB2459863A (en) 2009-11-11
GB2459863B true GB2459863B (en) 2011-01-19

Family

ID=39537415

Family Applications (4)

Application Number Title Priority Date Filing Date
GB1012728A Active GB2469411B (en) 2008-05-07 2008-05-07 Mems transducers
GB1012729A Active GB2469412B (en) 2008-05-07 2008-05-07 MEMS transducers
GB0808294A Active GB2459863B (en) 2008-05-07 2008-05-07 Mems transducers
GB1012727A Active GB2469410B (en) 2008-05-07 2008-05-07 Mems transducers

Family Applications Before (2)

Application Number Title Priority Date Filing Date
GB1012728A Active GB2469411B (en) 2008-05-07 2008-05-07 Mems transducers
GB1012729A Active GB2469412B (en) 2008-05-07 2008-05-07 MEMS transducers

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB1012727A Active GB2469410B (en) 2008-05-07 2008-05-07 Mems transducers

Country Status (1)

Country Link
GB (4) GB2469411B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2459866B (en) * 2008-05-07 2011-08-31 Wolfson Microelectronics Plc Mems transducer
US10899605B2 (en) 2018-03-05 2021-01-26 Sharp Kabushiki Kaisha MEMS device and manipulation method for micro-objects
US10636936B2 (en) 2018-03-05 2020-04-28 Sharp Kabushiki Kaisha MEMS array system and method of manipulating objects
WO2023077504A1 (en) * 2021-11-08 2023-05-11 重庆康佳光电技术研究院有限公司 Chip structure, chip structure manufacturing method, and chip transfer method
EP4181163A1 (en) * 2021-11-12 2023-05-17 ETH Zurich Zero-power operable classification device and switching device and voice-operated powerless wake-up switch

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0881477A2 (en) * 1997-05-26 1998-12-02 Sumitomo Metal Industries Limited Vibration wave detecting method and vibration wave detector
US6314057B1 (en) * 1999-05-11 2001-11-06 Rodney J Solomon Micro-machined ultrasonic transducer array
US20030028109A1 (en) * 2001-07-31 2003-02-06 Miller David G. Micro-machined ultrasonic transducer (MUT) array
US20060196272A1 (en) * 2005-03-01 2006-09-07 Denso Corporation Ultrasonic sensor having transmission device and reception device of ultrasonic wave
EP1764162A1 (en) * 2005-09-14 2007-03-21 Esaote S.p.A. Microfabricated capacitive ultrasonic transducer for high frequency applications
EP1779784A1 (en) * 2004-06-07 2007-05-02 Olympus Corporation Electrostatic capacity type ultrasonic transducer
US20070215964A1 (en) * 2006-02-28 2007-09-20 Butrus Khuri-Yakub Capacitive micromachined ultrasonic transducer (CMUT) with varying thickness membrane

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0881477A2 (en) * 1997-05-26 1998-12-02 Sumitomo Metal Industries Limited Vibration wave detecting method and vibration wave detector
US6314057B1 (en) * 1999-05-11 2001-11-06 Rodney J Solomon Micro-machined ultrasonic transducer array
US20030028109A1 (en) * 2001-07-31 2003-02-06 Miller David G. Micro-machined ultrasonic transducer (MUT) array
EP1779784A1 (en) * 2004-06-07 2007-05-02 Olympus Corporation Electrostatic capacity type ultrasonic transducer
US20060196272A1 (en) * 2005-03-01 2006-09-07 Denso Corporation Ultrasonic sensor having transmission device and reception device of ultrasonic wave
EP1764162A1 (en) * 2005-09-14 2007-03-21 Esaote S.p.A. Microfabricated capacitive ultrasonic transducer for high frequency applications
US20070215964A1 (en) * 2006-02-28 2007-09-20 Butrus Khuri-Yakub Capacitive micromachined ultrasonic transducer (CMUT) with varying thickness membrane

Also Published As

Publication number Publication date
GB2469410A (en) 2010-10-13
GB201012727D0 (en) 2010-09-15
GB201012728D0 (en) 2010-09-15
GB2469411B (en) 2011-01-19
GB2469412B (en) 2011-01-19
GB2469411A (en) 2010-10-13
GB201012729D0 (en) 2010-09-15
GB2469410B (en) 2011-01-19
GB0808294D0 (en) 2008-06-11
GB2469412A (en) 2010-10-13
GB2459863A (en) 2009-11-11

Similar Documents

Publication Publication Date Title
HK1254195A1 (en) Ultrasound transducers
GB2461448B (en) Transducer
EP2297976A4 (en) Piezoelectric mems microphone
EP2312158A4 (en) Piezoelectric microblower
EP2306019A4 (en) Piezoelectric microblower
EP2148524A4 (en) Electroacoustic transducer
EP2446115A4 (en) Transducer assembly
IL200938A0 (en) Mems microphone
AU322949S (en) Vibrator
EP2164280A4 (en) Acoustic sensor
EP2206359A4 (en) Acoustic transducer
EP2164281A4 (en) Acoustic sensor
EP2355541A4 (en) Microphone unit
GB2465091B (en) Pressure transducer
EP2297975B8 (en) Improved acoustic device
EP2242285A4 (en) Microphone unit
EP2346083A4 (en) Mems sensor
EP2324353A4 (en) Selectively functionized transducer microarray
EP2252075A4 (en) Microphone unit
GB2469412B (en) MEMS transducers
EP2273131A4 (en) Displacement transducer
GB2459866B (en) Mems transducer
GB0723526D0 (en) Acoustic transducer
GB0820857D0 (en) Optical displacement transducer
GB2470849B (en) Transducer

Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20150820 AND 20150826